AU2012351700C1 - Mass spectrometer vacuum interface method and apparatus - Google Patents

Mass spectrometer vacuum interface method and apparatus Download PDF

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Publication number
AU2012351700C1
AU2012351700C1 AU2012351700A AU2012351700A AU2012351700C1 AU 2012351700 C1 AU2012351700 C1 AU 2012351700C1 AU 2012351700 A AU2012351700 A AU 2012351700A AU 2012351700 A AU2012351700 A AU 2012351700A AU 2012351700 C1 AU2012351700 C1 AU 2012351700C1
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AU
Australia
Prior art keywords
skimmer
plasma
internal surface
channel
skimmer apparatus
Prior art date
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Active
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AU2012351700A
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English (en)
Other versions
AU2012351700A1 (en
AU2012351700B2 (en
Inventor
Alexander Alekseevich Makarov
Lothar Rottmann
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Thermo Fisher Scientific Bremen GmbH
Original Assignee
Thermo Fisher Scientific Bremen GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thermo Fisher Scientific Bremen GmbH filed Critical Thermo Fisher Scientific Bremen GmbH
Publication of AU2012351700A1 publication Critical patent/AU2012351700A1/en
Application granted granted Critical
Publication of AU2012351700B2 publication Critical patent/AU2012351700B2/en
Publication of AU2012351700C1 publication Critical patent/AU2012351700C1/en
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/067—Ion lenses, apertures, skimmers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0495—Vacuum locks; Valves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
AU2012351700A 2011-12-12 2012-12-12 Mass spectrometer vacuum interface method and apparatus Active AU2012351700C1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1121290.9 2011-12-12
GB1121290.9A GB2498173C (en) 2011-12-12 2011-12-12 Mass spectrometer vacuum interface method and apparatus
PCT/EP2012/075301 WO2013087731A1 (en) 2011-12-12 2012-12-12 Mass spectrometer vacuum interface method and apparatus

Publications (3)

Publication Number Publication Date
AU2012351700A1 AU2012351700A1 (en) 2014-07-03
AU2012351700B2 AU2012351700B2 (en) 2016-11-03
AU2012351700C1 true AU2012351700C1 (en) 2017-03-23

Family

ID=45560285

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2012351700A Active AU2012351700C1 (en) 2011-12-12 2012-12-12 Mass spectrometer vacuum interface method and apparatus

Country Status (8)

Country Link
US (6) US9012839B2 (enExample)
JP (2) JP6046740B2 (enExample)
CN (2) CN103999187B (enExample)
AU (1) AU2012351700C1 (enExample)
CA (1) CA2858457C (enExample)
DE (1) DE112012005173B4 (enExample)
GB (1) GB2498173C (enExample)
WO (1) WO2013087731A1 (enExample)

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CN104637773B (zh) * 2015-02-16 2017-03-01 江苏天瑞仪器股份有限公司 质谱仪一级真空结构
US10692692B2 (en) * 2015-05-27 2020-06-23 Kla-Tencor Corporation System and method for providing a clean environment in an electron-optical system
GB2544959B (en) * 2015-09-17 2019-06-05 Thermo Fisher Scient Bremen Gmbh Mass spectrometer
DE102016113771B4 (de) 2016-07-26 2019-11-07 Bundesrepublik Deutschland, Vertreten Durch Den Bundesminister Für Wirtschaft Und Energie, Dieser Vertreten Durch Den Präsidenten Der Bundesanstalt Für Materialforschung Und -Prüfung (Bam) Analysevorrichtung für gasförmige Proben und Verfahren zum Nachweis von Analyten in einem Gas
GB2560160B (en) * 2017-02-23 2021-08-18 Thermo Fisher Scient Bremen Gmbh Methods in mass spectrometry using collision gas as ion source
CN107910241B (zh) * 2017-11-14 2019-12-13 大连民族大学 一种激光焊接中等离子体羽辉微粒子成分的质谱分析装置
GB2572819B (en) * 2018-04-13 2021-05-19 Thermo Fisher Scient Bremen Gmbh Method and apparatus for operating a vacuum interface of a mass spectrometer
CN111902907A (zh) * 2018-04-20 2020-11-06 株式会社岛津制作所 截取锥以及电感耦合等离子体质量分析装置
CN110690100B (zh) * 2019-10-31 2025-01-28 杭州谱育科技发展有限公司 一种电感耦合等离子质谱接口装置
US11145501B2 (en) * 2020-02-20 2021-10-12 Perkinelmer, Inc. Thermal management for instruments including a plasma source
CN112557488A (zh) * 2020-12-09 2021-03-26 上海交通大学 一种一体式分子束取样接口
CN116635976A (zh) 2020-12-23 2023-08-22 万机仪器公司 使用质谱测定法监测自由基粒子浓度
CN112924525A (zh) * 2021-01-29 2021-06-08 厦门大学 一种富勒烯形成机理研究的原位质谱分析装置及方法
WO2023117760A1 (en) 2021-12-21 2023-06-29 Thermo Fisher Scientific (Bremen) Gmbh Skimmers for plasma interfaces
CN115421180A (zh) * 2022-10-09 2022-12-02 中国科学院国家空间科学中心 一种降低进入定标载荷离子通量的系统及方法
WO2025072067A1 (en) * 2023-09-26 2025-04-03 Inficon, Inc. Method and assembly for creating a molecular beam

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WO2004012223A1 (en) * 2002-07-31 2004-02-05 Varian Australia Pty Ltd Mass spectrometry apparatus and method

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JP3492081B2 (ja) * 1996-05-15 2004-02-03 セイコーインスツルメンツ株式会社 プラズマイオン源質量分析装置
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Also Published As

Publication number Publication date
JP2015502022A (ja) 2015-01-19
DE112012005173B4 (de) 2021-04-29
CN103999187A (zh) 2014-08-20
JP2017084790A (ja) 2017-05-18
US10475632B2 (en) 2019-11-12
CA2858457C (en) 2018-06-12
US20170025261A1 (en) 2017-01-26
GB201121290D0 (en) 2012-01-25
JP6279057B2 (ja) 2018-02-14
US20200043713A1 (en) 2020-02-06
AU2012351700A1 (en) 2014-07-03
US20140339418A1 (en) 2014-11-20
GB2498173B (en) 2016-06-29
US10283338B2 (en) 2019-05-07
US9012839B2 (en) 2015-04-21
AU2012351700B2 (en) 2016-11-03
US20170316927A1 (en) 2017-11-02
CN107068534A (zh) 2017-08-18
US20190252174A1 (en) 2019-08-15
CN107068534B (zh) 2019-01-08
US20150228466A1 (en) 2015-08-13
US9640379B2 (en) 2017-05-02
JP6046740B2 (ja) 2016-12-21
GB2498173A (en) 2013-07-10
US10991561B2 (en) 2021-04-27
CA2858457A1 (en) 2013-06-20
GB2498173C (en) 2018-06-27
CN103999187B (zh) 2017-05-17
US9741549B2 (en) 2017-08-22
DE112012005173T5 (de) 2014-08-28
WO2013087731A1 (en) 2013-06-20

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Free format text: THE TIME IN WHICH TO GAIN ACCEPTANCE HAS BEEN EXTENDED TO 01 NOV 2016

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