DE102015118765A1 - Device for coating a large-area substrate - Google Patents

Abstract

The invention relates to a device for coating at least one substrate with a gas inlet element (4) arranged in a reactor housing (1) for feeding process gases into a process chamber having a gas distribution chamber (4 ') with a gas exit plate (9) having outlet openings (7). and a rear wall (10) extending parallel thereto and secured to the reactor housing (1) by hangers (3), the hangers (1) being fixed to the gas inlet member (4) spaced from a lateral edge of the gas inlet member (4). Between the rear wall (10) and the gas outlet plate (9) spacer elements (13) are provided, on which the gas outlet plate (9), the rear wall (10) and a lower end (3 '') of the trailer (3) are attached. The hangers (3) have in their direction of extension spaced-apart first and second bending zones (25 to 28). An upper end (3 '') of the hanger (3) is fastened to a holding element (36) whose vertical position relative to the holding device (2) is adjustable.

Description

Field of engineering

The invention relates to a device for coating at least one substrate with a arranged in a reactor housing gas inlet member for feeding process gases into a process chamber having a gas distribution chamber with a gas outlet plate having outlet openings and a parallel extending rear wall, and which is fixed with hangers on the reactor housing wherein the hangers are mounted spaced from a side edge of the gas inlet member to the gas inlet member.

State of the art

Such coating devices are used to coat a substrate. For this purpose, the substrate is located in a process chamber in which a CVD or a PVD process is performed. The process gases are fed into the process chamber by means of a gas distributor. Such gas distributors are in the DE 10 2014 116 991 A1 or DE 10 2013 101 534 A1 described. From the JP 2013-187318 A a gas inlet member is known which has a plurality of gas distribution chambers, which lie in a plane next to each other. The CN 103103501 describes a multi-segment gas inlet device.

From the US 8,721,791 B2 and US 2009/0133631 A1 Gas inlet members are known which has a gas outlet surface in which there are gas outlet openings. The inlet member is fixed with a holding member upwards.

In the deposition of OLEDs organic starting materials are used, which are fed by means of a carrier gas in a heated gas distributor. Such a gas distributor may be part of a gas inlet member. The process gases are fed into a gas distribution chamber of the gas inlet member, which has a gas outlet surface with gas passage openings and a rear wall. The temperature of the gas inlet member is maintained at a value which avoids condensation of the organic starting material.

The bottom of the process chamber is formed by a susceptor on which one or more substrates rest. The gaseous starting materials are transported in the process chamber by means of a carrier gas to the surface of the substrate, where they form a layer forming a layer. For this purpose, the susceptor is tempered to a temperature which is lower than the temperature of the gas inlet member. The susceptor is cooled in particular. The substrates may have a surface area of more than one square meter, so that there is a demand to produce a coating device with a susceptor diagonal of 2 to 3 meters. The gas inlet member should extend over the entire surface of the susceptor. The gas inlet organ then has a diagonal of 2 to 3 meters. The process chamber height, which is limited to the top of the gas outlet surface and down from the susceptor surface, however, is only a few inches.

Summary of the invention

The invention has the object of developing a generic device to the effect that large-area substrates can be deposited within the process chamber.

The object is achieved by the invention specified in the claims, each claim is basically an independent solution to the problem.

A first aspect of the invention is concerned with the attachment of the lower end of the hanger to the gas inlet member. According to the invention, a spacer element is located between the rear wall and the gas outlet plate. At this spacer the gas outlet plate, the rear wall and the lower end of a trailer are attached. Preferably, a plurality of hangers are used to hold the gas inlet member within the reactor housing, which are secured with their respective upper end to a holding device which is fixedly connected to an upper portion of the reactor housing. Each trailer is assigned a spacer, so that there are several spacer elements in the space between the rear wall and gas outlet plate. At least some of the hangers used to support the gas inlet member within the reactor housing engage spacers which are spaced from the lateral edge of the gas inlet member, that is, distributed over the base of the gas inlet member.

A second aspect of the invention relates to the design of the trailer. According to the invention, the hangers have in their direction of extension spaced-apart first and second bending zones. The first bending zone allows only a bending of the trailer in a first bending direction. The second bending zone allows only a bending of the trailer in a second bending direction. The first bending direction is perpendicular to the second bending direction. Denoting the plane in which the gas inlet member, so its gas outlet plate and its rear wall extend as X- / Y-plane, the trailer extends in the direction of a Z-direction. It this is a vertical direction. The trailer may have a slight inclination to this Z-direction. The Biegerungen lie in a sense in the X- / Y-plane and are perpendicular to the realized by the bending zones bending axes. The hangers are arranged such that at least one of the two bending directions is directed to the surface center of the gas inlet member, since it is to be understood that upon thermal expansion of the gas inlet member, the lower attachment point of each hanger moves in a line directed toward the surface center , The first bending directions are preferably aligned with the surface center and the first bending zones are directly adjacent to the upper or lower end of the trailer.

A third aspect of the invention relates to the attachment of the upper end of the trailer on the holding element. According to the invention it is proposed that the vertical position of the trailer relative to the holding device is adjustable. It is preferably provided an adjusting element, with which the vertical position of the trailer can be adjusted, so that the height of the process chamber can be adjusted by adjusting the adjusting element at each hanger position. For this purpose, an upper part of the reactor housing may have openings through which an adjusting tool can be passed in order to attack and adjust the adjusting element.

Preferred developments of the abovementioned aspects of the invention, which can be implemented both individually and in combination and which also develop the prior art independently within the meaning of the invention, are described below. The spacer element forms a lower fastening element, with which the lower end of the trailer is attached to the gas outlet plate. The spacer may have a cavity which is open at the top and which has a bottom. The lower end of the hanger may be attached to the bottom of this cavity. This is preferably done by means of screws, which are screwed from below through screw through holes in the bottom screwed into internal thread of the lower end of the trailer. From the bottom of the floor feet can protrude, have the screw through openings through which fastening screws are pushed, with which the feet are attached to the gas outlet plate. There may further be provided a bellows having a central opening in which the spacer is inserted. The spacer is thus partially surrounded by a bellows. A lower end of the bellows is secured to the spacer element, preferably a collar projecting radially from the wall of the cavity. However, the lower end of the bellows can also be connected to the gas outlet plate. The upper end of the bellows is connected to a movable object relative to the spacer in the vertical direction. It is a holding object, which is firmly connected to the rear wall, so that the rear wall can be slightly displaced in the vertical direction relative to the gas outlet plate. The bellows has a first portion and a second portion which is displaceable relative to the first portion. For this purpose, the area between the first and the second section has wave-shaped structures. The first section is preferably fastened to the spacer element and the second section is fastened to the rear wall. There are stop elements provided with which the vertical displaceability of the rear wall relative to the gas outlet plate is limited. For this purpose, in particular a ring piece is provided or a cover plate. The holding device, which is located in the upper region of the cavity of the reactor housing, is preferably formed by a rigid, in particular made in lightweight construction body. It may be a truss structure with perpendicular to each other extending cell walls. The upper end of the hanger is preferably secured to the holding device with a pin breaking in an overload condition. For this purpose, the upper end of the trailer may have a transverse opening in which the pin is inserted. The pin has two ends. One end is in the opening of the trailer. The other end of the pin is inserted in an opening of a fastening body, which is preferably fixedly connected to the holding element. If the axial force applied to the hanger exceeds the breaking load of the pin, the pin will break and the hanger may gravitationally shift downwards. In order to prevent the gas inlet member held by the trailer from falling onto the susceptor, a securing means in the form of a shoulder is provided which is located on a head element of the trailer. In the vertical direction, the shoulder is spaced from a retaining element fixedly assigned edge. After a breakage of the pin, the trailer can only move so far down until the shoulder abuts against the flank. The upper end of the trailer is for this purpose mounted vertically movable in an opening of the holding element. The adjusting element is preferably an adjusting ring, which has a radially outwardly pointing collar, which is supported on a flange portion or collar of the holding device. The adjusting ring formed in this way has one or more tool engagement openings in order to be able to turn it. An internal thread of the adjusting ring meshes with an external thread of the holding element, so that a rotation of the adjusting ring has a vertical displacement of the holding element result. It is provided a clamping element which is fixed in the vertical direction on the holding device. The clamping element generates a vertically downward force on the retaining element and, as the upper end of the hanger is firmly connected to the retaining element, also on the hanger.

Brief description of the drawings

Embodiments of the invention are explained below with reference to accompanying drawings. Show it:

1 roughly schematically a cross section through a reactor housing 1 in which there is a susceptor 5 and a gas inlet member 4 which is about hanger 3 with one at the top of the reactor housing 1 attached holding device 2 connected is,

2 a second embodiment of the invention also roughly schematically, in which the upper end 3 '' of the hanger 3 an upper fastening element 12 and the bottom end 3 ' of the hanger 3 a lower fastener 11 has, with which the trailer 3 at the gas inlet member 4 is attached,

3 a vertical section through a lower fastening element of a third embodiment of the invention, which is a between gas outlet plate 9 and back wall 10 of the gas inlet member 4 arranged spacer element 13 having,

4 the trailer 3 with the lower fastener 11 in the view

5 the section along the line VV in 4 .

6 in perspective, half cut, the lower fastener 11 together with the trailer 3 .

7 a vertical section through the upper fastener 12 with which the trailer 3 with the holding device 2 is connected (according to section line VII-VII in 10 )

8th in perspective and cut according to 7 the upper fastening element 12 together with the trailer 3 .

9 the upper fastening element 12 with trailer 3 in the view

10 a plan view of the upper fastener 12 .

11 the section according to the line XI-XI in 10 .

12 the section according to the line XII-XII in 9 and

13 schematically the arrangement of two hangers 3 based on the area center 49 of the gas inlet member 4 and their slope change by heating the gas inlet member 4 ,

Description of the embodiments

The 1 shows roughly schematically the housing 1 a coating device for depositing OLEDs. Within this reactor housing 1 there is a susceptor 5 that by means of coolant channels 6 can be cooled. The susceptor 5 has a horizontal top surface on which the substrate to be coated can be placed. Vertically above the susceptor 5 extends a gas inlet member, with the process gases in between the bottom of the gas inlet member 4 and the top of the susceptor 5 be located process chamber can be fed. For this purpose has the gas inlet member 4 a gas outlet plate 9 , which by means of a tempering 8th flowing temperature control can be maintained at a temperature which is greater than the temperature of the susceptor 5 , In the gas outlet plate 9 are located substantially evenly distributed a variety sieve arranged gas outlet openings 7 containing the process chamber with a gas distribution chamber 4 ' connect with a back wall 10 closed vertically upwards.

It is a variety of hangers 3 provided with which the gas inlet organ 4 on a holding device 2 is attached. The holding device 2 is preferably formed by a truss-like, made in lightweight construction body, which at the top of the reactor housing 1 is attached. The holding device 2 is preferably attached only at the edge of lying in a horizontal outline contour surface with the reactor housing. The hangers 3 are distributed substantially uniformly over this outline contour surface, so that the gas inlet member 4 at a plurality of over the entire floor plan area of the gas inlet member 4 is held evenly distributed arranged points.

The 2 shows a rough schematic of another embodiment, in which the lower end 3 ' every hanger 3 with a lower fastener 11 with the gas inlet member 4 is fastened, wherein the lower fastening element 11 also a distance-retaining function regarding the gas outlet plate 9 and the back wall 10 having. The upper end 3 '' of the hanger 3 has an upper fastening element 12 , with which a height adjustment of the trailer 3 can be made.

From the 1 and 2 It can be seen that at least some, preferably at least the majority of hangers 3 not at the outer edge of the gas inlet member 4 but rather at attachment points so from the edge of the outline of the gas inlet member 4 apart are that the lower fasteners 11 within the gas distribution chamber 4 ' are arranged.

The 3 to 6 show the structural design of a preferred embodiment of a lower fastener 11 , It has a spacer formed by a metal body 13 on. The spacer element 13 has downstanding feet 15 , The feet have an axial cavity through which screws 16 are inserted through the threaded shaft each in a threaded bore of the gas outlet plate 9 are screwed in. The feet 15 thus touching the upwardly facing surface of the gas outlet plate 9 ,

The spacer element 13 forms an upwardly open cavity 14 out, a floor 14 ' and one the cavity 14 ring-shaped surrounding wall 14 '' having. The floor 14 ' has two screw holes, through each one screw 17 engages, the threaded shaft in an internal thread of a lower end 3 ' a hanger 3 screwed in, leaving the bottom end 3 ' of the hanger 3 stuck to the ground 14 ' connected is.

At about the level of the ground 14 ' protrudes from the wall 14 '' A bunch 18 radially outward. To this covenant 18 is a lower end of a bellows 20 attached. Through the bellows cavity protrudes the spacer element 13 , The upper end of the bellows 20 is fixed with a ring piece 22 connected, which in turn to a lens 21 abuts and preferably firmly with the lens 21 connected is. The lens 21 in turn rests on the edge of an opening in the back wall 10 through which an upper section of the wall 14 '' protrudes. The lens 21 is from a ring piece 23 over which acts as a clamping piece. By means of a screw 24 is the ring piece 23 with the back wall 10 screwed.

The ring piece 23 has an opening through which the trailer 3 protrudes. In this opening is another ring piece 23 ' with a smaller diameter opening through which the hanger 3 protrudes. The upper end edge of the wall 14 '' is from the ring piece 23 or the ring piece 23 ' spaced in the vertical direction. The back wall 10 can thus be slightly opposite to the gas outlet plate 9 shift in vertical direction. With the bellows 20 is the gas distribution chamber 4 ' sealed gas-tight upwards.

At the federal government 18 is a ring-shell-shaped body 19 attached. This is a collection tray for receiving particles that adhere to the outer surface of the bellows corrugation 20 have separated and the mechanical movement of the bellows 20 can flake off.

The trailer 3 owns in the area of its upper end 3 ' and its lower end 3 '' a circular cylindrical cross-section. He also has a middle section 27 with a circular cross-section.

Between the lower end 3 ' and the middle section 29 There is a first bending zone 25 and a second bending zone 26 , Between the middle section 29 and the upper end 3 '' There is also a first bending zone 28 and a second bending zone 27 ,

The first bending zone 25 . 28 allows a bending of the trailer 3 in a first bending direction, so to speak, about a first bending axis extending transversely thereto. The two second bending zones 26 . 27 allow a bending of the trailer 3 in a second bending direction, which is perpendicular to the first bending direction, so to speak, a second bending axis which is perpendicular to the first bending axis.

The first bending zones 25 . 28 and the second bending zones 26 . 27 are each formed by flat portions of the trailer. They are essentially in the shape of leaf springs.

The lowest lying first bending zone 25 closes immediately to the lower end 3 ' on, leaving a section of the bending zone 25 still within the cavity 14 located.

The uppermost first bending zone 28 closes immediately to a holding element 36 on, with the top end 3 '' with the holding device 2 connected is.

The holding element 36 has a vertically extending opening in which the upper end 3 '' of the hanger 3 plugged. In a hollow 38 of the holding element 36 sits on a floor 38 ' the cavity 38 a fastening body 45 , The fastening body 45 has a ring shape, wherein the ring opening is aligned with the opening of the holding element 36 followed. The from the ground 38 ' groundbreaking broadside surface of the fastening body 45 forms a flank 45 ' out.

The upper end face of the upper end 3 '' of the hanger 3 is by means of screws 42 with a head piece 40 connected. The head piece 40 has a lower section that is flush with the top 3 '' followed. The head piece 40 has a radially projecting collar, one down to the flank 45 ' pointing shoulder 40 ' formed. The shoulder 40 ' is from the flank 45 ' vertically spaced.

In the area of the border between upper end 3 '' and lower end of the head piece 40 a cross channel or bore forms 43 in which a holding pin 44 plugged. The channel 43 can be formed by prismatic jaws, with which the retaining pin 44 in the canal 43 through the screws 42 is clamped.

One end of the retaining pin 44 stuck in the cross hole 43 , The other end of the retaining pin 44 stuck in a hole in the mounting body 45 that with a screw 46 with the ground 38 ' connected is. The on the trailer 3 Applied traction is via the retaining pin 44 on the holding element 36 transfer. Exceeds this tensile force a limit force, the breaking force of the retaining pin 44 corresponds, then breaks the retaining pin 44 , The trailer 3 can then go to the distance between flank 45 ' and shoulder 40 ' dodge down. By evasion caused by gravity the shoulder 40 ' on the flank 45 ' stops, prevents the gas inlet organ 4 in case of a overload-induced breakage of the retaining pin 44 on the susceptor 5 falls.

The retaining pin 44 also has an indicator function. The hole 43 runs in the direction of the first bending direction of the first bending zone 28 ,

The holding element 36 has an external thread 37 , On this external thread 37 is the internal thread 34 an adjusting ring 32 screwed. The adjusting ring 32 at the same time forms a retaining ring with which the retaining element 36 on the holding device 2 is attached. For this purpose has the adjusting ring 32 a radially projecting support section 33 standing on a support zone 30 ' a collar 30 the holding device 2 rests. The adjusting ring 32 has tool engagement holes 35 into which an adjusting tool can engage, around the adjusting ring 32 to turn. Along with such a rotational movement of the adjusting ring 32 the retaining element shifts 36 and the trailer 3 in vertical direction. To avoid being the trailer 3 or the holding element 36 rotates, has the rotation with the trailer 3 connected headpiece 40 a holding tool engagement hole 41 ,

It is a clamping element 47 provided, which has a substantially star-shaped shape. It has an opening 47 ' through which the cavity 38 is accessible. From a ring portion of the clamping element 47 protrude radial arms 47 '' starting on threaded shafts of screws 48 can be placed. The heads of the screws 48 take hold of the collar 30 , The collar 30 has radially open slots through which are directly attached to the heads of the screws 48 protrude through subsequent threaded sections. By means of a nut are the screws 48 on the collar 30 attached. The clamping element 47 has the function of a hold-down. It prevents that in its vertical position adjusted holding element 36 can move up.

For adjusting the vertical position of the trailer 3 need the nuts of the screws 48 to be solved; then the adjustment ring 32 to be turned around. The head piece 40 is recorded. After completion of the adjustment process, the nuts of the screw 48 tightened, leaving the bottom of the clamping element 47 on the top of the retaining element 36 rests.

The 13 schematically shows a holding device 2 and the underlying gas inlet member 4 whose area center is through the line 49 is indicated. Any point on a floor plan surface of the gas inlet 4 shifts at a temperature change of the gas inlet member 4 on a line passing through the area center 49 passes. The hangers 3 are oriented so that the bending direction of the first bending zones 24 . 25 on the surface center 49 is directed. During assembly, this can be done using the indicator function of the retaining pin 44 take place, since this extends in the first bending direction.

In the case of a thermal expansion, a trailer located in the basic position in a tilted position c can be used 3 shift to a vertical position b. But it is also possible that the trailer 3 shifted to a further tilt position a. It is also possible that the trailer 3 In its normal position it hangs vertically and when the gas inlet organ warms up 4 shifted to a tilt position a.

The above explanations serve to explain the inventions as a whole, which further develop the state of the art independently, at least by the following feature combinations, namely:
A device characterized in that between the rear wall 10 and the gas outlet plate 9 spacers 13 are provided, where the gas outlet plate 9 , the back wall 10 and a lower end 3 '' of the hanger 3 are attached.

A device characterized in that the hangers 3 in their direction of extension spaced apart first and second bending zones 25 to 28 have, wherein the first bending zone 25 . 28 only one bend in a first bending direction and the second bending zones 26 . 27 allow only a bend in a direction transverse to the first bending direction second bending direction.

A device characterized in that an upper end 3 '' of the hanger 3 at a holding element 36 is fixed, its vertical position relative to the holding device 2 is adjustable.

A device characterized in that the rear wall 10 opposite the gas outlet plate 9 in the extension direction of the trailer 3 can shift slightly and to seal a bellows 20 is provided, which in particular with a first section on the spacer element 13 and with a relative to the first portion displaceable second portion on the rear wall 10 is attached.

A device characterized in that the spacer element 13 a cavity 14 that has a bottom 14 ' having at the lower end 3 ' of the hanger 3 is attached.

A device characterized in that the spacer element 13 feet 15 which is fixed to the gas outlet plate 9 are connected.

A device characterized by a ring piece 23 , which is on the back wall 10 is attached to limit the displacement path of the spacer 13 opposite the back wall 10 ,

A device characterized in that the bending zones 25 to 28 of leaf-like flattened zones of the trailer 3 are formed.

A device characterized in that the lower end 3 ' and the upper end 3 '' the trailer 3 each immediately adjacent a first bending zones 25 . 28 is assigned and that these first bending zones 25 . 28 each a second bending zone 26 . 27 is immediately adjacent.

A device characterized by a spacer element 13 arranged device for collecting eventual from the bellows 20 Soluble particles, in particular in the form of a shell 19 ,

A device characterized in that the upper end 3 '' of the hanger 3 by means of a pin breaking in the event of an overload 44 with a holding element 36 connected is.

A device characterized in that the upper end 3 '' of the hanger 3 a head piece 40 with a shoulder pointing down 40 ' is assigned by a flank 45 ' is adjacent, the trailer 3 such the holding element 36 is assigned that at break of the pin 44 the trailer 3 from gravity only to the distance of the shoulder 40 ' from the flank 45 ' is shifted downwards.

A device characterized in that the retaining element 36 by means of an adjusting ring 32 on a collar 30 the holding device 2 supported.

A device which is characterized in that the adjusting element 32 An adjusting ring is an internal thread 34 having, with an external thread 37 of the holding element 36 interacts.

A device characterized in that a plurality of hangers 3 each with its upper end 3 '' on the holding device 2 and with its lower end 3 ' at the gas inlet member 4 are attached and due to a thermal expansion of the gas inlet member 4 the angular position of the trailer 3 with respect to the surface normal to the plane of extent of the gas inlet member 4 changes, with the bending directions of each first bending zones 25 . 28 towards the center of the area 49 the floor plan area of the gas inlet member 4 are directed.

All disclosed features are essential to the invention (individually, but also in combination with one another). The disclosure of the associated / attached priority documents (copy of the prior application) is hereby also incorporated in full in the disclosure of the application, also for the purpose of including features of these documents in claims of the present application. The subclaims characterize with their features independent inventive developments of the prior art, in particular to make on the basis of these claims divisional applications.

LIST OF REFERENCE NUMBERS

1

reactor housing

2

holder

3

trailer

3 '

lower end

3 ''

top end

4

Gas inlet element

4 '

gas distribution chamber

5

susceptor

6

Coolant channel

7

Gas outlet

8th

tempering

9

Gas outlet plate

10

rear wall

11

lower fastening element

12

Upper fastening element

13

spacer

14

cavity

14 '

ground

14 ''

wall

15

foot

16

screw

17

screw

18

Federation

19

Bowl

20

scramble

21

lens

22

banjo

23

banjo

23 '

banjo

24

screw

25

bending zone

26

bending zone

27

bending zone

28

bending zone

29

Cylinder zone, middle section

30

collar

30 '

support zone

31

Opening, edge open

32

Adjusting ring

33

support section

34

inner thread

35

Tool engagement opening

36

retaining element

37

external thread

38

cavity

38 '

ground

39

drilling

40

headpiece

40 '

shoulder

41

Tool engagement opening

42

screw

43

Querkanal

44

retaining pin

45

mounting body

45 '

flank

46

screw

47

clamping element

47 '

opening

47 ''

poor

48

screw

49

space center

a

inclined position

b

vertical position

c

inclined position

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• DE 102014116991 A1 [0002]
• DE 102013101534 A1 [0002]
• JP 2013-187318 A [0002]
• CN 103103501 [0002]
• US 8721791 B2 [0003]
• US 2009/0133631 A1 [0003]

Claims (16)

Device for coating at least one substrate with one in a reactor housing ( 1 ) arranged gas inlet member ( 4 ) for feeding process gases into a process chamber which has a gas distribution chamber ( 4 ' ) having an outlet openings ( 7 ) having gas outlet plate ( 9 ) and a parallel extending rear wall ( 10 ), and with hangers ( 3 ) on the reactor housing ( 1 ), the hangers ( 1 ) spaced from a lateral edge of the gas inlet member ( 4 ) at the gas inlet member ( 4 ), characterized in that between the rear wall ( 10 ) and the gas outlet plate ( 9 ) Spacer elements ( 13 ) are provided, on which the gas outlet plate ( 9 ), the back wall ( 10 ) and a lower end ( 3 '' ) of the trailer ( 3 ) are attached. Device for coating at least one substrate with one in a reactor housing ( 1 ) arranged gas inlet member ( 4 ) for feeding process gases into a process chamber which has a gas distribution chamber ( 4 ' ) having an outlet openings ( 7 ) having gas outlet plate ( 9 ) and a parallel extending rear wall ( 10 ), and with hangers ( 3 ) on the reactor housing ( 1 ), the hangers ( 1 ) spaced from a lateral edge of the gas inlet member ( 4 ) at the gas inlet member ( 4 ), characterized in that the hangers ( 3 ) spaced apart in their extension direction first and second bending zones ( 25 to 28 ), wherein the first bending zone ( 25 . 28 ) only one bend in a first bending direction and the second bending zones ( 26 . 27 ) allow only a bend in a direction transverse to the first bending direction second bending direction. Device for coating at least one substrate with one in a reactor housing ( 1 ) arranged gas inlet member ( 4 ) for feeding process gases into a process chamber which has a gas distribution chamber ( 4 ' ) having an outlet openings ( 7 ) having gas outlet plate ( 9 ) and a parallel extending rear wall ( 10 ), and with hangers ( 3 ) on the reactor housing ( 1 ), the hangers ( 1 ) spaced from a lateral edge of the gas inlet member ( 4 ) at the gas inlet member ( 4 ), characterized in that an upper end ( 3 '' ) of the trailer ( 3 ) on a holding element ( 36 ), whose vertical position relative to the holding device ( 2 ) is adjustable. Device according to one or more of the preceding claims, characterized in that the rear wall ( 10 ) opposite the gas outlet plate ( 9 ) in the extension direction of the trailer ( 3 ) can shift slightly and to seal a bellows ( 20 ) is provided, which in particular with a first section on the spacer ( 13 ) and with a relative to the first section movable second section on the rear wall ( 10 ) is attached. Device according to one or more of the preceding claims, characterized in that the spacer element ( 13 ) a cavity ( 14 ) having a bottom ( 14 ' ), at which the lower end ( 3 ' ) of the trailer ( 3 ) is attached. Device according to one or more of the preceding claims, characterized in that the spacer element ( 13 ) Feet ( 15 ) fixed to the gas outlet plate ( 9 ) are connected. Device according to one or more of the preceding claims, characterized by a ring piece ( 23 ), which on the back wall ( 10 ) is attached to limit the displacement path of the spacer element ( 13 ) opposite the back wall ( 10 ). Device according to one or more of the preceding claims, characterized in that the bending zones ( 25 to 28 ) of leaf-like flattened zones of the hanger ( 3 ) are formed. Device according to one or more of the preceding claims, characterized in that the lower end ( 3 ' ) and the upper end ( 3 '' ) the trailer ( 3 ) immediately adjacent a first bending zones ( 25 . 28 ) and that these first bending zones ( 25 . 28 ) each have a second bending zone ( 26 . 27 ) is immediately adjacent. Device according to one or more of the preceding claims, characterized by a at the spacer ( 13 ) arranged device for collecting eventual from the bellows ( 20 ) dissolving particles, in particular in the form of a shell ( 19 ). Device according to one or more of the preceding claims, characterized in that the upper end ( 3 '' ) of the trailer ( 3 ) by means of an overload-breaking pin ( 44 ) with a holding element ( 36 ) connected is. Device according to one or more of the preceding claims, characterized in that the upper end ( 3 '' ) of the trailer ( 3 ) a head piece ( 40 ) with a shoulder pointing downwards ( 40 ' ), which depends on a flank ( 45 ' ) is adjacent, wherein the trailer ( 3 ) such the holding element ( 36 ) is assigned, that at break of the pen ( 44 ) the trailer ( 3 ) of gravity only around the distance of the shoulder ( 40 ' ) from the flank ( 45 ' ) is shifted downwards. Device according to one or more of the preceding claims, characterized in that the retaining element ( 36 ) by means of an adjusting ring ( 32 ) on a collar ( 30 ) of the holding device ( 2 ) is supported. Device according to one or more of the preceding claims, characterized in that the adjusting element ( 32 ) is an adjusting ring having an internal thread ( 34 ), which with an external thread ( 37 ) of the retaining element ( 36 ) cooperates. Device according to one or more of the preceding claims, characterized in that a plurality of hangers ( 3 ) each with their upper end ( 3 '' ) on the holding device ( 2 ) and with its lower end ( 3 ' ) at the gas inlet member ( 4 ) and due to a thermal expansion of the gas inlet member ( 4 ) the angular position of the trailer ( 3 ) with respect to the surface normal to the plane of extent of the gas inlet member ( 4 ), wherein the bending directions of the respective first bending zones ( 25 . 28 ) in the direction of the surface center ( 49 ) of the ground plan surface of the gas inlet member ( 4 ) are directed. Device characterized by one or more of the characterizing features of one of the preceding claims.

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