CN1949397A - 一种用于气浮位移台的气垫驱动装置 - Google Patents
一种用于气浮位移台的气垫驱动装置 Download PDFInfo
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- CN1949397A CN1949397A CN 200610127188 CN200610127188A CN1949397A CN 1949397 A CN1949397 A CN 1949397A CN 200610127188 CN200610127188 CN 200610127188 CN 200610127188 A CN200610127188 A CN 200610127188A CN 1949397 A CN1949397 A CN 1949397A
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- dolly
- air cushion
- baffle plate
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- motion
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 7
- 230000033001 locomotion Effects 0.000 claims abstract description 17
- 239000002184 metal Substances 0.000 claims abstract description 7
- 230000005540 biological transmission Effects 0.000 claims abstract description 4
- 229910000831 Steel Inorganic materials 0.000 claims description 5
- 239000010959 steel Substances 0.000 claims description 5
- 230000035945 sensitivity Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 1
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Application Number | Priority Date | Filing Date | Title |
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CNB2006101271881A CN100533601C (zh) | 2006-09-12 | 2006-09-12 | 一种用于气浮位移台的气垫驱动装置 |
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CNB2006101271881A CN100533601C (zh) | 2006-09-12 | 2006-09-12 | 一种用于气浮位移台的气垫驱动装置 |
Publications (2)
Publication Number | Publication Date |
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CN1949397A true CN1949397A (zh) | 2007-04-18 |
CN100533601C CN100533601C (zh) | 2009-08-26 |
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CNB2006101271881A Active CN100533601C (zh) | 2006-09-12 | 2006-09-12 | 一种用于气浮位移台的气垫驱动装置 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101581631B (zh) * | 2009-06-16 | 2011-01-19 | 中冶南方(武汉)威仕工业炉有限公司 | 气浮式带钢传送装置性能的测试方法及其设备 |
CN103317103A (zh) * | 2013-06-28 | 2013-09-25 | 苏州明志科技有限公司 | 一种制芯机芯盒小车移动机构 |
CN108773680A (zh) * | 2018-08-01 | 2018-11-09 | 长春迈达汽车设备有限公司 | 高运载能力的气悬浮运输车及其使用方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60140722A (ja) * | 1983-12-27 | 1985-07-25 | Canon Inc | 精密移動装置 |
CN2148634Y (zh) * | 1992-05-30 | 1993-12-08 | 李鹏生 | 共基面二维超精密工作台 |
CN1512132A (zh) * | 2002-12-27 | 2004-07-14 | 中国航空工业总公司第三○三研究所 | 超精密零件长度直接测量装置 |
CN2628337Y (zh) * | 2003-07-14 | 2004-07-28 | 重庆邮电学院 | 车厢内集装箱定位移位装置 |
CN1200321C (zh) * | 2003-08-29 | 2005-05-04 | 清华大学 | 步进投影光刻机双台轮换曝光超精密定位硅片台系统 |
CN1252542C (zh) * | 2004-06-25 | 2006-04-19 | 清华大学 | 带有平衡块消振装置的超精密硅片定位系统 |
CN1326670C (zh) * | 2005-07-22 | 2007-07-18 | 北京航空航天大学 | 带双边直线电机同步驱动的h型气浮工作台 |
-
2006
- 2006-09-12 CN CNB2006101271881A patent/CN100533601C/zh active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101581631B (zh) * | 2009-06-16 | 2011-01-19 | 中冶南方(武汉)威仕工业炉有限公司 | 气浮式带钢传送装置性能的测试方法及其设备 |
CN103317103A (zh) * | 2013-06-28 | 2013-09-25 | 苏州明志科技有限公司 | 一种制芯机芯盒小车移动机构 |
CN103317103B (zh) * | 2013-06-28 | 2015-12-09 | 苏州明志科技有限公司 | 一种制芯机芯盒小车移动机构 |
CN108773680A (zh) * | 2018-08-01 | 2018-11-09 | 长春迈达汽车设备有限公司 | 高运载能力的气悬浮运输车及其使用方法 |
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Publication number | Publication date |
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CN100533601C (zh) | 2009-08-26 |
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CP03 | Change of name, title or address |
Address after: 100095 Beijing, box No. 1066 Patentee after: Beijing Changcheng Institute of Metrology & Measurement, Aviation Industry Corporaation of China Address before: 100095 mailbox 1066, Beijing City Patentee before: AVIC I Beijing Changcheng Institute of Metrology & Measurement (CIMM) |
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EE01 | Entry into force of recordation of patent licensing contract | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20070418 Assignee: China Inspection and long voyage (Beijing) Technology Co., Ltd. Assignor: Beijing Changcheng Institute of Metrology & Measurement, Aviation Industry Corporaation of China Contract record no.: 2018110000004 Denomination of invention: Air cushion driver for air float displacement table Granted publication date: 20090826 License type: Common License Record date: 20180212 |