CN209104121U - 基板处理装置 - Google Patents

基板处理装置 Download PDF

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Publication number
CN209104121U
CN209104121U CN201821709882.9U CN201821709882U CN209104121U CN 209104121 U CN209104121 U CN 209104121U CN 201821709882 U CN201821709882 U CN 201821709882U CN 209104121 U CN209104121 U CN 209104121U
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energy
discharge pipe
unit
substrate board
board treatment
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CN201821709882.9U
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Chinese (zh)
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境宏之
中岛清次
大薗启
乡野纯一
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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CN201821709882.9U 2017-10-26 2018-10-22 基板处理装置 Active CN209104121U (zh)

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Application Number Priority Date Filing Date Title
JP2017-207474 2017-10-26
JP2017207474A JP6928537B2 (ja) 2017-10-26 2017-10-26 基板処理装置、基板処理方法及び記憶媒体

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CN209104121U true CN209104121U (zh) 2019-07-12

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CN (1) CN209104121U (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102289260B1 (ko) * 2019-10-18 2021-08-12 세메스 주식회사 유체 배출 장치 및 이를 포함하는 기판 처리 시스템, 유체 배출 방법
JP7441665B2 (ja) * 2020-02-10 2024-03-01 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
JP7441664B2 (ja) * 2020-02-10 2024-03-01 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
JP2021190561A (ja) * 2020-05-29 2021-12-13 株式会社Ｓｃｒｅｅｎホールディングス 基板処理方法および基板処理装置
CN113073731A (zh) * 2021-04-07 2021-07-06 武汉合创四联科技发展有限公司 一种高层建筑排污管道清洗装置及其使用方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59142399A (ja) * 1983-02-04 1984-08-15 Mitsubishi Heavy Ind Ltd ハンマの打撃によるボイラチユ−ブのダスト除去装置
JP2006086166A (ja) * 2004-09-14 2006-03-30 Canon Inc シリコン含有物の除去方法および除去装置
KR100793849B1 (ko) * 2006-09-01 2008-01-11 정치영 진공배관 라인용 파우더 제거 및 흡착억제장치와 그 방법
JP4739390B2 (ja) * 2008-10-27 2011-08-03 大日本スクリーン製造株式会社 基板処理装置
JP5635452B2 (ja) * 2010-07-02 2014-12-03 東京エレクトロン株式会社 基板処理システム
JP6123698B2 (ja) * 2014-02-19 2017-05-10 Ｊｆｅスチール株式会社 焼結機の排気ダクトのダスト堆積防止方法
JP3209679U (ja) * 2016-11-22 2017-04-06 新科産業有限会社 配管洗浄装置

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JP2019080003A (ja) 2019-05-23
JP6928537B2 (ja) 2021-09-01

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