CN1841020A - 角速度传感器 - Google Patents
角速度传感器 Download PDFInfo
- Publication number
- CN1841020A CN1841020A CNA2006100733347A CN200610073334A CN1841020A CN 1841020 A CN1841020 A CN 1841020A CN A2006100733347 A CNA2006100733347 A CN A2006100733347A CN 200610073334 A CN200610073334 A CN 200610073334A CN 1841020 A CN1841020 A CN 1841020A
- Authority
- CN
- China
- Prior art keywords
- angular
- rate sensor
- lead frame
- shell
- circuit board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 51
- 230000008878 coupling Effects 0.000 claims description 11
- 238000010168 coupling process Methods 0.000 claims description 11
- 238000005859 coupling reaction Methods 0.000 claims description 11
- 230000001133 acceleration Effects 0.000 claims description 10
- 238000009434 installation Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 description 9
- 238000000605 extraction Methods 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 239000010410 layer Substances 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
Abstract
Description
Claims (25)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP2005-104441 | 2005-03-31 | ||
JP2005104441 | 2005-03-31 | ||
JP2005104441 | 2005-03-31 | ||
JPJP2005-239711 | 2005-08-22 | ||
JP2005239711 | 2005-08-22 | ||
JP2005239711A JP2006308543A (ja) | 2005-03-31 | 2005-08-22 | 角速度センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1841020A true CN1841020A (zh) | 2006-10-04 |
CN1841020B CN1841020B (zh) | 2010-04-14 |
Family
ID=36607350
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2006100733347A Expired - Fee Related CN1841020B (zh) | 2005-03-31 | 2006-03-31 | 角速度传感器 |
Country Status (5)
Country | Link |
---|---|
US (2) | US20060219008A1 (zh) |
EP (1) | EP1707920A2 (zh) |
JP (1) | JP2006308543A (zh) |
KR (2) | KR20060105534A (zh) |
CN (1) | CN1841020B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102334009A (zh) * | 2009-02-27 | 2012-01-25 | 感应动力股份公司 | 微机电传感器 |
CN105758395A (zh) * | 2015-01-06 | 2016-07-13 | 精工爱普生株式会社 | 物理量传感器、电子设备以及移动体 |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4935126B2 (ja) * | 2006-03-15 | 2012-05-23 | パナソニック株式会社 | 角速度センサ |
JP4850572B2 (ja) * | 2006-04-19 | 2012-01-11 | 富士通株式会社 | 角速度センサ |
JP2007292470A (ja) * | 2006-04-20 | 2007-11-08 | Fujitsu Media Device Kk | 角速度センサ |
US7816698B2 (en) * | 2007-04-13 | 2010-10-19 | Industrial Technology Research Institute | Heat dissipation package for heat generation element |
US7934423B2 (en) | 2007-12-10 | 2011-05-03 | Invensense, Inc. | Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics |
US8952832B2 (en) | 2008-01-18 | 2015-02-10 | Invensense, Inc. | Interfacing application programs and motion sensors of a device |
US8250921B2 (en) | 2007-07-06 | 2012-08-28 | Invensense, Inc. | Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics |
US8462109B2 (en) * | 2007-01-05 | 2013-06-11 | Invensense, Inc. | Controlling and accessing content using motion processing on mobile devices |
JP2008180511A (ja) | 2007-01-23 | 2008-08-07 | Fujitsu Media Device Kk | 角速度センサ |
CN101657081A (zh) * | 2008-08-20 | 2010-02-24 | 鸿富锦精密工业(深圳)有限公司 | 电子装置 |
WO2010026818A1 (ja) * | 2008-09-02 | 2010-03-11 | 株式会社村田製作所 | 角速度センサ |
US8928602B1 (en) | 2009-03-03 | 2015-01-06 | MCube Inc. | Methods and apparatus for object tracking on a hand-held device |
US8797279B2 (en) | 2010-05-25 | 2014-08-05 | MCube Inc. | Analog touchscreen methods and apparatus |
JP5367154B2 (ja) * | 2009-03-26 | 2013-12-11 | ケメット エレクトロニクス コーポレーション | 低いeslおよびesrを有するリード付き多層セラミックキャパシタ |
US8477473B1 (en) | 2010-08-19 | 2013-07-02 | MCube Inc. | Transducer structure and method for MEMS devices |
US8553389B1 (en) | 2010-08-19 | 2013-10-08 | MCube Inc. | Anchor design and method for MEMS transducer apparatuses |
US8710597B1 (en) | 2010-04-21 | 2014-04-29 | MCube Inc. | Method and structure for adding mass with stress isolation to MEMS structures |
US8823007B2 (en) | 2009-10-28 | 2014-09-02 | MCube Inc. | Integrated system on chip using multiple MEMS and CMOS devices |
US8476129B1 (en) | 2010-05-24 | 2013-07-02 | MCube Inc. | Method and structure of sensors and MEMS devices using vertical mounting with interconnections |
US8421082B1 (en) | 2010-01-19 | 2013-04-16 | Mcube, Inc. | Integrated CMOS and MEMS with air dielectric method and system |
US9709509B1 (en) | 2009-11-13 | 2017-07-18 | MCube Inc. | System configured for integrated communication, MEMS, Processor, and applications using a foundry compatible semiconductor process |
US8637943B1 (en) | 2010-01-04 | 2014-01-28 | MCube Inc. | Multi-axis integrated MEMS devices with CMOS circuits and method therefor |
US8584521B1 (en) * | 2010-01-19 | 2013-11-19 | MCube Inc. | Accurate gyroscope device using MEMS and quartz |
US8936959B1 (en) | 2010-02-27 | 2015-01-20 | MCube Inc. | Integrated rf MEMS, control systems and methods |
US8794065B1 (en) * | 2010-02-27 | 2014-08-05 | MCube Inc. | Integrated inertial sensing apparatus using MEMS and quartz configured on crystallographic planes |
US8367522B1 (en) | 2010-04-08 | 2013-02-05 | MCube Inc. | Method and structure of integrated micro electro-mechanical systems and electronic devices using edge bond pads |
US8928696B1 (en) | 2010-05-25 | 2015-01-06 | MCube Inc. | Methods and apparatus for operating hysteresis on a hand held device |
US8869616B1 (en) | 2010-06-18 | 2014-10-28 | MCube Inc. | Method and structure of an inertial sensor using tilt conversion |
US8652961B1 (en) | 2010-06-18 | 2014-02-18 | MCube Inc. | Methods and structure for adapting MEMS structures to form electrical interconnections for integrated circuits |
US8993362B1 (en) | 2010-07-23 | 2015-03-31 | MCube Inc. | Oxide retainer method for MEMS devices |
US8723986B1 (en) | 2010-11-04 | 2014-05-13 | MCube Inc. | Methods and apparatus for initiating image capture on a hand-held device |
KR101239636B1 (ko) * | 2011-04-08 | 2013-03-11 | 국방과학연구소 | Mems 공진기, 이를 구비하는 센서 및 mems 공진기의 제조방법 |
US8969101B1 (en) | 2011-08-17 | 2015-03-03 | MCube Inc. | Three axis magnetic sensor device and method using flex cables |
JP6010690B2 (ja) * | 2012-06-04 | 2016-10-19 | カスタム センサーズ アンド テクノロジーズ インコーポレイテッド | ねじれ速度測定ジャイロスコープ |
JP2014048090A (ja) * | 2012-08-30 | 2014-03-17 | Seiko Epson Corp | 電子モジュール、電子機器、及び移動体 |
JP6256145B2 (ja) * | 2014-03-26 | 2018-01-10 | 株式会社デンソー | 半導体装置及びその製造方法 |
JP6432190B2 (ja) * | 2014-07-25 | 2018-12-05 | セイコーエプソン株式会社 | 振動素子、振動素子の製造方法、振動子、電子機器および移動体 |
WO2023043595A1 (en) * | 2021-09-14 | 2023-03-23 | Callisto Design Solutions Llc | Sensor assembly |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08114458A (ja) * | 1994-10-13 | 1996-05-07 | Nippondenso Co Ltd | 角速度センサー |
US5698784A (en) * | 1996-01-24 | 1997-12-16 | Gyration, Inc. | Vibratory rate gyroscope and methods of assembly and operation |
US6182508B1 (en) * | 1996-12-18 | 2001-02-06 | Denso Corporation | Structure of angular rate sensor |
JPH10197254A (ja) * | 1997-01-07 | 1998-07-31 | Alps Electric Co Ltd | 振動子の支持装置 |
US6578420B1 (en) * | 1997-01-28 | 2003-06-17 | Microsensors, Inc. | Multi-axis micro gyro structure |
JP4256727B2 (ja) * | 2003-06-12 | 2009-04-22 | 富士通株式会社 | 振動ジャイロの支持構造 |
JP3966237B2 (ja) * | 2003-06-19 | 2007-08-29 | セイコーエプソン株式会社 | 圧電デバイス、圧電デバイスを搭載した電子機器 |
US7196404B2 (en) * | 2004-05-20 | 2007-03-27 | Analog Devices, Inc. | Motion detector and method of producing the same |
-
2005
- 2005-08-22 JP JP2005239711A patent/JP2006308543A/ja active Pending
-
2006
- 2006-03-24 EP EP06251597A patent/EP1707920A2/en not_active Withdrawn
- 2006-03-30 KR KR1020060028701A patent/KR20060105534A/ko not_active Application Discontinuation
- 2006-03-30 US US11/392,930 patent/US20060219008A1/en not_active Abandoned
- 2006-03-31 CN CN2006100733347A patent/CN1841020B/zh not_active Expired - Fee Related
-
2007
- 2007-11-05 US US11/979,486 patent/US20080066547A1/en not_active Abandoned
-
2008
- 2008-01-31 KR KR1020080010004A patent/KR20080015500A/ko not_active Application Discontinuation
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102334009A (zh) * | 2009-02-27 | 2012-01-25 | 感应动力股份公司 | 微机电传感器 |
US8850886B2 (en) | 2009-02-27 | 2014-10-07 | Maxim Integrated Products, Inc. | Electromechanic microsensor |
CN102334009B (zh) * | 2009-02-27 | 2014-11-05 | 玛克西姆综合公司 | 微机电传感器 |
CN105758395A (zh) * | 2015-01-06 | 2016-07-13 | 精工爱普生株式会社 | 物理量传感器、电子设备以及移动体 |
Also Published As
Publication number | Publication date |
---|---|
JP2006308543A (ja) | 2006-11-09 |
CN1841020B (zh) | 2010-04-14 |
KR20080015500A (ko) | 2008-02-19 |
EP1707920A2 (en) | 2006-10-04 |
US20060219008A1 (en) | 2006-10-05 |
US20080066547A1 (en) | 2008-03-20 |
KR20060105534A (ko) | 2006-10-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1841020A (zh) | 角速度传感器 | |
CN1854684A (zh) | 角速度传感器 | |
CN1250971C (zh) | 传感器封装盒 | |
US8426930B2 (en) | Sensor module | |
CN1901179A (zh) | 带布线基板以及利用该基板的薄膜上芯片封装 | |
CN1742372A (zh) | 集成电路组合件 | |
CN1719258A (zh) | 角速度检测器 | |
CN1533031A (zh) | 压电振子 | |
CN1933681A (zh) | 电容式传声器 | |
CN101034689A (zh) | 双密封半导体封装及其制造方法 | |
CN100335905C (zh) | 具有可动质量块的微结构 | |
CN1921107A (zh) | 图像传感器组件及其制造方法以及使用该组件的照相机组件 | |
CN1460172A (zh) | 惯性传感器 | |
CN1396657A (zh) | 减小尺寸的堆叠式芯片大小的组件型半导体器件 | |
CN1847916A (zh) | 微移动元件及光开关器件 | |
CN1722422A (zh) | 半导体封装 | |
JP2006269841A (ja) | 固体撮像装置 | |
CN1142626C (zh) | 梯形滤波器 | |
CN1898864A (zh) | 电子装置及其所使用的封装 | |
CN1324668C (zh) | 半导体装置及其制造方法 | |
CN1383264A (zh) | 电子封装组件及其基板电极的制作方法 | |
CN1550783A (zh) | 电容型力学量传感器 | |
CN1154570C (zh) | 热打印头和热打印头装置 | |
US8159116B2 (en) | Piezoelectric device, electronic device using the same, and automobile | |
CN1391704A (zh) | 表面安装ic堆积法与器件 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: DUOMOCHUAN FINE MACHINARY CO., LTD. Free format text: FORMER OWNER: FUJITSU MEDIA DEVICES LTD. Effective date: 20090522 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20090522 Address after: nks Applicant after: Tamakawa Seiki K. K . Address before: Kanagawa Applicant before: Fujitsu Media Co., Ltd. Co-applicant before: Fujitsu Ltd. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100414 Termination date: 20120331 |