CN1998072B - 抬高的源/漏区处理中加入可去除间隔壁的半导体制造方法 - Google Patents

抬高的源/漏区处理中加入可去除间隔壁的半导体制造方法 Download PDF

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Publication number
CN1998072B
CN1998072B CN200580014349XA CN200580014349A CN1998072B CN 1998072 B CN1998072 B CN 1998072B CN 200580014349X A CN200580014349X A CN 200580014349XA CN 200580014349 A CN200580014349 A CN 200580014349A CN 1998072 B CN1998072 B CN 1998072B
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China
Prior art keywords
silicon nitride
gate electrode
forming
spacer
silicon
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Expired - Fee Related
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CN200580014349XA
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English (en)
Chinese (zh)
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CN1998072A (zh
Inventor
陈健
罗德·R·莫拉
马克·A·罗索
史步保人
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NXP USA Inc
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Freescale Semiconductor Inc
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Publication date
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Publication of CN1998072A publication Critical patent/CN1998072A/zh
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/027—Manufacture or treatment of FETs having insulated gates [IGFET] of lateral single-gate IGFETs
    • H10D30/0275—Manufacture or treatment of FETs having insulated gates [IGFET] of lateral single-gate IGFETs forming single crystalline semiconductor source or drain regions resulting in recessed gates, e.g. forming raised source or drain regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0212—Manufacture or treatment of FETs having insulated gates [IGFET] using self-aligned silicidation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/022—Manufacture or treatment of FETs having insulated gates [IGFET] having lightly-doped source or drain extensions selectively formed at the sides of the gates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/031—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
    • H10D30/0321—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] comprising silicon, e.g. amorphous silicon or polysilicon
    • H10D30/0323—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] comprising silicon, e.g. amorphous silicon or polysilicon comprising monocrystalline silicon
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/601—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs 
    • H10D30/608—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs  having non-planar bodies, e.g. having recessed gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/015—Manufacture or treatment removing at least parts of gate spacers, e.g. disposable spacers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/021—Manufacture or treatment using multiple gate spacer layers, e.g. bilayered sidewall spacers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P30/00—Ion implantation into wafers, substrates or parts of devices
    • H10P30/20—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping
    • H10P30/222—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping characterised by the angle between the ion beam and the crystal planes or the main crystal surface

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  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Thin Film Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
CN200580014349XA 2004-05-05 2005-04-13 抬高的源/漏区处理中加入可去除间隔壁的半导体制造方法 Expired - Fee Related CN1998072B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/839,385 2004-05-05
US10/839,385 US7125805B2 (en) 2004-05-05 2004-05-05 Method of semiconductor fabrication incorporating disposable spacer into elevated source/drain processing
PCT/US2005/012252 WO2005112099A2 (en) 2004-05-05 2005-04-13 Method of semiconductor fabrication in corporating disposable spacer into elevated source/drain processing

Publications (2)

Publication Number Publication Date
CN1998072A CN1998072A (zh) 2007-07-11
CN1998072B true CN1998072B (zh) 2010-09-15

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CN200580014349XA Expired - Fee Related CN1998072B (zh) 2004-05-05 2005-04-13 抬高的源/漏区处理中加入可去除间隔壁的半导体制造方法

Country Status (9)

Country Link
US (1) US7125805B2 (enExample)
EP (1) EP1756860B1 (enExample)
JP (1) JP5048480B2 (enExample)
KR (1) KR20070007900A (enExample)
CN (1) CN1998072B (enExample)
AT (1) ATE447765T1 (enExample)
DE (1) DE602005017490D1 (enExample)
TW (1) TWI377625B (enExample)
WO (1) WO2005112099A2 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100668954B1 (ko) * 2004-12-15 2007-01-12 동부일렉트로닉스 주식회사 박막트랜지스터 제조 방법
US7745296B2 (en) * 2005-06-08 2010-06-29 Globalfoundries Inc. Raised source and drain process with disposable spacers
US20070056930A1 (en) * 2005-09-14 2007-03-15 International Business Machines Corporation Polysilicon etching methods
US7514331B2 (en) * 2006-06-08 2009-04-07 Texas Instruments Incorporated Method of manufacturing gate sidewalls that avoids recessing
US7510923B2 (en) * 2006-12-19 2009-03-31 Texas Instruments Incorporated Slim spacer implementation to improve drive current
US7550808B2 (en) * 2007-01-18 2009-06-23 International Business Machines Corporation Fully siliciding regions to improve performance
JP2009158677A (ja) * 2007-12-26 2009-07-16 Renesas Technology Corp 半導体装置の製造方法及び混成トランジスタ用半導体装置の製造方法
JP6169222B2 (ja) * 2012-01-23 2017-07-26 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
JP5968708B2 (ja) 2012-01-23 2016-08-10 ルネサスエレクトロニクス株式会社 半導体装置
US9171927B2 (en) 2013-03-26 2015-10-27 GlobalFoundries, Inc. Spacer replacement for replacement metal gate semiconductor devices
CN103412444B (zh) * 2013-07-23 2015-08-26 北京京东方光电科技有限公司 一种阵列基板及其制作方法和显示面板
JP6279291B2 (ja) * 2013-11-18 2018-02-14 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
US9773865B2 (en) 2014-09-22 2017-09-26 International Business Machines Corporation Self-forming spacers using oxidation
US11653498B2 (en) * 2017-11-30 2023-05-16 Taiwan Semiconductor Manufacturing Co., Ltd. Memory device with improved data retention
JP7034834B2 (ja) 2018-05-30 2022-03-14 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
US11437245B2 (en) * 2020-09-30 2022-09-06 Taiwan Semiconductor Manufacturing Company, Ltd. Germanium hump reduction

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5496750A (en) * 1994-09-19 1996-03-05 Texas Instruments Incorporated Elevated source/drain junction metal oxide semiconductor field-effect transistor using blanket silicon deposition
EP0780907A2 (en) * 1995-12-21 1997-06-25 Nec Corporation Semiconductor device having shallow impurity region without short-circuit between gate electrode and source and drain regions and process of fabrication thereof
US6429084B1 (en) * 2001-06-20 2002-08-06 International Business Machines Corporation MOS transistors with raised sources and drains
US20020171107A1 (en) * 2001-05-21 2002-11-21 Baohong Cheng Method for forming a semiconductor device having elevated source and drain regions
US6677212B1 (en) * 1999-09-07 2004-01-13 Sharp Kabushiki Kaisha Elevated source/drain field effect transistor and method for making the same

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5200352A (en) * 1991-11-25 1993-04-06 Motorola Inc. Transistor having a lightly doped region and method of formation
US5847428A (en) * 1996-12-06 1998-12-08 Advanced Micro Devices, Inc. Integrated circuit gate conductor which uses layered spacers to produce a graded junction
US6555437B1 (en) * 2001-04-27 2003-04-29 Advanced Micro Devices, Inc. Multiple halo implant in a MOSFET with raised source/drain structure
US6614079B2 (en) 2001-07-19 2003-09-02 International Business Machines Corporation All-in-one disposable/permanent spacer elevated source/drain, self-aligned silicide CMOS
JP2004095639A (ja) * 2002-08-29 2004-03-25 Fujitsu Ltd 半導体装置及びその製造方法
US6800530B2 (en) * 2003-01-14 2004-10-05 International Business Machines Corporation Triple layer hard mask for gate patterning to fabricate scaled CMOS transistors
US20050048732A1 (en) * 2003-08-26 2005-03-03 International Business Machines Corporation Method to produce transistor having reduced gate height

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5496750A (en) * 1994-09-19 1996-03-05 Texas Instruments Incorporated Elevated source/drain junction metal oxide semiconductor field-effect transistor using blanket silicon deposition
EP0780907A2 (en) * 1995-12-21 1997-06-25 Nec Corporation Semiconductor device having shallow impurity region without short-circuit between gate electrode and source and drain regions and process of fabrication thereof
US6677212B1 (en) * 1999-09-07 2004-01-13 Sharp Kabushiki Kaisha Elevated source/drain field effect transistor and method for making the same
US20020171107A1 (en) * 2001-05-21 2002-11-21 Baohong Cheng Method for forming a semiconductor device having elevated source and drain regions
US6429084B1 (en) * 2001-06-20 2002-08-06 International Business Machines Corporation MOS transistors with raised sources and drains

Also Published As

Publication number Publication date
DE602005017490D1 (de) 2009-12-17
US7125805B2 (en) 2006-10-24
US20050250287A1 (en) 2005-11-10
WO2005112099A3 (en) 2006-04-27
WO2005112099A2 (en) 2005-11-24
ATE447765T1 (de) 2009-11-15
JP2007536734A (ja) 2007-12-13
EP1756860B1 (en) 2009-11-04
JP5048480B2 (ja) 2012-10-17
TWI377625B (en) 2012-11-21
CN1998072A (zh) 2007-07-11
EP1756860A2 (en) 2007-02-28
EP1756860A4 (en) 2008-12-17
TW200625463A (en) 2006-07-16
KR20070007900A (ko) 2007-01-16

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CP01 Change in the name or title of a patent holder
CP01 Change in the name or title of a patent holder

Address after: Texas in the United States

Patentee after: NXP America Co Ltd

Address before: Texas in the United States

Patentee before: Fisical Semiconductor Inc.

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20100915

Termination date: 20190413