DE112021000745T5 - Nitrid-halbleiterbauteil - Google Patents

Nitrid-halbleiterbauteil Download PDF

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Publication number
DE112021000745T5
DE112021000745T5 DE112021000745.9T DE112021000745T DE112021000745T5 DE 112021000745 T5 DE112021000745 T5 DE 112021000745T5 DE 112021000745 T DE112021000745 T DE 112021000745T DE 112021000745 T5 DE112021000745 T5 DE 112021000745T5
Authority
DE
Germany
Prior art keywords
nitride semiconductor
semiconductor layer
region
film
etching step
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112021000745.9T
Other languages
German (de)
English (en)
Inventor
Hirotaka Otake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Publication of DE112021000745T5 publication Critical patent/DE112021000745T5/de
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/015—Manufacture or treatment of FETs having heterojunction interface channels or heterojunction gate electrodes, e.g. HEMT
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/40—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
    • H10D30/47—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having two-dimensional [2D] charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
    • H10D30/471—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT]
    • H10D30/475—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having wider bandgap layer formed on top of lower bandgap active layer, e.g. undoped barrier HEMTs such as i-AlGaN/GaN HEMTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/23—Electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. sources, drains, anodes or cathodes
    • H10D64/251—Source or drain electrodes for field-effect devices
    • H10D64/257—Source or drain electrodes for field-effect devices for lateral devices wherein the source or drain electrodes are characterised by top-view geometrical layouts, e.g. interdigitated, semi-circular, annular or L-shaped electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/343—Gate regions of field-effect devices having PN junction gates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/85—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs
    • H10D62/8503—Nitride Group III-V materials, e.g. AlN or GaN
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/111—Field plates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/23—Electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. sources, drains, anodes or cathodes
    • H10D64/251—Source or drain electrodes for field-effect devices
    • H10D64/256—Source or drain electrodes for field-effect devices for lateral devices wherein the source or drain electrodes are recessed in semiconductor bodies

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  • Junction Field-Effect Transistors (AREA)
DE112021000745.9T 2020-01-28 2021-01-15 Nitrid-halbleiterbauteil Pending DE112021000745T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020011740 2020-01-28
JP2020-011740 2020-01-28
PCT/JP2021/001166 WO2021153266A1 (ja) 2020-01-28 2021-01-15 窒化物半導体装置

Publications (1)

Publication Number Publication Date
DE112021000745T5 true DE112021000745T5 (de) 2022-11-10

Family

ID=77078839

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112021000745.9T Pending DE112021000745T5 (de) 2020-01-28 2021-01-15 Nitrid-halbleiterbauteil

Country Status (5)

Country Link
US (1) US20230045660A1 (https=)
JP (1) JPWO2021153266A1 (https=)
CN (1) CN114981979A (https=)
DE (1) DE112021000745T5 (https=)
WO (1) WO2021153266A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11424247B1 (en) 2021-05-07 2022-08-23 Fujian Jinhua Integrated Circuit Co., Ltd. Semiconductor memory device having a second active region disposed at an outer side of a first active region
JPWO2023042617A1 (https=) * 2021-09-14 2023-03-23
JPWO2023219046A1 (https=) * 2022-05-12 2023-11-16

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010118087A1 (en) * 2009-04-08 2010-10-14 Efficient Power Conversion Corporation Enhancement mode gan hemt device and method for fabricating the same
DE112010001556B4 (de) * 2009-04-08 2022-01-27 Efficient Power Conversion Corporation Rückdiffusionsunterdrückende Strukturen
JP6170007B2 (ja) * 2014-04-10 2017-07-26 トヨタ自動車株式会社 スイッチング素子
JP2018163928A (ja) * 2017-03-24 2018-10-18 住友電気工業株式会社 半導体装置の製造方法
JP6600720B2 (ja) * 2018-08-06 2019-10-30 ルネサスエレクトロニクス株式会社 半導体装置

Also Published As

Publication number Publication date
US20230045660A1 (en) 2023-02-09
JPWO2021153266A1 (https=) 2021-08-05
WO2021153266A1 (ja) 2021-08-05
CN114981979A (zh) 2022-08-30

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R012 Request for examination validly filed
R016 Response to examination communication
R079 Amendment of ipc main class

Free format text: PREVIOUS MAIN CLASS: H01L0029778000

Ipc: H10D0030470000

R016 Response to examination communication
R002 Refusal decision in examination/registration proceedings