DE1911198A1 - Einrichtung zum Beschichten von Glasscheiben oder anderen Schichttraegern durch Bedampfung im Vakuum - Google Patents
Einrichtung zum Beschichten von Glasscheiben oder anderen Schichttraegern durch Bedampfung im VakuumInfo
- Publication number
- DE1911198A1 DE1911198A1 DE19691911198 DE1911198A DE1911198A1 DE 1911198 A1 DE1911198 A1 DE 1911198A1 DE 19691911198 DE19691911198 DE 19691911198 DE 1911198 A DE1911198 A DE 1911198A DE 1911198 A1 DE1911198 A1 DE 1911198A1
- Authority
- DE
- Germany
- Prior art keywords
- chamber
- valve
- coating
- line
- contacts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000576 coating method Methods 0.000 title claims description 153
- 239000011248 coating agent Substances 0.000 title claims description 139
- 238000007740 vapor deposition Methods 0.000 title claims description 16
- 239000011521 glass Substances 0.000 title claims description 13
- 239000000969 carrier Substances 0.000 title description 2
- 238000001704 evaporation Methods 0.000 claims description 81
- 230000008020 evaporation Effects 0.000 claims description 80
- 239000000463 material Substances 0.000 claims description 60
- 238000007789 sealing Methods 0.000 claims description 19
- 238000001771 vacuum deposition Methods 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000013517 stratification Methods 0.000 claims description 2
- 230000003213 activating effect Effects 0.000 claims 1
- 230000004913 activation Effects 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 18
- 239000011777 magnesium Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 12
- 230000000694 effects Effects 0.000 description 9
- 230000008569 process Effects 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 238000009792 diffusion process Methods 0.000 description 6
- 239000012530 fluid Substances 0.000 description 5
- 238000009834 vaporization Methods 0.000 description 5
- 230000008016 vaporization Effects 0.000 description 5
- 235000004443 Ricinus communis Nutrition 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
- 210000002414 leg Anatomy 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 240000000528 Ricinus communis Species 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 3
- 235000013601 eggs Nutrition 0.000 description 3
- 238000010849 ion bombardment Methods 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 240000000359 Triticum dicoccon Species 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000011068 loading method Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 238000005019 vapor deposition process Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 101000630756 Drosophila melanogaster ATP-binding cassette sub-family C member Sur Proteins 0.000 description 1
- 241000196324 Embryophyta Species 0.000 description 1
- 102000004315 Forkhead Transcription Factors Human genes 0.000 description 1
- 108090000852 Forkhead Transcription Factors Proteins 0.000 description 1
- 206010035148 Plague Diseases 0.000 description 1
- 101100425901 Rattus norvegicus Tpm1 gene Proteins 0.000 description 1
- 241000607479 Yersinia pestis Species 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 210000003414 extremity Anatomy 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000003306 harvesting Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000008267 milk Substances 0.000 description 1
- 235000013336 milk Nutrition 0.000 description 1
- 210000004080 milk Anatomy 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000010079 rubber tapping Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 239000011364 vaporized material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US70937668A | 1968-02-29 | 1968-02-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1911198A1 true DE1911198A1 (de) | 1969-09-18 |
Family
ID=24849612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19691911198 Pending DE1911198A1 (de) | 1968-02-29 | 1969-02-28 | Einrichtung zum Beschichten von Glasscheiben oder anderen Schichttraegern durch Bedampfung im Vakuum |
Country Status (13)
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3649339A (en) * | 1969-09-05 | 1972-03-14 | Eugene C Smith | Apparatus and method for securing a high vacuum for particle coating process |
| US3648654A (en) * | 1970-03-16 | 1972-03-14 | Bell Telephone Labor Inc | Vertical liquid phase crystal growth apparatus |
| US3641973A (en) * | 1970-11-25 | 1972-02-15 | Air Reduction | Vacuum coating apparatus |
| US3915118A (en) * | 1973-09-17 | 1975-10-28 | Etec Corp | Specimen coating device for an SEM |
| US3921572A (en) * | 1974-02-25 | 1975-11-25 | Ibm | Vacuum coating apparatus |
| JPS5130965A (ja) * | 1974-09-09 | 1976-03-16 | Matsushita Electric Ind Co Ltd | Atsumakushusekikairo no seizohoho |
| US4173944A (en) * | 1977-05-20 | 1979-11-13 | Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh | Silverplated vapor deposition chamber |
| US4179530A (en) * | 1977-05-20 | 1979-12-18 | Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh | Process for the deposition of pure semiconductor material |
| EP0008807A1 (de) * | 1978-09-13 | 1980-03-19 | Elektroschmelzwerk Kempten GmbH | Vorrichtung und Verfahren zum diskontinuierlichen oder kontinuierlichen thermischen Bedampfen von Formteilen oder Bandmaterial |
| DE2940064A1 (de) * | 1979-10-03 | 1981-04-16 | Leybold-Heraeus GmbH, 5000 Köln | Vakuumaufdampfanlage mir einer ventilkammer, einer bedampfungskammer und einer verdampferkammer |
| JPS5769797A (en) * | 1980-10-17 | 1982-04-28 | Matsushita Electric Ind Co Ltd | Method of producing hybrid thick film integrated circuit |
| JPS57193249U (enrdf_load_stackoverflow) * | 1981-06-03 | 1982-12-07 | ||
| JPS5851594A (ja) * | 1981-09-22 | 1983-03-26 | 日本電気株式会社 | 厚膜混成ｉｃ基板 |
| JPS5885378U (ja) * | 1981-12-04 | 1983-06-09 | ソニー株式会社 | プリント配線基板 |
| US4478174A (en) * | 1983-02-25 | 1984-10-23 | Canadian Patents & Development Limited | Vacuum coating vessel with movable shutter plate |
| JPS61164076U (enrdf_load_stackoverflow) * | 1986-03-20 | 1986-10-11 | ||
| DE112007002116T5 (de) * | 2006-09-11 | 2009-09-10 | ULVAC, Inc., Chigasaki | Unterdruck-Dampf-Bearbeitungs-Vorrichtung |
| KR101066033B1 (ko) * | 2009-07-28 | 2011-09-20 | 엘아이지에이디피 주식회사 | 화학기상 증착장치 및 기판 처리장치 |
| CN106947944A (zh) * | 2017-05-23 | 2017-07-14 | 京东方科技集团股份有限公司 | 一种蒸镀坩埚、蒸镀源、蒸镀装置及蒸镀方法 |
| EP4111060B1 (en) * | 2020-02-28 | 2025-06-04 | Illinois Tool Works Inc. | Piston monitoring assembly |
-
1968
- 1968-02-29 US US709376A patent/US3524426A/en not_active Expired - Lifetime
-
1969
- 1969-02-24 IE IE237/69A patent/IE33433B1/xx unknown
- 1969-02-25 GB GB1250544D patent/GB1250544A/en not_active Expired
- 1969-02-26 SE SE02595/69A patent/SE347024B/xx unknown
- 1969-02-27 NO NO0830/69A patent/NO123939B/no unknown
- 1969-02-27 LU LU58110D patent/LU58110A1/xx unknown
- 1969-02-27 BE BE729026D patent/BE729026A/xx unknown
- 1969-02-27 FR FR6905207A patent/FR2002902A1/fr not_active Withdrawn
- 1969-02-28 DE DE19691911198 patent/DE1911198A1/de active Pending
- 1969-02-28 AT AT205669A patent/AT286738B/de not_active IP Right Cessation
- 1969-02-28 CH CH306769A patent/CH501064A/de not_active IP Right Cessation
- 1969-02-28 NL NL6903181A patent/NL6903181A/xx unknown
- 1969-02-28 JP JP44015284A patent/JPS494156B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US3524426A (en) | 1970-08-18 |
| GB1250544A (enrdf_load_stackoverflow) | 1971-10-20 |
| JPS494156B1 (enrdf_load_stackoverflow) | 1974-01-30 |
| FR2002902A1 (enrdf_load_stackoverflow) | 1969-10-31 |
| LU58110A1 (enrdf_load_stackoverflow) | 1969-06-03 |
| CH501064A (de) | 1970-12-31 |
| AT286738B (de) | 1970-12-28 |
| IE33433B1 (en) | 1974-06-26 |
| IE33433L (en) | 1969-08-29 |
| BE729026A (enrdf_load_stackoverflow) | 1969-08-01 |
| NO123939B (enrdf_load_stackoverflow) | 1972-02-07 |
| NL6903181A (enrdf_load_stackoverflow) | 1969-09-02 |
| SE347024B (enrdf_load_stackoverflow) | 1972-07-24 |
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