FR2020681B1 - - Google Patents

Info

Publication number
FR2020681B1
FR2020681B1 FR696935188A FR6935188A FR2020681B1 FR 2020681 B1 FR2020681 B1 FR 2020681B1 FR 696935188 A FR696935188 A FR 696935188A FR 6935188 A FR6935188 A FR 6935188A FR 2020681 B1 FR2020681 B1 FR 2020681B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR696935188A
Other versions
FR2020681A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WC Heraus GmbH and Co KG
Heraeus Medical GmbH
Original Assignee
WC Heraus GmbH and Co KG
Heraeus Medical GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WC Heraus GmbH and Co KG, Heraeus Medical GmbH filed Critical WC Heraus GmbH and Co KG
Publication of FR2020681A1 publication Critical patent/FR2020681A1/fr
Application granted granted Critical
Publication of FR2020681B1 publication Critical patent/FR2020681B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/02—Contacts characterised by the material thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Manufacture Of Switches (AREA)
  • Contacts (AREA)
  • Conductive Materials (AREA)
FR696935188A 1968-10-14 1969-10-14 Expired FR2020681B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1802932A DE1802932B2 (de) 1968-10-14 1968-10-14 Verfahren zur Herstellung eines elektrischen Schaltkontaktes

Publications (2)

Publication Number Publication Date
FR2020681A1 FR2020681A1 (fr) 1970-07-17
FR2020681B1 true FR2020681B1 (fr) 1973-03-16

Family

ID=5710475

Family Applications (1)

Application Number Title Priority Date Filing Date
FR696935188A Expired FR2020681B1 (fr) 1968-10-14 1969-10-14

Country Status (5)

Country Link
US (1) US3630872A (fr)
JP (1) JPS4813789B1 (fr)
DE (1) DE1802932B2 (fr)
FR (1) FR2020681B1 (fr)
GB (1) GB1290502A (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4013539A (en) * 1973-01-12 1977-03-22 Coulter Information Systems, Inc. Thin film deposition apparatus
US3884787A (en) * 1973-01-12 1975-05-20 Coulter Information Systems Sputtering method for thin film deposition on a substrate
JPS5915449B2 (ja) * 1975-03-24 1984-04-10 イグロ カツジ 屋内電気配線のユニツト化工法
DE3011694C2 (de) * 1980-03-26 1986-01-16 Mengelberg, Hans, Dr., 8000 München Verfahren zur Beschichtung von Verschleißflächen, z.B. Kontaktflächen für die Schwachstromtechnik
DE3203037C2 (de) * 1982-01-29 1984-03-08 Siemens AG, 1000 Berlin und 8000 München Kontaktelement und Verfahren zu dessen Herstellung
FR2529022A1 (fr) * 1982-06-22 1983-12-23 Doloise Metallurgique Procede de fabrication d'un organe de contact electrique, contact et connecteur electriques obtenus par ce procede et dispositif pour la mise en oeuvre de ce procede
GB2130795B (en) * 1982-11-17 1986-07-16 Standard Telephones Cables Ltd Electrical contacts
GB2190399A (en) * 1986-05-02 1987-11-18 Nat Res Dev Multi-metal electrode
US4849079A (en) * 1986-05-23 1989-07-18 International Business Machines Corp. Process for preparing low electrical contact resistance composition
US4774151A (en) * 1986-05-23 1988-09-27 International Business Machines Corporation Low contact electrical resistant composition, substrates coated therewith, and process for preparing such
DE3708158C2 (de) * 1987-03-13 1997-02-06 Aeg Vakuumschalttechnik Gmbh Schaltkontakt für einen Vakuumschalter und Verfahren zur Herstellung eines derartigen Schaltkontakts
DE3813142A1 (de) * 1988-04-20 1989-11-09 Duerrwaechter E Dr Doduco Bandfoermiges oder plattenfoermiges halbzeug fuer elektrische kontakte
US4911810A (en) * 1988-06-21 1990-03-27 Brown University Modular sputtering apparatus
RU2546650C2 (ru) * 2013-05-31 2015-04-10 Открытое акционерное общество "Рязанский завод металлокерамических приборов" (ОАО РЗМКП) Магнитоуправляемый герметизированный контакт
KR101786675B1 (ko) * 2015-12-08 2017-10-18 현대자동차 주식회사 전기 접점 코팅용 조성물, 및 이를 이용한 전기 접점 코팅 방법

Also Published As

Publication number Publication date
GB1290502A (fr) 1972-09-27
JPS4813789B1 (fr) 1973-04-28
DE1802932A1 (de) 1970-05-27
DE1802932B2 (de) 1974-11-14
FR2020681A1 (fr) 1970-07-17
US3630872A (en) 1971-12-28

Similar Documents

Publication Publication Date Title
AU1946070A (fr)
AU5506869A (fr)
AU2374870A (fr)
AU5184069A (fr)
FR2020681B1 (fr)
AU6168869A (fr)
AU6171569A (fr)
AU4811568A (fr)
AR203075Q (fr)
AU4744468A (fr)
BE709435A (fr)
BE709138A (fr)
BE725360A (fr)
BE725153A (fr)
BE722350A (fr)
BE721235A (fr)
BE710669A (fr)
BE709496A (fr)
BE709484A (fr)
BE709479A (fr)
BE709446A (fr)
BE727215A (fr)
BE709415A (fr)
BE726368A (fr)
BE709320A (fr)

Legal Events

Date Code Title Description
ST Notification of lapse