CN1799078A - Substrate positioning device - Google Patents
Substrate positioning device Download PDFInfo
- Publication number
- CN1799078A CN1799078A CNA2004800154428A CN200480015442A CN1799078A CN 1799078 A CN1799078 A CN 1799078A CN A2004800154428 A CNA2004800154428 A CN A2004800154428A CN 200480015442 A CN200480015442 A CN 200480015442A CN 1799078 A CN1799078 A CN 1799078A
- Authority
- CN
- China
- Prior art keywords
- holding plate
- vacuum chamber
- substrate
- mentioned
- connecting bar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Liquid Crystal (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
To accurately position substrates relative to each other without using an XYtheta stage. A swing link guide mechanism (6) as a means for supporting, adjustably and movably in the XYtheta directions, one of upper and lower holding plates (1) and (2) on the other with both substrates (A) and (B) held parallel with each other is installed in an area from one of the upper and lower holding plates (1) and (2) to the ceiling wall (3) or the bottom wall (4) of a vacuum chamber (S). When the swing link guide mechanism (6) is swung in the XYtheta direction by an XYtheta direction moving means (5), one of the upper and lower holding plates (1) and (2) is adjustably moved relative to the other in the XYtheta direction to position these upper and lower substrates (A) and (B) relative to each other in the XYtheta direction.
Description
Technical field
The present invention relates to a kind of substrate position alignment device of baseplate-laminating machine, being particularly related to can be corresponding to the substrate position alignment device of large substrate, for example in the manufacture process of LCD (LCD) or plasma display flat-panel screens (flat panel display) such as (PDP), 2 substrates that will be used for its process are relatively behind XY θ direction aligned position, the overlapped sealing of these substrates, afterwards, draught head by producing inside and outside 2 substrates up and down will be forced into predetermined distance between 2 substrates.
Specifically, the present invention relates to a kind of substrate position alignment device, this substrate position alignment device makes 2 substrates that fit in vacuum chamber, keeping the loading and unloading freedom respectively and subtend on the holding plate up and down, these 2 substrates are relatively moved to the adjustment of XY θ direction in a vacuum, and carry out the mutual position alignment of each substrate.
Background technology
In the past, as this substrate position alignment device, there was type with following structure.Offer in the inside of vacuum chamber of gateway of upper and lower base plate in the side, have holding plate (upper stage) and following holding plate (lower stage), the pedestal portion of following holding plate connects in the through hole (aperture portion) that the base plate wall of this vacuum chamber is offered, by this pedestal portion, following holding plate is supported by the XY theta stage, this XY theta stage, by by CD-ROM drive motor to the XY platform of the removable support of XY direction and, inboard at this XY platform, by swivel bearing and vacuum seal, by the effect of CD-ROM drive motor relatively the theta stage of XY platform rotation constitute, with the pedestal portion of holding plate under these and the through hole of vacuum chamber, with airtight combinations of flexible sealing component such as wrinkle shape elastic bodys.(for example, with reference to patent documentation 1)
And, have following structure substrate position alignment device in addition.Come in and go out in order to make upper and lower base plate, offer in the inside that opens and closes the vacuum chamber of peristome freely in the side, have holding plate (upper stage) and following holding plate (lower stage), in a plurality of through holes (first peristome) that the base plate wall of this vacuum chamber is offered, insert axis (first) respectively, to keep airtight with flexible sealing components such as wrinkle shape elastic bodys between the two, simultaneously, link holding plate and XY theta stage (transfer table) down by these axles, thereby the binding face of this time holding plate and 2 substrates can freely be adjusted supported movably to XY θ direction abreast, after reaching required vacuum in the above-mentioned vacuum chamber and pressing, holding plate is approaching relatively about making by the driving that is arranged in the outer Z direction travel mechanism of vacuum chamber, then, and by the driving of above-mentioned XY theta stage, reach holding plate down by each, two substrates relatively are aligned the position to XY θ direction, afterwards, will revert to atmospheric pressure in the vacuum chamber, making between 2 substrates has atmospheric pressure to work, and 2 substrates that pressurize more.(for example, with reference to patent documentation 2)
[patent documentation 1]: open communique 2001-305563 number of Jap.P. (the 3-4 page or leaf, Fig. 3, Fig. 6, Fig. 7)
[patent documentation 2]: Jap.P. open communique 2002-229042 number (3-6 page or leaf, Fig. 1 to Fig. 5)
But, these substrate position alignment devices in the past, use the XY theta stage as the XY θ direction travel mechanism that is used to make each position aligning substrate, but, existing XY theta stage, generally in order substantially to move more than the mm unit and to design to XY θ direction, especially under the situation of the faint amount of movement below the such only hundreds of μ m of the position alignment of substrate, 1 rotation amount of the rotary body of swivel bearing does not reach yet, faint the moving that the hundreds of repeatedly μ m of the position alignment of each substrate are following, at this moment, because the oil-break sliding part can be worn, thereby can lose the response smoothly of accurate controlled indispensable high repeatability at short notice, its practicality is very low.
But, in recent years along with the trend of the more and more large-scale change of size of substrate, also begin to make the substrate that surpasses 1000mm on one side, the maximization though substrate size becomes,, the same with small-sized substrate, also require accurate position alignment, particularly on one side being large substrate more than the 1000mm, when carrying out aligned position, the amount that moves to XY θ direction can not surpass hundreds of μ m.
Under this environment, for the device that the large substrate that will surpass 1000mm on one side moves to the adjustment of XY θ direction, along with the maximization of substrate size, whole device also becomes greatly, can not be loaded on the lorry with the state of finishing.
At this moment, have only the dismounting of separation to transport with lorry, shipping expense increases, and owing to need carry out disintegration or carry out assembly working at the scene of setting when dispatching from the factory, therefore, the possibility that has performance accuracy to reduce, simultaneously, also need the required time till setting completed, during selecting arrangement, these just become fatal shortcoming.
But above-mentioned XY theta stage is because its structure is big, and whole device becomes maximization, and weight also increases simultaneously, thereby manufacturing expense and shipping expense improve, and along with the The Enlargement Tendency of substrate, the maximization of whole device develops day by day recently, thereby the problems referred to above are just more and more obvious.
And, owing to the base plate wall of vacuum chamber with connect flexible sealing components such as clamping wrinkle shape elastic body between the movable member of this base plate wall and keep vacuum state in the vacuum chamber, therefore, vacuum is cut off and is just needed expense, and in order to improve its tightness, and vacuum-packed surperficial brute force is connected airtight on movable member, then drag loading increases, and adjusting to move just needs sizable strength, therefore just needs the big adjustment position drive source of output, so, its type of drive has more restriction.
And, in this state, as mentioned above, in order to carry out the mutual position alignment of each substrate, above-mentioned movable member is adjusted when mobile, thereupon with micron unit or sub-micron unit, though the temporary transient elastic deformation of flexible sealing component, adjustment will return to the original form again after moving.Promptly, in the adjusting stage, even make each substrate aligned position correctly each other, but because the elastic force of the shape of will recovering of having of flexible sealing component before being out of shape, the position alignment mutual at each substrate takes place unusually, thereby has the shortcoming that can not carry out correct position alignment.
And, open and close whole vacuum chamber owing to can not cut apart, so the substrate that is difficult to carry out in vacuum chamber is come in and gone out, and is difficult to carry out the maintenance of internal vacuum chamber.
Summary of the invention
Among the present invention, the 1 described invention of technology division, its purpose is, does not use the XY theta stage, and carries out accurate position alignment.
In order to achieve the above object, maximum of the present invention is characterised in that: in the holding plate up and down in vacuum chamber, the holding plate for enforcing location aims at a movable side supports with " swing connecting bar guiding mechanism ".
Be somebody's turn to do by " swing connecting bar guiding mechanism ", as scrutable in the example described later, be as the swing swing link mechanism, be essentially circular motion, but in very small scope,, realize two dimensional surface guiding (bearing) approx with precision no problem in the practicality, with in the past each independent rotation of XY θ is that the guiding of main body is compared, and can obtain very outstanding response and controlled.Said mechanism also can constitute swing hang upside down, upright mode from the bottom up.
And in addition " swing connecting bar guiding mechanism " comprise also that a part of elasticity of connecting rod changes and the mechanism of realization two dimensional surface guiding.
And, the driving of this holding plate, the two dimensional surface guiding corresponding to such is embodied as the most desirable in 3 displacement driving cam modes of two dimension.
That is, technical scheme 1 described invention is characterized in that among the present invention, above-mentioned swing connecting bar guiding mechanism is arranged at the top or the bottom of vacuum chamber.When being arranged at vacuum chamber top, from the top board wall suspended swinging connecting rod guiding mechanism of vacuum chamber, when being arranged at the vacuum chamber bottom, from the upright swing connecting bar guiding mechanism of the base plate wall of vacuum chamber.
Explain, it is characterized in that, as keeping each other under the parallel state at 2 substrates, can freely adjust the movably mechanism of support for another to XY θ direction with one in the holding plate up and down, from holding plate up and down one, top board wall or base plate wall to vacuum chamber are provided with the swing connecting bar guiding mechanism, this swing connecting bar guiding mechanism is swung to XY θ direction by XY θ direction travel mechanism, thereby in the holding plate moves to the adjustment of XY θ direction with respect to another about making.
Explain, it is characterized in that, on the basis of the formation of technical scheme 1 described invention, above-mentioned swing connecting bar guiding mechanism has a plurality of from the inside of vacuum chamber to the outer setting of vacuum chamber, each is by being constituted to the link component of the almost parallel of vertical setting and the coupling member that links its each end on the top board wall of vacuum chamber or base plate wall, by to non deformable axle this coupling member of binding of XY θ direction and in the holding plate up and down.
Explain, it is characterized in that, on the basis of the formation of technical scheme 1 described invention, above-mentioned swing connecting bar guiding mechanism is connected the top board wall of the vacuum chamber relative with it or base plate wall, is constituted the formation that these pillars are freely swung to XY θ direction to the pillar of the almost parallel of vertical setting respectively towards base frame by the side from holding plate up and down.
As mentioned above, technical scheme 1 described invention among the present invention, freely support to XY θ direction with respect to another and adjust the mechanism that moves as keep under the parallel state in the holding plate up and down one each other at 2 substrates, from holding plate up and down one, top board wall or base plate wall to vacuum chamber are provided with the swing connecting bar guiding mechanism, this swing connecting bar guiding mechanism is swung to XY θ direction by XY θ direction travel mechanism, thereby in the holding plate up and down one is moved to the adjustment of XY θ direction with respect to another, thereby aim at the mutual alignment of going up holding plate and following holding plate to XY θ direction.
Therefore, do not use the XY theta stage, each substrate precision highland can be aligned the position yet.
The result, compared with in the past use XY theta stage technical scheme as the XY θ direction travel mechanism that each substrate is aligned the position, the present invention does not need the XY theta stage, therefore, can be with the structure miniaturization of XY θ direction travel mechanism, thereby to position alignment repeatedly, do not produce wear phenomenon, and can expect the raising of permanance because of the sliding part of breaking off causing of oil.Simultaneously, can also realize the minimizingization of manufacturing expense, and its to keep in repair also transfiguration easy, and, even maximizing, substrate size also whole device can be provided with compactness, diminish thereby the space is set, shipping expense reduces, and can omit disintegration when dispatching from the factory or the assembly working in the scene is set.
And, along with the maximization of substrate size, even the atmospheric pressure load in vacuum chamber increases, also can improve the controlled of position alignment, simultaneously, though because of the top board wall of vacuum chamber or base plate wall since atmospheric load be out of shape, also can be insusceptibly aligned position correctly.
The invention of technical scheme 2, on the basis of the effect that technical scheme 1 is invented, the swing connecting bar guiding mechanism, be formed with a plurality of from the inside of vacuum chamber to the outside of vacuum chamber, respectively by on the top board wall of vacuum chamber or base plate wall, being constituted with the link component of the almost parallel of vertical setting and the coupling member that links its each end, with this coupling member and up and down in the holding plate to link to the non deformable axle of XY θ direction, even member and coupling member move to the swing of XY θ direction thereby swing freely, also can be with the rigidity of axle, keep in the holding plate up and down one and roughly necessarily and not contact, so sliding resistance does not take place with the top board wall of vacuum chamber or the interval of base plate wall.
Therefore, can with one in the movable holding plate up and down with simple structure to XY θ direction planar support adjustably.
The result, owing to, do not have the rubbing contact part, therefore along with moving to the adjustment of XY θ direction, do not produce the dust that produces because of this rubbing contact, and can prevent in the mutual position alignment of 2 substrates the adverse effect that the generation because of dust takes place 2 substrates.
The invention of technical scheme 3, on the basis of the effect that technical scheme 1 is invented, the swing connecting bar guiding mechanism is by the top board wall of the vacuum chamber relative with it of a perforation from holding plate up and down or base plate wall, constituted to the pillar of the almost parallel of vertical setting respectively towards base frame, these pillars are freely swung to XY θ direction, thereby, the top board wall or the base plate wall of in the holding plate and vacuum chamber up and down, be not subjected to atmospheric any influence, contactlessly adjust move and sliding resistance do not take place.
Therefore, can with one in the movable holding plate up and down with simple structure to XY θ direction slyness planar support adjustably.
The result, because in the time of can be with the drive source miniaturization of XY θ direction travel mechanism, not along with the rubbing contact part that moves to the adjustment of XY θ direction, therefore, do not produce the dust that produces because of this rubbing contact, and can prevent in the mutual position alignment of each 2 substrate the adverse effect that the generation because of dust takes place 2 substrates.
The invention of technical scheme 4, on the basis of the effect that technical scheme 1 is invented, at the inboard of vacuum chamber or in the space identical with the internal atmosphere of vacuum chamber, arrange XY θ direction travel mechanism and swing connecting bar guiding mechanism, and a side in this XY θ direction travel mechanism and the holding plate up and down or swing connecting bar guiding mechanism directly are connected, thereby can carry out the mutual position alignment of each substrate with internal drive.
Therefore, can remove vacuum and connect parts.
The result, compared with in the past in the base plate wall of vacuum chamber and connect and clamp flexible sealing components such as wrinkle shape elastic body between the driver part of this base plate wall and keep vacuum state structure in the vacuum chamber, owing to do not need sealed vacuum to connect the flexible sealing component of parts, therefore, can reduce vacuum and cut off required expense, simultaneously, owing to do not need to adjust mobile required strength, therefore, there is not the restriction of type of drive.
And, in order to carry out the mutual position alignment of each substrate, even move with micron unit or the adjustment of sub-micron unit, after adjustment is moved, flexible sealing component also will recover the shape before the distortion owing to elastic deformation, therefore, do not take place to carry out correct position alignment unusually in position alignment.
The invention of technical scheme 5, on the basis of technical scheme 1,2 or 3 effects of inventing, arrange XY θ direction travel mechanism in the outside of vacuum chamber, this XY θ direction travel mechanism is connected indirectly with a pillar by the swing connecting bar guiding mechanism in the holding plate up and down, thereby, carry out the mutual position alignment of each substrate with external drive.
Therefore, can design vacuum chamber compactly.
The invention of technical scheme 6, on the basis of technical scheme 1,2,3,4 or 5 effects of inventing, in above-mentioned vacuum chamber or on the inside or pillar of the perisporium of vacuum chamber, form the substrate interval adjusting mechanism that is connected with last holding plate, by this substrate interval adjusting mechanism, to go up holding plate with respect to holding plate is relatively parallel mobile to the Z direction down, thereby can revise along with XY θ direction moving substrate (A, the part that interval B) changes a little.
Therefore, can not increase vacuum and connect parts,, be adjusted into the optimal interval of the mutual position alignment of each substrate with simple structure.
Description of drawings
Fig. 1 is the vertical disconnected front view (FV) of the substrate position alignment device of expression embodiments of the invention 1;
Fig. 2 is the cross-sectional plan that amplifies following holding plate of expression and XY θ direction travel mechanism;
Fig. 3 is the vertical disconnected front view (FV) of the substrate position alignment device of expression embodiments of the invention 2;
Fig. 4 is the cross-sectional plan that amplifies following holding plate of expression and XY θ direction travel mechanism;
Fig. 5 is the vertical disconnected front view (FV) of the substrate position alignment device of expression embodiments of the invention 3;
Fig. 6 amplifies cross-section base plate face figure according to the part of Fig. 5 (6)-(6).
Embodiment
Below, describe the specific embodiment of the present invention in detail.
Baseplate-laminating machine with substrate position alignment device D of the present invention, as Fig. 1～shown in Figure 6, reach the behind of holding plate 2 down at last holding plate 1, respectively to Z direction freedom of movement be horizontally set with and up and down the top board wall 3 and the base plate wall 4 of holding plate almost parallel subtend, along with moving of top board wall 3 and base plate wall 4 relative to approaching, (switching) vacuum chamber S is freely cut apart between division formation direction up and down, make it surround holding plate 1 up and down, 2, this vacuum chamber S inside reaches specified vacuum when spending, the XY θ direction travel mechanism 5 of aforesaid substrate position alignment device D brings into operation, with 2 glass substrate A, B relatively moves to the adjustment of XY θ direction, thereby as each substrate A, the position alignment that B is mutual is carried out coarse alignment and fine alignment successively.
In more detail, at the bottom surfaces peripheral part of top board wall 3 and the upper side peripheral part of base plate wall 4, integrally formed respectively or ring-type perisporium 3a is set integratedly, 4a, when the upper inside of the vacuum chamber S that is surrounded by this top board wall 3 and perisporium 3a is arranged holding plate 1, inner lower cloth at the vacuum chamber S that is surrounded by base plate wall 4 and perisporium 4a deposits holding plate 2, with these top board walls 3 and perisporium 3a and base plate wall 4 and perisporium 4a by the extension operation of the elevating mechanism 11 that constitutes by ground jack etc. under the state of Z direction away from (starting), at holding plate 1 up and down, substrate A is set on 2, B, afterwards, top board wall 3 is moved downward, make above-mentioned ring-type perisporium 3a by the operation of the retraction of this elevating mechanism 11,4a closely contacts, and forms vacuum chamber S thereby divide.
Afterwards, deflate from vacuum chamber S by the operation of suction mechanism 12, when reaching specified vacuum and spend, by XY θ direction travel mechanism 5 make holding plate 1 and down the either side in the holding plate 2 move to the adjustment of XY θ direction with respect to opposite side, go up the coarse alignment and the fine alignment that load and unload the infrabasal plate B that is freely keeping on the maintenance face of loading and unloading are freely keeping on the maintenance face of holding plate 1 upper substrate A and following holding plate 2 successively.
After these position alignment are finished,, thereby force to peel off upper substrate A, the cyclic adhesion agent C on the infrabasal plate B is carried out moment press attachedly, seal, make both superimposed from this maintenance face from gases such as the maintenance face of last holding plate 1 ejection nitrogen.
Afterwards, when making suction mechanism 12 operations, utilize attraction adsorbing mechanism 1b described later, the through hole of 2b, supply air or nitrogen in vacuum chamber S, or by a side's wherein work and will make and return to atmospheric pressure in the vacuum chamber S, thereby by at 2 substrate A, the draught head of the inside and outside generation of B has carried out uniform pressurization.And by the interval of conquassation, finish product under with the state of enclosing liquid crystal to regulation.
Below, with reference to accompanying drawing, describe various embodiments of the present invention in detail.
(embodiment 1)
Above-mentioned upward holding plate 1 reaches down, and holding plate 2 for example forms flat flat board by the thickness that rigid bodies such as metal or pottery are out of shape with non-warping (bending), make 2 substrate A as keeping, the immovable mechanism of B, at each subtend face electrostatic attraction board 1a is set respectively, in the time of 2a, for the absorption in the auxiliary atmosphere is kept, the additional setting attracts adsorbing mechanism 1b, 2b, and, in order to carry out transporting with the giving and accepting of robot (omit diagram), arrange a plurality of to Z direction back and forth movement with substrate, and adsorbing the stripper pin 1c that keeps, 2c is advisable.
And above-mentioned electrostatic attraction board 1a, 2a are electrostatic chuck, for example be arranged in metallic pedestal 1d in the mutual approaching mode of shape arranged side by side, on the 2d, these pedestals 1d, between the subtend face of 2d and last holding plate 1 and following holding plate 2, can clamp for example disc spring equal altitudes adjustment anchor clamps 1e, 2e comes these pedestals of trickle adjustment 1d, the depth of parallelism of 2d, also can not clamp height control anchor clamps 1e, 2e and with pedestal 1d, 2d and last holding plate 1 and down the subtend face of holding plate 2 directly contact.
And, between the bottom surfaces of the upper side of last holding plate 1 and top board wall 3, only clamp can elastic deformation in the Z direction a plurality of elastic component 1f such as for example spring and a body overhang, thereby, even owing in the vacuum chamber S and atmospheric pressure differential and top board wall 3 might be out of shape, can the last holding plate 1 in the vacuum chamber S not had a negative impact yet.
And, be arranged on the above-mentioned XY θ direction travel mechanism 5 of the base plate face and contact site 2e that the be recessed to form interlock of holding plate 2 down, by cam 5a, rotate this cam 5a aligned positions such as for example motor with drive source 5b, make this cam 5a all be contacted with the above-mentioned elastic body 5c such as for example spring of the contact site 2e of holding plate 2 down to constitute always, as a unit, the contact site 2e of the base plate face of holding plate 2 arranges 1 group under each with these parts.
Under the situation of illustrated example, as shown in Figure 2, wait near four jiaos of following holding plate 2 mutually away from the position on, with the cam 5a of this contact site 2e, above-mentioned XY θ direction travel mechanism 5, aligned position with drive source 5b and elastic body 5c as a unit, arrange more than at least 3 groups, so that it is to directions X and the operation of Y direction.Simultaneously, with this aligned position with drive source 5b from the inside of vacuum chamber S relative base plate wall 4 bury underground with airtight conditions, by of the operation of these aligned positions with drive source 5b, make each rotation drive the back and forth movement that is converted to directions X and Y direction by directions X cam 5a and Y direction cam 5a, simultaneously, overcome each elastic body 5c, make each contact site 2e directly move (pressing) to the adjustment of XY θ direction.
And, the directions X cam 5a of above-mentioned contact site 2e and XY θ direction travel mechanism 5 and Y direction cam 5a, the aligned position layout of drive source 5b and elastic body 5c, except illustrated example, produce only otherwise to the layout of above-mentioned stripper pin 2c etc. and to hinder, also can with other arrangement settings.
And, the aligned position arrangement of drive source 5b, except illustrated example, as long as by the inner space of this aligned position with drive source 5b, gas outside the inside of vacuum chamber S is not invaded, or, also can be provided with other arrangements from position gas outside the inside of vacuum chamber S is not invaded of this aligned position with drive source 5b.
And be provided with, with respect to last holding plate 1, so that each 2 substrate A, B keeps under the parallel state mutually with above-mentioned holding plate 2 down, freely supports to XY θ direction and adjusts the supporting mechanism 6 that moves.
This supporting mechanism 6, constitute by the base plate face 4 that is horizontally set with the vacuum chamber S that cannot move thereunder from the base plate face perforation of following holding plate 2, the swing connecting bar guiding mechanism of giving prominence to the outside of vacuum chamber S, make at least a portion of this swing connecting bar guiding mechanism 6, by the operation of above-mentioned XY θ direction travel mechanism 5 to the swing of XY θ direction, thereby will descend holding plate 2 to move to the adjustment of XY θ direction with respect to last holding plate 1.
Above-mentioned swing connecting bar guiding mechanism 6, be for holding plate 2 is moved and linkage assembly from swing to XY θ direction that swing as to the adjustment of XY θ direction, when it is rocked to predetermined angular, keep this pendulum angle, thereby with respect to holding plate 2 under last holding plate 1 location, make it not removable to XY θ direction, with this mechanism as a unit, down holding plate 2 and base plate wall 4 away from the position on be furnished with many groups.
In the present embodiment, above-mentioned swing connecting bar guiding mechanism 6 respectively by from the link component 6b of each almost parallel that hangs to vertical (Z direction) of the base plate wall 4 of vacuum chamber S and, the coupling member 6c that links this each end of link component constitutes, with this coupling member 6c and following holding plate 2 to XY θ direction with axle 6a binding non deformable, have big rigidity to vertical, make these link components 6b by above-mentioned XY θ direction travel mechanism 5, when XY θ direction is swung, keep its pendulum angle.
In the illustrated example, above-mentioned axle 6a, connect through hole 4b movably and be draped to XY θ direction from the base plate of following holding plate 2 towards base plate wall 4 perforates, above-mentioned link component 6b, bottom surfaces around the through hole 4b of base plate wall 4 for example is hung with 4, around this 6a, each is axially cut apart with these link components 6b, each is linked with bend 6d such as for example spherojoints, thereby the distortion of XY θ direction is moved.
That is, the axle 6a that will constitute with axle is by the link component 6b that can swing to XY θ direction and discoideus coupling member 6c, swings freely as swing and supports.
And, will be in the slit of the through hole 4b of above-mentioned base plate wall 4 perforates and axle 6a, for example the flexible sealing component 6e that constitutes of the resilient material that is formed with the wrinkle shape by bellows etc. covers, thereby seal movably and connect with airtight conditions to XY θ direction, or will cover respectively with partition wall (omitting diagram) around the above-mentioned swing connecting bar guiding mechanism 6, make its inside become the space of identical atmosphere, so then do not need sealing with flexible sealing component 6e with vacuum chamber S.
Above-mentioned swing connecting bar guiding mechanism 6, can be with the following structure setting beyond the illustrated example: opposite with said structure, the axle 6a at center is freely formed to the swing of XY θ direction, simultaneously, link component 6b is not on every side formed to XY θ direction shifting ground to Z direction rigidity height, perhaps, as becoming to swing structure freely to XY θ direction, do not use bend 6d such as spherojoint, and be to use the elastic rod material that constitutes by the pillar of elastically deformable or cable etc., or the part of axle 6a or connecting rod 6b or whole material with elastically deformable formed, or the integral body of link component 6b is formed etc. with cylindric by the material of elastically deformable.
And, though for example as shown in Figure 2 with above-mentioned swing connecting bar guiding mechanism 6, descending four jiaos of holding plate 2 and base plate wall 4 respectively to arrange 1 group, amount to 4 groups, but, along with the maximization of substrate size, also can on the position of the layout that does not hinder above-mentioned XY θ direction travel mechanism 5 or stripper pin 2c etc., arrange more than 5 groups or 5 groups.
And, also be provided with, with one of them connection at least in the above-mentioned up and down holding plate 1,2, will keep vacuum state in the vacuum chamber S, and make up and down holding plate 1,2 relatively to the parallel mobile substrate of Z direction adjusting mechanism 7 at interval.
In the illustrated example, in the way up and down of the central component 6a that the axle by each swing connecting bar guiding mechanism 6 constitutes, be provided with respectively to the substrate of Z direction stretching motion adjusting mechanism 7 at interval, by these substrates at interval adjusting mechanisms 7 holding plate 2 is moved to the Z direction is parallel relative to base plate wall 4.
Each substrate interval adjusting mechanism 7 is at driving bodies such as for example linear actuators (Linear Actuator) of the centre position of central component 6a layout or flexible cylinders, 2 substrate A are being installed, before the B, consider substrate A, changing factors such as the thickness balance of B, by each driving body is upheld respectively, setting up and down, holding plate 1,2 makes both parallel.
Carry out substrate A, when coarse alignment that B is mutual and fine alignment, get therewith, changing substrate A, in the time of the interval of B, member 6b moves to XY θ direction distortion around the swing connecting bar guiding mechanism 6, thereby that part of length that the interval of having extended time holding plate 2 and base plate wall 4 has shortened is a little kept with predetermined distance descending between holding plate 2 and the base plate wall 4.
Below, describe substrate A in detail, the interval of B.Under the state that deflates from vacuum chamber S, stay the space about 1mm to 2mm, so that upper substrate A does not contact with cyclic adhesion agent C or liquid crystal on the infrabasal plate B, implement before the coarse alignment, upper substrate A and cyclic adhesion agent C are approaching, are not advisable but do not contact till the minimum value of about 0.5mm, implement before the fine alignment, even upper substrate A contacts with the circumferential part of cyclic adhesion agent C partly at least, but does not contact with infrabasal plate B, till the minimum value of about 0.1mm to 0.2mm, be advisable.
The working condition of this substrate position alignment device then, is described.
At first, after reaching the specified vacuum degree in the vacuum chamber S of sealing, as shown in Figure 1, by the substrate operation of adjusting mechanism 7 at interval, will descend holding plate 2 to rise, at coarse alignment upper and lower base plate A, during B, both are approached to be spaced apart minimum about 0.5mm, simultaneously, during fine alignment, further approach to about minimum about 0.1mm to 0.2mm.In these coarse alignments and fine alignment stage, will be illustrated in 2 substrate A, the mark of B according to the output data of the detector that is made of microscope and camera (omit diagram), makes 5 operations respectively of a plurality of XY θ direction travel mechanism.
Each XY θ direction travel mechanism 5, by its aligned position with the rotation of drive source 5b by directions X cam 5a and Y direction cam 5a, to descend the contact site 2e of the base plate face of holding plate 2 to move (pressing) to the adjustment of XY θ direction relative to going up holding plate 1, thereby, carry out each 2 substrate A successively, coarse alignment that B is mutual and fine alignment.
As a result, the size of whole XY direction that can densification substrate position alignment device simultaneously, can reliably and critically be finely tuned.
And, in the present embodiment, in the contact site 2e of following holding plate 2 and vacuum chamber S that cam 5a is arranged in sealing, thereby according to each substrate A, the adjustment of the XY θ direction of the position alignment that B is mutual is moved in vacuum chamber S and is carried out, therefore, XY θ direction travel mechanism 5 can not connect vacuum chamber S and successfully adjust and move.
And, if when carrying out above-mentioned coarse alignment and fine alignment, above-mentioned holding plate 2 is down moved to the adjustment of XY θ direction with respect to base plate wall 4, then the member 6b on every side of each swing connecting bar guiding mechanism 6 moves to the equidirectional distortion, but because the weight from holding plate 2 to the big rigidity of vertical that can bear down that each central component 6a has, following holding plate 2 is kept and is not contacted with the interval of base plate wall 4, therefore, by moving, do not produce sliding resistance to the adjustment of XY θ direction.
As a result, can provide to the adjustment of XY θ direction and move slyness and the very high swing connecting bar guiding mechanism 6 of permanance.
And, make down holding plate 2 parallel mobile to the Z direction by substrate interval adjusting mechanism 7 with respect to base plate wall 4, therefore, be accompanied by each substrate A, the position alignment that B is mutual, when both intervals can be changed, along with member 6b around each swing connecting bar guiding mechanism 6 moves to the distortion of XY θ direction, the size of above-below direction diminishes a little, and each substrate A, when the mutual interval of B broadens a little,, also just can keep predetermined distance as revising with this part even the interval of following holding plate 2 and base plate wall 4 narrows down.
As a result, can be with compact structure, the precision highland when B carries out position alignment each other, can be revised the trickle error of the Z direction of following this position alignment generation with each substrate A.
(embodiment 2)
This embodiment 2, as shown in Figures 3 and 4, its following structure is different with the embodiment 1 of above-mentioned Figure 1 and Figure 2, and other structure is identical with the embodiment 1 of Figure 1 and Figure 2.Promptly, with respectively with the directions X cam 5a of above-mentioned XY θ direction travel mechanism 5 and the contact site 2e ' of Y direction cam 5a interlock, give prominence to setting from the base plate of following holding plate 2 towards base plate wall 4, descend the contact site 2e ' of the base plate face of holding plates 2 to move to the adjustment of XY θ (level) direction these by the driving of directions X cam 5a and Y direction cam 5a, thereby, with substrate A, B keeps parallel state mutually, carries out coarse alignment and fine alignment successively.
In the illustrated example, base plate wall 4 loadings of above-mentioned vacuum chamber S are fixed on the tabular pallet 13b, should support by a plurality of pillar shape pallet 13c by tabular pallet 13b, this base plate wall 4 is immovably supported, to this, make top board wall 3 by the stretching operation of above-mentioned elevating mechanism 11 to Z direction back and forth movement (opening and closing motion).
And, above-mentioned contact site 2e ' is with bar-shaped formation, will the through hole 4c of base plate wall 4 perforates to XY θ direction freedom of movement insert logical, make its outside outstanding to vacuum chamber S, the flexible sealing component 2f that the resilient material that the slit of these bar-shaped contact site 2e ' and through hole 4c is formed with the wrinkle shape by for example bellows etc. constitutes seals respectively, simultaneously, directions X cam 5a and Y direction cam 5a by each contact site 2e ' and above-mentioned XY θ direction travel mechanism 5, with driven member 5d respectively to directions X or Y direction freedom of movement set up, by elastic body 5e such as for example spring across each contact site 2e ' when directions X and Y direction stretch down holding plate 2, each cam 5a and driven member 5d are permanently connected to.
And, use the operation of drive source 5b by the aligned position of these XY θ direction travel mechanisms 5, each rotation is driven the back and forth movement that is converted to directions X and Y direction by each cam 5a, simultaneously, each back and forth movement is conveyed to each driven member 5d, revolt each elastic body 5e, holding plate 2 moves to the adjustment of XY θ direction indirectly to make each contact site 2e ' reach down.
Above-mentioned contact site 2e ', the directions X cam 5a of XY θ direction travel mechanism 5 and Y direction cam 5a, aligned position drive source 5b, the layout of driven member 5d and elastic body 5e or structure, except illustrated example, embodiment 1 as for example Figure 1 and Figure 2, can be or not this contact site 2e ' is not outstanding to the outside of vacuum chamber S, inboard and directions X cam 5a and Y direction cam 5a interlock at vacuum chamber S, or as long as the layout of above-mentioned stripper pin 2c etc. is not caused influence, do not need driven member 5d and directly contact site 2e ' and cam 5a interlock etc., as long as each contact site 2e ' can be moved to the adjustment of XY θ direction by cam 5a, then can be with other layouts or structure setting.
Thereby Fig. 3 and invention shown in Figure 4 can obtain the action effect identical with the embodiment 1 of above-mentioned Figure 1 and Figure 2.
And, when above-mentioned XY θ direction travel mechanism 5 and above-mentioned swing connecting bar guiding mechanism 6 are close and are difficult to arrange both layouts, can for example illustrate like that, the a plurality of cross-drilled hole 4d that offer for circular protrusion 4a in base plate wall 4, make down the outstanding a plurality of brace summer 2g that form of periphery of holding plate 2 insert logical with the loosening state that embeds respectively and adjust freedom of movement ground to XY θ direction and Z direction and support, simultaneously, below this brace summer 2f, engage the upper end of the central component 6a of swing connecting bar guiding mechanism 6.
(embodiment 3)
This embodiment 3, as Fig. 5 and shown in Figure 6, the embodiment 1 of its following structure and above-mentioned Figure 1 and Figure 2 or Fig. 3 and embodiment 2 shown in Figure 4 are different, and other structure is identical with embodiment 1 or embodiment 2.Promptly, as the above-mentioned swing connecting bar guiding mechanism of the supporting mechanism 6 of holding plate 2 down, by the base plate wall 4 that connects vacuum chamber S from the following base plate face of holding plate 2, constitute to each pillar 6f of base frame 13d with the almost parallel of vertical setting, make these pillars 6f and/or down holding plate 2 move to XY θ (level) direction by the operation of above-mentioned XY θ direction travel mechanism 5, thereby, the roughly whole or part of this pillar 6f is swung to XY θ direction, thereby with each substrate A, B keeps parallel state mutually, carries out coarse alignment and fine alignment successively.
In detail, the pillar 6f of above-mentioned swing connecting bar guiding mechanism 6, it is oscillating structural member in order to make down holding plate 2 move and freely form to XY θ direction swing to the adjustment of XY θ direction, thereby, following holding plate 2 is as reverse up and down swing, swinging in the cross rest freely by above-mentioned XY θ direction travel mechanism 5, is kept its pendulum angle to this pillar 6f when XY θ direction is swung.
In the illustrated example, base plate wall 4 loadings of above-mentioned vacuum chamber S are fixed on the tabular pallet 13b, should support by a plurality of pillar shape pallet 13c by tabular pallet 13b, this base plate wall 4 is immovably supported, to this, make top board wall 3 by the stretching operation of above-mentioned elevating mechanism 11 to Z direction back and forth movement (opening and closing motion), simultaneously, upper side from the base frame 13d of the lower end that fixedly mounting these pillar shape pallets 13c, connect the base plate wall 4 of vacuum chamber S, at the base plate face of whole holding plate 2 down with the equidistantly upright pillar 6f that is provided with above-mentioned swing connecting bar guiding mechanism 6 more than 4 or 4 of horizontal direction.
Each pillar 6f, to axially separating, for example link mutually, or the whole or part of each pillar 6f is made of the material of elastically deformable etc., thereby make the upper portion that is connected with the above-mentioned base plate face of holding plate 2 down can be at least to XY θ direction swing distortion by bend 6d such as spherojoints.
And the upper portion in the conduct of these pillars 6f swing side across each other, links above-mentioned coupling member 6g, and being integral respectively, connects this coupling member 6g and above-mentioned XY θ direction travel mechanism 5.
And, the upper part of each pillar 6f, connect the through hole 4e that on the base plate wall 4 of above-mentioned vacuum chamber S and above-mentioned tabular pallet 13b, offers to XY direction freedom of movement ground, lead to inside and outside vacuum chamber S and insert, this is inserted the slit of logical part and through hole 4e, for example the flexible sealing component 6h that constitutes by the resilient material that is formed with the wrinkle shape by bellows etc. covers, thereby seal movably to XY θ direction, connect with airtight conditions, perhaps if will cover with partition wall (omitting diagram) around each pillar 6f and coupling member 6g and the above-mentioned XY θ direction travel mechanism 5, make its inside become the space of identical atmosphere, then do not need sealing with flexible sealing component 6e with vacuum chamber S.
In the illustrated example, upper end at above-mentioned pillar 6f, link respectively not carry out to the axle 6i of XY θ direction distortion etc. integrated, make it to be attached at down on the base plate face of holding plate 2, in the slit of the through hole 4e of this 6i and above-mentioned base plate wall 4, flexible sealing component 6h is set, simultaneously, at these 6i each other, link tabular coupling member 6g.
Between the directions X cam 5a and Y direction cam 5a of above-mentioned coupling member 6g and above-mentioned XY θ direction travel mechanism 5, each to directions X or Y direction freedom of movement set up driven member 5f, pass through each coupling member 6g, axle 6i and pillar 6f by elastic body 5g such as for example springs, when directions X and Y direction stretch down holding plate 2, each cam 5a and driven member 5d are permanently connected to.
That is, these coupling members 6g, axle 6i and pillar 6f be respectively with the directions X cam 5a of above-mentioned XY θ direction travel mechanism 5 and the contact site 2e of Y direction cam 5a interlock ".
And, use the operation of drive source 5b by the aligned position of each XY θ direction travel mechanism 5, each rotation is driven the back and forth movement that converts directions X and Y direction by directions X cam 5a and Y direction cam 5a to, simultaneously, each back and forth movement is passed to each driven member 5f, revolts each elastic body 5g, connecting elements 6g is moved, simultaneously, by axle 6i and pillar 6f, holding plate 2 is moved indirectly to the adjustment of XY θ direction.
And, directions X cam 5a and Y direction cam 5a for above-mentioned XY θ direction travel mechanism 5, aligned position drive source 5b, driven member 5d, elastic body 5e and pillar 6f, layout or the structure of coupling member 6g and axle 6i, except illustrated example, for example can directly the base plate face of the upper end of pillar 6f with following holding plate 2 do not linked by axle 6i, or, with the embodiment 1 of Figure 1 and Figure 2 similarly, can be in vacuum chamber S inboard, make pillar 6f and coupling member 6g and directions X cam 5a and Y direction cam 5a interlock etc., as long as pillar 6f can be moved to the adjustment of XY θ direction by directions X cam 5a and Y direction cam 5a, then can be with other layouts or structure setting.
Thereby, Fig. 5 and invention shown in Figure 6, not only can obtain embodiment 1 with above-mentioned Figure 1 and Figure 2, or the identical action effect of Fig. 3 and embodiment shown in Figure 42, and, with shown in embodiment 1 or the embodiment 2 by the coupling member 6b of the almost parallel that hangs to vertical respectively from the base plate face 4 of the base plate face of following holding plate 2 and vacuum chamber S and, the swing link guide member 6 that the coupling member 6c that its each bottom is connected constitutes is compared and can will be descended holding plate 2 to XY θ direction planar support adjustably with simple structure, thereby, have the following advantages: along with the maximization of substrate size, even the atmospheric pressure load to vacuum chamber S increases, it is controlled also can to improve position alignment, simultaneously, even the base plate wall 4 of vacuum chamber S owing to this atmospheric load is out of shape, also can be carried out correct position alignment insusceptibly.
And, in order to carry out each above-mentioned substrate A, coarse alignment that B is mutual and fine alignment will be with at least one connections in the holding plate 1,2 up and down, will be maintained vacuum state in the vacuum chamber S, make holding plate 1 up and down, 2 relatively to the parallel mobile substrate of Z direction interval adjusting mechanism 7, be arranged in perisporium 3a around vacuum chamber S, the inside of 4a, but, except the structure of illustrated example, can also with this substrate at interval adjusting mechanism 7 be arranged in the way up and down of the inboard of vacuum chamber S or pillar 6f.
Thereby, even the size of above-below direction diminishes a little, each substrate A to the distortion of XY θ direction is mobile along with each pillar 6f, when the mutual interval of B broadens a little, even the interval of following holding plate 2 and base plate wall 4 narrows down, also can revise the trickle error of this Z direction, keep predetermined distance.
As a result, can not increase the parts that connect vacuum chamber S, with simple structure, with each substrate A, B is adjusted into the interval of suitable mutual position alignment.
And, in the various embodiments described above, the base plate wall 4 of above-mentioned vacuum chamber S loaded be fixed on pallet 13a, 13b, 13c is on the 13d, make it not removable,, make top board wall 3 open and close motion to the Z direction by the stretching operation of above-mentioned elevating mechanism 11 to this, but, the invention is not restricted to this, also can be in contrast, top board wall 3 is immovably supported, to this, make base plate wall 4 open and close motion to the Z direction, with vacuum chamber S up and down direction cut apart (switching).
And, by above-mentioned XY θ direction travel mechanism 5, only holding plate 2 moves to the adjustment of XY θ direction under the handle, and carry out infrabasal plate B and to the immovable position alignment that goes up the upper substrate A of holding plate 1 of XY θ direction, but, the invention is not restricted to this, also can be in contrast, by 5 in above-mentioned XY θ direction travel mechanism last holding plate 1 is moved to the adjustment of XY θ direction, and carry out upper substrate A and also can to the immovable position alignment of the infrabasal plate B of holding plate 2 down of XY θ direction.
At this moment, set up as the swing connecting bar guiding mechanism that should go up the supporting mechanism 6 of holding plate 1 from the top board wall 3 of last holding plate 1 to vacuum chamber S.
And the present invention has represented by a situation about moving to the adjustment of XY θ direction in the holding plate 1,2 about the cam 5a general of each XY θ direction travel mechanism 5, but the invention is not restricted to this, also can not use cam 5a, and use other drive source of actuator etc. for example, move to the adjustment of XY direction.
Claims (6)
1. substrate position alignment device, 2 substrate (A that will in vacuum chamber (S), fit, B), loading and unloading freely remain on up and down holding plate (1,2) and go up and make them relative respectively, with these 2 substrate (A, B) relatively move to the adjustment of XY θ direction, carry out each substrate (A, B) mutual position alignment is characterized in that:
As at 2 substrate (A, B) keep each other under the parallel state, with above-mentioned holding plate (1 up and down, 2) in one can freely adjust the mechanism that supports movably to XY θ direction with respect to another, from holding plate (1 up and down, 2) in one, top board wall (3) or base plate wall (4) to vacuum chamber (S) are provided with swing connecting bar guiding mechanism (6), this swing connecting bar guiding mechanism (6) is swung to XY θ direction by XY θ direction travel mechanism (5), thereby in the holding plate (1,2) up and down one is moved to the adjustment of XY θ direction with respect to another.
2. the described substrate position alignment device of claim 1, wherein, above-mentioned swing connecting bar guiding mechanism (6) has a plurality of from the inside of vacuum chamber (S) to the outer setting of vacuum chamber (S), each is by at the top board wall (3) of vacuum chamber (S) or base plate wall (4) goes up the link component (6b) of the almost parallel that is provided with to vertical and the coupling member (6c) of its each end of binding is constituted, by link this coupling member (6c) and in the holding plate (1,2) up and down to the non deformable axle of XY θ direction (6a).
3. the described substrate position alignment device of claim 1, wherein, above-mentioned swing connecting bar guiding mechanism (6) is by from holding plate (1 up and down, the pillar (6f) of the top board wall (3) of the vacuum chamber (S) that a perforation 2) is relative with it or base plate wall (4), the almost parallel that is provided with to vertical respectively towards base frame (13d) constitutes, and these pillars (6f) are freely swung to XY θ direction.
4. the described substrate position alignment device of claim 1, wherein, at the inboard of above-mentioned vacuum chamber (S) or in the space identical with the internal atmosphere of this vacuum chamber (S), arrange XY θ direction travel mechanism (5) and swing connecting bar guiding mechanism (6), with this XY θ direction travel mechanism (5) and up and down in the holding plate (1,2) one or swing connecting bar guiding mechanism (6) directly connect.
5. claim 1,2 or 3 described substrate position alignment devices, wherein, arrange XY θ direction travel mechanism (5) in the outside of above-mentioned vacuum chamber (S), with this XY θ direction travel mechanism (5) and up and down in the holding plate (1,2) by swing connecting bar guiding mechanism (6) connection indirectly.
6. claim 1,2,3,4 or 5 described substrate position alignment devices, wherein, in above-mentioned vacuum chamber (S) or around the perisporium (3a of vacuum chamber (S), inside 4a) or pillar (6a, 6f), form the substrate interval adjusting mechanism (7) that is connected with last holding plate (1), will go up holding plate (1) with respect to holding plate (2) is relatively parallel mobile to the Z direction down by this substrate interval adjusting mechanism (7).
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003365909 | 2003-10-27 | ||
| JP365909/2003 | 2003-10-27 | ||
| PCT/JP2004/014066 WO2005041154A1 (en) | 2003-10-27 | 2004-09-27 | Substrate positioning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1799078A true CN1799078A (en) | 2006-07-05 |
| CN1799078B CN1799078B (en) | 2010-06-09 |
Family
ID=34510204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2004800154428A Active CN1799078B (en) | 2003-10-27 | 2004-09-27 | Substrate positioning device |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP3817258B2 (en) |
| KR (1) | KR100897846B1 (en) |
| CN (1) | CN1799078B (en) |
| TW (1) | TW200518872A (en) |
| WO (1) | WO2005041154A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101654009B (en) * | 2006-10-16 | 2013-01-30 | Sfa工程股份有限公司 | Printer |
| CN108398814A (en) * | 2018-03-22 | 2018-08-14 | 京东方科技集团股份有限公司 | Processing unit (plant) for showing equipment |
| CN108761855A (en) * | 2018-05-04 | 2018-11-06 | 芜湖良匠机械制造有限公司 | A kind of apparatus for correcting for position of glass substrate correction |
| CN109036147A (en) * | 2018-09-19 | 2018-12-18 | 京东方科技集团股份有限公司 | A kind of substrate and display panel |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5172639B2 (en) * | 2008-12-16 | 2013-03-27 | アドヴァンスド・ディスプレイ・プロセス・エンジニアリング・コーポレーション・リミテッド | Substrate bonding device |
| US11552060B2 (en) * | 2020-11-24 | 2023-01-10 | Micron Technology, Inc. | Stacked light emitting diode (LED) display |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3094827B2 (en) * | 1995-02-14 | 2000-10-03 | ウシオ電機株式会社 | Method and apparatus for bonding liquid crystal panels |
| JPH0996822A (en) * | 1995-09-29 | 1997-04-08 | Toshiba Corp | Substrate joining device |
| KR19990016832A (en) * | 1997-08-20 | 1999-03-15 | 윤종용 | Route guidance mode automatic switching device for car navigation and its method |
| JP3486862B2 (en) * | 1999-06-21 | 2004-01-13 | 株式会社 日立インダストリイズ | Substrate assembly method and apparatus |
| JP3542956B2 (en) * | 2000-10-30 | 2004-07-14 | 信越エンジニアリング株式会社 | LCD panel substrate bonding equipment |
| KR100800323B1 (en) * | 2001-12-06 | 2008-02-01 | 엘지.필립스 엘시디 주식회사 | Align inspection apparatus for laminating apparatus of substrates |
| TWI257515B (en) * | 2002-11-16 | 2006-07-01 | Lg Philips Lcd Co Ltd | Substrate bonding apparatus for liquid crystal display device |
-
2004
- 2004-09-27 WO PCT/JP2004/014066 patent/WO2005041154A1/en active Application Filing
- 2004-09-27 JP JP2005509255A patent/JP3817258B2/en active Active
- 2004-09-27 CN CN2004800154428A patent/CN1799078B/en active Active
- 2004-09-27 KR KR1020057014372A patent/KR100897846B1/en active IP Right Grant
- 2004-10-27 TW TW093132594A patent/TW200518872A/en unknown
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101654009B (en) * | 2006-10-16 | 2013-01-30 | Sfa工程股份有限公司 | Printer |
| CN108398814A (en) * | 2018-03-22 | 2018-08-14 | 京东方科技集团股份有限公司 | Processing unit (plant) for showing equipment |
| CN108398814B (en) * | 2018-03-22 | 2021-09-24 | 京东方科技集团股份有限公司 | Processing device for display equipment |
| CN108761855A (en) * | 2018-05-04 | 2018-11-06 | 芜湖良匠机械制造有限公司 | A kind of apparatus for correcting for position of glass substrate correction |
| CN108761855B (en) * | 2018-05-04 | 2021-07-20 | 芜湖良匠机械制造有限公司 | Correcting device for correcting position of glass substrate |
| CN109036147A (en) * | 2018-09-19 | 2018-12-18 | 京东方科技集团股份有限公司 | A kind of substrate and display panel |
| CN109036147B (en) * | 2018-09-19 | 2020-05-22 | 京东方科技集团股份有限公司 | Substrate and display panel |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200518872A (en) | 2005-06-16 |
| JP3817258B2 (en) | 2006-09-06 |
| JPWO2005041154A1 (en) | 2007-04-26 |
| KR100897846B1 (en) | 2009-05-15 |
| KR20060113363A (en) | 2006-11-02 |
| TWI335254B (en) | 2011-01-01 |
| CN1799078B (en) | 2010-06-09 |
| WO2005041154A1 (en) | 2005-05-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100844968B1 (en) | Substrate assembling apparatus and method | |
| CN1530714A (en) | Placode binder and binding method | |
| TWI462665B (en) | Adhesive chuck and substrate bonding apparatus | |
| KR20130036154A (en) | Sticking apparatus | |
| CN103456662B (en) | Substrate separator and use the base plate separation method of this device | |
| CN1796254A (en) | Panel feed apparatus, panel feed method and panel assembly apparatus | |
| CN101035725A (en) | Board conveying device | |
| CN1780542A (en) | Panel assembling apparatus and panel assembling method | |
| KR101631028B1 (en) | Bonding apparatus for display | |
| CN1697768A (en) | Substrate-levitating device | |
| CN1906476A (en) | Macro inspection apparatus and macro inspection method | |
| CN101061528A (en) | Substrate holding structure | |
| CN1799078A (en) | Substrate positioning device | |
| CN1304885C (en) | Sticking device for flat panel substrate | |
| CN1991528A (en) | Substrate bonding apparatus for liquid crystal display panel | |
| JPH11262828A (en) | Substrate holding device | |
| CN1727880A (en) | Multiple glass substrate checker and multiple glass substrate check using such checker | |
| CN117457543A (en) | Double-station multi-axis air floatation movement system for wafer 3D packaging | |
| CN101063764A (en) | Adhesive substrates manufacturing device | |
| KR102194996B1 (en) | Cooling sheet attachment apparatus of focusing ring for semiconductor device manufacturing | |
| KR102512208B1 (en) | laser processing apparatus | |
| KR20200006008A (en) | Substrate assembly apparatus and substrate assembly method | |
| KR20120087462A (en) | Substrate bonding apparatus and substrate bonding method | |
| CN1784779A (en) | Substrate suction device | |
| CN1694236A (en) | Plane holding device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| REG | Reference to a national code |
Ref country code: HK Ref legal event code: DE Ref document number: 1092267 Country of ref document: HK |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| REG | Reference to a national code |
Ref country code: HK Ref legal event code: WD Ref document number: 1092267 Country of ref document: HK |