CH469348A - Ionenquelle - Google Patents

Ionenquelle

Info

Publication number
CH469348A
CH469348A CH497968A CH497968A CH469348A CH 469348 A CH469348 A CH 469348A CH 497968 A CH497968 A CH 497968A CH 497968 A CH497968 A CH 497968A CH 469348 A CH469348 A CH 469348A
Authority
CH
Switzerland
Prior art keywords
ion source
ion
source
Prior art date
Application number
CH497968A
Other languages
English (en)
Inventor
Evrard Robert
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of CH469348A publication Critical patent/CH469348A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Tubes For Measurement (AREA)
  • Particle Accelerators (AREA)
CH497968A 1967-04-07 1968-04-04 Ionenquelle CH469348A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR101911A FR1525369A (fr) 1967-04-07 1967-04-07 Pompe ionique et dispositif d'ionisation de gaz utilisable notamment dans cette pompe

Publications (1)

Publication Number Publication Date
CH469348A true CH469348A (de) 1969-02-28

Family

ID=8628392

Family Applications (2)

Application Number Title Priority Date Filing Date
CH497868A CH473474A (de) 1967-04-07 1968-04-04 Verfahren zum Erzeugen eines Vakuums mittels einer Getterionenpumpe und Getterionenpumpe zur Ausführung des Verfahrens
CH497968A CH469348A (de) 1967-04-07 1968-04-04 Ionenquelle

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CH497868A CH473474A (de) 1967-04-07 1968-04-04 Verfahren zum Erzeugen eines Vakuums mittels einer Getterionenpumpe und Getterionenpumpe zur Ausführung des Verfahrens

Country Status (6)

Country Link
US (2) US3532917A (de)
CH (2) CH473474A (de)
DE (1) DE1764099A1 (de)
FR (1) FR1525369A (de)
GB (1) GB1213498A (de)
NL (1) NL6804402A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1255439B (it) * 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile
DE102009042417B4 (de) * 2009-07-16 2011-11-24 Vacom Steuerungsbau Und Service Gmbh Orbitron-Ionengetterpumpe

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA729786A (en) * 1966-03-08 N.V. Philips Gloeilampenfabrieken Ion pump
US3236442A (en) * 1964-01-20 1966-02-22 Morris Associates Ionic vacuum pump
US3424936A (en) * 1965-02-10 1969-01-28 Nippon Electric Co Metal sleeve ionization gauge having controlled spacing between grid and shield electrodes for optimization of sensitivity

Also Published As

Publication number Publication date
CH473474A (de) 1969-05-31
US3532917A (en) 1970-10-06
FR1525369A (fr) 1968-05-17
DE1764099A1 (de) 1971-04-15
GB1213498A (en) 1970-11-25
USB353291I5 (de)
NL6804402A (de) 1968-10-08

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