CN1904741A - 曝光装置以及曝光方法和布线基板的制造方法 - Google Patents
曝光装置以及曝光方法和布线基板的制造方法 Download PDFInfo
- Publication number
- CN1904741A CN1904741A CNA200610107848XA CN200610107848A CN1904741A CN 1904741 A CN1904741 A CN 1904741A CN A200610107848X A CNA200610107848X A CN A200610107848XA CN 200610107848 A CN200610107848 A CN 200610107848A CN 1904741 A CN1904741 A CN 1904741A
- Authority
- CN
- China
- Prior art keywords
- exposure
- radiation source
- light
- imaging
- optical system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B27/00—Photographic printing apparatus
- G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
- G03B27/52—Details
- G03B27/54—Lamp housings; Illuminating means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/7005—Production of exposure light, i.e. light sources by multiple sources, e.g. light-emitting diodes [LED] or light source arrays
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
- G03F7/70466—Multiple exposures, e.g. combination of fine and coarse exposures, double patterning or multiple exposures for printing a single feature
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y80/00—Products made by additive manufacturing
Abstract
Description
Claims (16)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005-217330 | 2005-07-27 | ||
JP2005217330A JP2007033882A (ja) | 2005-07-27 | 2005-07-27 | 露光装置及び露光方法並びに配線基板の製造方法 |
JP2005217330 | 2005-07-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1904741A true CN1904741A (zh) | 2007-01-31 |
CN1904741B CN1904741B (zh) | 2010-12-15 |
Family
ID=37674028
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200610107848XA Expired - Fee Related CN1904741B (zh) | 2005-07-27 | 2006-07-26 | 无掩膜曝光方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7839484B2 (zh) |
JP (1) | JP2007033882A (zh) |
KR (1) | KR20070014068A (zh) |
CN (1) | CN1904741B (zh) |
TW (1) | TW200715065A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111770839A (zh) * | 2018-06-15 | 2020-10-13 | 米塔尼梅克罗尼株式会社 | 丝网掩模的制造方法以及曝光装置 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20080044193A (ko) * | 2006-11-15 | 2008-05-20 | 다이요 잉키 세이조 가부시키가이샤 | 솔더 레지스트막 형성 방법 및 감광성 조성물 |
JP2008197472A (ja) * | 2007-02-14 | 2008-08-28 | Shinko Electric Ind Co Ltd | 回路基板の製造方法 |
KR100868242B1 (ko) * | 2007-05-14 | 2008-11-12 | 아엠텐 주식회사 | 마스크리스 리소그래피를 위한 인라인 가상마스킹 방법 |
JP4863948B2 (ja) * | 2007-07-30 | 2012-01-25 | 株式会社日立ハイテクノロジーズ | 露光装置、露光方法、及び表示用パネル基板の製造方法 |
KR101458208B1 (ko) * | 2008-03-06 | 2014-11-04 | 엘지전자 주식회사 | 마스크리스 패턴 형성장치 및 패턴을 형성하는 방법 |
CN102126082B (zh) * | 2010-12-24 | 2013-08-21 | 陈乃奇 | 激光曝光刀具及基于激光的立体直接曝光成像方法 |
US10149390B2 (en) | 2012-08-27 | 2018-12-04 | Mycronic AB | Maskless writing of a workpiece using a plurality of exposures having different focal planes using multiple DMDs |
TWI575566B (zh) * | 2014-02-24 | 2017-03-21 | 東京威力科創股份有限公司 | 與光敏化化學放大光阻化學品及程序一起使用的方法及技術 |
JP6623847B2 (ja) * | 2016-03-07 | 2019-12-25 | ウシオ電機株式会社 | 光源装置及びこれを備えた露光装置 |
JP6523194B2 (ja) * | 2016-03-14 | 2019-05-29 | 東京エレクトロン株式会社 | 補助露光装置 |
TWI657314B (zh) * | 2016-05-13 | 2019-04-21 | 東京威力科創股份有限公司 | 藉由使用光敏化學品或光敏化學增幅型光阻劑之臨界尺寸控制 |
US20180068047A1 (en) * | 2016-09-08 | 2018-03-08 | Mapper Lithography Ip B.V. | Method and system for fabricating unique chips using a charged particle multi-beamlet lithography system |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02108053A (ja) * | 1988-10-18 | 1990-04-19 | Nippon Telegr & Teleph Corp <Ntt> | パターン形成材料及びパターン形成方法 |
JPH03142918A (ja) * | 1989-10-30 | 1991-06-18 | Matsushita Electron Corp | レジストパターン形成方法 |
DE4011023A1 (de) * | 1990-04-05 | 1991-10-10 | Hoechst Ag | Nachbehandlungsgeraet fuer druckplatten |
US5229872A (en) * | 1992-01-21 | 1993-07-20 | Hughes Aircraft Company | Exposure device including an electrically aligned electronic mask for micropatterning |
JPH11162844A (ja) * | 1997-09-25 | 1999-06-18 | Toshiba Corp | パターン形成方法 |
TW405062B (en) * | 1999-02-18 | 2000-09-11 | Asm Lithography Bv | Lithographic projection apparatus |
US6437348B1 (en) * | 1999-10-21 | 2002-08-20 | Advanced Micro Devices, Inc. | Simultaneous heating and exposure of reticle with pattern placement correction |
JP2002182157A (ja) | 2000-12-12 | 2002-06-26 | Fuji Photo Film Co Ltd | 照明光学系及びこれを用いたプロジェクター装置、露光装置、光造形装置、画像形成装置 |
JP2003015077A (ja) | 2001-07-04 | 2003-01-15 | Fuji Photo Film Co Ltd | 画像露光装置 |
US6841340B2 (en) * | 2001-07-13 | 2005-01-11 | Fuji Photo Film Co., Ltd. | Optical fabricating method and apparatus |
US6707534B2 (en) * | 2002-05-10 | 2004-03-16 | Anvik Corporation | Maskless conformable lithography |
JP4546019B2 (ja) | 2002-07-03 | 2010-09-15 | 株式会社日立製作所 | 露光装置 |
JP2004085728A (ja) | 2002-08-23 | 2004-03-18 | Mitsubishi Chemicals Corp | 赤外線感光性樹脂を用いた画像形成方法 |
KR101121825B1 (ko) * | 2002-08-24 | 2012-03-22 | 매스크리스 리소그래피 인코퍼레이티드 | 연속적인 직접-기록 광 리쏘그래피 장치 및 방법 |
JP2004157219A (ja) | 2002-11-05 | 2004-06-03 | Fuji Photo Film Co Ltd | 露光ヘッドおよび露光装置 |
JP2005158799A (ja) * | 2003-11-20 | 2005-06-16 | Shinko Electric Ind Co Ltd | 直接露光装置、直接露光方法および配線基板 |
JP2005189365A (ja) * | 2003-12-25 | 2005-07-14 | Fuji Photo Film Co Ltd | 吸着固定装置、画像形成装置 |
JP5080009B2 (ja) * | 2005-03-22 | 2012-11-21 | 日立ビアメカニクス株式会社 | 露光方法 |
-
2005
- 2005-07-27 JP JP2005217330A patent/JP2007033882A/ja active Pending
-
2006
- 2006-07-12 TW TW095125496A patent/TW200715065A/zh unknown
- 2006-07-26 KR KR1020060070134A patent/KR20070014068A/ko not_active Application Discontinuation
- 2006-07-26 CN CN200610107848XA patent/CN1904741B/zh not_active Expired - Fee Related
- 2006-07-26 US US11/492,790 patent/US7839484B2/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111770839A (zh) * | 2018-06-15 | 2020-10-13 | 米塔尼梅克罗尼株式会社 | 丝网掩模的制造方法以及曝光装置 |
Also Published As
Publication number | Publication date |
---|---|
TW200715065A (en) | 2007-04-16 |
JP2007033882A (ja) | 2007-02-08 |
US7839484B2 (en) | 2010-11-23 |
US20070024838A1 (en) | 2007-02-01 |
KR20070014068A (ko) | 2007-01-31 |
CN1904741B (zh) | 2010-12-15 |
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Address after: Kanagawa Patentee after: Via Mechanics Ltd. Address before: Kanagawa Patentee before: Hitachi Bia Macine Co., Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101215 Termination date: 20150726 |
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