GB2498173C - Mass spectrometer vacuum interface method and apparatus - Google Patents

Mass spectrometer vacuum interface method and apparatus

Info

Publication number
GB2498173C
GB2498173C GB1121290.9A GB201121290A GB2498173C GB 2498173 C GB2498173 C GB 2498173C GB 201121290 A GB201121290 A GB 201121290A GB 2498173 C GB2498173 C GB 2498173C
Authority
GB
United Kingdom
Prior art keywords
mass spectrometer
interface method
vacuum interface
spectrometer vacuum
mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB1121290.9A
Other languages
English (en)
Other versions
GB201121290D0 (en
GB2498173B (en
GB2498173A (en
Inventor
Alekseevich Makarov Alexander
Rottmann Lothar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thermo Fisher Scientific Bremen GmbH
Original Assignee
Thermo Fisher Scientific Bremen GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thermo Fisher Scientific Bremen GmbH filed Critical Thermo Fisher Scientific Bremen GmbH
Priority to GB1121290.9A priority Critical patent/GB2498173C/en
Publication of GB201121290D0 publication Critical patent/GB201121290D0/en
Priority to US14/364,616 priority patent/US9012839B2/en
Priority to AU2012351700A priority patent/AU2012351700C1/en
Priority to DE112012005173.4T priority patent/DE112012005173B4/de
Priority to CN201710265943.0A priority patent/CN107068534B/zh
Priority to PCT/EP2012/075301 priority patent/WO2013087731A1/en
Priority to CN201280061124.XA priority patent/CN103999187B/zh
Priority to JP2014546497A priority patent/JP6046740B2/ja
Priority to CA2858457A priority patent/CA2858457C/en
Publication of GB2498173A publication Critical patent/GB2498173A/en
Priority to US14/691,415 priority patent/US9640379B2/en
Publication of GB2498173B publication Critical patent/GB2498173B/en
Priority to US15/287,385 priority patent/US9741549B2/en
Priority to JP2016223987A priority patent/JP6279057B2/ja
Priority to US15/651,940 priority patent/US10283338B2/en
Application granted granted Critical
Publication of GB2498173C publication Critical patent/GB2498173C/en
Priority to US16/389,749 priority patent/US10475632B2/en
Priority to US16/601,869 priority patent/US10991561B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/067—Ion lenses, apertures, skimmers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0495—Vacuum locks; Valves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
GB1121290.9A 2011-12-12 2011-12-12 Mass spectrometer vacuum interface method and apparatus Active GB2498173C (en)

Priority Applications (15)

Application Number Priority Date Filing Date Title
GB1121290.9A GB2498173C (en) 2011-12-12 2011-12-12 Mass spectrometer vacuum interface method and apparatus
JP2014546497A JP6046740B2 (ja) 2011-12-12 2012-12-12 質量分光計の真空インターフェース方法および真空インターフェース装置
CA2858457A CA2858457C (en) 2011-12-12 2012-12-12 Mass spectrometer vacuum interface method and apparatus
AU2012351700A AU2012351700C1 (en) 2011-12-12 2012-12-12 Mass spectrometer vacuum interface method and apparatus
DE112012005173.4T DE112012005173B4 (de) 2011-12-12 2012-12-12 Massenspektrometervakuumschnittstellen-Verfahren und -Vorrichtung
CN201710265943.0A CN107068534B (zh) 2011-12-12 2012-12-12 质谱仪真空接口方法以及设备
PCT/EP2012/075301 WO2013087731A1 (en) 2011-12-12 2012-12-12 Mass spectrometer vacuum interface method and apparatus
CN201280061124.XA CN103999187B (zh) 2011-12-12 2012-12-12 质谱仪真空接口方法以及设备
US14/364,616 US9012839B2 (en) 2011-12-12 2012-12-12 Mass spectrometer vacuum interface method and apparatus
US14/691,415 US9640379B2 (en) 2011-12-12 2015-04-20 Mass spectrometer vacuum interface method and apparatus
US15/287,385 US9741549B2 (en) 2011-12-12 2016-10-06 Mass spectrometer vacuum interface method and apparatus
JP2016223987A JP6279057B2 (ja) 2011-12-12 2016-11-17 質量分光計の真空インターフェースを動作させる方法およびスキマー装置
US15/651,940 US10283338B2 (en) 2011-12-12 2017-07-17 Mass spectrometer vacuum interface method and apparatus
US16/389,749 US10475632B2 (en) 2011-12-12 2019-04-19 Mass spectrometer vacuum interface method and apparatus
US16/601,869 US10991561B2 (en) 2011-12-12 2019-10-15 Mass spectrometer vacuum interface method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1121290.9A GB2498173C (en) 2011-12-12 2011-12-12 Mass spectrometer vacuum interface method and apparatus

Publications (4)

Publication Number Publication Date
GB201121290D0 GB201121290D0 (en) 2012-01-25
GB2498173A GB2498173A (en) 2013-07-10
GB2498173B GB2498173B (en) 2016-06-29
GB2498173C true GB2498173C (en) 2018-06-27

Family

ID=45560285

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1121290.9A Active GB2498173C (en) 2011-12-12 2011-12-12 Mass spectrometer vacuum interface method and apparatus

Country Status (8)

Country Link
US (6) US9012839B2 (enExample)
JP (2) JP6046740B2 (enExample)
CN (2) CN103999187B (enExample)
AU (1) AU2012351700C1 (enExample)
CA (1) CA2858457C (enExample)
DE (1) DE112012005173B4 (enExample)
GB (1) GB2498173C (enExample)
WO (1) WO2013087731A1 (enExample)

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US9818593B2 (en) * 2012-09-13 2017-11-14 University Of Maine System Board Of Trustees Radio-frequency ionization of chemicals
CN104637773B (zh) * 2015-02-16 2017-03-01 江苏天瑞仪器股份有限公司 质谱仪一级真空结构
US10692692B2 (en) * 2015-05-27 2020-06-23 Kla-Tencor Corporation System and method for providing a clean environment in an electron-optical system
GB2544959B (en) * 2015-09-17 2019-06-05 Thermo Fisher Scient Bremen Gmbh Mass spectrometer
DE102016113771B4 (de) 2016-07-26 2019-11-07 Bundesrepublik Deutschland, Vertreten Durch Den Bundesminister Für Wirtschaft Und Energie, Dieser Vertreten Durch Den Präsidenten Der Bundesanstalt Für Materialforschung Und -Prüfung (Bam) Analysevorrichtung für gasförmige Proben und Verfahren zum Nachweis von Analyten in einem Gas
GB2560160B (en) * 2017-02-23 2021-08-18 Thermo Fisher Scient Bremen Gmbh Methods in mass spectrometry using collision gas as ion source
CN107910241B (zh) * 2017-11-14 2019-12-13 大连民族大学 一种激光焊接中等离子体羽辉微粒子成分的质谱分析装置
GB2572819B (en) * 2018-04-13 2021-05-19 Thermo Fisher Scient Bremen Gmbh Method and apparatus for operating a vacuum interface of a mass spectrometer
CN111902907A (zh) * 2018-04-20 2020-11-06 株式会社岛津制作所 截取锥以及电感耦合等离子体质量分析装置
CN110690100B (zh) * 2019-10-31 2025-01-28 杭州谱育科技发展有限公司 一种电感耦合等离子质谱接口装置
US11145501B2 (en) * 2020-02-20 2021-10-12 Perkinelmer, Inc. Thermal management for instruments including a plasma source
CN112557488A (zh) * 2020-12-09 2021-03-26 上海交通大学 一种一体式分子束取样接口
CN116635976A (zh) 2020-12-23 2023-08-22 万机仪器公司 使用质谱测定法监测自由基粒子浓度
CN112924525A (zh) * 2021-01-29 2021-06-08 厦门大学 一种富勒烯形成机理研究的原位质谱分析装置及方法
WO2023117760A1 (en) 2021-12-21 2023-06-29 Thermo Fisher Scientific (Bremen) Gmbh Skimmers for plasma interfaces
CN115421180A (zh) * 2022-10-09 2022-12-02 中国科学院国家空间科学中心 一种降低进入定标载荷离子通量的系统及方法
WO2025072067A1 (en) * 2023-09-26 2025-04-03 Inficon, Inc. Method and assembly for creating a molecular beam

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US4863491A (en) * 1988-05-27 1989-09-05 Hewlett-Packard Interface for liquid chromatography-mass spectrometry systems
JPH0340748U (enExample) * 1989-08-31 1991-04-18
US6002130A (en) * 1991-09-12 1999-12-14 Hitachi, Ltd. Mass spectrometry and mass spectrometer
CA2116821C (en) * 1993-03-05 2003-12-23 Stephen Esler Anderson Improvements in plasma mass spectrometry
JPH07240169A (ja) * 1994-02-28 1995-09-12 Jeol Ltd 誘導結合プラズマ質量分析装置
DE4433807A1 (de) * 1994-09-22 1996-03-28 Finnigan Mat Gmbh Massenspektrometer, insbesondere ICP-MS
GB9525507D0 (en) 1995-12-14 1996-02-14 Fisons Plc Electrospray and atmospheric pressure chemical ionization mass spectrometer and ion source
JP3492081B2 (ja) * 1996-05-15 2004-02-03 セイコーインスツルメンツ株式会社 プラズマイオン源質量分析装置
JPH10283984A (ja) * 1997-04-01 1998-10-23 Yokogawa Analytical Syst Kk 飛行時間型質量分析装置
JP3521218B2 (ja) * 1997-07-04 2004-04-19 独立行政法人産業技術総合研究所 金属−絶縁性セラミック複合サンプラー及びスキマー
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WO2009147894A1 (ja) * 2008-06-05 2009-12-10 株式会社日立ハイテクノロジーズ イオンビーム装置
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US9105457B2 (en) * 2010-02-24 2015-08-11 Perkinelmer Health Sciences, Inc. Cone-shaped orifice arrangement for inductively coupled plasma sample introduction system
GB2498174B (en) * 2011-12-12 2016-06-29 Thermo Fisher Scient (Bremen) Gmbh Mass spectrometer vacuum interface method and apparatus
WO2013100218A1 (ko) 2011-12-28 2013-07-04 볼보 컨스트럭션 이큅먼트 에이비 건설기계의 엔진 제어방법

Also Published As

Publication number Publication date
JP2015502022A (ja) 2015-01-19
DE112012005173B4 (de) 2021-04-29
CN103999187A (zh) 2014-08-20
JP2017084790A (ja) 2017-05-18
US10475632B2 (en) 2019-11-12
CA2858457C (en) 2018-06-12
US20170025261A1 (en) 2017-01-26
GB201121290D0 (en) 2012-01-25
AU2012351700C1 (en) 2017-03-23
JP6279057B2 (ja) 2018-02-14
US20200043713A1 (en) 2020-02-06
AU2012351700A1 (en) 2014-07-03
US20140339418A1 (en) 2014-11-20
GB2498173B (en) 2016-06-29
US10283338B2 (en) 2019-05-07
US9012839B2 (en) 2015-04-21
AU2012351700B2 (en) 2016-11-03
US20170316927A1 (en) 2017-11-02
CN107068534A (zh) 2017-08-18
US20190252174A1 (en) 2019-08-15
CN107068534B (zh) 2019-01-08
US20150228466A1 (en) 2015-08-13
US9640379B2 (en) 2017-05-02
JP6046740B2 (ja) 2016-12-21
GB2498173A (en) 2013-07-10
US10991561B2 (en) 2021-04-27
CA2858457A1 (en) 2013-06-20
CN103999187B (zh) 2017-05-17
US9741549B2 (en) 2017-08-22
DE112012005173T5 (de) 2014-08-28
WO2013087731A1 (en) 2013-06-20

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Legal Events

Date Code Title Description
S27 Amendment of specification after grant (sect. 27/patents act 1977)

Free format text: APPLICATION FILED; APPLICATION TO AMEND SPECIFICATION UNDER SECTION 27 FILED ON 4 APRIL 2016

S27 Amendment of specification after grant (sect. 27/patents act 1977)

Free format text: APPLICATION OPEN FOR OPPOSITION; PATENTS FORM 15 GIVING THE COMPTROLLER NOTICE OF OPPOSITION TO THE AMENDMENTS. YOU ALSO NEED TO FILE TWO COPIES OF A STATEMENT SETTING OUT FULLY THE FACTS OF YOUR CASE AND THE RELIEF THAT YOU ARE SEEKING. TITLE OF PATENT: MASS SPECTROMETER VACUUM INTERFACE METHOD AND APPARATUS INTERNATIONAL CLASSIFICATION: HO1J NAME OF PROPRIETOR: THERMO FISHER SCIENTIFIC (BREMEN) GMBH THESE AMENDMENTS MAY BE VIEWED ON OUR WEBSITE.

S27 Amendment of specification after grant (sect. 27/patents act 1977)

Free format text: SPECIFICATION AMENDED; APPLICATION TO AMEND SPECIFICATION UNDER SECTION 27 FILED ON 04 APRIL 2017 ALLOWED ON 18 JUNE 2018