DE102016006651A1 - Schaltvorrichtung mit spannungsgesteuerter magnetanisotropie, die einen externen ferromagnetischen vormagnetisierungsfilm verwendet - Google Patents
Schaltvorrichtung mit spannungsgesteuerter magnetanisotropie, die einen externen ferromagnetischen vormagnetisierungsfilm verwendet Download PDFInfo
- Publication number
- DE102016006651A1 DE102016006651A1 DE102016006651.2A DE102016006651A DE102016006651A1 DE 102016006651 A1 DE102016006651 A1 DE 102016006651A1 DE 102016006651 A DE102016006651 A DE 102016006651A DE 102016006651 A1 DE102016006651 A1 DE 102016006651A1
- Authority
- DE
- Germany
- Prior art keywords
- layer
- ferromagnetic layer
- magnet
- ferromagnetic
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/165—Auxiliary circuits
- G11C11/1673—Reading or sensing circuits or methods
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/165—Auxiliary circuits
- G11C11/1675—Writing or programming circuits or methods
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
- H10N50/85—Materials of the active region
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Mram Or Spin Memory Techniques (AREA)
- Hall/Mr Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/728,788 | 2015-06-02 | ||
| US14/728,788 US9620562B2 (en) | 2015-06-02 | 2015-06-02 | Voltage-controlled magnetic anisotropy switching device using an external ferromagnetic biasing film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102016006651A1 true DE102016006651A1 (de) | 2016-12-08 |
Family
ID=56410819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102016006651.2A Ceased DE102016006651A1 (de) | 2015-06-02 | 2016-06-02 | Schaltvorrichtung mit spannungsgesteuerter magnetanisotropie, die einen externen ferromagnetischen vormagnetisierungsfilm verwendet |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9620562B2 (enExample) |
| JP (1) | JP2016225633A (enExample) |
| KR (1) | KR101869149B1 (enExample) |
| CN (1) | CN106374035B (enExample) |
| DE (1) | DE102016006651A1 (enExample) |
| FR (1) | FR3037185B1 (enExample) |
| GB (1) | GB2539102B (enExample) |
| TW (1) | TWI602331B (enExample) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10103317B2 (en) | 2015-01-05 | 2018-10-16 | Inston, Inc. | Systems and methods for implementing efficient magnetoelectric junctions |
| US10217798B2 (en) | 2015-01-13 | 2019-02-26 | Inston, Inc. | Systems and methods for implementing select devices constructed from 2D materials |
| US9978931B2 (en) | 2015-02-13 | 2018-05-22 | Inston Inc. | Systems and methods for implementing robust magnetoelectric junctions |
| US20170033281A1 (en) * | 2015-07-29 | 2017-02-02 | Inston Inc. | Systems and Methods for Implementing Magnetoelectric Junctions Including Integrated Magnetization Components |
| WO2018005699A1 (en) | 2016-06-28 | 2018-01-04 | Inston Inc. | Systems for implementing word line pulse techniques in magnetoelectric junctions |
| JP6820572B2 (ja) * | 2017-04-28 | 2021-01-27 | 国立研究開発法人産業技術総合研究所 | 磁気記憶装置 |
| US10460786B2 (en) | 2017-06-27 | 2019-10-29 | Inston, Inc. | Systems and methods for reducing write error rate in magnetoelectric random access memory through pulse sharpening and reverse pulse schemes |
| US10861527B2 (en) | 2017-06-27 | 2020-12-08 | Inston, Inc. | Systems and methods for optimizing magnetic torque and pulse shaping for reducing write error rate in magnetoelectric random access memory |
| JP2019057601A (ja) | 2017-09-20 | 2019-04-11 | 東芝メモリ株式会社 | 磁気記憶装置 |
| US10593866B2 (en) * | 2018-06-27 | 2020-03-17 | Globalfoundries Singapore Pte. Ltd. | Magnetic field assisted MRAM structures, integrated circuits, and methods for fabricating the same |
| JP7005452B2 (ja) * | 2018-07-30 | 2022-01-21 | 株式会社東芝 | 磁気記憶装置 |
| US10636962B2 (en) | 2018-08-21 | 2020-04-28 | Qualcomm Incorporated | Spin-orbit torque (SOT) magnetic tunnel junction (MTJ) (SOT-MTJ) devices employing perpendicular and in-plane free layer magnetic anisotropy to facilitate perpendicular magnetic orientation switching, suitable for use in memory systems for storing data |
| US11195991B2 (en) * | 2018-09-27 | 2021-12-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Magnetic random access memory assisted devices and methods of making |
| EP3671874B1 (en) | 2018-12-21 | 2022-06-22 | IMEC vzw | Zero-field switching for sot technology |
| CN110061127B (zh) * | 2019-05-20 | 2023-08-08 | 中国科学院微电子研究所 | 磁隧道结的形成方法及磁阻式随机存储器 |
| CN112310274A (zh) * | 2019-07-31 | 2021-02-02 | 中电海康集团有限公司 | 自旋轨道矩磁性存储单元及其制备方法 |
| US11069390B2 (en) * | 2019-09-06 | 2021-07-20 | Wisconsin Alumni Research Foundation | Spin-orbit torque magnetoresistive random access memory with magnetic field-free current-induced perpendicular magnetization reversal |
| CN111490156A (zh) * | 2020-04-21 | 2020-08-04 | 浙江驰拓科技有限公司 | 自旋轨道力矩磁存储器件及其制备方法 |
| WO2022046237A1 (en) * | 2020-08-27 | 2022-03-03 | Western Digital Technologies, Inc. | Multiferroic-assisted voltage controlled magnetic anisotropy memory device and methods of manufacturing the same |
| US11264562B1 (en) | 2020-08-27 | 2022-03-01 | Western Digital Technologies, Inc. | Multiferroic-assisted voltage controlled magnetic anisotropy memory device and methods of manufacturing the same |
| US11276446B1 (en) | 2020-08-27 | 2022-03-15 | Western Digital Technologies, Inc. | Multiferroic-assisted voltage controlled magnetic anisotropy memory device and methods of manufacturing the same |
| US12093812B2 (en) | 2020-10-02 | 2024-09-17 | Sandisk Technologies Llc | Ultralow power inference engine with external magnetic field programming assistance |
| US11729996B2 (en) | 2021-07-30 | 2023-08-15 | International Business Machines Corporation | High retention eMRAM using VCMA-assisted writing |
| JP2023074096A (ja) * | 2021-11-17 | 2023-05-29 | ソニーセミコンダクタソリューションズ株式会社 | 磁気抵抗効果メモリ、メモリアレイ及びメモリシステム |
| US12471497B2 (en) | 2022-01-25 | 2025-11-11 | International Business Machines Corporation | Magnetic tunnel junction device with magnetoelectric assist |
| US20230298646A1 (en) * | 2022-03-21 | 2023-09-21 | International Business Machines Corporation | Deterministic voltage-controlled magnetic anisotropy (vcma) mram with spin-transfer torque (stt) mram assistance |
| WO2025074925A1 (ja) * | 2023-10-03 | 2025-04-10 | ソニーセミコンダクタソリューションズ株式会社 | 記憶装置および電子機器 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5729410A (en) | 1996-11-27 | 1998-03-17 | International Business Machines Corporation | Magnetic tunnel junction device with longitudinal biasing |
| US5936293A (en) * | 1998-01-23 | 1999-08-10 | International Business Machines Corporation | Hard/soft magnetic tunnel junction device with stable hard ferromagnetic layer |
| US6114719A (en) | 1998-05-29 | 2000-09-05 | International Business Machines Corporation | Magnetic tunnel junction memory cell with in-stack biasing of the free ferromagnetic layer and memory array using the cell |
| US8755222B2 (en) * | 2003-08-19 | 2014-06-17 | New York University | Bipolar spin-transfer switching |
| JP4575136B2 (ja) * | 2004-12-20 | 2010-11-04 | 株式会社東芝 | 磁気記録素子、磁気記録装置、および情報の記録方法 |
| US7285836B2 (en) * | 2005-03-09 | 2007-10-23 | Maglabs, Inc. | Magnetic random access memory with stacked memory cells having oppositely-directed hard-axis biasing |
| US7230845B1 (en) * | 2005-07-29 | 2007-06-12 | Grandis, Inc. | Magnetic devices having a hard bias field and magnetic memory devices using the magnetic devices |
| US7777261B2 (en) | 2005-09-20 | 2010-08-17 | Grandis Inc. | Magnetic device having stabilized free ferromagnetic layer |
| US8058696B2 (en) * | 2006-02-25 | 2011-11-15 | Avalanche Technology, Inc. | High capacity low cost multi-state magnetic memory |
| JP2008135432A (ja) * | 2006-11-27 | 2008-06-12 | Tdk Corp | トンネル磁気抵抗効果素子及びその製造方法 |
| JP2008171882A (ja) * | 2007-01-09 | 2008-07-24 | Sony Corp | 記憶素子及びメモリ |
| JP4435189B2 (ja) * | 2007-02-15 | 2010-03-17 | 株式会社東芝 | 磁気記憶素子及び磁気記憶装置 |
| FR2914482B1 (fr) * | 2007-03-29 | 2009-05-29 | Commissariat Energie Atomique | Memoire magnetique a jonction tunnel magnetique |
| EP2015307B8 (en) * | 2007-07-13 | 2013-05-15 | Hitachi Ltd. | Magnetoresistive device |
| JP5077019B2 (ja) * | 2008-03-31 | 2012-11-21 | Tdk株式会社 | 磁気記憶装置 |
| US8039913B2 (en) * | 2008-10-09 | 2011-10-18 | Seagate Technology Llc | Magnetic stack with laminated layer |
| US9728240B2 (en) | 2009-04-08 | 2017-08-08 | Avalanche Technology, Inc. | Pulse programming techniques for voltage-controlled magnetoresistive tunnel junction (MTJ) |
| US9196332B2 (en) * | 2011-02-16 | 2015-11-24 | Avalanche Technology, Inc. | Perpendicular magnetic tunnel junction (pMTJ) with in-plane magneto-static switching-enhancing layer |
| CN103563000B (zh) * | 2011-05-19 | 2016-12-07 | 加利福尼亚大学董事会 | 电压控制的磁各向异性(vcma)开关和电磁存储器(meram) |
| US9293694B2 (en) * | 2011-11-03 | 2016-03-22 | Ge Yi | Magnetoresistive random access memory cell with independently operating read and write components |
| WO2014022304A1 (en) | 2012-07-30 | 2014-02-06 | The Regents Of The University Of California | Multiple-bits-per-cell voltage-controlled magnetic memory |
| US9230626B2 (en) | 2012-08-06 | 2016-01-05 | Cornell University | Electrically gated three-terminal circuits and devices based on spin hall torque effects in magnetic nanostructures apparatus, methods and applications |
| US8988923B2 (en) | 2012-09-11 | 2015-03-24 | The Regents Of The University Of California | Nonvolatile magneto-electric random access memory circuit with burst writing and back-to-back reads |
| US9036407B2 (en) | 2012-12-07 | 2015-05-19 | The Regents Of The University Of California | Voltage-controlled magnetic memory element with canted magnetization |
-
2015
- 2015-06-02 US US14/728,788 patent/US9620562B2/en not_active Expired - Fee Related
-
2016
- 2016-06-01 FR FR1654982A patent/FR3037185B1/fr not_active Expired - Fee Related
- 2016-06-01 GB GB1609565.5A patent/GB2539102B/en not_active Expired - Fee Related
- 2016-06-02 JP JP2016111167A patent/JP2016225633A/ja active Pending
- 2016-06-02 KR KR1020160068948A patent/KR101869149B1/ko active Active
- 2016-06-02 TW TW105117430A patent/TWI602331B/zh not_active IP Right Cessation
- 2016-06-02 DE DE102016006651.2A patent/DE102016006651A1/de not_active Ceased
- 2016-06-02 CN CN201610826624.8A patent/CN106374035B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| KR101869149B1 (ko) | 2018-06-19 |
| JP2016225633A (ja) | 2016-12-28 |
| FR3037185B1 (fr) | 2019-10-25 |
| US20160358973A1 (en) | 2016-12-08 |
| TWI602331B (zh) | 2017-10-11 |
| US9620562B2 (en) | 2017-04-11 |
| GB2539102A (en) | 2016-12-07 |
| KR20160142255A (ko) | 2016-12-12 |
| CN106374035B (zh) | 2019-11-26 |
| GB201609565D0 (en) | 2016-07-13 |
| GB2539102B (en) | 2019-09-11 |
| TW201705568A (zh) | 2017-02-01 |
| FR3037185A1 (enExample) | 2016-12-09 |
| CN106374035A (zh) | 2017-02-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R082 | Change of representative |
Representative=s name: MURGITROYD GERMANY PATENTANWALTSGESELLSCHAFT M, DE Representative=s name: MURGITROYD & COMPANY, DE Representative=s name: MEWBURN ELLIS LLP, DE |
|
| R081 | Change of applicant/patentee |
Owner name: WESTERN DIGITAL TECHNOLOGIES, INC. (N.D.GES.D., US Free format text: FORMER OWNER: HGST NETHERLANDS B.V., AMSTERDAM, NL |
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| R082 | Change of representative |
Representative=s name: MEWBURN ELLIS LLP, DE |
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| R012 | Request for examination validly filed | ||
| R016 | Response to examination communication | ||
| R082 | Change of representative |
Representative=s name: MURGITROYD GERMANY PATENTANWALTSGESELLSCHAFT M, DE Representative=s name: MURGITROYD & COMPANY, DE |
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| R079 | Amendment of ipc main class |
Free format text: PREVIOUS MAIN CLASS: H01L0027220000 Ipc: H10B0061000000 |
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| R081 | Change of applicant/patentee |
Owner name: SANDISK TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US Free format text: FORMER OWNER: WESTERN DIGITAL TECHNOLOGIES, INC. (N.D.GES.D. STAATES DELAWARE), SAN JOSE, CA, US Owner name: SANDISK TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US Free format text: FORMER OWNER: WESTERN DIGITAL TECHNOLOGIES, INC. (N.D.GES.D.STAATES DELAWARE), SAN JOSE, CA, US Owner name: SANDISK TECHNOLOGIES, INC. (N.D.GES. D. STAATE, US Free format text: FORMER OWNER: WESTERN DIGITAL TECHNOLOGIES, INC. (N.D.GES.D.STAATES DELAWARE), SAN JOSE, CA, US |
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| R081 | Change of applicant/patentee |
Owner name: SANDISK TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US Free format text: FORMER OWNER: SANDISK TECHNOLOGIES, INC. (N.D.GES. D. STAATES DELAWARE), MILPITAS, CA, US |
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| R002 | Refusal decision in examination/registration proceedings | ||
| R003 | Refusal decision now final |