DD283982A5 - Verfahren zur steigerung des anteils an siliciumtetrachlorid - Google Patents

Verfahren zur steigerung des anteils an siliciumtetrachlorid Download PDF

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Publication number
DD283982A5
DD283982A5 DD89331915A DD33191589A DD283982A5 DD 283982 A5 DD283982 A5 DD 283982A5 DD 89331915 A DD89331915 A DD 89331915A DD 33191589 A DD33191589 A DD 33191589A DD 283982 A5 DD283982 A5 DD 283982A5
Authority
DD
German Democratic Republic
Prior art keywords
reaction
trichlorosilane
silicon
hydrogen chloride
mixture
Prior art date
Application number
DD89331915A
Other languages
German (de)
English (en)
Inventor
Klaus Ruff
Original Assignee
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Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=6361272&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DD283982(A5) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by �����@������������������k�� filed Critical �����@������������������k��
Publication of DD283982A5 publication Critical patent/DD283982A5/de

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • C01B33/10742—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • C01B33/10742—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material
    • C01B33/10747—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of tetrachloride
    • C01B33/10752—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of tetrachloride from silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
DD89331915A 1988-08-20 1989-08-18 Verfahren zur steigerung des anteils an siliciumtetrachlorid DD283982A5 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3828344A DE3828344C1 (fr) 1988-08-20 1988-08-20

Publications (1)

Publication Number Publication Date
DD283982A5 true DD283982A5 (de) 1990-10-31

Family

ID=6361272

Family Applications (1)

Application Number Title Priority Date Filing Date
DD89331915A DD283982A5 (de) 1988-08-20 1989-08-18 Verfahren zur steigerung des anteils an siliciumtetrachlorid

Country Status (5)

Country Link
US (1) US4980143A (fr)
EP (1) EP0355593B1 (fr)
JP (1) JPH0297415A (fr)
DD (1) DD283982A5 (fr)
DE (2) DE3828344C1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1114559C (zh) * 1996-09-03 2003-07-16 株式会社德山 四氯化硅的制造方法
KR100495988B1 (ko) * 1996-09-03 2005-09-30 가부시키가이샤 도쿠야마 사염화규소의제조방법
WO2010103633A1 (fr) * 2009-03-11 2010-09-16 電気化学工業株式会社 Appareil de récupération de chlorosilane et procédé de récupération de chlorosilane à l'aide dudit appareil
DE102011003453A1 (de) 2011-02-01 2012-08-02 Wacker Chemie Ag Verfahren zur destillativen Reinigung von Chlorsilanen
WO2013059686A1 (fr) * 2011-10-20 2013-04-25 Rec Silicon Inc Réduction de l'encrassement dans la production d'hydrochlorosilane

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE554836A (fr) * 1956-02-11
GB963745A (en) * 1961-01-05 1964-07-15 British Titan Products Halogenation of silicon-containing materials
BE792542A (fr) * 1971-12-11 1973-03-30 Degussa Procede pour la fabrication de chlorosilanes exempts de metaux lors de la chloration ou l'hydrochloration de ferrosilicium
DE2365273C3 (de) * 1973-12-31 1980-09-25 Dynamit Nobel Ag, 5210 Troisdorf Verfahren zur Hydrochlorierung von elementaren Silicium
DE2630542C3 (de) * 1976-07-07 1981-04-02 Dynamit Nobel Ag, 5210 Troisdorf Verfahren zur Herstellung von Trichlorsilan und Siliciumtetrahlorid
JPS57156318A (en) * 1981-03-16 1982-09-27 Koujiyundo Silicon Kk Production of trichlorosilane
JPS5832011A (ja) * 1981-08-17 1983-02-24 Nippon Aerojiru Kk 珪素と塩化水素からトリクロルシランと四塩化珪素を製造する方法
DE3303903A1 (de) * 1982-02-16 1983-08-25 General Electric Co., Schenectady, N.Y. Verfahren zum herstellen von trichlorsilan aus silizium
US4526769A (en) * 1983-07-18 1985-07-02 Motorola, Inc. Trichlorosilane production process
DE3809784C1 (fr) * 1988-03-23 1989-07-13 Huels Ag, 4370 Marl, De

Also Published As

Publication number Publication date
DE3828344C1 (fr) 1989-07-06
US4980143A (en) 1990-12-25
EP0355593B1 (fr) 1992-11-11
DE58902675D1 (de) 1992-12-17
EP0355593A2 (fr) 1990-02-28
JPH0297415A (ja) 1990-04-10
EP0355593A3 (fr) 1991-04-10

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