JPWO2023219046A1 - - Google Patents

Info

Publication number
JPWO2023219046A1
JPWO2023219046A1 JP2024520434A JP2024520434A JPWO2023219046A1 JP WO2023219046 A1 JPWO2023219046 A1 JP WO2023219046A1 JP 2024520434 A JP2024520434 A JP 2024520434A JP 2024520434 A JP2024520434 A JP 2024520434A JP WO2023219046 A1 JPWO2023219046 A1 JP WO2023219046A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024520434A
Other languages
Japanese (ja)
Other versions
JPWO2023219046A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023219046A1 publication Critical patent/JPWO2023219046A1/ja
Publication of JPWO2023219046A5 publication Critical patent/JPWO2023219046A5/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/051Manufacture or treatment of FETs having PN junction gates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/061Manufacture or treatment of FETs having Schottky gates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/40FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
    • H10D30/47FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having two-dimensional [2D] charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/80FETs having rectifying junction gate electrodes
    • H10D30/83FETs having PN junction gate electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/80FETs having rectifying junction gate electrodes
    • H10D30/87FETs having Schottky gate electrodes, e.g. metal-semiconductor FETs [MESFET]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/01Manufacture or treatment
    • H10D64/011Manufacture or treatment of electrodes ohmically coupled to a semiconductor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/20Electrodes characterised by their shapes, relative sizes or dispositions 
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/20Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/23Electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. sources, drains, anodes or cathodes
JP2024520434A 2022-05-12 2023-05-02 Pending JPWO2023219046A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022078855 2022-05-12
PCT/JP2023/017197 WO2023219046A1 (ja) 2022-05-12 2023-05-02 窒化物半導体装置

Publications (2)

Publication Number Publication Date
JPWO2023219046A1 true JPWO2023219046A1 (https=) 2023-11-16
JPWO2023219046A5 JPWO2023219046A5 (https=) 2025-01-23

Family

ID=88730454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024520434A Pending JPWO2023219046A1 (https=) 2022-05-12 2023-05-02

Country Status (2)

Country Link
JP (1) JPWO2023219046A1 (https=)
WO (1) WO2023219046A1 (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011124385A (ja) * 2009-12-10 2011-06-23 Sanken Electric Co Ltd 化合物半導体装置及びその製造方法
JP6227154B2 (ja) * 2014-09-17 2017-11-08 シャープ株式会社 化合物半導体電界効果トランジスタ
JP2016131207A (ja) * 2015-01-14 2016-07-21 株式会社豊田中央研究所 集積した半導体装置
JP7216523B2 (ja) * 2018-11-12 2023-02-01 ローム株式会社 窒化物半導体装置
US20230045660A1 (en) * 2020-01-28 2023-02-09 Rohm Co., Ltd. Nitride semiconductor device
JP2021190501A (ja) * 2020-05-27 2021-12-13 ローム株式会社 窒化物半導体装置

Also Published As

Publication number Publication date
WO2023219046A1 (ja) 2023-11-16

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Legal Events

Date Code Title Description
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Effective date: 20240927