DE102007003280A1 - Piezoelektrisches Bauelement - Google Patents

Piezoelektrisches Bauelement Download PDF

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Publication number
DE102007003280A1
DE102007003280A1 DE102007003280A DE102007003280A DE102007003280A1 DE 102007003280 A1 DE102007003280 A1 DE 102007003280A1 DE 102007003280 A DE102007003280 A DE 102007003280A DE 102007003280 A DE102007003280 A DE 102007003280A DE 102007003280 A1 DE102007003280 A1 DE 102007003280A1
Authority
DE
Germany
Prior art keywords
electrodes
component
piezoelectric
transducer elements
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102007003280A
Other languages
German (de)
English (en)
Inventor
Günter Dr. Engel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Electronics AG
Original Assignee
Epcos AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epcos AG filed Critical Epcos AG
Priority to DE102007003280A priority Critical patent/DE102007003280A1/de
Priority to PCT/EP2008/050578 priority patent/WO2008090095A1/de
Priority to JP2009546721A priority patent/JP5474564B2/ja
Priority to EP08701584.8A priority patent/EP2126992B1/de
Publication of DE102007003280A1 publication Critical patent/DE102007003280A1/de
Priority to US12/508,285 priority patent/US8072119B2/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/304—Beam type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/308—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/02—Microphones

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
DE102007003280A 2007-01-23 2007-01-23 Piezoelektrisches Bauelement Withdrawn DE102007003280A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE102007003280A DE102007003280A1 (de) 2007-01-23 2007-01-23 Piezoelektrisches Bauelement
PCT/EP2008/050578 WO2008090095A1 (de) 2007-01-23 2008-01-18 Piezoelektrisches bauelement
JP2009546721A JP5474564B2 (ja) 2007-01-23 2008-01-18 圧電素子
EP08701584.8A EP2126992B1 (de) 2007-01-23 2008-01-18 Piezoelektrisches bauelement
US12/508,285 US8072119B2 (en) 2007-01-23 2009-07-23 Piezoelectric component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102007003280A DE102007003280A1 (de) 2007-01-23 2007-01-23 Piezoelektrisches Bauelement

Publications (1)

Publication Number Publication Date
DE102007003280A1 true DE102007003280A1 (de) 2008-07-24

Family

ID=39323675

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102007003280A Withdrawn DE102007003280A1 (de) 2007-01-23 2007-01-23 Piezoelektrisches Bauelement

Country Status (5)

Country Link
US (1) US8072119B2 (https=)
EP (1) EP2126992B1 (https=)
JP (1) JP5474564B2 (https=)
DE (1) DE102007003280A1 (https=)
WO (1) WO2008090095A1 (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009038306A1 (de) * 2009-08-21 2011-02-24 Albert-Ludwigs-Universität Freiburg Frequenzabstimmbarer Resonator und Verfahren zum Betreiben eines solchen
DE102010018875A1 (de) * 2010-04-30 2011-11-03 Siemens Aktiengesellschaft Piezogenerator mit verschiedenen Piezoelementen und elektronische Schaltung
DE102011005360A1 (de) * 2011-03-10 2012-09-13 Brose Fahrzeugteile Gmbh & Co. Kg, Hallstadt Antriebseinrichtung mit aktiv gelagerter Antriebswelle
DE102015212586B3 (de) * 2015-07-06 2017-01-12 Festo Ag & Co. Kg Antriebsvorrichtung mit mehreren Polymeraktuatoren

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008028885A1 (de) 2008-06-18 2009-12-31 Epcos Ag Verfahren zur Abstimmung einer Resonanzfrequenz eines piezoelektrischen Bauelementes
US8556850B2 (en) 2008-12-31 2013-10-15 St. Jude Medical, Atrial Fibrillation Division, Inc. Shaft and handle for a catheter with independently-deflectable segments
US8676290B2 (en) 2010-05-11 2014-03-18 St. Jude Medical, Atrial Fibrillation Division, Inc. Multi-directional catheter control handle
JP5586248B2 (ja) * 2010-01-27 2014-09-10 京セラ株式会社 圧電積層部品
US9066183B2 (en) * 2010-04-15 2015-06-23 Panasonic Intellectual Property Management Co., Ltd. Piezoelectric speaker
US9289147B2 (en) * 2010-05-11 2016-03-22 St. Jude Medical, Atrial Fibrillation Division, Inc. Multi-directional flexible wire harness for medical devices
USD726905S1 (en) 2011-05-11 2015-04-14 St. Jude Medical, Atrial Fibrillation Division, Inc. Control handle for a medical device
JP5832000B2 (ja) * 2011-12-20 2015-12-16 太陽誘電株式会社 圧電発音体及びそれを利用した電子機器
JP5665836B2 (ja) 2011-12-20 2015-02-04 太陽誘電株式会社 圧電発音体及びそれを利用した電子機器
US9445200B2 (en) * 2012-05-14 2016-09-13 Electronics And Telecommunications Research Institute Piezoelectric speaker having weight and method of producing the same
IL225374A0 (en) * 2013-03-21 2013-07-31 Noveto Systems Ltd Array@Matamari
KR102279955B1 (ko) * 2019-12-02 2021-07-22 주식회사 이엠텍 캔틸레버 구조의 압전 소자를 이용한 음성 진동 센서
CN118660611B (zh) * 2024-08-22 2024-11-15 大连芯材薄膜技术有限公司 一种双层反向自发极化纤锌矿薄膜并联式压电传感器及制备方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2202254B1 (de) * 1972-01-18 1973-06-20 Siemens Ag Elektroakustischer Wandler,insbesondere Mikrophon fuer Fernsprechanlagen
US5278471A (en) * 1991-09-10 1994-01-11 Nec Corporation Piezoelectric ceramic transformer
DE19802302A1 (de) * 1998-01-22 1999-07-29 Bosch Gmbh Robert Piezoelektrischer Aktor
US6346764B1 (en) 2000-12-15 2002-02-12 Face International Corp. Multilayer piezoelectric transformer
US7003858B2 (en) * 1998-12-01 2006-02-28 Murata Manufacturing Co., Ltd. Method of manufacturing multilayer piezoelectric component
DE102005015600A1 (de) * 2005-04-05 2006-10-12 Epcos Ag Piezoelektrischer Transformator

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3142684A1 (de) * 1981-10-28 1983-05-05 Philips Patentverwaltung Gmbh, 2000 Hamburg "elektromechanischer wandler"
JPS60178677A (ja) * 1984-02-24 1985-09-12 Nippon Telegr & Teleph Corp <Ntt> 屈曲形圧電アクチユエ−タ
US4936303A (en) * 1987-11-20 1990-06-26 Ultrathermics Ultrasonic heating apparatus and method
JPH01261879A (ja) * 1988-04-13 1989-10-18 Jgc Corp 積層型変位素子
AU6719290A (en) * 1990-09-28 1992-04-28 Caterpillar Inc. Piezoelectric solid state motor stack
JPH08279631A (ja) * 1995-04-05 1996-10-22 Brother Ind Ltd 積層型圧電素子の製造方法
JP4578596B2 (ja) * 1998-09-18 2010-11-10 セイコーインスツル株式会社 振動子、圧電アクチュエータおよびこれらを用いた電子機器
CN101039085A (zh) * 1998-12-21 2007-09-19 精工爱普生株式会社 压电驱动装置
EP1186063B1 (en) * 1999-05-31 2006-07-12 Nanomotion Ltd. Multilayer piezoelectric motor
AU2001288481A1 (en) * 2000-08-30 2002-03-13 The Penn State Research Foundation Class v flextensional transducer with directional beam patterns
JP4095439B2 (ja) * 2000-10-20 2008-06-04 富士通株式会社 圧電アクチュエータ
JP4576738B2 (ja) * 2001-03-29 2010-11-10 ブラザー工業株式会社 圧電トランスデューサおよび液滴噴射装置
AR033080A1 (es) * 2001-04-02 2003-12-03 Sentec Ltd Sensor de corriente
JP3729103B2 (ja) * 2001-08-28 2005-12-21 株式会社村田製作所 圧電装置、ラダー型フィルタ及び圧電装置の製造方法
JP2003164174A (ja) * 2001-11-27 2003-06-06 Taiheiyo Cement Corp 圧電アクチュエータ
DE10224566A1 (de) 2002-06-03 2003-12-18 Epcos Ag Elektrisches Vielschichtbauelement

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2202254B1 (de) * 1972-01-18 1973-06-20 Siemens Ag Elektroakustischer Wandler,insbesondere Mikrophon fuer Fernsprechanlagen
US5278471A (en) * 1991-09-10 1994-01-11 Nec Corporation Piezoelectric ceramic transformer
DE19802302A1 (de) * 1998-01-22 1999-07-29 Bosch Gmbh Robert Piezoelektrischer Aktor
US7003858B2 (en) * 1998-12-01 2006-02-28 Murata Manufacturing Co., Ltd. Method of manufacturing multilayer piezoelectric component
US6346764B1 (en) 2000-12-15 2002-02-12 Face International Corp. Multilayer piezoelectric transformer
DE102005015600A1 (de) * 2005-04-05 2006-10-12 Epcos Ag Piezoelektrischer Transformator

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009038306A1 (de) * 2009-08-21 2011-02-24 Albert-Ludwigs-Universität Freiburg Frequenzabstimmbarer Resonator und Verfahren zum Betreiben eines solchen
WO2011020613A3 (de) * 2009-08-21 2011-06-03 Albert-Ludwigs-Universität Freiburg Frequenzabstimmbarer resonator und verfahren zum betreiben eines solchen
DE102010018875A1 (de) * 2010-04-30 2011-11-03 Siemens Aktiengesellschaft Piezogenerator mit verschiedenen Piezoelementen und elektronische Schaltung
DE102011005360A1 (de) * 2011-03-10 2012-09-13 Brose Fahrzeugteile Gmbh & Co. Kg, Hallstadt Antriebseinrichtung mit aktiv gelagerter Antriebswelle
US9103370B2 (en) 2011-03-10 2015-08-11 Brose Fahrzeugteile Gmbh & Co. Kommanditgesellschaft, Hallstadt Driving device having an actively supported drive shaft
DE102015212586B3 (de) * 2015-07-06 2017-01-12 Festo Ag & Co. Kg Antriebsvorrichtung mit mehreren Polymeraktuatoren

Also Published As

Publication number Publication date
EP2126992B1 (de) 2015-03-04
JP2010517282A (ja) 2010-05-20
EP2126992A1 (de) 2009-12-02
JP5474564B2 (ja) 2014-04-16
US8072119B2 (en) 2011-12-06
WO2008090095A1 (de) 2008-07-31
US20100007243A1 (en) 2010-01-14

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
R120 Application withdrawn or ip right abandoned

Effective date: 20140630