DE1764099A1 - Vorrichtung mit einer Getterionenpumpe und Getterionenpumpe fuer eine derartige Vorrichtung - Google Patents

Vorrichtung mit einer Getterionenpumpe und Getterionenpumpe fuer eine derartige Vorrichtung

Info

Publication number
DE1764099A1
DE1764099A1 DE19681764099 DE1764099A DE1764099A1 DE 1764099 A1 DE1764099 A1 DE 1764099A1 DE 19681764099 DE19681764099 DE 19681764099 DE 1764099 A DE1764099 A DE 1764099A DE 1764099 A1 DE1764099 A1 DE 1764099A1
Authority
DE
Germany
Prior art keywords
electrode
shaped
ion
electrodes
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19681764099
Other languages
German (de)
English (en)
Inventor
Robert Evard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of DE1764099A1 publication Critical patent/DE1764099A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Tubes For Measurement (AREA)
  • Particle Accelerators (AREA)
DE19681764099 1967-04-07 1968-04-02 Vorrichtung mit einer Getterionenpumpe und Getterionenpumpe fuer eine derartige Vorrichtung Pending DE1764099A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR101911A FR1525369A (fr) 1967-04-07 1967-04-07 Pompe ionique et dispositif d'ionisation de gaz utilisable notamment dans cette pompe

Publications (1)

Publication Number Publication Date
DE1764099A1 true DE1764099A1 (de) 1971-04-15

Family

ID=8628392

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19681764099 Pending DE1764099A1 (de) 1967-04-07 1968-04-02 Vorrichtung mit einer Getterionenpumpe und Getterionenpumpe fuer eine derartige Vorrichtung

Country Status (6)

Country Link
US (2) US3532917A (xx)
CH (2) CH473474A (xx)
DE (1) DE1764099A1 (xx)
FR (1) FR1525369A (xx)
GB (1) GB1213498A (xx)
NL (1) NL6804402A (xx)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1255439B (it) * 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile
DE102009042417B4 (de) * 2009-07-16 2011-11-24 Vacom Steuerungsbau Und Service Gmbh Orbitron-Ionengetterpumpe

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA729786A (en) * 1966-03-08 N.V. Philips Gloeilampenfabrieken Ion pump
US3236442A (en) * 1964-01-20 1966-02-22 Morris Associates Ionic vacuum pump
US3424936A (en) * 1965-02-10 1969-01-28 Nippon Electric Co Metal sleeve ionization gauge having controlled spacing between grid and shield electrodes for optimization of sensitivity

Also Published As

Publication number Publication date
USB353291I5 (xx)
CH469348A (de) 1969-02-28
NL6804402A (xx) 1968-10-08
CH473474A (de) 1969-05-31
FR1525369A (fr) 1968-05-17
GB1213498A (en) 1970-11-25
US3532917A (en) 1970-10-06

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