DE112012005173B4 - Massenspektrometervakuumschnittstellen-Verfahren und -Vorrichtung - Google Patents

Massenspektrometervakuumschnittstellen-Verfahren und -Vorrichtung Download PDF

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Publication number
DE112012005173B4
DE112012005173B4 DE112012005173.4T DE112012005173T DE112012005173B4 DE 112012005173 B4 DE112012005173 B4 DE 112012005173B4 DE 112012005173 T DE112012005173 T DE 112012005173T DE 112012005173 B4 DE112012005173 B4 DE 112012005173B4
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DE
Germany
Prior art keywords
skimmer
plasma
skimmer device
downstream
skimmed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
DE112012005173.4T
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German (de)
English (en)
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DE112012005173T5 (de
Inventor
Alexander Alekseevich Makarow
Lothar Rottmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thermo Fisher Scientific Bremen GmbH
Original Assignee
Thermo Fisher Scientific Bremen GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Thermo Fisher Scientific Bremen GmbH filed Critical Thermo Fisher Scientific Bremen GmbH
Publication of DE112012005173T5 publication Critical patent/DE112012005173T5/de
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/067—Ion lenses, apertures, skimmers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0495—Vacuum locks; Valves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
DE112012005173.4T 2011-12-12 2012-12-12 Massenspektrometervakuumschnittstellen-Verfahren und -Vorrichtung Active DE112012005173B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1121290.9 2011-12-12
GB1121290.9A GB2498173C (en) 2011-12-12 2011-12-12 Mass spectrometer vacuum interface method and apparatus
PCT/EP2012/075301 WO2013087731A1 (en) 2011-12-12 2012-12-12 Mass spectrometer vacuum interface method and apparatus

Publications (2)

Publication Number Publication Date
DE112012005173T5 DE112012005173T5 (de) 2014-08-28
DE112012005173B4 true DE112012005173B4 (de) 2021-04-29

Family

ID=45560285

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112012005173.4T Active DE112012005173B4 (de) 2011-12-12 2012-12-12 Massenspektrometervakuumschnittstellen-Verfahren und -Vorrichtung

Country Status (8)

Country Link
US (6) US9012839B2 (enExample)
JP (2) JP6046740B2 (enExample)
CN (2) CN103999187B (enExample)
AU (1) AU2012351700C1 (enExample)
CA (1) CA2858457C (enExample)
DE (1) DE112012005173B4 (enExample)
GB (1) GB2498173C (enExample)
WO (1) WO2013087731A1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9818593B2 (en) * 2012-09-13 2017-11-14 University Of Maine System Board Of Trustees Radio-frequency ionization of chemicals
CN104637773B (zh) * 2015-02-16 2017-03-01 江苏天瑞仪器股份有限公司 质谱仪一级真空结构
US10692692B2 (en) * 2015-05-27 2020-06-23 Kla-Tencor Corporation System and method for providing a clean environment in an electron-optical system
GB2544959B (en) * 2015-09-17 2019-06-05 Thermo Fisher Scient Bremen Gmbh Mass spectrometer
DE102016113771B4 (de) 2016-07-26 2019-11-07 Bundesrepublik Deutschland, Vertreten Durch Den Bundesminister Für Wirtschaft Und Energie, Dieser Vertreten Durch Den Präsidenten Der Bundesanstalt Für Materialforschung Und -Prüfung (Bam) Analysevorrichtung für gasförmige Proben und Verfahren zum Nachweis von Analyten in einem Gas
GB2560160B (en) * 2017-02-23 2021-08-18 Thermo Fisher Scient Bremen Gmbh Methods in mass spectrometry using collision gas as ion source
CN107910241B (zh) * 2017-11-14 2019-12-13 大连民族大学 一种激光焊接中等离子体羽辉微粒子成分的质谱分析装置
GB2572819B (en) * 2018-04-13 2021-05-19 Thermo Fisher Scient Bremen Gmbh Method and apparatus for operating a vacuum interface of a mass spectrometer
CN111902907A (zh) * 2018-04-20 2020-11-06 株式会社岛津制作所 截取锥以及电感耦合等离子体质量分析装置
CN110690100B (zh) * 2019-10-31 2025-01-28 杭州谱育科技发展有限公司 一种电感耦合等离子质谱接口装置
US11145501B2 (en) * 2020-02-20 2021-10-12 Perkinelmer, Inc. Thermal management for instruments including a plasma source
CN112557488A (zh) * 2020-12-09 2021-03-26 上海交通大学 一种一体式分子束取样接口
CN116635976A (zh) 2020-12-23 2023-08-22 万机仪器公司 使用质谱测定法监测自由基粒子浓度
CN112924525A (zh) * 2021-01-29 2021-06-08 厦门大学 一种富勒烯形成机理研究的原位质谱分析装置及方法
WO2023117760A1 (en) 2021-12-21 2023-06-29 Thermo Fisher Scientific (Bremen) Gmbh Skimmers for plasma interfaces
CN115421180A (zh) * 2022-10-09 2022-12-02 中国科学院国家空间科学中心 一种降低进入定标载荷离子通量的系统及方法
WO2025072067A1 (en) * 2023-09-26 2025-04-03 Inficon, Inc. Method and assembly for creating a molecular beam

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2293482A (en) * 1994-09-22 1996-03-27 Finnigan Mat Gmbh Ion-optical components, eg for mass spectrometers
US5756994A (en) * 1995-12-14 1998-05-26 Micromass Limited Electrospray and atmospheric pressure chemical ionization mass spectrometer and ion source
JPH1125903A (ja) * 1997-07-04 1999-01-29 Agency Of Ind Science & Technol 金属−セラミック複合サンプラー及びスキマー
JP2001185073A (ja) * 1999-12-27 2001-07-06 Yokogawa Analytical Systems Inc 誘導結合プラズマ質量分析装置及び方法
US20050194530A1 (en) * 2004-03-08 2005-09-08 Rohan Thakur Titanium ion transfer components for use in mass spectrometry
US20050269506A1 (en) * 2002-07-31 2005-12-08 Varian Australia Pty Ltd Mass spectrometry apparatus and method
US7119330B2 (en) * 2002-03-08 2006-10-10 Varian Australia Pty Ltd Plasma mass spectrometer
US7230232B2 (en) * 1998-09-16 2007-06-12 Thermo Fisher Scientific (Bremen) Gmbh Means for removing unwanted ions from an ion transport system and mass spectrometer
US20090039251A1 (en) * 2007-08-09 2009-02-12 Agilent Technologies, Inc. Mass spectrometer
US7915580B2 (en) * 2008-10-15 2011-03-29 Thermo Finnigan Llc Electro-dynamic or electro-static lens coupled to a stacked ring ion guide

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4863491A (en) * 1988-05-27 1989-09-05 Hewlett-Packard Interface for liquid chromatography-mass spectrometry systems
JPH0340748U (enExample) * 1989-08-31 1991-04-18
US6002130A (en) * 1991-09-12 1999-12-14 Hitachi, Ltd. Mass spectrometry and mass spectrometer
CA2116821C (en) * 1993-03-05 2003-12-23 Stephen Esler Anderson Improvements in plasma mass spectrometry
JPH07240169A (ja) * 1994-02-28 1995-09-12 Jeol Ltd 誘導結合プラズマ質量分析装置
JP3492081B2 (ja) * 1996-05-15 2004-02-03 セイコーインスツルメンツ株式会社 プラズマイオン源質量分析装置
JPH10283984A (ja) * 1997-04-01 1998-10-23 Yokogawa Analytical Syst Kk 飛行時間型質量分析装置
CA2460204A1 (en) * 2001-09-10 2003-03-20 Varian Australia Pty Ltd Apparatus and method for elemental mass spectrometry
JP4178110B2 (ja) * 2001-11-07 2008-11-12 株式会社日立ハイテクノロジーズ 質量分析装置
US6872940B1 (en) * 2002-05-31 2005-03-29 Thermo Finnigan Llc Focusing ions using gas dynamics
US7259371B2 (en) * 2005-01-10 2007-08-21 Applera Corporation Method and apparatus for improved sensitivity in a mass spectrometer
EP1865533B1 (en) * 2006-06-08 2014-09-17 Microsaic Systems PLC Microengineerd vacuum interface for an ionization system
WO2008147846A1 (en) * 2007-05-22 2008-12-04 Semequip, Inc. Method and system for extracting ion beams composed of molecular ions (cluster ion beam extraction system)
WO2009147894A1 (ja) * 2008-06-05 2009-12-10 株式会社日立ハイテクノロジーズ イオンビーム装置
US9105457B2 (en) * 2010-02-24 2015-08-11 Perkinelmer Health Sciences, Inc. Cone-shaped orifice arrangement for inductively coupled plasma sample introduction system
GB2498174B (en) * 2011-12-12 2016-06-29 Thermo Fisher Scient (Bremen) Gmbh Mass spectrometer vacuum interface method and apparatus
WO2013100218A1 (ko) 2011-12-28 2013-07-04 볼보 컨스트럭션 이큅먼트 에이비 건설기계의 엔진 제어방법

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2293482A (en) * 1994-09-22 1996-03-27 Finnigan Mat Gmbh Ion-optical components, eg for mass spectrometers
US5756994A (en) * 1995-12-14 1998-05-26 Micromass Limited Electrospray and atmospheric pressure chemical ionization mass spectrometer and ion source
JPH1125903A (ja) * 1997-07-04 1999-01-29 Agency Of Ind Science & Technol 金属−セラミック複合サンプラー及びスキマー
US7230232B2 (en) * 1998-09-16 2007-06-12 Thermo Fisher Scientific (Bremen) Gmbh Means for removing unwanted ions from an ion transport system and mass spectrometer
JP2001185073A (ja) * 1999-12-27 2001-07-06 Yokogawa Analytical Systems Inc 誘導結合プラズマ質量分析装置及び方法
US7119330B2 (en) * 2002-03-08 2006-10-10 Varian Australia Pty Ltd Plasma mass spectrometer
US20050269506A1 (en) * 2002-07-31 2005-12-08 Varian Australia Pty Ltd Mass spectrometry apparatus and method
US20050194530A1 (en) * 2004-03-08 2005-09-08 Rohan Thakur Titanium ion transfer components for use in mass spectrometry
US20090039251A1 (en) * 2007-08-09 2009-02-12 Agilent Technologies, Inc. Mass spectrometer
US7872227B2 (en) * 2007-08-09 2011-01-18 Agilent Technologies, Inc. Mass spectrometer
US7915580B2 (en) * 2008-10-15 2011-03-29 Thermo Finnigan Llc Electro-dynamic or electro-static lens coupled to a stacked ring ion guide

Also Published As

Publication number Publication date
JP2015502022A (ja) 2015-01-19
CN103999187A (zh) 2014-08-20
JP2017084790A (ja) 2017-05-18
US10475632B2 (en) 2019-11-12
CA2858457C (en) 2018-06-12
US20170025261A1 (en) 2017-01-26
GB201121290D0 (en) 2012-01-25
AU2012351700C1 (en) 2017-03-23
JP6279057B2 (ja) 2018-02-14
US20200043713A1 (en) 2020-02-06
AU2012351700A1 (en) 2014-07-03
US20140339418A1 (en) 2014-11-20
GB2498173B (en) 2016-06-29
US10283338B2 (en) 2019-05-07
US9012839B2 (en) 2015-04-21
AU2012351700B2 (en) 2016-11-03
US20170316927A1 (en) 2017-11-02
CN107068534A (zh) 2017-08-18
US20190252174A1 (en) 2019-08-15
CN107068534B (zh) 2019-01-08
US20150228466A1 (en) 2015-08-13
US9640379B2 (en) 2017-05-02
JP6046740B2 (ja) 2016-12-21
GB2498173A (en) 2013-07-10
US10991561B2 (en) 2021-04-27
CA2858457A1 (en) 2013-06-20
GB2498173C (en) 2018-06-27
CN103999187B (zh) 2017-05-17
US9741549B2 (en) 2017-08-22
DE112012005173T5 (de) 2014-08-28
WO2013087731A1 (en) 2013-06-20

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