JP6046740B2 - 質量分光計の真空インターフェース方法および真空インターフェース装置 - Google Patents

質量分光計の真空インターフェース方法および真空インターフェース装置 Download PDF

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JP6046740B2
JP6046740B2 JP2014546497A JP2014546497A JP6046740B2 JP 6046740 B2 JP6046740 B2 JP 6046740B2 JP 2014546497 A JP2014546497 A JP 2014546497A JP 2014546497 A JP2014546497 A JP 2014546497A JP 6046740 B2 JP6046740 B2 JP 6046740B2
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plasma
skimmer
skimmer device
vacuum interface
skimmed
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JP2015502022A (ja
JP2015502022A5 (enExample
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アレクサンダー アレクセーエヴィチ マカロフ
アレクサンダー アレクセーエヴィチ マカロフ
ローター ロットマン
ローター ロットマン
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サーモ フィッシャー サイエンティフィック （ブレーメン） ゲーエムベーハー
サーモ フィッシャー サイエンティフィック （ブレーメン） ゲーエムベーハー
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/067—Ion lenses, apertures, skimmers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0495—Vacuum locks; Valves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP2014546497A 2011-12-12 2012-12-12 質量分光計の真空インターフェース方法および真空インターフェース装置 Active JP6046740B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1121290.9 2011-12-12
GB1121290.9A GB2498173C (en) 2011-12-12 2011-12-12 Mass spectrometer vacuum interface method and apparatus
PCT/EP2012/075301 WO2013087731A1 (en) 2011-12-12 2012-12-12 Mass spectrometer vacuum interface method and apparatus

Related Child Applications (1)

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JP2016223987A Division JP6279057B2 (ja) 2011-12-12 2016-11-17 質量分光計の真空インターフェースを動作させる方法およびスキマー装置

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JP2015502022A JP2015502022A (ja) 2015-01-19
JP2015502022A5 JP2015502022A5 (enExample) 2015-04-23
JP6046740B2 true JP6046740B2 (ja) 2016-12-21

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JP2014546497A Active JP6046740B2 (ja) 2011-12-12 2012-12-12 質量分光計の真空インターフェース方法および真空インターフェース装置
JP2016223987A Active JP6279057B2 (ja) 2011-12-12 2016-11-17 質量分光計の真空インターフェースを動作させる方法およびスキマー装置

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US (6) US9012839B2 (enExample)
JP (2) JP6046740B2 (enExample)
CN (2) CN103999187B (enExample)
AU (1) AU2012351700C1 (enExample)
CA (1) CA2858457C (enExample)
DE (1) DE112012005173B4 (enExample)
GB (1) GB2498173C (enExample)
WO (1) WO2013087731A1 (enExample)

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GB2560160B (en) * 2017-02-23 2021-08-18 Thermo Fisher Scient Bremen Gmbh Methods in mass spectrometry using collision gas as ion source
CN107910241B (zh) * 2017-11-14 2019-12-13 大连民族大学 一种激光焊接中等离子体羽辉微粒子成分的质谱分析装置
GB2572819B (en) * 2018-04-13 2021-05-19 Thermo Fisher Scient Bremen Gmbh Method and apparatus for operating a vacuum interface of a mass spectrometer
CN111902907A (zh) * 2018-04-20 2020-11-06 株式会社岛津制作所 截取锥以及电感耦合等离子体质量分析装置
CN110690100B (zh) * 2019-10-31 2025-01-28 杭州谱育科技发展有限公司 一种电感耦合等离子质谱接口装置
US11145501B2 (en) * 2020-02-20 2021-10-12 Perkinelmer, Inc. Thermal management for instruments including a plasma source
CN112557488A (zh) * 2020-12-09 2021-03-26 上海交通大学 一种一体式分子束取样接口
CN116635976A (zh) 2020-12-23 2023-08-22 万机仪器公司 使用质谱测定法监测自由基粒子浓度
CN112924525A (zh) * 2021-01-29 2021-06-08 厦门大学 一种富勒烯形成机理研究的原位质谱分析装置及方法
WO2023117760A1 (en) 2021-12-21 2023-06-29 Thermo Fisher Scientific (Bremen) Gmbh Skimmers for plasma interfaces
CN115421180A (zh) * 2022-10-09 2022-12-02 中国科学院国家空间科学中心 一种降低进入定标载荷离子通量的系统及方法
WO2025072067A1 (en) * 2023-09-26 2025-04-03 Inficon, Inc. Method and assembly for creating a molecular beam

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Also Published As

Publication number Publication date
JP2015502022A (ja) 2015-01-19
DE112012005173B4 (de) 2021-04-29
CN103999187A (zh) 2014-08-20
JP2017084790A (ja) 2017-05-18
US10475632B2 (en) 2019-11-12
CA2858457C (en) 2018-06-12
US20170025261A1 (en) 2017-01-26
GB201121290D0 (en) 2012-01-25
AU2012351700C1 (en) 2017-03-23
JP6279057B2 (ja) 2018-02-14
US20200043713A1 (en) 2020-02-06
AU2012351700A1 (en) 2014-07-03
US20140339418A1 (en) 2014-11-20
GB2498173B (en) 2016-06-29
US10283338B2 (en) 2019-05-07
US9012839B2 (en) 2015-04-21
AU2012351700B2 (en) 2016-11-03
US20170316927A1 (en) 2017-11-02
CN107068534A (zh) 2017-08-18
US20190252174A1 (en) 2019-08-15
CN107068534B (zh) 2019-01-08
US20150228466A1 (en) 2015-08-13
US9640379B2 (en) 2017-05-02
GB2498173A (en) 2013-07-10
US10991561B2 (en) 2021-04-27
CA2858457A1 (en) 2013-06-20
GB2498173C (en) 2018-06-27
CN103999187B (zh) 2017-05-17
US9741549B2 (en) 2017-08-22
DE112012005173T5 (de) 2014-08-28
WO2013087731A1 (en) 2013-06-20

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