DE102014102681A1 - Statorscheibe - Google Patents

Statorscheibe Download PDF

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Publication number
DE102014102681A1
DE102014102681A1 DE102014102681.0A DE102014102681A DE102014102681A1 DE 102014102681 A1 DE102014102681 A1 DE 102014102681A1 DE 102014102681 A DE102014102681 A DE 102014102681A DE 102014102681 A1 DE102014102681 A1 DE 102014102681A1
Authority
DE
Germany
Prior art keywords
sheet metal
stator disk
stator
individual sheet
metal part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102014102681.0A
Other languages
German (de)
English (en)
Inventor
Tobias Stoll
Marco Antonacci
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to DE102014102681.0A priority Critical patent/DE102014102681A1/de
Priority to EP15152240.6A priority patent/EP2913533B1/de
Priority to JP2015036440A priority patent/JP6166296B2/ja
Publication of DE102014102681A1 publication Critical patent/DE102014102681A1/de
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
DE102014102681.0A 2014-02-28 2014-02-28 Statorscheibe Withdrawn DE102014102681A1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE102014102681.0A DE102014102681A1 (de) 2014-02-28 2014-02-28 Statorscheibe
EP15152240.6A EP2913533B1 (de) 2014-02-28 2015-01-23 Statorscheibe
JP2015036440A JP6166296B2 (ja) 2014-02-28 2015-02-26 ステータディスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014102681.0A DE102014102681A1 (de) 2014-02-28 2014-02-28 Statorscheibe

Publications (1)

Publication Number Publication Date
DE102014102681A1 true DE102014102681A1 (de) 2015-09-03

Family

ID=52394162

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102014102681.0A Withdrawn DE102014102681A1 (de) 2014-02-28 2014-02-28 Statorscheibe

Country Status (3)

Country Link
EP (1) EP2913533B1 (ja)
JP (1) JP6166296B2 (ja)
DE (1) DE102014102681A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6586275B2 (ja) * 2015-01-30 2019-10-02 エドワーズ株式会社 真空ポンプ
JP7108377B2 (ja) 2017-02-08 2022-07-28 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1503704B2 (de) * 1966-12-30 1971-08-19 Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar Schaufelkranz fuer ein lauf und oder leitrad einer turbomolekularpumpe

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3013083B2 (ja) * 1998-06-23 2000-02-28 セイコー精機株式会社 ターボ分子ポンプ
JP4527966B2 (ja) * 2003-05-01 2010-08-18 株式会社大阪真空機器製作所 分子ポンプ
JP4676731B2 (ja) * 2004-09-10 2011-04-27 エドワーズ株式会社 ターボ分子ポンプ固定翼及び真空ポンプ
DE102006050565A1 (de) * 2006-10-26 2008-04-30 Pfeiffer Vacuum Gmbh Statorscheibe für eine Turbomolekularpumpe
ITTO20100070A1 (it) * 2010-02-01 2011-08-02 Varian Spa Pompa da vuoto, in particolare pompa da vuoto turbomolecolare.
JP5786639B2 (ja) * 2011-10-24 2015-09-30 株式会社島津製作所 ターボ分子ポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1503704B2 (de) * 1966-12-30 1971-08-19 Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar Schaufelkranz fuer ein lauf und oder leitrad einer turbomolekularpumpe

Also Published As

Publication number Publication date
JP2015165135A (ja) 2015-09-17
EP2913533B1 (de) 2020-01-08
EP2913533A1 (de) 2015-09-02
JP6166296B2 (ja) 2017-07-19

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Legal Events

Date Code Title Description
R163 Identified publications notified
R005 Application deemed withdrawn due to failure to request examination