GB1343137A - Sputtering apparatus - Google Patents

Sputtering apparatus

Info

Publication number
GB1343137A
GB1343137A GB1225971A GB1225971A GB1343137A GB 1343137 A GB1343137 A GB 1343137A GB 1225971 A GB1225971 A GB 1225971A GB 1225971 A GB1225971 A GB 1225971A GB 1343137 A GB1343137 A GB 1343137A
Authority
GB
United Kingdom
Prior art keywords
blades
screen
target
razor blades
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1225971A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gillette Co LLC
Original Assignee
Gillette Co LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gillette Co LLC filed Critical Gillette Co LLC
Publication of GB1343137A publication Critical patent/GB1343137A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M3/00—Liquid compositions essentially based on lubricating components other than mineral lubricating oils or fatty oils and their use as lubricants; Use as lubricants of single liquid substances
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB1225971A 1970-08-25 1971-04-29 Sputtering apparatus Expired GB1343137A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6684270A 1970-08-25 1970-08-25

Publications (1)

Publication Number Publication Date
GB1343137A true GB1343137A (en) 1974-01-10

Family

ID=22072063

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1225971A Expired GB1343137A (en) 1970-08-25 1971-04-29 Sputtering apparatus

Country Status (9)

Country Link
US (1) US3652443A (enExample)
BE (1) BE767506A (enExample)
BR (1) BR7102802D0 (enExample)
CA (1) CA936834A (enExample)
DE (1) DE2126095B2 (enExample)
ES (1) ES391740A1 (enExample)
FR (1) FR2103480B1 (enExample)
GB (1) GB1343137A (enExample)
NL (1) NL7107310A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113878652A (zh) * 2021-09-30 2022-01-04 福建迈可博电子科技集团股份有限公司 一种射频连接器绝缘子对切装置

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3775285A (en) * 1971-05-18 1973-11-27 Warner Lambert Co Apparatus for coating continuous strips of ribbon razor blade material
US3784458A (en) * 1973-04-03 1974-01-08 Warner Lambert Co Method of coating a continuous strip of ribbon razor blade material
JPS51117933A (en) * 1975-04-10 1976-10-16 Tokuda Seisakusho Spattering apparatus
US3998718A (en) * 1976-02-18 1976-12-21 Bell Telephone Laboratories, Incorporated Ion milling apparatus
DE2655942A1 (de) * 1976-12-10 1978-06-15 Tokuda Seisakusho Kawasaki Kk Zerstaeubungsvorrichtung
GB2010676B (en) * 1977-12-27 1982-05-19 Alza Corp Diffusional drug delivery device with block copolymer as drug carrier
GB8600829D0 (en) * 1986-01-23 1986-02-19 Gillette Co Formation of hard coatings on cutting edges
US4933058A (en) * 1986-01-23 1990-06-12 The Gillette Company Formation of hard coatings on cutting edges
NL8602759A (nl) * 1986-10-31 1988-05-16 Bekaert Sa Nv Werkwijze en inrichting voor het behandelen van een langwerpig substraat, dat van een deklaag voorzien is; alsmede volgens die werkwijze behandelde substraten en met deze substraten versterkte voorwerpen uit polymeermateriaal.
US5219668A (en) * 1986-10-31 1993-06-15 N.V. Bekaert S.A. Process and apparatus for the treatment of coated, elongated substrate, as well as substrates thus treated and articles of polymeric material reinforced with these substrates
US4988424A (en) * 1989-06-07 1991-01-29 Ppg Industries, Inc. Mask and method for making gradient sputtered coatings
US5142785A (en) * 1991-04-26 1992-09-01 The Gillette Company Razor technology
US5232568A (en) * 1991-06-24 1993-08-03 The Gillette Company Razor technology
US5669144A (en) * 1991-11-15 1997-09-23 The Gillette Company Razor blade technology
ZA928617B (en) * 1991-11-15 1993-05-11 Gillette Co Shaving system.
US5295305B1 (en) * 1992-02-13 1996-08-13 Gillette Co Razor blade technology
TW378173B (en) 1997-02-27 2000-01-01 Gillette Co Razor blade and cartridge including same and method of making same
US6077572A (en) * 1997-06-18 2000-06-20 Northeastern University Method of coating edges with diamond-like carbon
BRPI0419033B1 (pt) * 2004-09-08 2017-03-28 Bic Violex Sa método para deposição de uma camada em uma borda de lâmina de barbear de uma lâmina de barbear
CN101818326B (zh) * 2009-02-26 2012-11-21 鸿富锦精密工业（深圳）有限公司 溅镀装置
CN102086507B (zh) * 2009-12-03 2014-10-15 鸿富锦精密工业（深圳）有限公司 溅镀装置
FR2995454B1 (fr) * 2012-09-07 2014-08-22 Commissariat Energie Atomique Procede pour la realisation d'un electrolyte a base de lithium pour micro-batterie solide
KR102001117B1 (ko) * 2013-11-05 2019-07-17 어플라이드 머티어리얼스, 인코포레이티드 스퍼터 증착 소스, 스퍼터 증착을 위한 장치, 및 그 조립 방법
CN106435507B (zh) * 2016-11-10 2018-11-20 北京帕托真空技术有限公司 一种镀膜机旋转装置
US12416073B2 (en) * 2023-01-19 2025-09-16 Institute For Plasma Research Plasma based system for generating antimicrobial coating on flexible polymeric substrates and process thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3480483A (en) * 1965-05-06 1969-11-25 Wilkinson Sword Ltd Razor blades and methods of manufacture thereof
US3410775A (en) * 1966-04-14 1968-11-12 Bell Telephone Labor Inc Electrostatic control of electron movement in cathode sputtering
US3458426A (en) * 1966-05-25 1969-07-29 Fabri Tek Inc Symmetrical sputtering apparatus with plasma confinement
US3528902A (en) * 1966-10-04 1970-09-15 Matsushita Electric Industrial Co Ltd Method of producing thin films by sputtering
US3501393A (en) * 1967-05-05 1970-03-17 Litton Systems Inc Apparatus for sputtering wherein the plasma is confined by the target structure
US3562140A (en) * 1967-10-23 1971-02-09 Eversharp Inc Sequential sputtering apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113878652A (zh) * 2021-09-30 2022-01-04 福建迈可博电子科技集团股份有限公司 一种射频连接器绝缘子对切装置

Also Published As

Publication number Publication date
NL7107310A (enExample) 1972-02-29
ES391740A1 (es) 1973-06-16
CA936834A (en) 1973-11-13
FR2103480A1 (enExample) 1972-04-14
BE767506A (fr) 1971-11-22
US3652443A (en) 1972-03-28
DE2126095B2 (de) 1974-06-06
DE2126095A1 (de) 1972-03-02
FR2103480B1 (enExample) 1974-09-06
BR7102802D0 (pt) 1973-04-12

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees