DE102019112546B4 - Herstellungsverfahren für eine lichtemittierende Vorrichtung - Google Patents

Herstellungsverfahren für eine lichtemittierende Vorrichtung Download PDF

Info

Publication number
DE102019112546B4
DE102019112546B4 DE102019112546.4A DE102019112546A DE102019112546B4 DE 102019112546 B4 DE102019112546 B4 DE 102019112546B4 DE 102019112546 A DE102019112546 A DE 102019112546A DE 102019112546 B4 DE102019112546 B4 DE 102019112546B4
Authority
DE
Germany
Prior art keywords
light
substrate
emitting element
emitting elements
emitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE102019112546.4A
Other languages
German (de)
English (en)
Other versions
DE102019112546A1 (de
Inventor
Min-Hsun Hsieh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ENNOSTAR CORPORATION, TW
Original Assignee
Epistar Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epistar Corp filed Critical Epistar Corp
Publication of DE102019112546A1 publication Critical patent/DE102019112546A1/de
Application granted granted Critical
Publication of DE102019112546B4 publication Critical patent/DE102019112546B4/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01Manufacture or treatment
    • H10H20/036Manufacture or treatment of packages
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/8506Containers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/857Interconnections, e.g. lead-frames, bond wires or solder balls
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01Manufacture or treatment
    • H10H20/036Manufacture or treatment of packages
    • H10H20/0364Manufacture or treatment of packages of interconnections
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • H10W72/0198Manufacture or treatment batch processes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/072Connecting or disconnecting of bump connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/072Connecting or disconnecting of bump connectors
    • H10W72/07202Connecting or disconnecting of bump connectors using auxiliary members
    • H10W72/07204Connecting or disconnecting of bump connectors using auxiliary members using temporary auxiliary members, e.g. sacrificial coatings
    • H10W72/07207Temporary substrates, e.g. removable substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/073Connecting or disconnecting of die-attach connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/10Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/15Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills

Landscapes

  • Led Device Packages (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Planar Illumination Modules (AREA)
DE102019112546.4A 2018-05-14 2019-05-14 Herstellungsverfahren für eine lichtemittierende Vorrichtung Active DE102019112546B4 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201862670900P 2018-05-14 2018-05-14
US62/670,900 2018-05-14
US201862697387P 2018-07-12 2018-07-12
US62/697,387 2018-07-12

Publications (2)

Publication Number Publication Date
DE102019112546A1 DE102019112546A1 (de) 2019-11-14
DE102019112546B4 true DE102019112546B4 (de) 2023-09-28

Family

ID=68337028

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102019112546.4A Active DE102019112546B4 (de) 2018-05-14 2019-05-14 Herstellungsverfahren für eine lichtemittierende Vorrichtung

Country Status (6)

Country Link
US (4) US10923641B2 (https=)
JP (2) JP7441612B2 (https=)
KR (2) KR102498453B1 (https=)
CN (3) CN116682923A (https=)
DE (1) DE102019112546B4 (https=)
TW (2) TWI878222B (https=)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240130146A (ko) * 2017-06-12 2024-08-28 쿨리케 & 소파 네덜란드 비.브이. 개별 부품들의 기판 상으로의 병렬적 조립
JP7072977B2 (ja) * 2018-03-05 2022-05-23 株式会社ディスコ デバイスの移設方法
TWI878222B (zh) * 2018-05-14 2025-04-01 晶元光電股份有限公司 一種發光裝置及其製造方法
KR102786764B1 (ko) * 2018-07-11 2025-03-27 엘지전자 주식회사 반도체 발광 소자를 이용한 디스플레이 장치 및 이의 제조방법
US11424224B2 (en) * 2019-04-24 2022-08-23 Seoul Viosys Co., Ltd. LED display panel, LED display apparatus having the same and method of fabricating the same
JP7321792B2 (ja) * 2019-06-26 2023-08-07 株式会社ジャパンディスプレイ 異方性導電膜及び表示装置
US10847083B1 (en) 2019-10-14 2020-11-24 Shaoher Pan Integrated active-matrix light emitting pixel arrays based devices by laser-assisted bonding
US11011669B2 (en) * 2019-10-14 2021-05-18 Shaoher Pan Integrated active-matrix light emitting pixel arrays based devices
US11901497B2 (en) * 2019-12-24 2024-02-13 Seoul Viosys Co., Ltd. Method of repairing light emitting device, apparatus for repairing light emitting device, and display panel having repaired light emitting device
KR20210106056A (ko) * 2020-02-19 2021-08-30 한국전자통신연구원 레이저를 이용한 전사 및 접합 방법
WO2021182318A1 (ja) * 2020-03-09 2021-09-16 積水化学工業株式会社 電子部品の製造方法、及び、表示装置の製造方法
EP3907725A1 (en) * 2020-05-06 2021-11-10 Admesy B.V. Method and setup for performing a series of optical measurements with a 2d imaging system
CN111710745B (zh) * 2020-06-28 2023-03-21 重庆邮电大学 一种锰掺杂纯无机钙钛矿-Au纳米晶异质结及其制备方法和应用
WO2022021003A1 (zh) * 2020-07-27 2022-02-03 重庆康佳光电技术研究院有限公司 转接板、巨量转移方法及Micro-LED显示器
CN112967980B (zh) * 2020-08-13 2021-12-24 重庆康佳光电技术研究院有限公司 芯片转移组件及其制作方法、芯片转移方法
JP7522611B2 (ja) * 2020-08-28 2024-07-25 株式会社ジャパンディスプレイ 表示装置の製造方法
CN113808980B (zh) * 2020-09-30 2025-07-25 深圳市晶相技术有限公司 一种半导体外延结构及其应用
KR102436469B1 (ko) * 2020-11-27 2022-08-26 주식회사 아큐레이저 반도체 소자의 전사 장치 및 전사 방법
KR102899002B1 (ko) * 2020-12-02 2025-12-10 엘지디스플레이 주식회사 발광 소자의 전사 방법 및 이를 이용한 표시 장치의 제조 방법
JP7788849B2 (ja) * 2021-01-28 2025-12-19 東レエンジニアリング株式会社 転写装置および転写基板
CN118483848A (zh) * 2021-07-28 2024-08-13 群创光电股份有限公司 发光装置
US12446374B2 (en) * 2022-03-21 2025-10-14 GM Global Technology Operations LLC Transparent structural composites with encapsulated micro-LEDs
JP7733602B2 (ja) * 2022-03-28 2025-09-03 東レエンジニアリング株式会社 転写装置および転写方法
CN115763351B (zh) * 2022-04-01 2025-08-26 友达光电股份有限公司 发光元件阵列基板及其制造方法
US20230317497A1 (en) * 2022-04-01 2023-10-05 AUO Corporation Display apparatus
CN119384888A (zh) * 2022-09-01 2025-01-28 三星电子株式会社 包括连接发光二极管和基板的接合构件的显示模块
CN117476532B (zh) * 2023-03-09 2025-09-02 深圳市华星光电半导体显示技术有限公司 巨量转移方法
TWI873574B (zh) * 2023-03-22 2025-02-21 友達光電股份有限公司 電子裝置及電子裝置的製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100258543A1 (en) 2009-04-10 2010-10-14 Sony Corporation Method of transferring device
US20100259164A1 (en) 2009-04-10 2010-10-14 Sony Corporation Manufacturing method of display device and display device
WO2017123780A1 (en) 2016-01-15 2017-07-20 Uniqarta, Inc. Placing ultra-small or ultra-thin discrete components
US20180130683A1 (en) 2015-04-28 2018-05-10 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Apparatus and method for contactless transfer and soldering of chips using a flash lamp

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4535219A (en) 1982-10-12 1985-08-13 Xerox Corporation Interfacial blister bonding for microinterconnections
JP4491948B2 (ja) * 2000-10-06 2010-06-30 ソニー株式会社 素子実装方法および画像表示装置の製造方法
WO2002084631A1 (en) 2001-04-11 2002-10-24 Sony Corporation Element transfer method, element arrangmenet method using the same, and image display apparatus production method
JP4151420B2 (ja) * 2003-01-23 2008-09-17 セイコーエプソン株式会社 デバイスの製造方法
US7244326B2 (en) * 2003-05-16 2007-07-17 Alien Technology Corporation Transfer assembly for manufacturing electronic devices
JP4667803B2 (ja) * 2004-09-14 2011-04-13 日亜化学工業株式会社 発光装置
KR20100080423A (ko) * 2008-12-30 2010-07-08 삼성엘이디 주식회사 발광소자 패키지 및 그 제조방법
JP5402804B2 (ja) * 2010-04-12 2014-01-29 デクセリアルズ株式会社 発光装置の製造方法
US8877567B2 (en) * 2010-11-18 2014-11-04 Stats Chippac, Ltd. Semiconductor device and method of forming uniform height insulating layer over interposer frame as standoff for semiconductor die
JP6053756B2 (ja) 2011-04-11 2016-12-27 エヌディーエスユー リサーチ ファウンデーション レーザで促進される、分離した部品の選択的な転写
US9306117B2 (en) * 2011-07-25 2016-04-05 Industrial Technology Research Institute Transfer-bonding method for light emitting devices
TWI499031B (zh) * 2012-03-22 2015-09-01 光芯科技股份有限公司 發光裝置
JP2013211443A (ja) * 2012-03-30 2013-10-10 Toyohashi Univ Of Technology 発光装置の製造方法
KR102135352B1 (ko) * 2013-08-20 2020-07-17 엘지전자 주식회사 표시장치
US10193012B2 (en) * 2015-05-21 2019-01-29 Goertek, Inc. Transferring method, manufacturing method, device and electronic apparatus of micro-LED
US10312310B2 (en) * 2016-01-19 2019-06-04 Diftek Lasers, Inc. OLED display and method of fabrication thereof
EP3518626B1 (en) * 2016-09-22 2022-03-16 LG Electronics Inc. Display apparatus using semiconductor light emitting device and manufacturing method therefor
JP2018060993A (ja) 2016-09-29 2018-04-12 東レエンジニアリング株式会社 転写方法、実装方法、転写装置、及び実装装置
KR102335714B1 (ko) * 2016-10-24 2021-12-06 글로 에이비 발광 다이오드, 디스플레이 소자 및 직시형 디스플레이 소자
US20190043843A1 (en) * 2017-08-01 2019-02-07 Innolux Corporation Methods for manufacturing a display device
CN107658371B (zh) * 2017-09-15 2019-01-04 武汉大学 基于激光直写的Micro-LED的制造方法
TWI642047B (zh) * 2018-01-26 2018-11-21 Flex Tek Co., Ltd. 可撓性微發光二極體顯示模組
US10707105B1 (en) * 2018-03-29 2020-07-07 Facebook Technologies, Llc Selective shape memory alloy pick-up head
TWI878222B (zh) * 2018-05-14 2025-04-01 晶元光電股份有限公司 一種發光裝置及其製造方法
US10985046B2 (en) * 2018-06-22 2021-04-20 Veeco Instruments Inc. Micro-LED transfer methods using light-based debonding
US11107947B2 (en) * 2018-07-10 2021-08-31 Long Yang Micro light emitting diode

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100258543A1 (en) 2009-04-10 2010-10-14 Sony Corporation Method of transferring device
US20100259164A1 (en) 2009-04-10 2010-10-14 Sony Corporation Manufacturing method of display device and display device
US20180130683A1 (en) 2015-04-28 2018-05-10 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Apparatus and method for contactless transfer and soldering of chips using a flash lamp
WO2017123780A1 (en) 2016-01-15 2017-07-20 Uniqarta, Inc. Placing ultra-small or ultra-thin discrete components

Also Published As

Publication number Publication date
US20230187597A1 (en) 2023-06-15
TWI879686B (zh) 2025-04-01
US11621384B2 (en) 2023-04-04
JP2019201206A (ja) 2019-11-21
US10923641B2 (en) 2021-02-16
CN116682923A (zh) 2023-09-01
KR20230023696A (ko) 2023-02-17
KR102688372B1 (ko) 2024-07-24
CN110491987A (zh) 2019-11-22
TW201947737A (zh) 2019-12-16
CN116682924A (zh) 2023-09-01
TW202508018A (zh) 2025-02-16
US20210159379A1 (en) 2021-05-27
US20190348588A1 (en) 2019-11-14
US11894507B2 (en) 2024-02-06
JP2023181464A (ja) 2023-12-21
US12317664B2 (en) 2025-05-27
DE102019112546A1 (de) 2019-11-14
US20240234660A1 (en) 2024-07-11
KR102498453B1 (ko) 2023-02-09
TWI878222B (zh) 2025-04-01
JP7441612B2 (ja) 2024-03-01
KR20190130518A (ko) 2019-11-22

Similar Documents

Publication Publication Date Title
DE102019112546B4 (de) Herstellungsverfahren für eine lichtemittierende Vorrichtung
DE102017106755B4 (de) Verfahren zur Herstellung eines optoelektronischen Halbleiterbauteils und optoelektronisches Halbleiterbauteil
US10756070B2 (en) LED module and method for fabricating the same
DE102017128441B4 (de) Lichtemittierende Vorrichtung
DE102015107864B4 (de) Optoelektronische Vorrichtung
DE102017102112A1 (de) Lichtemittierendes Element und sein Herstellungsverfahren
DE112017004029T5 (de) Led-modul und verfahren zur seiner herstellung
DE102021208095A1 (de) Herstellungsverfahren für eine anzeigevorrichtung
WO2020089101A1 (de) Verfahren zur herstellung von optoelektronischen halbleiterbauteilen
DE102012216738A1 (de) Optoelektronisches bauelement
DE112018006965T5 (de) Verfahren zur Herstellung einer Anzeigevorrichtung unter Verwendung lichtemittierender Halbleiterelemente und Anzeigevorrichtung
DE112018006870T5 (de) Anzeigevorrichtung, die lichtemittierende Halbleitervorrichtung verwendet
US11530804B2 (en) Light-emitting device
DE102017104144B9 (de) Verfahren zur Herstellung von Leuchtdioden
WO2019115344A1 (de) Lichtemittierendes halbleiterbauteil und verfahren zur herstellung eines licht emittierenden halbleiterbauteils
DE102016103552A1 (de) Modul für eine Leuchte
DE112005002855B4 (de) LED vom integrierten Typ und Herstellungsverfahren derselben
WO2026002667A1 (de) Trägerstruktur, elektrisches bauelement und verfahren zur herstellung eines elektrischen bauelements
DE102010049961A1 (de) Optoelektronisches Halbleiterbauelement mit einem Halbleiterchip, einem Trägersubstrat und einer Folie und ein Verfahren zu dessen Herstellung
DE102020125857A1 (de) System und Verfahren zur Herstellung einer Mikro-LED-Anzeige
DE102022125488A1 (de) Optoelektronisches produkt und herstellungsverfahren dafür
DE102018132824B4 (de) Verfahren zur herstellung einer optoelektronischen leuchtvorrichtung
DE112020007793T5 (de) Anzeigevorrichtung und verfahren zu deren herstellung
DE102024115382A1 (de) Haltbleitervorrichtungen und verfahren zu ihrer herstellung

Legal Events

Date Code Title Description
R012 Request for examination validly filed
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R130 Divisional application to

Ref document number: 102019009415

Country of ref document: DE

R020 Patent grant now final
R079 Amendment of ipc main class

Free format text: PREVIOUS MAIN CLASS: H01L0021580000

Ipc: H10W0072300000

R081 Change of applicant/patentee

Owner name: ENNOSTAR CORPORATION, TW

Free format text: FORMER OWNER: EPISTAR CORPORATION, HSINCHU, TW