DE112014004088T5 - Verfahren und Apparatur zur Herstellung von Massen-Siliciumcarbid unter Verwendung eines Siliciumcarbid-Impfkristalls - Google Patents

Verfahren und Apparatur zur Herstellung von Massen-Siliciumcarbid unter Verwendung eines Siliciumcarbid-Impfkristalls Download PDF

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Publication number
DE112014004088T5
DE112014004088T5 DE112014004088.6T DE112014004088T DE112014004088T5 DE 112014004088 T5 DE112014004088 T5 DE 112014004088T5 DE 112014004088 T DE112014004088 T DE 112014004088T DE 112014004088 T5 DE112014004088 T5 DE 112014004088T5
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Germany
Prior art keywords
silicon carbide
seed crystal
crucible
microns
hot zone
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
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DE112014004088.6T
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German (de)
English (en)
Inventor
Parthasarathy Santhanaraghavan
Andriy M. Andrukhiv
Roman V. Drachev
David S. Lyttle
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GTAT Corp
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GTAT Corp
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Publication date
Application filed by GTAT Corp filed Critical GTAT Corp
Publication of DE112014004088T5 publication Critical patent/DE112014004088T5/de
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/36—Carbides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C30B23/025—Epitaxial-layer growth characterised by the substrate
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
DE112014004088.6T 2013-09-06 2014-09-05 Verfahren und Apparatur zur Herstellung von Massen-Siliciumcarbid unter Verwendung eines Siliciumcarbid-Impfkristalls Pending DE112014004088T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361874620P 2013-09-06 2013-09-06
US61/874,620 2013-09-06
PCT/US2014/054274 WO2015035152A1 (en) 2013-09-06 2014-09-05 Method and apparatus for producing bulk silicon carbide using a silicon carbide seed

Publications (1)

Publication Number Publication Date
DE112014004088T5 true DE112014004088T5 (de) 2016-06-23

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Family Applications (1)

Application Number Title Priority Date Filing Date
DE112014004088.6T Pending DE112014004088T5 (de) 2013-09-06 2014-09-05 Verfahren und Apparatur zur Herstellung von Massen-Siliciumcarbid unter Verwendung eines Siliciumcarbid-Impfkristalls

Country Status (7)

Country Link
US (2) US10793971B2 (enExample)
JP (1) JP6473455B2 (enExample)
KR (1) KR102245507B1 (enExample)
CN (2) CN105518189B (enExample)
DE (1) DE112014004088T5 (enExample)
TW (2) TWI665343B (enExample)
WO (1) WO2015035152A1 (enExample)

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DE112014004056T5 (de) * 2013-09-06 2016-06-02 Gtat Corporation Verfahren und Apparatur zur Herstellung von Massen-Siliciumcarbid aus einem Siliciumcarbid-Vorläufer
US9512542B2 (en) * 2013-09-06 2016-12-06 Gtat Corporation Bulk silicon carbide having low defect density
CN105518187B (zh) * 2013-09-06 2019-11-08 Gtat公司 生产大块硅碳化物的方法
JP6473455B2 (ja) * 2013-09-06 2019-02-20 ジーティーエイティー コーポレーションＧｔａｔ Ｃｏｒｐｏｒａｔｉｏｎ 炭化ケイ素シードを用いたバルクの炭化ケイ素の製造方法及び装置
CN106480503B (zh) * 2016-12-09 2018-11-20 河北同光晶体有限公司 一种颗粒状碳化硅单晶的生长方法
US11339498B2 (en) * 2016-12-20 2022-05-24 Senic Inc. Method for growing single crystal silicon carbide ingot having large diameter
US10793972B1 (en) 2017-07-11 2020-10-06 Ii-Vi Delaware, Inc. High quality silicon carbide crystals and method of making the same
CN108468089B (zh) * 2018-05-16 2022-06-21 福建北电新材料科技有限公司 一种高效高温固化碳化硅籽晶的工艺
CN111074338B (zh) * 2018-10-22 2022-09-20 赛尼克公司 具有保护膜的籽晶及其制备方法和附着方法、采用该籽晶的晶锭的制备方法
CN109234810A (zh) * 2018-10-31 2019-01-18 福建北电新材料科技有限公司 一种无需粘结籽晶的碳化硅单晶生长装置
US10562130B1 (en) 2018-12-29 2020-02-18 Cree, Inc. Laser-assisted method for parting crystalline material
US10576585B1 (en) 2018-12-29 2020-03-03 Cree, Inc. Laser-assisted method for parting crystalline material
US11024501B2 (en) 2018-12-29 2021-06-01 Cree, Inc. Carrier-assisted method for parting crystalline material along laser damage region
US10611052B1 (en) * 2019-05-17 2020-04-07 Cree, Inc. Silicon carbide wafers with relaxed positive bow and related methods
CN110453285A (zh) * 2019-09-09 2019-11-15 福建北电新材料科技有限公司 坩埚盖及坩埚
CN110872728B (zh) * 2019-11-28 2021-05-28 山东大学 一种简单、高效降低SiC单晶中碳包裹物的方法
CN110886014B (zh) * 2019-12-18 2021-07-27 福建北电新材料科技有限公司 晶体生长装置
CN111321472B (zh) * 2020-03-25 2022-02-22 哈尔滨科友半导体产业装备与技术研究院有限公司 AlN籽晶精确扩径的装置及方法
TWI844788B (zh) * 2020-07-27 2024-06-11 環球晶圓股份有限公司 碳化矽晶種及碳化矽晶體的製造方法
RU2770838C1 (ru) * 2021-05-04 2022-04-22 Юрий Николаевич Макаров СПОСОБ ВЫРАЩИВАНИЯ МОНОКРИСТАЛЛОВ КАРБИДА КРЕМНИЯ С ПРОВОДИМОСТЬЮ n-ТИПА
CN117109301B (zh) * 2023-10-25 2023-12-22 山西第三代半导体技术创新中心有限公司 一种用于制备大孔径碳化硅粉料的坩埚结构
CN117431522B (zh) * 2023-10-26 2024-06-21 北京北方华创微电子装备有限公司 清洁装置、清洁腔室及其控制方法、半导体工艺设备

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Publication number Publication date
US20210095392A1 (en) 2021-04-01
TW201920783A (zh) 2019-06-01
TWI647348B (zh) 2019-01-11
TW201522723A (zh) 2015-06-16
JP2016534973A (ja) 2016-11-10
CN110578172B (zh) 2022-10-28
KR102245507B1 (ko) 2021-04-28
KR20160052685A (ko) 2016-05-12
CN105518189B (zh) 2019-10-15
JP6473455B2 (ja) 2019-02-20
TWI665343B (zh) 2019-07-11
US20150068446A1 (en) 2015-03-12
US11421343B2 (en) 2022-08-23
CN105518189A (zh) 2016-04-20
US10793971B2 (en) 2020-10-06
CN110578172A (zh) 2019-12-17
WO2015035152A1 (en) 2015-03-12

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