DE2126095B2 - Vorrichtung zum Herstellen eines dünnen Überzugs auf einem Substrat - Google Patents

Vorrichtung zum Herstellen eines dünnen Überzugs auf einem Substrat

Info

Publication number
DE2126095B2
DE2126095B2 DE2126095A DE2126095A DE2126095B2 DE 2126095 B2 DE2126095 B2 DE 2126095B2 DE 2126095 A DE2126095 A DE 2126095A DE 2126095 A DE2126095 A DE 2126095A DE 2126095 B2 DE2126095 B2 DE 2126095B2
Authority
DE
Germany
Prior art keywords
sieve
material source
substrate
screen
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE2126095A
Other languages
German (de)
English (en)
Other versions
DE2126095A1 (de
Inventor
Frank Hamilton Westwood Fish
Edward Patrick Braintree Mclaughlin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gillette Co LLC
Original Assignee
Gillette Co LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gillette Co LLC filed Critical Gillette Co LLC
Publication of DE2126095A1 publication Critical patent/DE2126095A1/de
Publication of DE2126095B2 publication Critical patent/DE2126095B2/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M3/00—Liquid compositions essentially based on lubricating components other than mineral lubricating oils or fatty oils and their use as lubricants; Use as lubricants of single liquid substances
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Physical Vapour Deposition (AREA)
DE2126095A 1970-08-25 1971-05-21 Vorrichtung zum Herstellen eines dünnen Überzugs auf einem Substrat Withdrawn DE2126095B2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6684270A 1970-08-25 1970-08-25

Publications (2)

Publication Number Publication Date
DE2126095A1 DE2126095A1 (de) 1972-03-02
DE2126095B2 true DE2126095B2 (de) 1974-06-06

Family

ID=22072063

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2126095A Withdrawn DE2126095B2 (de) 1970-08-25 1971-05-21 Vorrichtung zum Herstellen eines dünnen Überzugs auf einem Substrat

Country Status (9)

Country Link
US (1) US3652443A (fr)
BE (1) BE767506A (fr)
BR (1) BR7102802D0 (fr)
CA (1) CA936834A (fr)
DE (1) DE2126095B2 (fr)
ES (1) ES391740A1 (fr)
FR (1) FR2103480B1 (fr)
GB (1) GB1343137A (fr)
NL (1) NL7107310A (fr)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3775285A (en) * 1971-05-18 1973-11-27 Warner Lambert Co Apparatus for coating continuous strips of ribbon razor blade material
US3784458A (en) * 1973-04-03 1974-01-08 Warner Lambert Co Method of coating a continuous strip of ribbon razor blade material
JPS51117933A (en) * 1975-04-10 1976-10-16 Tokuda Seisakusho Spattering apparatus
US3998718A (en) * 1976-02-18 1976-12-21 Bell Telephone Laboratories, Incorporated Ion milling apparatus
DE2655942A1 (de) * 1976-12-10 1978-06-15 Tokuda Seisakusho Kawasaki Kk Zerstaeubungsvorrichtung
GB2010676B (en) * 1977-12-27 1982-05-19 Alza Corp Diffusional drug delivery device with block copolymer as drug carrier
GB8600829D0 (en) * 1986-01-23 1986-02-19 Gillette Co Formation of hard coatings on cutting edges
US4933058A (en) * 1986-01-23 1990-06-12 The Gillette Company Formation of hard coatings on cutting edges
NL8602759A (nl) * 1986-10-31 1988-05-16 Bekaert Sa Nv Werkwijze en inrichting voor het behandelen van een langwerpig substraat, dat van een deklaag voorzien is; alsmede volgens die werkwijze behandelde substraten en met deze substraten versterkte voorwerpen uit polymeermateriaal.
US5219668A (en) * 1986-10-31 1993-06-15 N.V. Bekaert S.A. Process and apparatus for the treatment of coated, elongated substrate, as well as substrates thus treated and articles of polymeric material reinforced with these substrates
US4988424A (en) * 1989-06-07 1991-01-29 Ppg Industries, Inc. Mask and method for making gradient sputtered coatings
US5142785A (en) * 1991-04-26 1992-09-01 The Gillette Company Razor technology
US5232568A (en) * 1991-06-24 1993-08-03 The Gillette Company Razor technology
ZA928617B (en) * 1991-11-15 1993-05-11 Gillette Co Shaving system.
US5669144A (en) * 1991-11-15 1997-09-23 The Gillette Company Razor blade technology
US5295305B1 (en) * 1992-02-13 1996-08-13 Gillette Co Razor blade technology
TW378173B (en) 1997-02-27 2000-01-01 Gillette Co Razor blade and cartridge including same and method of making same
US6077572A (en) * 1997-06-18 2000-06-20 Northeastern University Method of coating edges with diamond-like carbon
US9180599B2 (en) * 2004-09-08 2015-11-10 Bic-Violex S.A. Method of deposition of a layer on a razor blade edge and razor blade
CN101818326B (zh) * 2009-02-26 2012-11-21 鸿富锦精密工业（深圳）有限公司 溅镀装置
CN102086507B (zh) * 2009-12-03 2014-10-15 鸿富锦精密工业（深圳）有限公司 溅镀装置
FR2995454B1 (fr) * 2012-09-07 2014-08-22 Commissariat Energie Atomique Procede pour la realisation d'un electrolyte a base de lithium pour micro-batterie solide
JP2016536472A (ja) * 2013-11-05 2016-11-24 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 高周波（ｒｆ）スパッタ堆積源、堆積装置及びその組立て方法
CN106435507B (zh) * 2016-11-10 2018-11-20 北京帕托真空技术有限公司 一种镀膜机旋转装置
CN116330381A (zh) * 2021-09-30 2023-06-27 福建迈可博电子科技集团股份有限公司 一种多动作联动的射频连接器绝缘子对切装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3480483A (en) * 1965-05-06 1969-11-25 Wilkinson Sword Ltd Razor blades and methods of manufacture thereof
US3410775A (en) * 1966-04-14 1968-11-12 Bell Telephone Labor Inc Electrostatic control of electron movement in cathode sputtering
US3458426A (en) * 1966-05-25 1969-07-29 Fabri Tek Inc Symmetrical sputtering apparatus with plasma confinement
US3528902A (en) * 1966-10-04 1970-09-15 Matsushita Electric Ind Co Ltd Method of producing thin films by sputtering
US3501393A (en) * 1967-05-05 1970-03-17 Litton Systems Inc Apparatus for sputtering wherein the plasma is confined by the target structure
US3562140A (en) * 1967-10-23 1971-02-09 Eversharp Inc Sequential sputtering apparatus

Also Published As

Publication number Publication date
BE767506A (fr) 1971-11-22
US3652443A (en) 1972-03-28
ES391740A1 (es) 1973-06-16
BR7102802D0 (pt) 1973-04-12
DE2126095A1 (de) 1972-03-02
NL7107310A (fr) 1972-02-29
CA936834A (en) 1973-11-13
FR2103480B1 (fr) 1974-09-06
FR2103480A1 (fr) 1972-04-14
GB1343137A (en) 1974-01-10

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