DE1802932B2 - Verfahren zur Herstellung eines elektrischen Schaltkontaktes - Google Patents
Verfahren zur Herstellung eines elektrischen SchaltkontaktesInfo
- Publication number
- DE1802932B2 DE1802932B2 DE1802932A DE1802932A DE1802932B2 DE 1802932 B2 DE1802932 B2 DE 1802932B2 DE 1802932 A DE1802932 A DE 1802932A DE 1802932 A DE1802932 A DE 1802932A DE 1802932 B2 DE1802932 B2 DE 1802932B2
- Authority
- DE
- Germany
- Prior art keywords
- contact
- carrier
- hollow cylinder
- alloy
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 25
- 239000002184 metal Substances 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 22
- 229910045601 alloy Inorganic materials 0.000 claims description 20
- 239000000956 alloy Substances 0.000 claims description 20
- 150000002739 metals Chemical class 0.000 claims description 12
- 239000007789 gas Substances 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 8
- 229910000510 noble metal Inorganic materials 0.000 claims description 7
- 229910052750 molybdenum Inorganic materials 0.000 claims description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 5
- 239000011733 molybdenum Substances 0.000 claims description 5
- 229910052721 tungsten Inorganic materials 0.000 claims description 5
- 238000000889 atomisation Methods 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 150000004767 nitrides Chemical class 0.000 claims description 4
- 229910052763 palladium Inorganic materials 0.000 claims description 4
- 229910052707 ruthenium Inorganic materials 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 230000005291 magnetic effect Effects 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229910052702 rhenium Inorganic materials 0.000 claims description 3
- 229910052703 rhodium Inorganic materials 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 229910000906 Bronze Inorganic materials 0.000 claims description 2
- 239000010974 bronze Substances 0.000 claims description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 claims description 2
- 229910052741 iridium Inorganic materials 0.000 claims description 2
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- -1 carbide Chemical class 0.000 claims 2
- 239000010970 precious metal Substances 0.000 claims 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 238000004870 electrical engineering Methods 0.000 claims 1
- 230000003628 erosive effect Effects 0.000 claims 1
- 239000003302 ferromagnetic material Substances 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 230000001681 protective effect Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 34
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 6
- 238000002844 melting Methods 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 239000002923 metal particle Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 239000012876 carrier material Substances 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 210000003608 fece Anatomy 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- MOFOBJHOKRNACT-UHFFFAOYSA-N nickel silver Chemical compound [Ni].[Ag] MOFOBJHOKRNACT-UHFFFAOYSA-N 0.000 description 1
- 239000010956 nickel silver Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 231100000935 short-term exposure limit Toxicity 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/02—Contacts characterised by the material thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/332—Coating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Manufacture Of Switches (AREA)
- Contacts (AREA)
- Conductive Materials (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE1802932A DE1802932B2 (de) | 1968-10-14 | 1968-10-14 | Verfahren zur Herstellung eines elektrischen Schaltkontaktes |
| JP44065393A JPS4813789B1 (enrdf_load_stackoverflow) | 1968-10-14 | 1969-08-20 | |
| US856932A US3630872A (en) | 1968-10-14 | 1969-09-09 | Process for the manufacture of an electrical contact point |
| GB1290502D GB1290502A (enrdf_load_stackoverflow) | 1968-10-14 | 1969-10-14 | |
| FR696935188A FR2020681B1 (enrdf_load_stackoverflow) | 1968-10-14 | 1969-10-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE1802932A DE1802932B2 (de) | 1968-10-14 | 1968-10-14 | Verfahren zur Herstellung eines elektrischen Schaltkontaktes |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE1802932A1 DE1802932A1 (de) | 1970-05-27 |
| DE1802932B2 true DE1802932B2 (de) | 1974-11-14 |
Family
ID=5710475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE1802932A Withdrawn DE1802932B2 (de) | 1968-10-14 | 1968-10-14 | Verfahren zur Herstellung eines elektrischen Schaltkontaktes |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3630872A (enrdf_load_stackoverflow) |
| JP (1) | JPS4813789B1 (enrdf_load_stackoverflow) |
| DE (1) | DE1802932B2 (enrdf_load_stackoverflow) |
| FR (1) | FR2020681B1 (enrdf_load_stackoverflow) |
| GB (1) | GB1290502A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3708158A1 (de) * | 1987-03-13 | 1988-09-22 | Licentia Gmbh | Aus wenigstens zwei aneinandergrenzenden schichten unterschiedlicher materialien bestehendes kontaktmaterial und verfahren zu dessen herstellung |
| DE3813142A1 (de) * | 1988-04-20 | 1989-11-09 | Duerrwaechter E Dr Doduco | Bandfoermiges oder plattenfoermiges halbzeug fuer elektrische kontakte |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3884787A (en) * | 1973-01-12 | 1975-05-20 | Coulter Information Systems | Sputtering method for thin film deposition on a substrate |
| US4013539A (en) * | 1973-01-12 | 1977-03-22 | Coulter Information Systems, Inc. | Thin film deposition apparatus |
| DE3011694C2 (de) * | 1980-03-26 | 1986-01-16 | Mengelberg, Hans, Dr., 8000 München | Verfahren zur Beschichtung von Verschleißflächen, z.B. Kontaktflächen für die Schwachstromtechnik |
| DE3203037C2 (de) * | 1982-01-29 | 1984-03-08 | Siemens AG, 1000 Berlin und 8000 München | Kontaktelement und Verfahren zu dessen Herstellung |
| FR2529022A1 (fr) * | 1982-06-22 | 1983-12-23 | Doloise Metallurgique | Procede de fabrication d'un organe de contact electrique, contact et connecteur electriques obtenus par ce procede et dispositif pour la mise en oeuvre de ce procede |
| GB2130795B (en) * | 1982-11-17 | 1986-07-16 | Standard Telephones Cables Ltd | Electrical contacts |
| GB2190399A (en) * | 1986-05-02 | 1987-11-18 | Nat Res Dev | Multi-metal electrode |
| US4849079A (en) * | 1986-05-23 | 1989-07-18 | International Business Machines Corp. | Process for preparing low electrical contact resistance composition |
| US4774151A (en) * | 1986-05-23 | 1988-09-27 | International Business Machines Corporation | Low contact electrical resistant composition, substrates coated therewith, and process for preparing such |
| US4911810A (en) * | 1988-06-21 | 1990-03-27 | Brown University | Modular sputtering apparatus |
| RU2228557C1 (ru) * | 2002-10-08 | 2004-05-10 | Овчинникова Марина Николаевна | Слоистый электрический контакт |
| RU2546650C2 (ru) * | 2013-05-31 | 2015-04-10 | Открытое акционерное общество "Рязанский завод металлокерамических приборов" (ОАО РЗМКП) | Магнитоуправляемый герметизированный контакт |
| KR101786675B1 (ko) * | 2015-12-08 | 2017-10-18 | 현대자동차 주식회사 | 전기 접점 코팅용 조성물, 및 이를 이용한 전기 접점 코팅 방법 |
-
1968
- 1968-10-14 DE DE1802932A patent/DE1802932B2/de not_active Withdrawn
-
1969
- 1969-08-20 JP JP44065393A patent/JPS4813789B1/ja active Pending
- 1969-09-09 US US856932A patent/US3630872A/en not_active Expired - Lifetime
- 1969-10-14 GB GB1290502D patent/GB1290502A/en not_active Expired
- 1969-10-14 FR FR696935188A patent/FR2020681B1/fr not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3708158A1 (de) * | 1987-03-13 | 1988-09-22 | Licentia Gmbh | Aus wenigstens zwei aneinandergrenzenden schichten unterschiedlicher materialien bestehendes kontaktmaterial und verfahren zu dessen herstellung |
| DE3813142A1 (de) * | 1988-04-20 | 1989-11-09 | Duerrwaechter E Dr Doduco | Bandfoermiges oder plattenfoermiges halbzeug fuer elektrische kontakte |
Also Published As
| Publication number | Publication date |
|---|---|
| DE1802932A1 (de) | 1970-05-27 |
| FR2020681B1 (enrdf_load_stackoverflow) | 1973-03-16 |
| FR2020681A1 (enrdf_load_stackoverflow) | 1970-07-17 |
| US3630872A (en) | 1971-12-28 |
| GB1290502A (enrdf_load_stackoverflow) | 1972-09-27 |
| JPS4813789B1 (enrdf_load_stackoverflow) | 1973-04-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| BHJ | Nonpayment of the annual fee |