BE729026A - - Google Patents

Info

Publication number
BE729026A
BE729026A BE729026DA BE729026A BE 729026 A BE729026 A BE 729026A BE 729026D A BE729026D A BE 729026DA BE 729026 A BE729026 A BE 729026A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE729026A publication Critical patent/BE729026A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
BE729026D 1968-02-29 1969-02-27 BE729026A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US70937668A 1968-02-29 1968-02-29

Publications (1)

Publication Number Publication Date
BE729026A true BE729026A (enrdf_load_stackoverflow) 1969-08-01

Family

ID=24849612

Family Applications (1)

Application Number Title Priority Date Filing Date
BE729026D BE729026A (enrdf_load_stackoverflow) 1968-02-29 1969-02-27

Country Status (13)

Country Link
US (1) US3524426A (enrdf_load_stackoverflow)
JP (1) JPS494156B1 (enrdf_load_stackoverflow)
AT (1) AT286738B (enrdf_load_stackoverflow)
BE (1) BE729026A (enrdf_load_stackoverflow)
CH (1) CH501064A (enrdf_load_stackoverflow)
DE (1) DE1911198A1 (enrdf_load_stackoverflow)
FR (1) FR2002902A1 (enrdf_load_stackoverflow)
GB (1) GB1250544A (enrdf_load_stackoverflow)
IE (1) IE33433B1 (enrdf_load_stackoverflow)
LU (1) LU58110A1 (enrdf_load_stackoverflow)
NL (1) NL6903181A (enrdf_load_stackoverflow)
NO (1) NO123939B (enrdf_load_stackoverflow)
SE (1) SE347024B (enrdf_load_stackoverflow)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3649339A (en) * 1969-09-05 1972-03-14 Eugene C Smith Apparatus and method for securing a high vacuum for particle coating process
US3648654A (en) * 1970-03-16 1972-03-14 Bell Telephone Labor Inc Vertical liquid phase crystal growth apparatus
US3641973A (en) * 1970-11-25 1972-02-15 Air Reduction Vacuum coating apparatus
US3915118A (en) * 1973-09-17 1975-10-28 Etec Corp Specimen coating device for an SEM
US3921572A (en) * 1974-02-25 1975-11-25 Ibm Vacuum coating apparatus
JPS5130965A (en) * 1974-09-09 1976-03-16 Matsushita Electric Industrial Co Ltd Atsumakushusekikairo no seizohoho
US4179530A (en) * 1977-05-20 1979-12-18 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Process for the deposition of pure semiconductor material
US4173944A (en) * 1977-05-20 1979-11-13 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Silverplated vapor deposition chamber
EP0008807A1 (de) * 1978-09-13 1980-03-19 Elektroschmelzwerk Kempten GmbH Vorrichtung und Verfahren zum diskontinuierlichen oder kontinuierlichen thermischen Bedampfen von Formteilen oder Bandmaterial
DE2940064A1 (de) * 1979-10-03 1981-04-16 Leybold-Heraeus GmbH, 5000 Köln Vakuumaufdampfanlage mir einer ventilkammer, einer bedampfungskammer und einer verdampferkammer
JPS5769797A (en) * 1980-10-17 1982-04-28 Matsushita Electric Industrial Co Ltd Method of producing hybrid thick film integrated circuit
JPS57193249U (enrdf_load_stackoverflow) * 1981-06-03 1982-12-07
JPS5851594A (ja) * 1981-09-22 1983-03-26 日本電気株式会社 厚膜混成ｉｃ基板
JPS5885378U (ja) * 1981-12-04 1983-06-09 ソニー株式会社 プリント配線基板
US4478174A (en) * 1983-02-25 1984-10-23 Canadian Patents & Development Limited Vacuum coating vessel with movable shutter plate
JPS61164076U (enrdf_load_stackoverflow) * 1986-03-20 1986-10-11
CN101512036B (zh) * 2006-09-11 2011-11-02 株式会社爱发科 真空蒸气处理装置
KR101066033B1 (ko) * 2009-07-28 2011-09-20 엘아이지에이디피 주식회사 화학기상 증착장치 및 기판 처리장치
CN106947944A (zh) * 2017-05-23 2017-07-14 京东方科技集团股份有限公司 一种蒸镀坩埚、蒸镀源、蒸镀装置及蒸镀方法
CN115176084A (zh) 2020-02-28 2022-10-11 伊利诺斯工具制品有限公司 活塞监测组件

Also Published As

Publication number Publication date
FR2002902A1 (enrdf_load_stackoverflow) 1969-10-31
NO123939B (enrdf_load_stackoverflow) 1972-02-07
SE347024B (enrdf_load_stackoverflow) 1972-07-24
AT286738B (de) 1970-12-28
NL6903181A (enrdf_load_stackoverflow) 1969-09-02
US3524426A (en) 1970-08-18
IE33433B1 (en) 1974-06-26
LU58110A1 (enrdf_load_stackoverflow) 1969-06-03
GB1250544A (enrdf_load_stackoverflow) 1971-10-20
CH501064A (de) 1970-12-31
DE1911198A1 (de) 1969-09-18
IE33433L (en) 1969-08-29
JPS494156B1 (enrdf_load_stackoverflow) 1974-01-30

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