DE10008545A1 - Monolithisch integriertes Halbleiterbauelement - Google Patents
Monolithisch integriertes HalbleiterbauelementInfo
- Publication number
- DE10008545A1 DE10008545A1 DE10008545A DE10008545A DE10008545A1 DE 10008545 A1 DE10008545 A1 DE 10008545A1 DE 10008545 A DE10008545 A DE 10008545A DE 10008545 A DE10008545 A DE 10008545A DE 10008545 A1 DE10008545 A1 DE 10008545A1
- Authority
- DE
- Germany
- Prior art keywords
- charge carrier
- region
- contact
- semiconductor component
- doping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000002800 charge carrier Substances 0.000 claims abstract description 54
- 239000004065 semiconductor Substances 0.000 claims description 17
- 238000001465 metallisation Methods 0.000 description 12
- 230000003071 parasitic effect Effects 0.000 description 7
- 230000000903 blocking effect Effects 0.000 description 5
- 230000001939 inductive effect Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/101—Integrated devices comprising main components and built-in components, e.g. IGBT having built-in freewheel diode
- H10D84/141—VDMOS having built-in components
- H10D84/146—VDMOS having built-in components the built-in components being Schottky barrier diodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
- H10D30/66—Vertical DMOS [VDMOS] FETs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
- H10D84/811—Combinations of field-effect devices and one or more diodes, capacitors or resistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/124—Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
- H10D62/126—Top-view geometrical layouts of the regions or the junctions
- H10D62/127—Top-view geometrical layouts of the regions or the junctions of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/13—Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
- H10D62/149—Source or drain regions of field-effect devices
- H10D62/151—Source or drain regions of field-effect devices of IGFETs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
- H10D62/393—Body regions of DMOS transistors or IGBTs
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
- Electrodes Of Semiconductors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Priority Applications (10)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10008545A DE10008545A1 (de) | 2000-02-24 | 2000-02-24 | Monolithisch integriertes Halbleiterbauelement |
| JP2001566188A JP2003526923A (ja) | 2000-02-24 | 2001-02-23 | モノリシック集積半導体素子 |
| US10/220,084 US6784487B2 (en) | 2000-02-24 | 2001-02-23 | Monolithcally integrated semiconductor component |
| DE50115196T DE50115196D1 (de) | 2000-02-24 | 2001-02-23 | Monolithisch integriertes halbleiterbauelement |
| KR1020027011021A KR100712165B1 (ko) | 2000-02-24 | 2001-02-23 | 모놀리식으로 집적된 반도체 구성 요소 |
| PCT/DE2001/000708 WO2001067515A1 (de) | 2000-02-24 | 2001-02-23 | Monolithisch integriertes halbleiterbauelement |
| CZ20022847A CZ20022847A3 (cs) | 2000-02-24 | 2001-02-23 | Monoliticky integrovaná polovodičová součástka |
| EP01929217A EP1259989B1 (de) | 2000-02-24 | 2001-02-23 | Monolithisch integriertes halbleiterbauelement |
| HU0300366A HUP0300366A2 (en) | 2000-02-24 | 2001-02-23 | Monolithically integrated semiconductor component |
| TW090104134A TW499761B (en) | 2000-02-24 | 2001-02-26 | Monolithic integrated semiconductor component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10008545A DE10008545A1 (de) | 2000-02-24 | 2000-02-24 | Monolithisch integriertes Halbleiterbauelement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE10008545A1 true DE10008545A1 (de) | 2001-08-30 |
Family
ID=7632172
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE10008545A Withdrawn DE10008545A1 (de) | 2000-02-24 | 2000-02-24 | Monolithisch integriertes Halbleiterbauelement |
| DE50115196T Expired - Lifetime DE50115196D1 (de) | 2000-02-24 | 2001-02-23 | Monolithisch integriertes halbleiterbauelement |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE50115196T Expired - Lifetime DE50115196D1 (de) | 2000-02-24 | 2001-02-23 | Monolithisch integriertes halbleiterbauelement |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US6784487B2 (cs) |
| EP (1) | EP1259989B1 (cs) |
| JP (1) | JP2003526923A (cs) |
| KR (1) | KR100712165B1 (cs) |
| CZ (1) | CZ20022847A3 (cs) |
| DE (2) | DE10008545A1 (cs) |
| HU (1) | HUP0300366A2 (cs) |
| TW (1) | TW499761B (cs) |
| WO (1) | WO2001067515A1 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1432037A3 (en) * | 2002-12-20 | 2005-06-22 | STMicroelectronics S.r.l. | Integrated device with Schottky diode and with MOS transistor and related manufacturing process |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7528459B2 (en) * | 2003-05-27 | 2009-05-05 | Nxp B.V. | Punch-through diode and method of processing the same |
| US7092552B2 (en) * | 2003-07-30 | 2006-08-15 | Xerox Corporation | System and method for measuring and quantizing document quality |
| US6917082B1 (en) * | 2004-01-26 | 2005-07-12 | Altera Corporation | Gate-body cross-link circuitry for metal-oxide-semiconductor transistor circuits |
| US7821097B2 (en) * | 2006-06-05 | 2010-10-26 | International Business Machines Corporation | Lateral passive device having dual annular electrodes |
| KR100780967B1 (ko) * | 2006-12-07 | 2007-12-03 | 삼성전자주식회사 | 고전압용 쇼트키 다이오드 구조체 |
| DE102018115728B4 (de) * | 2018-06-29 | 2021-09-23 | Infineon Technologies Ag | Halbleitervorrichtung, die einen Siliziumcarbidkörper und Transistorzellen enthält |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3507181A1 (de) | 1985-03-01 | 1986-09-04 | IC - Haus GmbH, 6501 Bodenheim | Schaltungsanordnung zur vermeidung parasitaerer substrat-effekte in integrierten schaltkreisen |
| US4811065A (en) * | 1987-06-11 | 1989-03-07 | Siliconix Incorporated | Power DMOS transistor with high speed body diode |
| JPH03110867A (ja) * | 1989-09-26 | 1991-05-10 | Nippon Inter Electronics Corp | 縦型電界効果トランジスタ |
| JPH05291507A (ja) | 1992-04-07 | 1993-11-05 | Fujitsu Ltd | 拡散抵抗 |
| US5973367A (en) * | 1995-10-13 | 1999-10-26 | Siliconix Incorporated | Multiple gated MOSFET for use in DC-DC converter |
| US5744991A (en) * | 1995-10-16 | 1998-04-28 | Altera Corporation | System for distributing clocks using a delay lock loop in a programmable logic circuit |
| US5744994A (en) | 1996-05-15 | 1998-04-28 | Siliconix Incorporated | Three-terminal power mosfet switch for use as synchronous rectifier or voltage clamp |
| JP3291441B2 (ja) * | 1996-10-31 | 2002-06-10 | 三洋電機株式会社 | Ｄｃ−ｄｃコンバータ装置 |
| US6519457B1 (en) * | 1997-04-09 | 2003-02-11 | Nortel Networks Limited | Methods and systems for standardizing interbase station communications |
| JPH11274490A (ja) * | 1998-03-18 | 1999-10-08 | Soc Kk | Ｍｏｓｆｅｔ |
| US6580699B1 (en) * | 1999-03-29 | 2003-06-17 | Nortel Networks Limited | Method for updating an R-P connection for a roaming mobile station |
| KR100395496B1 (ko) * | 2001-09-14 | 2003-08-25 | 한국전자통신연구원 | 패킷 데이터 서비스 노드 내에서 기지국 제어기간 통신을통한 고속 소프트 핸드오프 수행 방법 |
-
2000
- 2000-02-24 DE DE10008545A patent/DE10008545A1/de not_active Withdrawn
-
2001
- 2001-02-23 HU HU0300366A patent/HUP0300366A2/hu unknown
- 2001-02-23 EP EP01929217A patent/EP1259989B1/de not_active Expired - Lifetime
- 2001-02-23 WO PCT/DE2001/000708 patent/WO2001067515A1/de active IP Right Grant
- 2001-02-23 US US10/220,084 patent/US6784487B2/en not_active Expired - Fee Related
- 2001-02-23 DE DE50115196T patent/DE50115196D1/de not_active Expired - Lifetime
- 2001-02-23 CZ CZ20022847A patent/CZ20022847A3/cs unknown
- 2001-02-23 JP JP2001566188A patent/JP2003526923A/ja active Pending
- 2001-02-23 KR KR1020027011021A patent/KR100712165B1/ko not_active Expired - Fee Related
- 2001-02-26 TW TW090104134A patent/TW499761B/zh not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1432037A3 (en) * | 2002-12-20 | 2005-06-22 | STMicroelectronics S.r.l. | Integrated device with Schottky diode and with MOS transistor and related manufacturing process |
Also Published As
| Publication number | Publication date |
|---|---|
| KR100712165B1 (ko) | 2007-04-27 |
| EP1259989B1 (de) | 2009-10-28 |
| HUP0300366A2 (en) | 2003-09-29 |
| EP1259989A1 (de) | 2002-11-27 |
| TW499761B (en) | 2002-08-21 |
| DE50115196D1 (de) | 2009-12-10 |
| CZ20022847A3 (cs) | 2003-03-12 |
| JP2003526923A (ja) | 2003-09-09 |
| KR20020092369A (ko) | 2002-12-11 |
| US6784487B2 (en) | 2004-08-31 |
| WO2001067515A1 (de) | 2001-09-13 |
| US20040075135A1 (en) | 2004-04-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| 8139 | Disposal/non-payment of the annual fee |