JP6654193B2 - Equipment for coating large area substrates - Google Patents

Description

  The present invention has a gas inlet member disposed within a reactor housing for supplying process gas to a process chamber, the gas inlet member extending parallel to a gas outlet plate having gas outlet holes. A gas distribution chamber having a rear wall that is attached to the reactor housing by a hanger, wherein the hanger is attached to the gas inlet member at a distance from a side edge of the gas inlet member. It relates to an apparatus for coating.

  Such a coating apparatus is used for coating a substrate. For this purpose, a substrate is placed in a process chamber where a CVD or PVD process is performed. Process gas is supplied to the process chamber using a gas distributor. Such a gas distributor is described in Patent Document 1 or Patent Document 2. From U.S. Pat. No. 5,049,095 a gas inlet member is known, which has a plurality of gas distribution chambers, which are arranged next to one another in one plane. Patent Document 4 describes a gas inlet member composed of a plurality of segments.

  From U.S. Pat. Nos. 5,059,086 and 5,086,086 a gas inlet member is known, which has a gas outlet surface with a gas outlet hole. The inlet member is attached upward by a holding member.

Published German Patent Application No. 10 2014 116 991 Published German Patent Application No. 10 2013 101 534 JP 2013-187318 A Chinese Patent Application Publication No. 103103501 U.S. Patent No. 8,721,791 U.S. Patent Application Publication No. 2009/0133631

  During the deposition of OLEDs, organic starting materials are used, which are supplied to a heated gas distributor with the aid of a carrier gas. Such a gas distributor can be a part of the gas inlet member. The process gas is supplied to a gas distribution chamber of a gas inlet member having a gas outlet surface having a gas passage hole and a back wall. The temperature of the gas inlet member is maintained at a value that avoids condensation of the organic starting material.

The floor of the process chamber is formed from a susceptor, on which one or more substrates are mounted. The gaseous starting material is carried to the surface of the substrate in the process chamber using a carrier gas, where it condenses to form a layer. To this end, the susceptor is temperature controlled to a temperature lower than the temperature of the gas inlet member. The susceptor is particularly cooled. Since the substrate can have a surface area of 1 m ² or more, it is necessary to make a coating device with a susceptor diagonal of 2-3 m. The gas inlet member must extend over the entire surface of the susceptor. Thus, the gas inlet member has a diagonal of 2-3 m. However, the height of the process chamber, defined above by the gas outlet surface and below by the susceptor surface, is only a few cm.

  It is an object of the present invention to further develop an apparatus according to the present invention that allows deposition on large area substrates in a process chamber.

  This problem is achieved by the invention as described in the claims, each claim constituting a separate solution to this problem.

  A first aspect of the present invention relates to fixing a lower end of a hanger to a gas inlet member. According to the invention, there is a spacer element between the back wall and the gas outlet plate. The gas outlet plate, the back wall, and the lower end of the hanger are attached to this spacer element. Preferably, a plurality of hangers are used inside the reactor housing to hold the gas inlet member, fixed to the holding device by their respective upper ends, the holding device being securely connected to the top of the reactor housing. Have been. By assigning each hanger to one spacer element, a plurality of spacer elements are arranged in the interstitial space between the back wall and the gas outlet plate. At least some of the hangers used for retaining the gas inlet member inside the reactor housing engage spacer elements spaced from the side edges of the gas inlet member and disperse on the base surface of the gas inlet member. are doing.

  A second aspect of the present invention relates to a hanger structure. According to the invention, the hanger has first and second curved zones spaced apart from each other in the direction of its extension. The first bending zone allows the hanger to bend only in the first bending direction. The second bending zone allows the hanger to bend only in the second bending direction. The first bending direction is perpendicular to the second bending direction. Assuming that the surface on which the gas inlet member, that is, the gas outlet plate and the rear wall extend is an XY plane, the hanger extends in the Z-axis direction. It is vertical. The hanger may have a slight inclination with respect to this Z-axis direction. The bending direction is in the XY plane and perpendicular to the bending axis provided by the bending zone. The hanger is arranged so that at least one of the two bending directions faces the center of the surface of the gas inlet member. This is because, when the gas inlet member is thermally expanded, it is assumed that the lower mounting point of each hanger is moved along a line facing the center of the plane. Preferably, the first bending direction is towards the center of the plane and the first bending zone is immediately next to the upper or lower end of the hanger.

  A third aspect of the invention relates to attaching the upper end of the hanger to the holding element. According to the present invention, the vertical position of the hanger with respect to the holding device can be adjusted. Advantageously, an adjusting element is provided, by means of which the vertical position of the hanger can be adjusted, so that the adjustment of the adjusting element allows the height of the process chamber to be adjusted at any hanger position. For this purpose, the top of the reactor housing has an opening through which an adjustment tool can be inserted to engage and adjust the adjustment element.

Further preferred developments of the above-mentioned aspects of the invention are those which can be implemented independently or in combination in the spirit of the invention and which further develop the prior art independently and are described below.
The spacer element forms the lower mounting element, whereby the lower end of the hanger is mounted on the gas outlet plate. The spacer element can have a cavity that opens upward and has a floor. The lower end of the hanger can be fixed to the floor of this cavity. This is preferably done with screws, which are threaded from below through threaded through holes in the floor and into the inner threads at the lower end of the hanger. Below the floor is provided a leg with a threaded through hole through which a mounting screw can be inserted, with which the leg is fixed to the gas outlet plate.
A bellows having a central hole into which the spacer element is inserted may also be provided. Thus, the spacer element is partially surrounded by the bellows. The lower end of the bellows is fixed to the spacer element, preferably to a collar that projects radially outward from the wall of the cavity. However, the lower end of the bellows can also be connected to a gas outlet plate. The upper end of the bellows is connected to a vertically movable element on the opposite side of the spacer element. This is a holding element and is rigidly connected to the back wall so that the back wall can be displaced slightly vertically in the opposite side of the gas outlet plate. The bellows has a first portion and a second portion displaceable with respect to the first portion. For this purpose, there is a bellows structure between the first part and the second part. The first part is preferably fixed to the spacer element and the second part is fixed to the back wall. A stop element is provided, which limits the vertical displacement of the rear wall with respect to the gas outlet plate. For this purpose, in particular, ring pieces or closure lids are provided.
The holding device provided in the upper region of the interior space of the reactor housing is preferably formed by a rigid, in particular lightweight, body. It can be a grid frame structure with cell walls extending perpendicular to each other. The upper end of the hanger is preferably attached to the holding device using a pin that breaks due to overload. To this end, the upper end of the hanger can have a lateral hole into which the pin is inserted. The pin has two ends. One end is inserted into a hole in the hanger. The other end of the pin is inserted into a hole in the mounting body and is preferably firmly connected to the holding element. If the axial force on the hanger exceeds the breaking strength of the pin, the pin will break. The hanger is displaced vertically downward by the effect of gravity. In order to prevent the gas inlet member held by the hanger from falling onto the susceptor, a safety rope in the form of a shoulder is provided on the head of the hanger. Its shoulder is vertically separated from the flank rigidly connected to the holding element. After the pin breaks, the hanger can only move down until the shoulder hits the flanks. For this purpose, the upper end of the hanger is mounted in the hole of the holding element so as to be movable vertically.
The adjusting element is preferably an adjusting ring, which has a radially outwardly directed collar, which is supported on a collar or flange of the holding device. The adjustment ring thus formed has one or more tool engagement holes that can be rotated. As the inner thread of the adjusting ring is screwed with the outer thread of the holding element, the screwing of the adjusting ring causes the holding element to move vertically. A clamping element is provided which is mounted vertically on the holding device. The clamping element exerts a vertically downward force on the holding element and also exerts a vertically downward force on the hanger as the upper end of the hanger is rigidly connected to the retaining element.
Examples of embodiments of the present invention will be described with reference to the accompanying drawings shown below.

FIG. 1 shows a schematic sectional view of a reactor housing having a susceptor 5 and a gas inlet member 4 connected via a hanger 3 to a holding device 3 mounted on the upper edge of the reactor housing 1. FIG. 2 also shows a schematic representation of a second embodiment of the invention, in which the upper end 3 "of the hanger 3 has an upper mounting element 12 and the lower end 3 'of the hanger 3 is a lower mounting element. 11, whereby the hanger 3 is attached to the gas inlet member 4. FIG. 3 is a longitudinal sectional view of the lower mounting element of the third embodiment of the present invention, having a spacer element 13 disposed between the gas outlet plate 9 of the gas inlet member 4 and the rear wall 10. FIG. 4 shows the hanger 3 with the lower mounting element 11. FIG. 5 is a sectional view taken along line VV in FIG. FIG. 6 is a perspective view showing a half of the lower mounting element 11 together with the hanger 3. FIG. 7 is a longitudinal sectional view of the upper mounting element 12, whereby the hanger 3 is connected to the holding device 2 (according to the section line VII-VII in FIG. 10). FIG. 8 is a perspective sectional view of the upper mounting element 12 of FIG. FIG. 9 shows the upper mounting element 12 together with the hanger 3. FIG. 10 is a plan view of the upper mounting element 12. FIG. 11 is a sectional view taken along line XI-XI in FIG. FIG. 12 is a sectional view taken along line XII-XII in FIG. FIG. 13 is a diagram schematically showing the arrangement of the second hanger 3 with respect to the plane center 49 of the gas inlet member 4 and a change in inclination due to heating of the gas inlet member 4.

  FIG. 1 schematically shows a housing 1 of a coating device for the deposition of an OLED. Inside the reactor housing 1 there is a susceptor 5 which can be cooled by a cooling medium channel 6. The susceptor 5 has a horizontally extending upper surface on which a substrate to be coated is placed. A gas inlet member extends vertically above the susceptor 5 so that process gas can be supplied to a process chamber between the lower surface of the gas inlet member 4 and the upper surface of the susceptor 5. For this purpose, the gas inlet member 4 has a gas outlet plate 9, which can be maintained at a temperature higher than the temperature of the susceptor 5 by a temperature control medium flowing through the temperature control channel 8. The gas outlet plate 9 has a plurality of substantially uniformly distributed sieve-arranged gas outlet holes 7, which connect the process chamber with the gas distribution chamber 4 ', which is connected to the rear wall 10'. Is closed vertically above.

  A plurality of hangers 3 are provided, whereby the gas inlet member 4 is attached to the holding device 2. The holding device 2 is preferably formed from a body made of a lattice frame-like lightweight structure, and is attached to the upper part of the housing 1. The holding device 2 is preferably attached to the reactor housing only at the edge of the horizontally extending contoured surface. Due to the hanger 3 being substantially evenly distributed over this contoured surface, the gas inlet member 4 is at a plurality of points which are evenly distributed over the entire base surface of the gas inlet member. Will be retained.

  FIG. 2 schematically shows a further embodiment in which the lower end 3 ′ of each hanger 3 is attached to the gas inlet member 4 by a lower attachment element 11, in which case The lower mounting element 11 also has a function of maintaining a gap between the gas outlet plate 9 and the rear wall 10. The upper end 3 "of the hanger 3 has an upper mounting element 12 by means of which the height of the hanger 3 can be adjusted.

  1 and 2 that at least some, and preferably most, hangers 3 are mounted not on the outer edge of the gas inlet member 4 but at a plurality of mounting points remote from the edge of the base surface of the gas inlet member 4. , Whereby the lower mounting element 11 is arranged inside the gas distribution chamber 4 '.

  3 to 6 show the configuration of the preferred embodiment of the lower mounting element 11. It has a space element 13 formed of a metal body. The spacer element 13 has a downwardly projecting leg 15. The legs 15 have holes in the axial direction, through which the screws 16 pass, the threaded shafts of the screws 16 being respectively screwed into the threaded holes of the gas outlet plate 9. Thus, the leg 15 abuts on the upward surface of the gas outlet plate 9.

  The spacer element 13 forms an upwardly open cavity 14, which has a floor 14 'and a wall 14 "surrounding the cavity 14 annularly. The floor 14' has two threaded through holes, The lower end 3 ′ of the hanger 3 is firmly connected to the floor 14 ′ by screwing each of the screws 17 through the through hole and screwing the screwed shaft to the inner thread of the lower end 3 ′ of the hanger 3.

  At approximately the level of the floor 14 ', a collar 18 projects radially outwardly from the wall 14 ". The lower end of the bellows 20 is fixed to this collar 18. The spacer element 13 extends through a hole in the bellows. The upper end of the bellows 20 is rigidly fixed to a ring piece 22, which abuts a closing lid 21 and is preferably rigidly connected to the closing lid 21. The closing lid 21 is also connected. , Abuts the edge of the opening in the back wall 10 through which the top of the wall 14 "extends. The closing lid 21 is covered by a ring piece 23 acting as a clamp piece. The ring piece 23 is screwed to the back wall 10 by a screw 24.

  The ring piece 23 has an opening through which the hanger 3 penetrates. Another ring piece 23 'having a smaller diameter opening is placed in this opening, and the hanger 3 penetrates the opening. The upper edge of the wall 14 "is vertically spaced from the ring piece 23 or the ring piece 23 'so that the rear wall 10 can be displaced slightly vertically in relation to the gas outlet plate 9. 20, the gas distribution chamber 4 'is hermetically sealed upward.

  An annular dish-shaped member 19 is attached to the collar 18. This is a collecting dish for receiving particles that may accumulate on the outer surface of the bellows structure of the bellows 20 and that may fall off during the mechanical movement of the bellows 20.

  The hanger 3 has a cylindrical cross section in the region of its upper end 3 "and lower end 3 '. It also comprises a central portion 29 with a circular cross section.

  There is a first curved zone 25 and a second curved zone 26 between the lower end 3 'and the central portion 29. Similarly, a first curved zone 28 and a second curved zone 27 are provided between the central portion 29 and the upper end 3 ″.

  Each of the first bending zones 25, 28 allows a degree of bending of the hanger 3 in a first bending direction about a first bending axis extending across it. The two second bending zones 26, 27 are in a second bending direction perpendicular to the first bending direction, around a second bending axis extending perpendicular to the first bending axis. Allows some curvature of the hanger 3.

  The first curved zones 25, 28 and the second curved zones 26, 27 are each formed by a flat portion of the hanger 3. They have substantially the shape of a leaf spring.

  Since the lower first curved zone 25 is directly connected to the lower end 3 ′, a part of the curved zone 25 is still located inside the cavity 14.

  The upper first curved zone 28 is directly connected to a holding element 36 by means of which the upper end 3 ″ is connected to the holding device 2.

  The holding element 36 has a vertically extending hole into which the upper end 3 "of the hanger 3 is inserted. Into the cavity 38 of the holding element 36 is mounted on a floor 38 'of the cavity 38. There is a member 45. The mounting member 45 is ring-shaped, the ring hole of which is connected to the hole of the holding element 36. The wide surface of the mounting member 45 opposite the floor 38 'forms a flank 45'.

  The upper surface of the upper end 3 "of the hanger 3 is connected to the head piece 40 by a screw 42. The head piece 40 has a lower portion at the same height position as the upper end 3". The headpiece 40 has a radially projecting collar which has a shoulder 40 'facing downwardly the flank 45'. The shoulder 40 'is vertically spaced from the flank 45'.

  A lateral channel or hole 43 is formed in a boundary region between the upper end 3 "and the lower surface of the head piece 40, and a holding pin 44 is inserted therein. The horizontal hole 43 is a prismatic clamp jack. , Whereby the holding pin 44 is gripped and fixed to the lateral hole 43 by the screw 42.

  One end of the holding pin 44 is engaged with the lateral hole 43. The other end of the holding pin 44 is engaged with a hole of the mounting member 45, and the mounting member 45 is connected to the floor 38 'by a screw 46. The tensile force applied to the hanger 3 is transmitted to the holding element 36 via the holding pin 44. If this pulling force exceeds the limit force corresponding to the breaking strength of the retaining pin 44, the retaining pin will break. The hanger 3 can then move downward by the separation distance between the flank 45 'and the shoulder 40'. Since the unavoidable movement caused by gravity causes the shoulder 40 'to collide with the flank 45', the gas inlet member 4 is prevented from falling onto the susceptor 5 when the retaining pin 44 is broken by applying an overload.

  The holding pin 44 also has a function as a mark. The transverse hole 43 extends in the first bending direction of the first bending zone 28.

  The retaining element 36 has an outer thread 37. The inner thread 34 of the adjustment ring 32 is screwed into the outer thread 37. The adjusting ring 32 at the same time constitutes a retaining ring, whereby the retaining element 36 is mounted on the retaining device 2. To this end, the adjusting ring 32 has a support 33 projecting in the radial direction, and the support 33 is mounted on the support area 30 ′ of the flange 30 of the holding device 2. The adjustment ring 32 has a tool engagement hole 35 through which an adjustment tool can be engaged to rotate the adjustment ring 32. As a result of such rotation of the adjusting ring 32, the holding element 36 and the hanger 3 are moved vertically. In order to prevent the hanger 3 or the holding element 36 from rotating, the head piece 40 non-rotatably connected to the hanger 3 has a holding / engaging tool engagement hole 41.

  A clamping element 47 having a substantially star shape is provided. It has a hole 47 'through which the cavity 38 is accessible. Protruding from the annulus of the clamping element 47 are radial arms 47 "which can be mounted on a threaded shaft of a screw 48. The head of the screw 48 engages the flange 30 from below. Has a notch 31 which opens radially, through which a threaded part directly connected to the head of a screw 48 passes, the screw 48 being fixed to the flange 30 by means of a nut. Has the function of a hole-down device, which prevents the vertically aligned holding element 36 from displacing upwards.

  In order to adjust the vertical position of the hanger 3, the nut of the screw 48 must be loosened. Thereafter, the adjustment ring 32 can be turned. At that time, the head piece 40 is held. After the adjustment process is completed, the nut of the screw 48 is tightened, so that the lower surface of the clamp element 47 is placed on the upper surface of the holding element 36.

  FIG. 13 schematically shows the holding device 2 and the gas inlet member 4 arranged thereunder, and the plane center of the gas inlet member 4 is indicated by a line 49. Any point on the base surface of the gas inlet member 4 moves on a line passing through the plane center 49 when the temperature of the gas inlet member 4 changes. The hanger 3 is oriented such that the bending direction of the first bending zones 24, 25 is directed toward the plane center 49. Since the holding pin 44 extends in the first bending direction, this can be performed with the aid of the function of the holding pin 44 as a mark during assembly.

  During thermal expansion, the hanger 3 at the basic position of the inclined position c can be displaced to the vertical position b. However, the hanger 3 can be further displaced to the inclined position a. It is also possible that the hanger 3 is suspended vertically in the basic position, and can be displaced to the inclined position a when the gas inlet member 4 is heated.

  The above description is for describing the invention comprehensively covered by the present application, and further advances the related art by at least the combination of the following features. That is:

  A device characterized in that a spacer element 13 is provided between the back wall 10 and the gas outlet plate 9, to which the gas outlet plate 9, the back wall 10 and the lower end 3 ′ of the hanger 3 are mounted. .

  The hanger 3 has first and second bending zones 25 to 28 spaced apart from each other in the direction of extension, the first bending zones 25, 28 permit bending only in the first bending direction, and Apparatus characterized in that the second bending zones 26, 27 allow bending only in a second bending direction perpendicular to the first bending direction.

  Device, characterized in that the upper end 3 "of the hanger 3 is mounted on a holding element 36 whose vertical position with respect to the holding device 2 is adjustable.

The rear wall 10 opposite the gas outlet plate 9 can be displaced slightly in the direction of extension of the hanger 3 and is provided with a bellows 20 for hermeticity, the bellows 20 being, in particular, a first part. apparatus characterized by with attached to the spacer element 13 is attached to the back wall 10 by a second portion can be displaced relative to the first portion by.

  An apparatus, characterized in that the spacer element 13 has a cavity 14 with a floor 14 ', on which the lower end 3' of the hanger 3 is mounted.

  Device, characterized in that the spacer element (13) has legs (15) rigidly connected to the gas outlet plate (9).

  Device characterized by a ring piece 23 attached to the back wall 10 to limit the displacement travel of the spacer element 13 relative to the back wall 10.

  The device according to claim 1, wherein the curved zones (25 to 28) are formed by flat portions of the hanger (3) in a leaf spring shape.

  The lower end 3 ′ and the upper end 3 ″ of the hanger 3 are arranged immediately next to the first curved zones 25, 28, respectively, and these first curved zones 25, 28 are respectively connected to the second curved zones 26, 27. The device immediately adjacent to 27.

  An apparatus characterized in that it is arranged on the spacer element 13, in particular in the form of a dish 19, for collecting particles that may detach from the bellows 20.

  Device, characterized in that the upper end 3 "of the hanger 3 is connected to the holding element 36 by a pin 44 which breaks in case of an overload.

  A head piece 40 with a downward shoulder 40 'adjacent to the flank 45' is located at the upper end 3 "of the hanger 3, so that when the pin 44 breaks, the hanger 3 is displaced from the flank 45 'by gravity. The hanger 3 is arranged on the holding element 36 so as to be displaced downward by a distance up to '.

  Device, characterized in that the holding element (36) is supported on the flange (30) of the holding device (2) by an adjusting ring (32).

  The device characterized in that the adjusting element 32 is an adjusting ring having an inner thread 34 and is screwed with an outer thread 37 of the holding element 36.

  Each of the plurality of hangers 3 is attached to the holding device 2 by its upper end 3 "and attached to the gas inlet member 4 by its lower end 3 ', and the gas inlet member 4 is thermally expanded by the gas inlet member 4. Of the hanger 3 relative to the surface normal to the plane of extension of the gas inlet member 4, the bending direction of each of the first bending zones 25, 28 A device characterized in that it is directed towards

  All the features disclosed (in themselves and in combination with each other) are the essence of the invention. The disclosure of the present application also includes the related priority documents (copy of the earlier application) in their entirety, including for the purpose of incorporating the features of those documents into the claims of the present application. Dependent claims are characterized by their construction and are independent and inventive improvements over the prior art, in particular for filing divisional applications based on these claims.

DESCRIPTION OF SYMBOLS 1 Reactor housing 2 Holding device 3 Hanger 3 'Lower end 3 "Upper end 4 Gas inlet member 4' Gas distribution chamber 5 Susceptor 6 Coolant channel 7 Gas outlet hole 8 Temperature control channel 9 Gas outlet plate 10 Rear wall 11 Lower mounting element 12 Upper mounting element 13 Spacer element 14 Cavity 14 'Floor 14 "Wall 15 Leg 16 Screw 17 Screw 18 Collar 19 Plate 20 Bellows 21 Closing lid 22 Ring piece 23 Ring piece 23' Ring piece 24 Screw 25 Curved zone 26 Curved zone 27 Curved zone 28 Curved zone 29 Cylindrical zone, middle part 30 Flange 30 'Support area 31 Notch, edge opening 32 Adjustment ring 33 Support 34 Inner thread 35 Tool engagement hole 36 Holding element 37 Outer thread 38 Cavity 38' Floor 39 holes 40 head piece 40 'shoulder 41 tsu Tool engaging hole 42 Screw 43 Side hole 44 Holding pin 45 Mounting member 45 'Frank 46 Screw 47 Clamping element 47' Opening 47 "Arm 48 Screw 49 Center of surface a Tilt position b Vertical position c Tilt position

Claims (14)

A gas inlet member (4) arranged in the reactor housing (1) for supplying process gas to the process chamber, the gas inlet member having a gas outlet plate (9) having an outlet hole (7) and a gas outlet plate (9) parallel thereto. And a gas distribution chamber (4 ') with a rear wall (10) extending to the reactor housing (1) by a hanger (3), wherein the hanger (3) An apparatus for coating at least one substrate attached to a gas inlet member (4) spaced apart from a side edge of the inlet member (4),
A spacer element (13) is provided between the back wall (10) and the gas outlet plate (9), for which the gas outlet plate (9), the back wall (10) and the lower end (3) of the hanger (3) are provided. ') And an attached device. A gas inlet member (4) arranged in the reactor housing (1) for supplying process gas to the process chamber, the gas inlet member having a gas outlet plate (9) having an outlet hole (7) and a gas outlet plate (9) parallel thereto. And a gas distribution chamber (4 ') with a rear wall (10) extending to the reactor housing (1) by a hanger (3), wherein the hanger (3) An apparatus for coating at least one substrate attached to a gas inlet member (4) spaced apart from a side edge of the inlet member (4),
The hanger (3) has first and second curved zones (25-28) spaced apart from each other in the direction of its extension, wherein the first curved zone (25, 28) has a first curved direction. The second bending zone (26, 27) allows bending only in a second bending direction perpendicular to the first bending direction. A gas inlet member (4) arranged in the reactor housing (1) for supplying process gas to the process chamber, the gas inlet member having a gas outlet plate (9) having an outlet hole (7) and a gas outlet plate (9) parallel thereto. And a gas distribution chamber (4 ') with a rear wall (10) extending to the reactor housing (1) by a hanger (3), wherein the hanger (3) An apparatus for coating at least one substrate attached to a gas inlet member (4) spaced apart from a side edge of the inlet member (4),
The upper end (3 ") of the hanger (3) is mounted on a holding element (36) whose vertical position with respect to the holding device (2) is adjustable , the holding element (36) being an outer thread (37). And an inner thread (34) of the adjusting ring (32) is screwed to the outer thread (37), and
A clamping element (47) is provided, said clamping element (47) having the function of a hole-down device for preventing the vertically aligned holding element (36) from displacing upwards. Equipment to do. The rear wall (10) opposite the gas outlet plate (9) can be displaced slightly in the direction of extension of the hanger (3), and a bellows (20) is provided for airtightness, and the bellows is provided. (20) is characterized in that it is attached to the spacer element (13) by a first part and to the back wall (10) by a second part displaceable with respect to the first part. The apparatus according to claim 1, wherein:   The spacer element (13) has a cavity (14) with a floor (14 ') to which the lower end (3') of the hanger (3) is attached. An apparatus according to claim 1.   Device according to claim 1, 4 or 5, characterized in that the spacer element (13) has legs (15) rigidly connected to the gas outlet plate (9). Claim 1, wherein the ring piece is attached to the back wall (10) and (23) to limit the displacement travel for the back wall (10) of the spacer elements (13), 4,5, or 6 An apparatus according to claim 1.   Device according to claim 2, characterized in that the curved zone (25-28) is formed by a leaf spring-like flat part in the hanger (3). The lower end (3 ') and the upper end (3 ") of the hanger (3) are respectively located immediately next to the first curved zones (25, 28) and these first curved zones (25, 28). 9. The device according to claim 2 or 8, characterized in that each of the two) is immediately next to the second curved zone (26, 27). 7. A device according to claim 4, characterized in that a device is arranged on the spacer element (13) in the form of a dish (19) for collecting particles that may detach from the bellows (20). apparatus. Device according to claim 3 , characterized in that the upper end (3 ") of the hanger (3) is connected to the holding element ( 36) by a pin (44) which breaks in case of an overload.   A head piece (40) with a downward shoulder (40 ') adjacent to the flanks (45') is located at the upper end (3 ") of the hanger (3) and when the pin (44) breaks. The hanger (3) is arranged on the holding element (36) such that the hanger (3) is displaced downward by the distance from the flank (45 ') to the shoulder (40') by gravity. An apparatus according to claim 11. 13. Device according to claim 3, wherein the holding element (36) is supported on a flange (30) of the holding device (2) by an adjusting ring (32). Each of the plurality of hangers (3) is attached to the holding device (2) by its upper end (3 ") and to the gas inlet member 4 by its lower end (3 '), and is connected to the gas inlet member (4). ) Changes the angular position of the hanger (3) with respect to the plane normal to the plane of extension of the gas inlet member (4), in which case each of the first curved zones (25, 28) 10. The device according to claim 2 , wherein the direction of curvature is directed towards a plane center (49) of the base surface of the gas inlet member (4).

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