CA2858457C - Mass spectrometer vacuum interface method and apparatus - Google Patents

Mass spectrometer vacuum interface method and apparatus Download PDF

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Publication number
CA2858457C
CA2858457C CA2858457A CA2858457A CA2858457C CA 2858457 C CA2858457 C CA 2858457C CA 2858457 A CA2858457 A CA 2858457A CA 2858457 A CA2858457 A CA 2858457A CA 2858457 C CA2858457 C CA 2858457C
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CA
Canada
Prior art keywords
skimmer
plasma
internal surface
channel
aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CA2858457A
Other languages
English (en)
French (fr)
Other versions
CA2858457A1 (en
Inventor
Alexander Alekseevich Makarov
Lothar Rottmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thermo Fisher Scientific Bremen GmbH
Original Assignee
Thermo Fisher Scientific Bremen GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thermo Fisher Scientific Bremen GmbH filed Critical Thermo Fisher Scientific Bremen GmbH
Publication of CA2858457A1 publication Critical patent/CA2858457A1/en
Application granted granted Critical
Publication of CA2858457C publication Critical patent/CA2858457C/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/06Electron- or ion-optical arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/04Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0495Vacuum locks; Valves
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/06Electron- or ion-optical arrangements
    • H01J49/067Ion lenses, apertures, skimmers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • H01J49/105Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/24Vacuum systems, e.g. maintaining desired pressures

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
CA2858457A 2011-12-12 2012-12-12 Mass spectrometer vacuum interface method and apparatus Active CA2858457C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1121290.9 2011-12-12
GB1121290.9A GB2498173C (en) 2011-12-12 2011-12-12 Mass spectrometer vacuum interface method and apparatus
PCT/EP2012/075301 WO2013087731A1 (en) 2011-12-12 2012-12-12 Mass spectrometer vacuum interface method and apparatus

Publications (2)

Publication Number Publication Date
CA2858457A1 CA2858457A1 (en) 2013-06-20
CA2858457C true CA2858457C (en) 2018-06-12

Family

ID=45560285

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2858457A Active CA2858457C (en) 2011-12-12 2012-12-12 Mass spectrometer vacuum interface method and apparatus

Country Status (8)

Country Link
US (6) US9012839B2 (enExample)
JP (2) JP6046740B2 (enExample)
CN (2) CN103999187B (enExample)
AU (1) AU2012351700C1 (enExample)
CA (1) CA2858457C (enExample)
DE (1) DE112012005173B4 (enExample)
GB (1) GB2498173C (enExample)
WO (1) WO2013087731A1 (enExample)

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US10692692B2 (en) * 2015-05-27 2020-06-23 Kla-Tencor Corporation System and method for providing a clean environment in an electron-optical system
GB2544959B (en) * 2015-09-17 2019-06-05 Thermo Fisher Scient Bremen Gmbh Mass spectrometer
DE102016113771B4 (de) 2016-07-26 2019-11-07 Bundesrepublik Deutschland, Vertreten Durch Den Bundesminister Für Wirtschaft Und Energie, Dieser Vertreten Durch Den Präsidenten Der Bundesanstalt Für Materialforschung Und -Prüfung (Bam) Analysevorrichtung für gasförmige Proben und Verfahren zum Nachweis von Analyten in einem Gas
GB2560160B (en) * 2017-02-23 2021-08-18 Thermo Fisher Scient Bremen Gmbh Methods in mass spectrometry using collision gas as ion source
CN107910241B (zh) * 2017-11-14 2019-12-13 大连民族大学 一种激光焊接中等离子体羽辉微粒子成分的质谱分析装置
GB2572819B (en) * 2018-04-13 2021-05-19 Thermo Fisher Scient Bremen Gmbh Method and apparatus for operating a vacuum interface of a mass spectrometer
CN111902907A (zh) * 2018-04-20 2020-11-06 株式会社岛津制作所 截取锥以及电感耦合等离子体质量分析装置
CN110690100B (zh) * 2019-10-31 2025-01-28 杭州谱育科技发展有限公司 一种电感耦合等离子质谱接口装置
US11145501B2 (en) * 2020-02-20 2021-10-12 Perkinelmer, Inc. Thermal management for instruments including a plasma source
CN112557488A (zh) * 2020-12-09 2021-03-26 上海交通大学 一种一体式分子束取样接口
CN116635976A (zh) 2020-12-23 2023-08-22 万机仪器公司 使用质谱测定法监测自由基粒子浓度
CN112924525A (zh) * 2021-01-29 2021-06-08 厦门大学 一种富勒烯形成机理研究的原位质谱分析装置及方法
WO2023117760A1 (en) 2021-12-21 2023-06-29 Thermo Fisher Scientific (Bremen) Gmbh Skimmers for plasma interfaces
CN115421180A (zh) * 2022-10-09 2022-12-02 中国科学院国家空间科学中心 一种降低进入定标载荷离子通量的系统及方法
WO2025072067A1 (en) * 2023-09-26 2025-04-03 Inficon, Inc. Method and assembly for creating a molecular beam

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JPH10283984A (ja) * 1997-04-01 1998-10-23 Yokogawa Analytical Syst Kk 飛行時間型質量分析装置
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WO2009147894A1 (ja) * 2008-06-05 2009-12-10 株式会社日立ハイテクノロジーズ イオンビーム装置
US7915580B2 (en) 2008-10-15 2011-03-29 Thermo Finnigan Llc Electro-dynamic or electro-static lens coupled to a stacked ring ion guide
US9105457B2 (en) * 2010-02-24 2015-08-11 Perkinelmer Health Sciences, Inc. Cone-shaped orifice arrangement for inductively coupled plasma sample introduction system
GB2498174B (en) * 2011-12-12 2016-06-29 Thermo Fisher Scient (Bremen) Gmbh Mass spectrometer vacuum interface method and apparatus
WO2013100218A1 (ko) 2011-12-28 2013-07-04 볼보 컨스트럭션 이큅먼트 에이비 건설기계의 엔진 제어방법

Also Published As

Publication number Publication date
JP2015502022A (ja) 2015-01-19
DE112012005173B4 (de) 2021-04-29
CN103999187A (zh) 2014-08-20
JP2017084790A (ja) 2017-05-18
US10475632B2 (en) 2019-11-12
US20170025261A1 (en) 2017-01-26
GB201121290D0 (en) 2012-01-25
AU2012351700C1 (en) 2017-03-23
JP6279057B2 (ja) 2018-02-14
US20200043713A1 (en) 2020-02-06
AU2012351700A1 (en) 2014-07-03
US20140339418A1 (en) 2014-11-20
GB2498173B (en) 2016-06-29
US10283338B2 (en) 2019-05-07
US9012839B2 (en) 2015-04-21
AU2012351700B2 (en) 2016-11-03
US20170316927A1 (en) 2017-11-02
CN107068534A (zh) 2017-08-18
US20190252174A1 (en) 2019-08-15
CN107068534B (zh) 2019-01-08
US20150228466A1 (en) 2015-08-13
US9640379B2 (en) 2017-05-02
JP6046740B2 (ja) 2016-12-21
GB2498173A (en) 2013-07-10
US10991561B2 (en) 2021-04-27
CA2858457A1 (en) 2013-06-20
GB2498173C (en) 2018-06-27
CN103999187B (zh) 2017-05-17
US9741549B2 (en) 2017-08-22
DE112012005173T5 (de) 2014-08-28
WO2013087731A1 (en) 2013-06-20

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