EP1864290A1 - Magnetoresistives element, insbesondere speicherelement oder logikelement, und verfahren zum schreiben von informationen in ein derartiges element - Google Patents
Magnetoresistives element, insbesondere speicherelement oder logikelement, und verfahren zum schreiben von informationen in ein derartiges elementInfo
- Publication number
- EP1864290A1 EP1864290A1 EP06723859A EP06723859A EP1864290A1 EP 1864290 A1 EP1864290 A1 EP 1864290A1 EP 06723859 A EP06723859 A EP 06723859A EP 06723859 A EP06723859 A EP 06723859A EP 1864290 A1 EP1864290 A1 EP 1864290A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- layer
- contact
- magnetic
- antiferromagnetic
- polarization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/165—Auxiliary circuits
- G11C11/1675—Writing or programming circuits or methods
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/22—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements
- G11C11/225—Auxiliary circuits
- G11C11/2275—Writing or programming circuits or methods
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/04—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using optical elements ; using other beam accessed elements, e.g. electron or ion beam
- G11C13/06—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using optical elements ; using other beam accessed elements, e.g. electron or ion beam using magneto-optical elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
- H10N50/85—Magnetic active materials
Definitions
- Magnetoresistive element in particular memory element or logic element, and method for writing information in such an element
- the present invention relates to a magnetoresistive element, in particular a memory element or logic element, a structure formed therefrom, a method for writing information in such an element and a use of an exchange bias system for information storage.
- GMR giant magnetoresistance
- TMR tunnel magnetoresistance
- the GMR is usually used in purely metallic structures and the TMR in structures with an oxide tunnel barrier between two ferromagnetic metal layers.
- TMR structures are used for electronically readable magnetic memories (MRAMs), while the GMR is used commercially, above all in magnetic field sensors and in fixed-head probes.
- MRAMs electronically readable magnetic memories
- the present invention relates to such a magnetoresistive or other element in which at least one information is present or can be stored in magnetic form.
- the writing of information-that is to say a magnetic polarization or magnetization- is usually effected by a corresponding magnetization field which is generated electromagnetically.
- the polarity of the magnetic field is varied depending on the information.
- Disadvantageous or pro- The problem here is that focusing the magnetic field in relation to a high packing density is difficult or expensive, and that relatively high electrical currents are required for generating and varying the magnetic field during writing and lead to a high undesired loss of heat.
- No. 6,483,741 B1 relates to the remagnetization of a material having magnetic anisotropy, for example in an MRAM, by applying a magnetic pulse or a driving force transversely to the original magnetization direction.
- the pulse or drive force is generated either by the piezoelectric effect or by varying the interaction of the material with another magnetic material via a control layer.
- the magnetoresistive element preferably has two ferromagnetic contacts which are connected via a separating layer and form, in particular, a TMR element or GMR element.
- the first contact is associated with a first layer of magnetoelectric or ferroelectric material such that the first contact is magnetically polarizable in dependence on the antiferromagnetic interface polarization of the first layer.
- the first contact and the first layer form an exchange bias system.
- the magnetoelectric material additionally required magnetic field can be kept constant in contrast to conventional methods even when writing varying information and therefore generated for example by a permanent magnet.
- the magnetic polarization of the first contact is determined by the electric field and not by an electric current.
- the magnetic polarization or magnetization of the first contact then forms a stored information of the magnetoresistive element.
- the electrical resistance across the two contacts allows this information to be read, since the electrical resistance is high when the polarizations or magnetic moments of the two contacts are aligned parallel and in antiparallel (opposite) orientation.
- the preferred method of writing information is characterized in that the magnetoelectric layer is heated above a critical temperature and is antiferromagnetically polarized in its boundary layer by means of a magnetic field and an electric field, wherein the magnetic field and the electric field are polarized Field to cool down below the critical temperature or to freeze the determined by the magnetic field and electric field antiferromagnetic Grenz inhabit- polarization of the magnetoelectric layer, so that the associated contact is magnetized by the antiferromagnetic interfacial polarization of the layer in the desired manner and magnetically magnetic polarization forms a magnetic information of the element.
- antiferromagnetic Grenz inhabitpolarisation the layer so the writing of the information is done.
- the same polarization of the magnetic field can always be used when writing the information, the antiferromagnetic interfacial polarization of the layer or the information depending on the direction of the electric field relative to the magnetic field-parallel or anti-parallel. Accordingly, the magnetic field for the antiferromagnetic _
- FIG. 1 shows a schematic structure of a proposed magneto-resistive element according to a first embodiment
- FIG. 2 shows a first contact and a first layer of the magnetoresistive element, which form a proposed exchange system
- 3 is a diagram showing a magnetization state of the exchange
- Fig. 4 is a diagram showing another magnetization state of
- FIG. 6 shows a schematic structure of a proposed magnetoresistive element according to a second embodiment.
- FIG. 1 shows a schematic, not to scale representation of a proposed, magnetoresistive element 10 with a first Kon- _ f _
- clock 11 and a second contact 12 which are electrically connected to each other via a separating layer or barrier 13 arranged therebetween.
- the first contact 11 and the second contact 12 are preferably made of ferromagnetic material, ie ferromagnetic, and in particular form a TMR element or GMR element whose electrical resistance between A and B from the relative orientation of the indicated by arrows by way of example magnetic Moments or polarizations of the two contacts 11, 12 depends.
- the separating layer 13 accordingly forms a tunnel barrier or an electrically conductive, possibly metallic compound.
- the first contact 11 is associated with a first layer 14 of magnetoelectric or ferroelectric material, in particular adjacent.
- the first contact 11 and the first layer 14 lie over one another over the entire surface.
- the first contact 11 and the first layer 14 form a proposed exchange bias system. This means that the magnetic moments of the first contact 11 and the first layer 14 correlate in their orientations, in particular run anti-parallel. In particular, an orientation of the magnetic moments or polarization of the first contact 11 as a function of the antiferromagnetic boundary surface polarization of the first layer 14 takes place through this interaction.
- the magnetoresistive element 10 has a second layer 15, which immediately adjoins the first layer 14 in the illustrated embodiment, specifically on the flat side facing away from the first contact 11.
- the second layer 15 is constructed in the first embodiment of permanent magnetic material, so permanent magnetic, and / or formed as a connection electrode.
- FIG. 1 is to be understood in particular only as a schematic section of a particular surface or plate-like structure or the like, and in particular serves only to explain the function of a memory cell.
- a magnetic memory or the like can have a multiplicity of such elements 10, preferably side by side, in particular arranged in a plane, or memory cells with a corresponding layering or similar layering.
- the separating layer 13, the first layer 14 and / or the second layer 15 can be designed as continuous, if necessary interruption-free layers. If necessary, the first contact 11 and the second contact 12 may also be formed as continuous layers or the like.
- the terminal electrodes 16, 17 also be flat, but not continuous, but for example, transverse to each other in different planes extending stripes or the like.
- FIG. 1 represents only a single memory cell, which is preferably constructed in the z-direction perpendicular to the xy-plane of the strips (not shown) or other planar extension of the first and second contacts 11, 12 or of the layers 13 to 15.
- other structures and structures are possible.
- the arrangement of the first contact or area 11 and the first layer 14, as indicated in FIG. 2, forms a proposed exchange bias system, in which the magnetic moments of the first contact 11 and of the first layer 14 are preferably aligned in anti-parallel to one another, for example, away from each other as shown, or towards or parallel to the major planes of the layers.
- the first layer 14 is used for the first layer 14, as is customary and proposed in US Pat. No. 6,483,741 B1.
- the "magnetoelectric” property is that in the first layer 14, the orientation of the magnetic moments or spins in the boundary layer at the interface to the first contact 11 through an external magnetic field and an electric field can be predetermined and in particular permanently fixed. This is also referred to as antiferromagnetic interface polarization (AGP) in the present invention.
- AGP antiferromagnetic interface polarization
- the "magnetoelectric” property of the present invention within the meaning of the article “Revival of the magnetoelectric effect" by Manfred Fiebig, J. Phys. D: Appl. Phys. 38 (2005), R123-R152, which is hereby incorporated by way of additional disclosure.
- the direction of the AGP can be predetermined by the magnetic field and external electric field, that is controllable. Further, the AGP is maintained even after the magnetic field and the electric field are turned off.
- the predetermined AGP of the magnetoelectric layer 14 leads to a defined, in particular opposite or parallel, magnetic polarization of the first contact 11. Accordingly, the polarization direction of the first contact 11 is controlled by the direction of the AGP.
- FIG. 3 shows a diagram which very schematically shows the magnetization hysteresis of the first contact 11 in AGP of the first layer 14 in a first direction.
- 4 shows the corresponding schematic magnetization hysteresis with opposite AGP of the first layer 14.
- the x-axis indicates the external magnetic field H in each case.
- the y-axis corresponds to the magnetic moment m of the first contact 11.
- the two diagrams illustrate that the magnetoelectric layer 14 results in a strong asymmetry of the magnetization hysteresis depending on the direction of the AGP of the layer 14.
- This magnetic polarization or magnetization of the first contact 11 can therefore be understood as information I, which depends only on the AGP of the first layer 14.
- the information I is, for example, "1" or "high”, and in the case of FIG. 4, for example, "0" or "low”.
- the magnetoelectric layer 14 is preferably heated above a critical temperature T (about 310 K in the case of Cr 2 O 3 ) and by an external magnetic field (this can be generated by the second layer 15) ) and electric field are "polarized" in the desired manner, at least in their boundary layer toward the first contact 11, in order to achieve the desired AGP.
- T a critical temperature
- an external magnetic field this can be generated by the second layer 15
- electric field are "polarized" in the desired manner, at least in their boundary layer toward the first contact 11, in order to achieve the desired AGP.
- a spatially very limited AGP of the magnetoelectric layer 14 is desirable, as indicated in Fig. 5.
- the limitation of the AGP to a desired, very small area allows a correspondingly dense packing of storage cells.
- the following two measures are proposed, which can be implemented alternatively or together: a)
- the heating preferably takes place by means of radiation, in particular light, preferably laser light L of a laser. This is relatively easy to implement, for example by a movable laser head, as in a DVD burner or the like.
- the heating by laser light L can be done very quickly and in particular very localized. Accordingly, local heating can also limit the range in which the AGP is in the magnetoelectric
- Layer 14 is or can be set.
- the external magnetic field H and the external electric field E are generated, for example, by a magnetic head and an electrode tip.
- the maximum field strength of the magnetic field H lies in a first region of the magnetoelectric layer 14 and the maximum field strength of the electric field E in a second, to the first spaced region of the magnetoelectric layer 14. Only in an overlap region Ü of the magnetic field H and the electric field E of depends on the field strengths and the distance, the product exceeds the
- the two above-mentioned measures can be combined in that the overlapping area Ü mentioned under b) is only partially heated to or above the required or critical temperature T, so that only in this partial area finally the AGP of the magnetoelectric layer 14 and thereby the writing the magnetic information takes place.
- the same polarization of the magnetic field can always be used regardless of the desired direction of the AGP or the information, and preferably, since the direction of the AGP of the magnetoelectric layer 14 is only depends on whether the magnetic field and the electric field are aligned parallel or antiparallel to each other. Accordingly, preferably, only by varying the direction of the electric field, the direction of the AGP of the magnetoelectric layer 14 is modulated, thereby producing the desired information.
- the outer magnetic field H and the outer electric field E during writing are at least substantially perpendicular to the layer plane of the magnetoelectric layer 14.
- the same magnetic field is always used during writing.
- a permanent magnet can be used for this purpose.
- a particular advantage is that, compared to previous magnetoresistive elements Umpolar algebra is or an alternating magnetic field depending on the information to be written is not required. This simplifies the proposed method substantially, so that the use of an electromagnet is less problematic and in particular even a permanent magnet can be used. Another advantage is that there is no significant flow for writing. Rather, the writing of the electric field suffices for writing. In addition, the actual fixation can be carried out by the heating and cooling of the magnetoelectric layer 14, preferably only in certain areas.
- the two embodiments are directed to magnetoresistive reading or retrieval of the information.
- a readout can take place in any other form.
- the electrical resistance depends on the two contacts 11 and 12 and the separating layer 13 arranged therebetween - ie between the schematically indicated terminals A and B - of the relative orientation of the magnetic Moments in the two contacts 11 and 12 from, as already explained.
- the orientation of the magnetic moments of the second contact 12 is preferably determined in the first embodiment by the second, formed as a permanent magnet layer 15. Consequently, in the first embodiment, said electrical resistance depends only on the orientation of the magnetic moments, that is, the magnetic polarization, of the first contact 11. Since this polarization is in turn determined by the first, in particular magnetoelectric, layer 14, as already explained above with reference to FIGS. 2 to 5, the stored information can thus be determined or "read” by measuring the said electrical resistance.
- the second layer 15 or another magnet provides the required external magnetic field.
- a corresponding voltage in particular between contact A and the second layer 15 can - if necessary with appropriate additional heating - the writing done in the desired manner.
- the magnetoresistive element 10 according to the first embodiment is particularly suitable for a RAM (Random Access Memory) having a plurality of memory cells in a compact space.
- RAM Random Access Memory
- the first and / or second layer 14, 15 is at least essentially composed of Cr 2 O 3 .
- the first and / or second layer 14, 15 is or are not composed of magnetoelectric material but at least essentially of so-called ferroelectric material, which preferably also comprises multiferroic material, in particular BaTiO 3 -CoFe 2 O 4 Nanostructures, as described, for example, in the article "Multiferroic BaTiO 3 -CoFe 2 O 4 Nanostructures" by H. Zhieng et al., Science, Vol. 303, p. 661 f. of January 30, 2004, or the like.
- the multiferroic or ferroelectric property of the layer 14 is therein and causes the AGP is at least substantially modifiable and fixable by an electric field alone, so an additional external magnetic field is not required. Heating above a critical temperature is also not required. This makes writing information easier.
- the second layer 15 can not be permanent magnetic.
- the second layer 15 may be constructed from antiferromagnetic material or like the first layer 14.
- the second layer 15 can also be arranged directly on the assigned second contact 12.
- Fig. 6 shows a second embodiment of the magnetoresistive element 10 in a very schematic, not to scale representation, similar to Fig. 1.
- the basic structure is similar, so that below only essential differences compared to the first embodiment will be discussed.
- the above statements apply to the second In accordance with the invention.
- any combination of different aspects of the two Ausflihrungsformen is possible.
- the second layer 15 is disposed immediately adjacent to the second contact 12, on the flat side of the second contact 12 facing away from the separation layer 13.
- the second layer 12 is not permanent magnet but of magnetoelectric or ferroelectric material, in particular correspondingly the first layer 14, constructed.
- the second contact 12 and the second layer 15 form an exchange bias system corresponding to or similar to the first contact 11 and the first layer 14.
- first and / or second layer 14, 15 is or are provided with a connection electrode 16, 17 or form or form it.
- the orientations of the magnetic moments of the first contact 11 on the one hand and the second contact 12 on the other hand can be set independently of one another. Accordingly, by changing an orientation, an inversion of the stored information may occur.
- the magnetoresistive element 10 according to the second embodiment can be used not only as a memory cell but also, in particular, as a logic element having the binary Boolean function XOR (exclusive OR).
- the magnetoresistive element 10 according to the second embodiment in layers 14, 15 of magnetoelectric material
- the antiferromagnetic interface polarizations of the two layers 14 and 15 are determined independently of one another in the desired direction or direction. Accordingly, the orientations of the magnetic mo- ments of the two contacts 11 and 12 set.
- the electrical resistance which is measurable for example via the terminals Al and B2, depends on the relative orientation of the magnetic orientation or polarization of the two contacts 11 and 12 from each other. Accordingly, a logic element 10 results which corresponds to the Boolean function XOR.
- the proposed logic element 10 can operate virtually without current since at least essentially only electrical voltages, but no (relevant) electrical currents, are required for the writing or input process.
- the reading process consists only of a resistance measurement and can also be performed at minimum currents.
- Another aspect is the non-volatility of the logic state, which is stable at the normal reading temperature, in particular room temperature.
- the proposed logic element 10 according to the second embodiment is also very easily combinable with the element 10 according to the first embodiment because of its very similar layer structure, ie with memory elements 10 or RAM (Random Access Memory).
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Mram Or Spin Memory Techniques (AREA)
- Hall/Mr Elements (AREA)
- Semiconductor Memories (AREA)
Abstract
Description
Claims
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005014820 | 2005-03-30 | ||
DE102005015339 | 2005-04-01 | ||
DE102005043574A DE102005043574A1 (de) | 2005-03-30 | 2005-09-12 | Magnetoresistives Element, insbesondere Speicherelement oder Lokikelement, und Verfahren zum Schreiben von Informationen in ein derartiges Element |
PCT/EP2006/002892 WO2006103065A1 (de) | 2005-03-30 | 2006-03-30 | Magnetoresistives element, insbesondere speicherelement oder logikelement, und verfahren zum schreiben von informationen in ein derartiges element |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1864290A1 true EP1864290A1 (de) | 2007-12-12 |
Family
ID=36539273
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP06723859A Withdrawn EP1864290A1 (de) | 2005-03-30 | 2006-03-30 | Magnetoresistives element, insbesondere speicherelement oder logikelement, und verfahren zum schreiben von informationen in ein derartiges element |
Country Status (4)
Country | Link |
---|---|
US (1) | US7719883B2 (de) |
EP (1) | EP1864290A1 (de) |
DE (1) | DE102005043574A1 (de) |
WO (1) | WO2006103065A1 (de) |
Families Citing this family (23)
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US7573734B2 (en) | 2007-07-13 | 2009-08-11 | Consejo Superior De Investigaciones Cientificas | Magnetoelectric device and method for writing non-volatile information into said magnetoelectric device |
WO2009010595A1 (es) * | 2007-07-13 | 2009-01-22 | Consejo Superior De Investigaciones Científicas | Dispositivo magnetoeléctrico y método para escribir información no volátil en dicho dispositivo |
WO2010032574A1 (ja) * | 2008-09-22 | 2010-03-25 | 株式会社日立製作所 | 磁気記録素子、磁気メモリセル及び磁気ランダムアクセスメモリ |
FR2973163B1 (fr) * | 2011-03-23 | 2013-10-25 | Thales Sa | Dispositif constitue de différentes couches minces et utilisation d'un tel dispositif |
EP2538235B1 (de) * | 2011-06-24 | 2013-07-31 | Christian-Albrechts-Universität zu Kiel | Magnetostriktives Schichtsystem |
US8724376B2 (en) | 2011-09-15 | 2014-05-13 | International Business Machines Corporation | Antiferromagnetic storage device |
US8724434B2 (en) | 2012-03-23 | 2014-05-13 | Tdk Corporation | Magnetic recording system and magnetic recording device |
EP2688072B1 (de) * | 2012-07-19 | 2014-06-18 | Forschungsverbund Berlin e.V. | Spintronikanordnung und Betriebsverfahren dafür |
EP2717343B1 (de) * | 2012-10-08 | 2014-09-24 | Christian-Albrechts-Universität zu Kiel | Magnetoelektrischer Sensor und Verfahren zu seiner Herstellung |
US9299485B1 (en) * | 2013-10-09 | 2016-03-29 | University Of Puerto Rico | Micro and nanoscale magnetoelectric multiferroic lead iron tantalate-lead zirconate titanate |
US9520175B2 (en) | 2013-11-05 | 2016-12-13 | Tdk Corporation | Magnetization controlling element using magnetoelectric effect |
KR102134132B1 (ko) | 2014-02-11 | 2020-07-21 | 삼성전자주식회사 | 자기 기억 소자 |
US9871193B2 (en) * | 2014-08-08 | 2018-01-16 | California State University, Northridge | Methods of producing and controlling tunneling electroresistance and tunneling magnetoresistance in a multiferroic tunnel junction |
DE102015203272B4 (de) | 2015-02-24 | 2022-05-05 | Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. | Magnetoelektrische funktionselemente |
US9472595B1 (en) * | 2015-03-24 | 2016-10-18 | Avalanche Technology, Inc. | Perpendicular MRAM with magnet |
US9692413B2 (en) * | 2015-09-30 | 2017-06-27 | The Research Foundation For The State University Of New York | Configurable exclusive-OR / exclusive-NOR gate using magneto-electric tunnel junctions |
US9979401B2 (en) * | 2016-07-19 | 2018-05-22 | Georgia Tech Research Corporation | Magnetoelectric computational devices |
WO2018063286A1 (en) * | 2016-09-30 | 2018-04-05 | Intel Corporation | Magnetostrictive stack and corresponding bit-cell |
JP2018061025A (ja) | 2016-10-06 | 2018-04-12 | Tdk株式会社 | 周波数可変磁気抵抗効果素子、及びそれを用いた発振器・検波器・フィルタ |
EP3555920A4 (de) * | 2016-12-13 | 2020-05-06 | INTEL Corporation | Senkrechte magnetoelektrische spin-bahnlogik |
WO2018194155A1 (ja) | 2017-04-21 | 2018-10-25 | Tdk株式会社 | 磁化制御素子、磁気メモリ及び磁気記録システム |
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GB2576174B (en) | 2018-08-07 | 2021-06-16 | Ip2Ipo Innovations Ltd | Memory |
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2005
- 2005-09-12 DE DE102005043574A patent/DE102005043574A1/de not_active Withdrawn
-
2006
- 2006-03-30 EP EP06723859A patent/EP1864290A1/de not_active Withdrawn
- 2006-03-30 WO PCT/EP2006/002892 patent/WO2006103065A1/de active Application Filing
- 2006-03-30 US US11/909,854 patent/US7719883B2/en not_active Expired - Fee Related
Non-Patent Citations (1)
Title |
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Also Published As
Publication number | Publication date |
---|---|
US7719883B2 (en) | 2010-05-18 |
DE102005043574A1 (de) | 2006-10-05 |
US20090067224A1 (en) | 2009-03-12 |
WO2006103065A1 (de) | 2006-10-05 |
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