CN1958512B - 透光性稀土氧化物烧结体及其制造方法 - Google Patents
透光性稀土氧化物烧结体及其制造方法 Download PDFInfo
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- CN1958512B CN1958512B CN2006101427974A CN200610142797A CN1958512B CN 1958512 B CN1958512 B CN 1958512B CN 2006101427974 A CN2006101427974 A CN 2006101427974A CN 200610142797 A CN200610142797 A CN 200610142797A CN 1958512 B CN1958512 B CN 1958512B
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- Prior art keywords
- niobium
- tantalum
- sintered compact
- oxide
- straight line
- Prior art date
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- 229910001404 rare earth metal oxide Inorganic materials 0.000 title claims description 6
- 238000004519 manufacturing process Methods 0.000 title description 13
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims abstract description 88
- 239000010955 niobium Substances 0.000 claims abstract description 87
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 87
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 85
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims abstract description 85
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims abstract description 49
- OHSVLFRHMCKCQY-UHFFFAOYSA-N lutetium atom Chemical compound [Lu] OHSVLFRHMCKCQY-UHFFFAOYSA-N 0.000 claims description 52
- 230000005540 biological transmission Effects 0.000 claims description 51
- 229910052751 metal Inorganic materials 0.000 claims description 49
- 239000002184 metal Substances 0.000 claims description 49
- UZLYXNNZYFBAQO-UHFFFAOYSA-N oxygen(2-);ytterbium(3+) Chemical compound [O-2].[O-2].[O-2].[Yb+3].[Yb+3] UZLYXNNZYFBAQO-UHFFFAOYSA-N 0.000 claims description 45
- 229910003454 ytterbium oxide Inorganic materials 0.000 claims description 45
- 229940075624 ytterbium oxide Drugs 0.000 claims description 45
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 claims description 31
- 239000000463 material Substances 0.000 claims description 12
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 abstract description 31
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 31
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 22
- 229910052710 silicon Inorganic materials 0.000 abstract description 22
- 239000010703 silicon Substances 0.000 abstract description 22
- 239000002994 raw material Substances 0.000 abstract description 18
- 238000002834 transmittance Methods 0.000 abstract description 14
- 238000010298 pulverizing process Methods 0.000 abstract 1
- 238000005245 sintering Methods 0.000 description 45
- 239000000843 powder Substances 0.000 description 38
- 238000000034 method Methods 0.000 description 28
- 239000004411 aluminium Substances 0.000 description 24
- 239000007789 gas Substances 0.000 description 15
- 239000013078 crystal Substances 0.000 description 14
- 150000002822 niobium compounds Chemical class 0.000 description 14
- 150000003482 tantalum compounds Chemical class 0.000 description 14
- 238000000465 moulding Methods 0.000 description 9
- 239000011148 porous material Substances 0.000 description 9
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 8
- 229920001296 polysiloxane Polymers 0.000 description 8
- 239000001257 hydrogen Substances 0.000 description 7
- 229910052739 hydrogen Inorganic materials 0.000 description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000001307 helium Substances 0.000 description 6
- 229910052734 helium Inorganic materials 0.000 description 6
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 230000007547 defect Effects 0.000 description 5
- 238000009616 inductively coupled plasma Methods 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 5
- 229910052727 yttrium Inorganic materials 0.000 description 5
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 5
- 229910052765 Lutetium Inorganic materials 0.000 description 4
- 229910052769 Ytterbium Inorganic materials 0.000 description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000000227 grinding Methods 0.000 description 4
- 238000005304 joining Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 4
- 238000002798 spectrophotometry method Methods 0.000 description 4
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 4
- 229910001928 zirconium oxide Inorganic materials 0.000 description 4
- 230000003111 delayed effect Effects 0.000 description 3
- 238000000280 densification Methods 0.000 description 3
- 238000004993 emission spectroscopy Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000000452 restraining effect Effects 0.000 description 3
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 2
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 2
- 239000000292 calcium oxide Substances 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000011164 primary particle Substances 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 238000001149 thermolysis Methods 0.000 description 2
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- NYEODMYOBSNUDJ-UHFFFAOYSA-N S(O)(O)(=O)=O.[Lu] Chemical compound S(O)(O)(=O)=O.[Lu] NYEODMYOBSNUDJ-UHFFFAOYSA-N 0.000 description 1
- 206010040925 Skin striae Diseases 0.000 description 1
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000004939 coking Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000004320 controlled atmosphere Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- QVVDHJQBGNVGEB-UHFFFAOYSA-K lutetium(3+);trihydroxide Chemical compound [OH-].[OH-].[OH-].[Lu+3] QVVDHJQBGNVGEB-UHFFFAOYSA-K 0.000 description 1
- YQAQUOLVUCJCHH-UHFFFAOYSA-N lutetium;oxalic acid Chemical compound [Lu].OC(=O)C(O)=O YQAQUOLVUCJCHH-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical class [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- FLJKBWKLGAYSFH-UHFFFAOYSA-H oxalate;ytterbium(3+) Chemical compound [Yb+3].[Yb+3].[O-]C(=O)C([O-])=O.[O-]C(=O)C([O-])=O.[O-]C(=O)C([O-])=O FLJKBWKLGAYSFH-UHFFFAOYSA-H 0.000 description 1
- IBSDADOZMZEYKD-UHFFFAOYSA-H oxalate;yttrium(3+) Chemical compound [Y+3].[Y+3].[O-]C(=O)C([O-])=O.[O-]C(=O)C([O-])=O.[O-]C(=O)C([O-])=O IBSDADOZMZEYKD-UHFFFAOYSA-H 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- SJHMKWQYVBZNLZ-UHFFFAOYSA-K ytterbium(3+);trihydroxide Chemical compound [OH-].[OH-].[OH-].[Yb+3] SJHMKWQYVBZNLZ-UHFFFAOYSA-K 0.000 description 1
- KUBYTSCYMRPPAG-UHFFFAOYSA-N ytterbium(3+);trinitrate Chemical compound [Yb+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O KUBYTSCYMRPPAG-UHFFFAOYSA-N 0.000 description 1
- KVCOOBXEBNBTGL-UHFFFAOYSA-H ytterbium(3+);trisulfate Chemical compound [Yb+3].[Yb+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O KVCOOBXEBNBTGL-UHFFFAOYSA-H 0.000 description 1
- 229910000347 yttrium sulfate Inorganic materials 0.000 description 1
- DEXZEPDUSNRVTN-UHFFFAOYSA-K yttrium(3+);trihydroxide Chemical compound [OH-].[OH-].[OH-].[Y+3] DEXZEPDUSNRVTN-UHFFFAOYSA-K 0.000 description 1
- BXJPTTGFESFXJU-UHFFFAOYSA-N yttrium(3+);trinitrate Chemical compound [Y+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O BXJPTTGFESFXJU-UHFFFAOYSA-N 0.000 description 1
- RTAYJOCWVUTQHB-UHFFFAOYSA-H yttrium(3+);trisulfate Chemical compound [Y+3].[Y+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O RTAYJOCWVUTQHB-UHFFFAOYSA-H 0.000 description 1
- 150000003755 zirconium compounds Chemical class 0.000 description 1
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/50—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare-earth compounds
- C04B35/505—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare-earth compounds based on yttrium oxide
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- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
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- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
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Abstract
Description
Claims (9)
Applications Claiming Priority (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005317297 | 2005-10-31 | ||
JP2005-317297 | 2005-10-31 | ||
JP2005317297 | 2005-10-31 | ||
JP2006009003 | 2006-01-17 | ||
JP2006009003A JP4783636B2 (ja) | 2006-01-17 | 2006-01-17 | 透光性酸化ルテチウム焼結体及びその製造方法 |
JP2006-009003 | 2006-01-17 | ||
JP2006-078294 | 2006-03-22 | ||
JP2006078294A JP4783655B2 (ja) | 2006-03-22 | 2006-03-22 | 透光性酸化イッテルビウム焼結体 |
JP2006078294 | 2006-03-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1958512A CN1958512A (zh) | 2007-05-09 |
CN1958512B true CN1958512B (zh) | 2010-05-12 |
Family
ID=38004509
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2006101427974A Active CN1958512B (zh) | 2005-10-31 | 2006-10-31 | 透光性稀土氧化物烧结体及其制造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7608553B2 (zh) |
KR (1) | KR100910261B1 (zh) |
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US20080213496A1 (en) * | 2002-02-14 | 2008-09-04 | Applied Materials, Inc. | Method of coating semiconductor processing apparatus with protective yttrium-containing coatings |
US7799719B2 (en) * | 2007-01-17 | 2010-09-21 | Toto Ltd. | Ceramic member and corrosion-resisting member |
US10242888B2 (en) | 2007-04-27 | 2019-03-26 | Applied Materials, Inc. | Semiconductor processing apparatus with a ceramic-comprising surface which exhibits fracture toughness and halogen plasma resistance |
US10622194B2 (en) | 2007-04-27 | 2020-04-14 | Applied Materials, Inc. | Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance |
US8367227B2 (en) | 2007-08-02 | 2013-02-05 | Applied Materials, Inc. | Plasma-resistant ceramics with controlled electrical resistivity |
CN102344285B (zh) * | 2011-07-04 | 2013-04-17 | 辽宁爱尔创生物材料有限公司 | 改变牙科氧化锆材料透光性的方法 |
US8936848B2 (en) | 2012-02-23 | 2015-01-20 | B&D Dental Corp | Non-pre-colored multi-layer zirconia dental blank that has a gradual change in translucency through a thickness after sintering |
CN114956821A (zh) * | 2022-06-24 | 2022-08-30 | 中国科学院上海硅酸盐研究所 | 一种高透过率三氧化二钇透明陶瓷及其制备方法 |
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US7608553B2 (en) | 2009-10-27 |
CN1958512A (zh) | 2007-05-09 |
KR100910261B1 (ko) | 2009-07-31 |
TWI350828B (en) | 2011-10-21 |
TW200720218A (en) | 2007-06-01 |
KR20070046763A (ko) | 2007-05-03 |
US20070105708A1 (en) | 2007-05-10 |
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