DE102014102681A1 - Statorscheibe - Google Patents
Statorscheibe Download PDFInfo
- Publication number
- DE102014102681A1 DE102014102681A1 DE102014102681.0A DE102014102681A DE102014102681A1 DE 102014102681 A1 DE102014102681 A1 DE 102014102681A1 DE 102014102681 A DE102014102681 A DE 102014102681A DE 102014102681 A1 DE102014102681 A1 DE 102014102681A1
- Authority
- DE
- Germany
- Prior art keywords
- sheet metal
- stator disk
- stator
- individual sheet
- metal part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/64—Mounting; Assembling; Disassembling of axial pumps
- F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102014102681.0A DE102014102681A1 (de) | 2014-02-28 | 2014-02-28 | Statorscheibe |
EP15152240.6A EP2913533B1 (de) | 2014-02-28 | 2015-01-23 | Statorscheibe |
JP2015036440A JP6166296B2 (ja) | 2014-02-28 | 2015-02-26 | ステータディスク |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102014102681.0A DE102014102681A1 (de) | 2014-02-28 | 2014-02-28 | Statorscheibe |
Publications (1)
Publication Number | Publication Date |
---|---|
DE102014102681A1 true DE102014102681A1 (de) | 2015-09-03 |
Family
ID=52394162
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE102014102681.0A Withdrawn DE102014102681A1 (de) | 2014-02-28 | 2014-02-28 | Statorscheibe |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2913533B1 (ja) |
JP (1) | JP6166296B2 (ja) |
DE (1) | DE102014102681A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6586275B2 (ja) * | 2015-01-30 | 2019-10-02 | エドワーズ株式会社 | 真空ポンプ |
JP7108377B2 (ja) | 2017-02-08 | 2022-07-28 | エドワーズ株式会社 | 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1503704B2 (de) * | 1966-12-30 | 1971-08-19 | Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar | Schaufelkranz fuer ein lauf und oder leitrad einer turbomolekularpumpe |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3013083B2 (ja) * | 1998-06-23 | 2000-02-28 | セイコー精機株式会社 | ターボ分子ポンプ |
JP4527966B2 (ja) * | 2003-05-01 | 2010-08-18 | 株式会社大阪真空機器製作所 | 分子ポンプ |
JP4676731B2 (ja) * | 2004-09-10 | 2011-04-27 | エドワーズ株式会社 | ターボ分子ポンプ固定翼及び真空ポンプ |
DE102006050565A1 (de) * | 2006-10-26 | 2008-04-30 | Pfeiffer Vacuum Gmbh | Statorscheibe für eine Turbomolekularpumpe |
ITTO20100070A1 (it) * | 2010-02-01 | 2011-08-02 | Varian Spa | Pompa da vuoto, in particolare pompa da vuoto turbomolecolare. |
JP5786639B2 (ja) * | 2011-10-24 | 2015-09-30 | 株式会社島津製作所 | ターボ分子ポンプ |
-
2014
- 2014-02-28 DE DE102014102681.0A patent/DE102014102681A1/de not_active Withdrawn
-
2015
- 2015-01-23 EP EP15152240.6A patent/EP2913533B1/de active Active
- 2015-02-26 JP JP2015036440A patent/JP6166296B2/ja active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1503704B2 (de) * | 1966-12-30 | 1971-08-19 | Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar | Schaufelkranz fuer ein lauf und oder leitrad einer turbomolekularpumpe |
Also Published As
Publication number | Publication date |
---|---|
JP2015165135A (ja) | 2015-09-17 |
EP2913533B1 (de) | 2020-01-08 |
EP2913533A1 (de) | 2015-09-02 |
JP6166296B2 (ja) | 2017-07-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R163 | Identified publications notified | ||
R005 | Application deemed withdrawn due to failure to request examination |