DE19882665T1 - Tilt-and-Go-Losträgerinterfacejustiersystem - Google Patents

Tilt-and-Go-Losträgerinterfacejustiersystem

Info

Publication number
DE19882665T1
DE19882665T1 DE19882665T DE19882665T DE19882665T1 DE 19882665 T1 DE19882665 T1 DE 19882665T1 DE 19882665 T DE19882665 T DE 19882665T DE 19882665 T DE19882665 T DE 19882665T DE 19882665 T1 DE19882665 T1 DE 19882665T1
Authority
DE
Germany
Prior art keywords
tilt
adjustment system
carrier interface
interface adjustment
lot carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19882665T
Other languages
English (en)
Inventor
Anthony Bonora
Edward J Cortez
John D Kyffin
Michael Ng
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASYST TECHNOLOGIES
Asyst Technologies Inc
Original Assignee
ASYST TECHNOLOGIES
Asyst Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASYST TECHNOLOGIES, Asyst Technologies Inc filed Critical ASYST TECHNOLOGIES
Publication of DE19882665T1 publication Critical patent/DE19882665T1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B1/00—Packaging fluent solid material, e.g. powders, granular or loose fibrous material, loose masses of small articles, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
    • B65B1/04—Methods of, or means for, filling the material into the containers or receptacles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting
DE19882665T 1997-09-03 1998-09-03 Tilt-and-Go-Losträgerinterfacejustiersystem Withdrawn DE19882665T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US5788797P 1997-09-03 1997-09-03
US09/145,704 US6138721A (en) 1997-09-03 1998-09-02 Tilt and go load port interface alignment system
PCT/US1998/018542 WO1999012191A2 (en) 1997-09-03 1998-09-03 Tilt and go load port interface alignment system

Publications (1)

Publication Number Publication Date
DE19882665T1 true DE19882665T1 (de) 2000-11-16

Family

ID=26736992

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19882665T Withdrawn DE19882665T1 (de) 1997-09-03 1998-09-03 Tilt-and-Go-Losträgerinterfacejustiersystem

Country Status (5)

Country Link
US (1) US6138721A (de)
JP (1) JP4287040B2 (de)
KR (1) KR100559447B1 (de)
DE (1) DE19882665T1 (de)
WO (1) WO1999012191A2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8444125B2 (en) 2007-07-19 2013-05-21 Sinfonia Technology Co., Ltd. Attaching apparatus for load port apparatus

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DE19805624A1 (de) * 1998-02-12 1999-09-23 Acr Automation In Cleanroom Schleuse zum Öffnen und Schließen von Reinraumtransport-Boxen
US6883770B1 (en) * 1999-05-18 2005-04-26 Tdk Corporation Load port mounting mechanism
JP2000332079A (ja) * 1999-05-18 2000-11-30 Tdk Corp 半導体製造装置用ロードポート、ロードポート取り付け機構及びロードポート取り付け方法
US6396072B1 (en) * 1999-06-21 2002-05-28 Fortrend Engineering Corporation Load port door assembly with integrated wafer mapper
EP1297557A2 (de) * 2000-06-30 2003-04-02 AJS Automation Inc. Apparat und verfahren für vorrichtungen zur bearbeitung von halbleiterwafern
TW461014B (en) * 2000-10-11 2001-10-21 Ind Tech Res Inst A positioning method and device for wafer loading devices
US6848876B2 (en) 2001-01-12 2005-02-01 Asyst Technologies, Inc. Workpiece sorter operating with modular bare workpiece stockers and/or closed container stockers
US6745908B2 (en) 2001-06-30 2004-06-08 Applied Materials, Inc. Shelf module adapted to store substrate carriers
US20030031538A1 (en) * 2001-06-30 2003-02-13 Applied Materials, Inc. Datum plate for use in installations of substrate handling systems
JP2005520321A (ja) * 2001-07-16 2005-07-07 アシスト テクノロジーズ インコーポレイテッド ツールのフロントエンド加工物処理のための統合システム
US7217076B2 (en) 2001-08-31 2007-05-15 Asyst Technologies, Inc. Semiconductor material handling system
US7100340B2 (en) * 2001-08-31 2006-09-05 Asyst Technologies, Inc. Unified frame for semiconductor material handling system
US7066707B1 (en) 2001-08-31 2006-06-27 Asyst Technologies, Inc. Wafer engine
TW514073U (en) * 2001-09-13 2002-12-11 Fortrend Taiwan Scient Corp Alignment device capable of elastic stretch
JP3871535B2 (ja) * 2001-09-17 2007-01-24 大日本スクリーン製造株式会社 ロードポート装置及びこの装置と上位装置との取り付け機構
EP1315198B1 (de) * 2001-11-21 2006-08-30 RIGHT MFG. Co. Ltd. Entfernungs- und Einbringungsvorrichtung für einen Behälterdeckel
US7344349B2 (en) * 2001-11-30 2008-03-18 Right Mfg. Co., Ltd. Pod cover removing-installing apparatus
US20080206028A1 (en) * 2001-11-30 2008-08-28 Tatsuhiko Nagata Pod cover removing-installing apparatus
US6726429B2 (en) * 2002-02-19 2004-04-27 Vertical Solutions, Inc. Local store for a wafer processing station
US7261508B2 (en) * 2002-04-22 2007-08-28 Taiwan Semiconductor Manufacturing Co., Ltd. Method for aligning a loadport to an overhead hoist transport system
US20040080852A1 (en) * 2002-10-18 2004-04-29 Seagate Technology Llc Disc caddy feeder system with caddy gripper for data storage devices
US20040090152A1 (en) * 2002-10-25 2004-05-13 Keith Pearson Method and apparatus for implementing measurement or instrumentation on production equipment
JP3916148B2 (ja) * 2002-11-15 2007-05-16 Ｔｄｋ株式会社 ウェハーマッピング機能を備えるウェハー処理装置
US6984839B2 (en) * 2002-11-22 2006-01-10 Tdk Corporation Wafer processing apparatus capable of mapping wafers
US7165303B2 (en) * 2002-12-16 2007-01-23 Seagate Technology Llc Disc cassette delidder and feeder system for data storage devices
WO2006009723A2 (en) * 2004-06-15 2006-01-26 Brooks Automation, Inc. Substrate processing apparatus with removable component module
JP4012189B2 (ja) * 2004-10-26 2007-11-21 Ｔｄｋ株式会社 ウエハ検出装置
US7410340B2 (en) * 2005-02-24 2008-08-12 Asyst Technologies, Inc. Direct tool loading
JP4597708B2 (ja) * 2005-02-25 2010-12-15 平田機工株式会社 Ｆｏｕｐオープナ
JP4579723B2 (ja) * 2005-03-07 2010-11-10 川崎重工業株式会社 搬送系ユニットおよび分割体
US10627809B2 (en) 2005-06-18 2020-04-21 Frederick A. Flitsch Multilevel fabricators
US9457442B2 (en) * 2005-06-18 2016-10-04 Futrfab, Inc. Method and apparatus to support process tool modules in a cleanspace fabricator
US7513822B2 (en) 2005-06-18 2009-04-07 Flitsch Frederick A Method and apparatus for a cleanspace fabricator
US9339900B2 (en) 2005-08-18 2016-05-17 Futrfab, Inc. Apparatus to support a cleanspace fabricator
US9159592B2 (en) 2005-06-18 2015-10-13 Futrfab, Inc. Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator
US11024527B2 (en) 2005-06-18 2021-06-01 Frederick A. Flitsch Methods and apparatus for novel fabricators with Cleanspace
US9059227B2 (en) 2005-06-18 2015-06-16 Futrfab, Inc. Methods and apparatus for vertically orienting substrate processing tools in a clean space
US10651063B2 (en) 2005-06-18 2020-05-12 Frederick A. Flitsch Methods of prototyping and manufacturing with cleanspace fabricators
US7762755B2 (en) * 2005-07-11 2010-07-27 Brooks Automation, Inc. Equipment storage for substrate processing apparatus
US8821099B2 (en) * 2005-07-11 2014-09-02 Brooks Automation, Inc. Load port module
US7467024B2 (en) * 2005-08-26 2008-12-16 Flitsch Frederick A Method and apparatus for an elevator system for a multilevel cleanspace fabricator
ITBO20060244A1 (it) * 2006-04-05 2007-10-06 Ima Spa Sistema e metodo per trasferire e movimentare elementi di una macchina automatica confezionatrice.
ITBO20060245A1 (it) * 2006-04-05 2007-10-06 Ima Spa Apparato per trasferire e movimentare elementi di una macchina operatrice.
JP4606388B2 (ja) * 2006-06-12 2011-01-05 川崎重工業株式会社 基板移載装置の搬送系ユニット
DE102006029003A1 (de) * 2006-06-24 2008-01-03 Vistec Semiconductor Systems Gmbh Waferhandhabungsvorrichtung
US9117859B2 (en) 2006-08-31 2015-08-25 Brooks Automation, Inc. Compact processing apparatus
JP5988076B2 (ja) * 2012-02-24 2016-09-07 Tdk株式会社 ロードポート装置取付け機構
JP6150242B2 (ja) * 2012-12-04 2017-06-21 国立研究開発法人産業技術総合研究所 製造ラインを構成するためのユニットとその組み立て方法
CN105793975B (zh) * 2013-10-08 2018-11-27 阿西斯自动系统股份有限公司 具有底盘的净化室-运输容器
JP6451453B2 (ja) * 2015-03-31 2019-01-16 Tdk株式会社 ガスパージ装置、ロードポート装置、パージ対象容器の設置台およびガスパージ方法
JP6554872B2 (ja) * 2015-03-31 2019-08-07 Tdk株式会社 ガスパージ装置、ロードポート装置、パージ対象容器の設置台およびガスパージ方法
JP7177333B2 (ja) 2018-07-04 2022-11-24 シンフォニアテクノロジー株式会社 ロードポート、および、ｅｆｅｍ
JP7271940B2 (ja) * 2018-12-21 2023-05-12 Tdk株式会社 ロードポート装置、ｅｆｅｍ及びロードポート装置の取り付け方法
US11276599B2 (en) * 2020-06-09 2022-03-15 Tdk Corporation Load port apparatus, EFEM, and method of installing load port apparatus
CN114758974B (zh) * 2022-06-16 2022-09-09 上海果纳半导体技术有限公司武汉分公司 晶圆装载装置
WO2024018872A1 (ja) * 2022-07-19 2024-01-25 シンフォニアテクノロジー株式会社 ロードポート取付位置調整機構

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US5668056A (en) * 1990-12-17 1997-09-16 United Microelectronics Corporation Single semiconductor wafer transfer method and manufacturing system
US5468111A (en) * 1992-01-22 1995-11-21 Seagate Technology, Inc. Disc loading and unloading assembly
DE4425208C2 (de) * 1994-07-16 1996-05-09 Jenoptik Technologie Gmbh Einrichtung zur Kopplung von Be- und Entladegeräten mit Halbleiterbearbeitungsmaschinen

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8444125B2 (en) 2007-07-19 2013-05-21 Sinfonia Technology Co., Ltd. Attaching apparatus for load port apparatus

Also Published As

Publication number Publication date
KR20010023587A (ko) 2001-03-26
KR100559447B1 (ko) 2006-03-10
WO1999012191A2 (en) 1999-03-11
JP4287040B2 (ja) 2009-07-01
WO1999012191A3 (en) 1999-06-10
US6138721A (en) 2000-10-31
JP2001526458A (ja) 2001-12-18

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Legal Events

Date Code Title Description
8141 Disposal/no request for examination