DE102012214559A8 - Graphen- und Nanoröhrchen-/Nanodraht-Transistor mit einer selbstausgerichteten Gate-Elektrodenstruktur auf transparenten Substraten und Verfahren zur Herstellung desselben - Google Patents

Graphen- und Nanoröhrchen-/Nanodraht-Transistor mit einer selbstausgerichteten Gate-Elektrodenstruktur auf transparenten Substraten und Verfahren zur Herstellung desselben Download PDF

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DE102012214559A8
DE102012214559A8 DE201210214559 DE102012214559A DE102012214559A8 DE 102012214559 A8 DE102012214559 A8 DE 102012214559A8 DE 201210214559 DE201210214559 DE 201210214559 DE 102012214559 A DE102012214559 A DE 102012214559A DE 102012214559 A8 DE102012214559 A8 DE 102012214559A8
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self
dielectric layer
transparent substrates
nanotube
graphene
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DE102012214559B4 (de
DE102012214559A1 (de
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Wilfried Ernst-August Haensch
Zihong Liu
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GlobalFoundries US Inc
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International Business Machines Corp
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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
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  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
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  • Nanotechnology (AREA)
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  • Materials Engineering (AREA)
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  • Electromagnetism (AREA)
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  • Non-Volatile Memory (AREA)
  • Electrodes Of Semiconductors (AREA)
DE102012214559.1A 2011-11-01 2012-08-16 Graphen- und Nanoröhrchen-/Nanodraht-Transistor mit einer selbstausgerichteten Gate-Elektrodenstruktur auf transparenten Substraten und Verfahren zur Herstellung desselben Active DE102012214559B4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/286,394 US8569121B2 (en) 2011-11-01 2011-11-01 Graphene and nanotube/nanowire transistor with a self-aligned gate structure on transparent substrates and method of making same
US13/286,394 2011-11-01

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DE102012214559A1 DE102012214559A1 (de) 2013-05-02
DE102012214559A8 true DE102012214559A8 (de) 2013-07-04
DE102012214559B4 DE102012214559B4 (de) 2018-07-05

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US (3) US8569121B2 (de)
DE (1) DE102012214559B4 (de)
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US20140042393A1 (en) 2014-02-13
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US9064748B2 (en) 2015-06-23

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