DE102020111602B4 - Mehr-gate-vorrichtungen und gate-strukturierungsprozess dafür - Google Patents

Mehr-gate-vorrichtungen und gate-strukturierungsprozess dafür Download PDF

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DE102020111602B4
DE102020111602B4 DE102020111602.0A DE102020111602A DE102020111602B4 DE 102020111602 B4 DE102020111602 B4 DE 102020111602B4 DE 102020111602 A DE102020111602 A DE 102020111602A DE 102020111602 B4 DE102020111602 B4 DE 102020111602B4
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region
channel layers
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metal layer
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DE102020111602A1 (de
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Mao-Lin Huang
Lung-Kun Chu
Chung-Wei Hsu
Jia-Ni YU
Kuo-Cheng Chiang
Chih-Hao Wang
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Taiwan Semiconductor Manufacturing Co TSMC Ltd
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    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
    • H01L29/0642—Isolation within the component, i.e. internal isolation
    • H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
    • H01L29/0653—Dielectric regions, e.g. SiO2 regions, air gaps adjoining the input or output region of a field-effect device, e.g. the source or drain region

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  • Nanotechnology (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Composite Materials (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Bipolar Transistors (AREA)
  • Thin Film Transistor (AREA)
  • Semiconductor Memories (AREA)
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US20220278197A1 (en) * 2021-02-26 2022-09-01 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor device and method
US11967504B2 (en) * 2021-06-17 2024-04-23 Taiwan Semiconductor Manufacturing Co., Ltd. Gate structures in transistor devices and methods of forming same
US20220406909A1 (en) * 2021-06-17 2022-12-22 Taiwan Semiconductor Manufacturing Co., Ltd. Field effect transistor with dual silicide and method
US11948981B2 (en) * 2021-07-15 2024-04-02 Taiwan Semiconductor Manufacturing Co., Ltd. Seam-filling of metal gates with Si-containing layers
KR20230115804A (ko) * 2022-01-27 2023-08-03 삼성전자주식회사 반도체 소자

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