DE2126095B2 - Vorrichtung zum Herstellen eines dünnen Überzugs auf einem Substrat - Google Patents
Vorrichtung zum Herstellen eines dünnen Überzugs auf einem SubstratInfo
- Publication number
- DE2126095B2 DE2126095B2 DE2126095A DE2126095A DE2126095B2 DE 2126095 B2 DE2126095 B2 DE 2126095B2 DE 2126095 A DE2126095 A DE 2126095A DE 2126095 A DE2126095 A DE 2126095A DE 2126095 B2 DE2126095 B2 DE 2126095B2
- Authority
- DE
- Germany
- Prior art keywords
- sieve
- material source
- substrate
- screen
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 title claims description 16
- 238000000576 coating method Methods 0.000 title claims description 14
- 239000011248 coating agent Substances 0.000 title claims description 12
- 239000000463 material Substances 0.000 claims description 16
- -1 argon ions Chemical class 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 claims description 2
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 2
- 230000035699 permeability Effects 0.000 claims description 2
- 241000483002 Euproctis similis Species 0.000 claims 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 1
- 229910052786 argon Inorganic materials 0.000 claims 1
- 238000000889 atomisation Methods 0.000 claims 1
- 238000000354 decomposition reaction Methods 0.000 claims 1
- 238000005520 cutting process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 101100346656 Drosophila melanogaster strat gene Proteins 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M3/00—Liquid compositions essentially based on lubricating components other than mineral lubricating oils or fatty oils and their use as lubricants; Use as lubricants of single liquid substances
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US6684270A | 1970-08-25 | 1970-08-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2126095A1 DE2126095A1 (de) | 1972-03-02 |
| DE2126095B2 true DE2126095B2 (de) | 1974-06-06 |
Family
ID=22072063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2126095A Withdrawn DE2126095B2 (de) | 1970-08-25 | 1971-05-21 | Vorrichtung zum Herstellen eines dünnen Überzugs auf einem Substrat |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US3652443A (enExample) |
| BE (1) | BE767506A (enExample) |
| BR (1) | BR7102802D0 (enExample) |
| CA (1) | CA936834A (enExample) |
| DE (1) | DE2126095B2 (enExample) |
| ES (1) | ES391740A1 (enExample) |
| FR (1) | FR2103480B1 (enExample) |
| GB (1) | GB1343137A (enExample) |
| NL (1) | NL7107310A (enExample) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3775285A (en) * | 1971-05-18 | 1973-11-27 | Warner Lambert Co | Apparatus for coating continuous strips of ribbon razor blade material |
| US3784458A (en) * | 1973-04-03 | 1974-01-08 | Warner Lambert Co | Method of coating a continuous strip of ribbon razor blade material |
| JPS51117933A (en) * | 1975-04-10 | 1976-10-16 | Tokuda Seisakusho | Spattering apparatus |
| US3998718A (en) * | 1976-02-18 | 1976-12-21 | Bell Telephone Laboratories, Incorporated | Ion milling apparatus |
| DE2655942A1 (de) * | 1976-12-10 | 1978-06-15 | Tokuda Seisakusho Kawasaki Kk | Zerstaeubungsvorrichtung |
| GB2010676B (en) * | 1977-12-27 | 1982-05-19 | Alza Corp | Diffusional drug delivery device with block copolymer as drug carrier |
| GB8600829D0 (en) * | 1986-01-23 | 1986-02-19 | Gillette Co | Formation of hard coatings on cutting edges |
| US4933058A (en) * | 1986-01-23 | 1990-06-12 | The Gillette Company | Formation of hard coatings on cutting edges |
| NL8602759A (nl) * | 1986-10-31 | 1988-05-16 | Bekaert Sa Nv | Werkwijze en inrichting voor het behandelen van een langwerpig substraat, dat van een deklaag voorzien is; alsmede volgens die werkwijze behandelde substraten en met deze substraten versterkte voorwerpen uit polymeermateriaal. |
| US5219668A (en) * | 1986-10-31 | 1993-06-15 | N.V. Bekaert S.A. | Process and apparatus for the treatment of coated, elongated substrate, as well as substrates thus treated and articles of polymeric material reinforced with these substrates |
| US4988424A (en) * | 1989-06-07 | 1991-01-29 | Ppg Industries, Inc. | Mask and method for making gradient sputtered coatings |
| US5142785A (en) * | 1991-04-26 | 1992-09-01 | The Gillette Company | Razor technology |
| US5232568A (en) * | 1991-06-24 | 1993-08-03 | The Gillette Company | Razor technology |
| US5669144A (en) * | 1991-11-15 | 1997-09-23 | The Gillette Company | Razor blade technology |
| ZA928617B (en) * | 1991-11-15 | 1993-05-11 | Gillette Co | Shaving system. |
| US5295305B1 (en) * | 1992-02-13 | 1996-08-13 | Gillette Co | Razor blade technology |
| TW378173B (en) | 1997-02-27 | 2000-01-01 | Gillette Co | Razor blade and cartridge including same and method of making same |
| US6077572A (en) * | 1997-06-18 | 2000-06-20 | Northeastern University | Method of coating edges with diamond-like carbon |
| BRPI0419033B1 (pt) * | 2004-09-08 | 2017-03-28 | Bic Violex Sa | método para deposição de uma camada em uma borda de lâmina de barbear de uma lâmina de barbear |
| CN101818326B (zh) * | 2009-02-26 | 2012-11-21 | 鸿富锦精密工业（深圳）有限公司 | 溅镀装置 |
| CN102086507B (zh) * | 2009-12-03 | 2014-10-15 | 鸿富锦精密工业（深圳）有限公司 | 溅镀装置 |
| FR2995454B1 (fr) * | 2012-09-07 | 2014-08-22 | Commissariat Energie Atomique | Procede pour la realisation d'un electrolyte a base de lithium pour micro-batterie solide |
| KR102001117B1 (ko) * | 2013-11-05 | 2019-07-17 | 어플라이드 머티어리얼스, 인코포레이티드 | 스퍼터 증착 소스, 스퍼터 증착을 위한 장치, 및 그 조립 방법 |
| CN106435507B (zh) * | 2016-11-10 | 2018-11-20 | 北京帕托真空技术有限公司 | 一种镀膜机旋转装置 |
| CN116330381B (zh) * | 2021-09-30 | 2025-09-12 | 福建迈可博电子科技集团股份有限公司 | 一种多动作联动的射频连接器绝缘子对切装置 |
| US12416073B2 (en) * | 2023-01-19 | 2025-09-16 | Institute For Plasma Research | Plasma based system for generating antimicrobial coating on flexible polymeric substrates and process thereof |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3480483A (en) * | 1965-05-06 | 1969-11-25 | Wilkinson Sword Ltd | Razor blades and methods of manufacture thereof |
| US3410775A (en) * | 1966-04-14 | 1968-11-12 | Bell Telephone Labor Inc | Electrostatic control of electron movement in cathode sputtering |
| US3458426A (en) * | 1966-05-25 | 1969-07-29 | Fabri Tek Inc | Symmetrical sputtering apparatus with plasma confinement |
| US3528902A (en) * | 1966-10-04 | 1970-09-15 | Matsushita Electric Industrial Co Ltd | Method of producing thin films by sputtering |
| US3501393A (en) * | 1967-05-05 | 1970-03-17 | Litton Systems Inc | Apparatus for sputtering wherein the plasma is confined by the target structure |
| US3562140A (en) * | 1967-10-23 | 1971-02-09 | Eversharp Inc | Sequential sputtering apparatus |
-
1970
- 1970-08-25 US US66842A patent/US3652443A/en not_active Expired - Lifetime
-
1971
- 1971-04-23 CA CA111200A patent/CA936834A/en not_active Expired
- 1971-04-29 GB GB1225971A patent/GB1343137A/en not_active Expired
- 1971-05-10 BR BR2802/71A patent/BR7102802D0/pt unknown
- 1971-05-21 DE DE2126095A patent/DE2126095B2/de not_active Withdrawn
- 1971-05-21 BE BE767506A patent/BE767506A/xx unknown
- 1971-05-27 NL NL7107310A patent/NL7107310A/xx unknown
- 1971-05-28 FR FR7119560A patent/FR2103480B1/fr not_active Expired
- 1971-05-29 ES ES391740A patent/ES391740A1/es not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1343137A (en) | 1974-01-10 |
| NL7107310A (enExample) | 1972-02-29 |
| ES391740A1 (es) | 1973-06-16 |
| CA936834A (en) | 1973-11-13 |
| FR2103480A1 (enExample) | 1972-04-14 |
| BE767506A (fr) | 1971-11-22 |
| US3652443A (en) | 1972-03-28 |
| DE2126095A1 (de) | 1972-03-02 |
| FR2103480B1 (enExample) | 1974-09-06 |
| BR7102802D0 (pt) | 1973-04-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE2126095B2 (de) | Vorrichtung zum Herstellen eines dünnen Überzugs auf einem Substrat | |
| DE3786800T2 (de) | Anlage zur kontinuierlichen Verbundbeschichtung von bandförmigem Gut. | |
| DE2614951C3 (de) | Verfahren zur Herstellung einer Flüssigkristall-Zelle | |
| DE69528836T2 (de) | Vorrichtung und verfahren zur herstellung von gleichen dünnen beschichtungen auf breiten substraten | |
| DE2148132C3 (de) | Verfahren zur Herstellung eines dünnen piezoelektrischen Films | |
| DE2610444C2 (de) | Verfahren und Einrichtung zur Beschichtung von Trägermaterialien, insbesondere durch Kathodenzerstäubung | |
| DE3009836A1 (de) | Verfahren und vorrichtung zum verlaengern der nutzungsdauer von zerstaeubungskathoden | |
| DE2234064A1 (de) | Schneidwerkzeuge und verfahren zu ihrer herstellung | |
| DE19505268A1 (de) | Verfahren und Vorrichtung zur Behandlung von Substratoberflächen | |
| DE2601066B2 (de) | Plattierungsverfahren | |
| DE2203080C2 (de) | Verfahren zum Herstellen einer Schicht auf einem Substrat | |
| DE2546697A1 (de) | Verfahren zum elektrochemischen abscheiden eines materials auf einem halbleiterkoerper | |
| DE69809351T2 (de) | Solarbatteriemodul | |
| DE2208032A1 (de) | Zerstäubungsvorrichtung | |
| DE2723465C2 (de) | Maske zum Aufbringen eines Musters auf ein Substrat und Verfahren zu ihrer Herstellung | |
| DE112005001299T5 (de) | Magnetron-Sputterverfahren und Magnetron-Sputtervorrichtung | |
| DE2454413C2 (enExample) | ||
| EP1110234A1 (de) | Vorrichtung und verfahren zur beschichtung von substraten im vakuum | |
| DE69110547T2 (de) | Plasma-CVD-Anlage. | |
| DE1515310A1 (de) | Verfahren zum Herstellen gleichfoermiger duenner Schichten hoher Guete aus leitenden oder halbleitenden Materialien und Vorrichtung zur Durchfuehrung des Verfahrens | |
| DE3629000C1 (de) | Verfahren und Vorrichtung zum Ausbilden einer Schicht durch plasmachemischen Prozess | |
| DE2359893C2 (de) | Verfahren und Vorrichtung zum Niederschlagen einer durchsichtigen elektrisch leitenden Metalloxidschicht | |
| DE3248121A1 (de) | Hochleistungs-katodenanordnung fuer die erzeugung von mehrfachschichten | |
| DE69807571T2 (de) | Verfahren und Vorrichtung zum Ätzen | |
| DE3000451A1 (de) | Vakuumbedampfungsanlage |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| BHJ | Nonpayment of the annual fee |