KR102194996B1 - Cooling sheet attachment apparatus of focusing ring for semiconductor device manufacturing - Google Patents

Abstract

The present invention relates to an apparatus for attaching a cooling sheet to a focusing ring for a semiconductor device manufacturing apparatus. The apparatus for attaching a cooling sheet to a focusing ring for a semiconductor device manufacturing apparatus includes: a body; a vacuum chamber installed on a cooling sheet placed in a chamber body installed in the body such that a focusing ring is elastically supported to be spaced, provided with a cover to close the chamber body, connected with a vacuum suction pipe for vacuum formation therein, and leading the focusing ring to be pressed and attached to the cooling sheet; and a vacuum suction part enabling vacuum formation by suction in the vacuum chamber. According to the present invention, the apparatus for attaching a cooling sheet to a focusing ring for a semiconductor device manufacturing apparatus can lead the cooling sheet to be attached to an accurate position of the focusing ring as well as can facilitate the attachment work of the cooling sheet, thereby minimizing costs and time consumed for the attachment work of the cooling sheet as well as eliminating the need for the skillfulness of workers, and can improve the attachment quality of the cooling sheet to the focusing ring, which can lead to an increase in the cooling efficiency of the focusing ring, thereby making a contribution to an increase in the yield of semiconductor devices, and can prevent the formation of bubbles between the focusing ring and the cooling sheet, thereby minimizing defects occurring on the focusing ring caused by the cooling sheet.

Description

Cooling sheet attachment apparatus of focusing ring for semiconductor device manufacturing TECHNICAL FIELD

The present invention relates to an apparatus for attaching a cooling sheet to a focusing ring for semiconductor device manufacturing, and more particularly, to a cooling sheet attached to the focusing ring at an exact position, and to facilitate the attachment of such a cooling sheet. The present invention relates to an apparatus for attaching a cooling sheet for a focusing ring for manufacturing a semiconductor device, which minimizes the time and cost required for attaching a device, and improves the adhesion quality of the cooling sheet to the focusing ring.

In general, semiconductor devices are manufactured by performing various unit processes such as a photo lithography process, a diffusion process, an etching process, a chemical vapor deposition process, and CMP (Chemical Mechanical Planarization).

In order to manufacture such a semiconductor device, when a difference in height occurs on the surface of a semiconductor wafer in the process of laminating a fine circuit, a defect that is fatal to the quality of the semiconductor device is caused, and a process for solving this problem is a CMP process. The CMP process mainly proceeds after thin film deposition, and flattening the thin film in a situation where a thin film is covered on the wafer, and etching and deposition are performed to form a circuit thereon again.

In this CMP process, the wafer is placed on a polishing machine including a rotating table, a compressor, and a slurry solution sprayer, and then rotated. In addition, in the CMP process, a focusing ring is installed around the wafer. This focusing ring reduces thermal damage to the wafer through the dissipation of heat generated during the polishing process.

In order to increase the cooling effect on one side of the focusing ring used in the CMP process, a cooling sheet is attached, and such a cooling sheet must be replaced periodically.

Since the attachment of the cooling sheet to the conventional focusing ring is performed manually by the operator, it is difficult to accurately attach it to a predetermined position on the focusing ring, and for this reason, the quality of the attachment of the cooling sheet differs depending on the skill level of the operator, and focusing ring and cooling Bubbles are formed between the sheets, thereby causing defects in the focusing ring, and even having a problem of wasting cost and time due to reattachment of the cooling sheet.

Registered "Sheet Attachment Device and Attachment Method" in Korean Patent No. 101744371, 2017.05.31

In order to solve the problems of the prior art as described above, the present invention not only allows the cooling sheet to be attached to the focusing ring at the correct position, but also allows the attachment of the cooling sheet to be easily performed, so that it is required for the attachment of the cooling sheet. In addition to minimizing the time and cost, it does not require operator skill, and improves the adhesion quality of the cooling sheet to the focusing ring, thereby increasing the cooling efficiency of the focusing ring, contributing to the increase in the yield of semiconductor devices. , By preventing the generation of air bubbles between the focusing ring and the cooling sheet, the purpose is to minimize the occurrence of defects in the focusing ring caused by the cooling sheet.

Other objects of the present invention will be easily understood through the description of the following embodiments.

In order to achieve the object as described above, according to an aspect of the present invention, an apparatus for attaching a cooling sheet to a focusing ring for a semiconductor device manufacturing apparatus, comprising: a main body; A focusing ring is elastically supported and spaced apart on a cooling sheet installed in the chamber body installed in the body, a cover is provided to block the chamber body, and a vacuum suction pipe for forming a vacuum is connected inside, and the A vacuum chamber for pressing and bonding a focusing ring to the cooling sheet; And a vacuum suction unit configured to form a vacuum by suction in the vacuum chamber. A device for attaching a cooling sheet to a focusing ring for manufacturing a semiconductor device is provided.

The vacuum chamber may include: a chamber body installed on the body and opened upward; A seat support ring in which the cooling sheet is seated in the chamber body to expose an adhesive surface; A ring jig that penetrates the seat support ring and is positioned in plural to enable elevation, and wherein the focusing ring is seated on an upper side; An elastic support for elastically supporting the ring jig upward; A cover for opening and closing the upper side of the chamber body by rotation; An elevating part for elevating the cover; A press unit installed on the cover to press the focusing ring on the ring jig downward so that the cooling sheet is attached to the bottom surface of the focusing ring by pressure and close contact; And a vacuum suction pipe connected to the chamber body for vacuum suction from the vacuum suction unit.

The seat support ring is provided with a plurality of seat seating areas on the upper surface of which the cooling sheet is seated at an interval, and a plurality of slits for vertically penetrating the ring jig between the seat seating areas, and the elasticity The support is provided on the lower side of each of the ring jigs, and the receiving groove for receiving the ring jig is formed to be opened upwardly, and a sliding coupling part is formed vertically on the lower side of the receiving groove, and the sliding coupling A support block having an upper stopper and a lower stopper respectively provided at the upper and lower portions of the unit; An elevating shaft provided at a lower end of the ring jig so as to be slidably coupled to the sliding coupling part, and having a locking protrusion provided at an outer side to be caught by the upper stopper; And an elastic member inserted into the lifting shaft and installed between the locking protrusion and the lower stopper, and providing an elastic force upward to the lifting shaft.

The ring jig may be provided such that an alignment protrusion for aligning the focusing ring in a predetermined position by engaging the inner circumferential surface of the focusing ring protrudes upward.

The cover is installed so as to rotate by a rotation shaft from the rotation coupling member, and when the chamber body is blocked, the opening is suppressed by a vacuum formed between the chamber body, and the elevating portion includes the rotation coupling member and the A lifting guide installed between the main body and guiding the rotation coupling member to rise and fall; And an elevating drive unit installed between the rotational coupling member and the main body and configured to elevate the rotational coupling member together with the cover.

The press unit may include a sliding shaft that is installed to be slidably through the cover in a plurality; A pressing plate fixed to one end of each of the sliding shafts and inserted into the chamber body when the cover blocks the chamber body; A connection plate which is fixed to the other end of each of the sliding shafts and is positioned on the opposite side of the pressing plate with the cover therebetween; And a pressure driving part installed between the connection plate and the cover to move the connection plate so that the pressure plate presses or releases the focusing ring on the ring jig.

According to the cooling sheet attaching device of the focusing ring for semiconductor device manufacturing according to the present invention, not only the cooling sheet is attached to the focusing ring at the correct position, but also the attaching operation of the cooling sheet is easily performed. In addition to minimizing the time and cost required, it is possible to avoid requiring the skill of the operator, and to improve the quality of adhesion of the cooling sheet to the focusing ring, thereby increasing the cooling efficiency of the focusing ring, thereby making semiconductor devices It can contribute to the increase in the yield of, and by preventing the generation of bubbles between the focusing ring and the cooling sheet, it has the effect of minimizing the occurrence of defects in the focusing ring due to the cooling sheet.

1 is a perspective view showing an apparatus for attaching a cooling sheet to a focusing ring for manufacturing a semiconductor device according to an embodiment of the present invention.
2 is a rear perspective view illustrating an apparatus for attaching a cooling sheet to a focusing ring for manufacturing a semiconductor device according to an embodiment of the present invention.
3 is a front cross-sectional view showing an apparatus for attaching a cooling sheet to a focusing ring for manufacturing a semiconductor device according to an embodiment of the present invention.
4 is a perspective view illustrating a chamber of a cooling sheet attaching apparatus for a focusing ring for manufacturing a semiconductor device according to an embodiment of the present invention, illustrating a state in which the focusing ring is not mounted.
5 is a front cross-sectional view showing a chamber body of a cooling sheet attaching apparatus for a focusing ring for manufacturing a semiconductor device according to an embodiment of the present invention.
6 is a perspective view illustrating an apparatus for attaching a cooling sheet to a focusing ring for manufacturing a semiconductor device according to an exemplary embodiment of the present invention, and is a perspective view illustrating a state in which a chamber body is closed by a cover.
7 is a front cross-sectional view showing a state in which a chamber body is closed by a cover and a vacuum is applied in the apparatus for attaching a cooling sheet for a focusing ring for manufacturing a semiconductor device according to an embodiment of the present invention.
8 is a front cross-sectional view showing a state in which the focusing ring is pressed and adhered to the cooling sheet in the apparatus for attaching a cooling sheet for a focusing ring for manufacturing a semiconductor device according to an exemplary embodiment of the present invention.

In the present invention, various changes may be made and various embodiments may be provided, and specific embodiments will be illustrated in the drawings and described in detail. However, this is not intended to limit the present invention to a specific embodiment, and should be understood in a way that includes all changes, equivalents, or substitutes included in the technical spirit and scope of the present invention, and may be modified in various other forms. It can be, and the scope of the present invention is not limited to the following examples.

Hereinafter, embodiments according to the present invention will be described in detail with reference to the accompanying drawings, and identical reference numerals are assigned to the same or corresponding components regardless of the reference numerals, and redundant descriptions thereof will be omitted.

1 is a perspective view showing an apparatus for attaching a cooling sheet to a focusing ring for manufacturing a semiconductor device according to an embodiment of the present invention, and FIG. 2 is a diagram illustrating an apparatus for attaching a cooling sheet to a focusing ring for manufacturing a semiconductor device according to an embodiment of the present invention. It is a rear perspective view, and FIG. 3 is a front cross-sectional view showing an apparatus for attaching a cooling sheet to a focusing ring for manufacturing a semiconductor device according to an embodiment of the present invention.

1 to 3, a cooling sheet attaching apparatus 100 for a focusing ring for semiconductor device manufacturing according to an embodiment of the present invention includes a cooling sheet 2 on a focusing ring 1 for a semiconductor device manufacturing apparatus; As an apparatus for attaching (shown in FIG. 8 ), it may include a main body 200, a vacuum chamber 100, and a vacuum suction unit 300. Here, the focusing ring 1 is used, for example, in a CMP (Chemical Mechanical Planarization) device, and a cooling sheet 2 (shown in FIGS. 7 and 8) may be attached to one side to increase a cooling effect.

The main body 200 provides a working space for installation of the vacuum chamber 100 on an upper surface, and a door 230 for opening and closing the inner storage space of the front or rear surface or both may be installed. The main body 200 may be provided with a plurality of casters 210 on the bottom surface for movement, and a pedestal 220 for fixing to the ground by adjusting the degree of separation from the ground may be screwed. The pedestal 220 is screwed to the bottom of the main body 200, so that the tilt of the main body 200 can be adjusted by rotating operation.

The vacuum chamber 100 is installed so that the focusing ring 1 is elastically supported and spaced apart on a cooling sheet 2 (shown in FIGS. 7 and 8) seated in the chamber main body 110 installed in the main body 200, A cover 150 is provided to block the chamber body 110, a vacuum suction pipe 114 for forming a vacuum is connected to the inside, and the focusing ring 1 is pressed and bonded to the cooling sheet 2.

1 to 5, the vacuum chamber 100 is provided with a chamber body 110 opened and closed by a cover 150 as an example, and a cooling sheet 2 in the chamber body 110; FIGS. 7 and 7 8) is a seat support ring 120 that is seated with the adhesive surface upward, and a focusing ring 1 is installed on the upper side of the cooling sheet 2 (shown in FIGS. 7 and 8) The jig 130 is provided, the ring jig 130 is elastically supported to return upward by the elastic support 140, and the suction port 112 for vacuum suction in the chamber body 110 blocked by the cover 150 ) Is provided so that the focusing ring 1 is pressed downward by the press unit 170 in a vacuum state to be attached to the cooling sheet 2 (shown in FIGS. 7 and 8).

The vacuum chamber 100 is, for example, as in this embodiment, the chamber body 110, the seat support ring 120, the ring jig 130, the elastic support 140, the cover 150, the lifting unit 160, the press unit It may include 170 and a vacuum suction pipe 114.

The vacuum chamber 110 is installed on the main body 200 and is formed to open the upper side. The vacuum chamber 110 may be installed to be spaced upward from the main body 200 by a plurality of spacers 111 provided on the bottom surface, and light transmittance to any one or both of the front and rear surfaces so that the inside can be observed. The window 113 may be provided to be airtight with a material. The vacuum chamber 110 may be provided with a suction port 112 on a side to which the vacuum suction pipe 114 is connected for vacuum suction. A mesh net or a porous plate may be installed in the suction port 112 so that objects do not escape through the suction port 112, or the suction port 112 may have a porous structure.

The seat support ring 120 is mounted so that the cooling sheet 2 (shown in FIGS. 7 and 8) is mounted in the chamber body 110 to expose the adhesive surface upward, and the chamber body 110 is provided by the fixing table 123 It can be installed so as to be spaced upward from the inner bottom surface. The fixing table 123 may be disposed in the chamber body 110 to alternately with the elastic support 140 to be described later.

The seat support ring 120 may be provided with a plurality of seat seating areas 121 on the upper surface of which a cooling sheet 2 (shown in FIGS. 7 and 8) is seated at an interval, and a seat seating area ( A plurality of slits 122 for vertically penetrating the ring jig 130 may be formed between 121). The cooling sheet 2 (shown in FIGS. 7 and 8) is provided with an adhesive layer for adhesion to the focusing ring 1 on one surface, and is made of a film material that is advantageous for cooling, but a plurality of each focusing ring 1, for example 8 It can be formed in a structure divided into about 10 to 10 pieces.

The seat support ring 120 is a suction distribution port 124 for uniform suction around the focusing ring 1 when vacuum is sucked from the vacuum suction unit 300 through the vacuum suction pipe 114 and the suction port 112 May be formed to penetrate up and down so as to be located in a plurality on each of the inner peripheral surface side and the outer peripheral surface side. Accordingly, in the bonding process between the focusing ring 1 and the cooling sheet 2 (shown in Figs. 7 and 8), it is possible to have an excellent suppression of bubble generation between them.

The ring jig 130 penetrates the seat support ring 120 and is located in a number so as to be elevated, and the focusing ring 1 is seated on the upper side. The ring jig 130 may be formed of a plate-shaped member that is vertically installed as in this embodiment so that the structure for penetrating the seat support ring 120 is slimmed when penetrating the seat support ring 120.

The ring jig 130 may be provided so that the alignment protrusion 131 for aligning the focusing ring 1 to a predetermined position by being caught on the inner circumferential surface of the focusing ring 1 protrudes upward. Therefore, each of the ring jig 130 aligns the position where the focusing ring 1 is seated by the alignment protrusion 131, so that the cooling sheet 2 (shown in FIGS. 7 and 8) is determined on the focusing ring 1 You can ensure that it is attached exactly to the location.

The elastic support 140 elastically supports the ring jig 130 upward. Accordingly, when the ring jig 130 moves downward, it can have a restoring force upward.

As in the present embodiment, the elastic support 140 may be provided on the lower side of each of the ring jig 130, and the receiving groove 141a for receiving the ring jig 130 may be formed to be opened upwardly. And, the sliding coupling portion (141b) may be vertically formed on the lower side of the receiving groove (141a), the upper stopper (141c) and the lower stopper (141d) are provided respectively on the upper and lower portions of the sliding coupling portion (141b). It may be provided at the lower end of the ring jig 130 so as to be slidably coupled to the support block 141 and the sliding coupling portion 141b, and a locking protrusion 142a is provided on the outside so as to be caught by the upper stopper 141c. An elastic member 143 that is inserted into the lifting shaft 142 and the lifting shaft 142 to be installed between the locking protrusion 142a and the lower stopper 141d, and provides an elastic force upward to the lifting shaft 142 It may include. here,

The support block 141 may be fixed to the seat support ring 120 so as to be spaced upward from the bottom surface of the chamber body 110, and the ring jig 130 is elevated in the receiving groove 141a formed to be opened upward. By being accommodated as possible, it is possible to guide the lifting of the ring jig 130 and to secure the occupied space, and the sliding coupling part 141b is formed to vertically penetrate the lower side of the receiving groove 141a, so that the lifting shaft ( Even if the 142 protrudes through the sliding coupling part 141b due to the lifting and descending, interference with the chamber body 110 can be reduced, and the upper stopper 141c and the lower part respectively provided at the upper and lower ends of the sliding coupling part 141b The stopper 141d has a plate structure having an opening and may be fixed to the support block 141 by bolting. The lifting shaft 142 may be formed integrally with the ring jig l30 or may be coupled to the ring jig 130 by bolts as in this embodiment. The elastic member 143 may be formed of, for example, a compression coil spring, and both ends may be supported by the locking protrusion 142a and the lower stopper 141d to apply an elastic force.

The cover 150 is to open and close the upper side of the chamber body 110 by rotation, and may be installed to be located on one side of the chamber body 110 on the body 200 as in this embodiment.

The cover 150 may be installed to rotate by the rotation shaft 151 from the rotation coupling member 152, and when the chamber body 110 is blocked, the opening is suppressed by the vacuum formed between the chamber body 110 It will be. That is, even if the cover 150 is simply seated on the chamber body 110, despite the pressing operation of the press unit 170, which will be described later, due to the negative pressure formed between the chamber body 110, the chamber body 110 ) Will not be allowed to open.

The elevating unit 160 may elevate and lower the cover 150 to provide a path for the cover 150 to easily move from the main body 200 to the upper side of the chamber main body 110.

The lifting unit 160 is installed between the rotation coupling member 152 and the body 200, and the lifting guide 161 for guiding the rotation coupling member 152 to rise and descend, and the rotation coupling member 152 and the body 200 ) Is installed between, and may include an elevating driving unit 162 to elevate the rotation coupling member 152 together with the cover 150. Here, as for the elevating guide 161, an LM guide (linear motion guide) may be used as in this embodiment, and not only a lead screw or a ball screw, but also various guide devices including a guide shaft and a coupling structure thereof may be used. I can. As for the lifting drive unit 162, as in this embodiment, a cylinder operating with fluid pressure may be used, and each of the body and the piston rod may be fixed to one of the rotational coupling member 152 and the body 200, and the other. In addition, a driving means for converting the rotational force of the rotary motor into linear motion or a linear motor providing linear motion may be used.

The press unit 170 is installed on the cover 150 to press the focusing ring 1 on the ring jig 130 downward, so that the cooling sheet 2 on the bottom of the focusing ring 1; shown in FIGS. 7 and 8 ) Is attached by pressing and pressing. The press unit 170 may be, for example, a pressing plate 172 and a connecting plate 173 fixed at both ends of each of the sliding shaft 171 that is installed to be slidably installed through the cover 150, respectively, and the cover When 150 blocks the chamber body 110, the pressing plate 172 located in the chamber body 110 descends by the pressing drive unit 174 to press the focusing ring 1 to press the cooling sheet 2; FIG. 7 and 8) can be moved to the side and adhered.

For example, the press unit 170 may be fixed to one end of each of the sliding shaft 171 and the sliding shaft 171 which are installed to be slidably installed through the cover 150 in a plurality as in this embodiment, and the cover 150 When) blocks the chamber body 110, the pressing plate 172 inserted into the chamber body 110 and the sliding shaft 171 are fixed to the other end of each, so that the opposite side of the pressing plate 172 with the cover 150 interposed therebetween The pressure plate 172 presses the focusing ring 1 on the ring jig 130 by moving the connection plate 173 installed between the connection plate 173 and the cover 150 and the connection plate 173 located at Or it may include a pressure driving unit 174 to release the pressure.

The sliding shaft 171 may be connected to the through hole side of the cover 150 and slidably coupled to the sliding guide 153 having a bearing built therein for smooth sliding in the cover 150. The pressure plate 172 is a buffer pad 172a made of a material capable of buffering such as silicone or rubber in order to prevent scratching or damage to the focusing ring 1 on the side that presses the focusing ring 1. It can be installed on the outer surface of the ring (1). The connecting plate 173 is bolted to each end of the sliding shaft 171 so that all of the sliding shafts 171 behave at the same time. As for the pressurization drive unit 174, as in this embodiment, a cylinder operating with fluid pressure may be used, and each of the body and the piston rod may be fixed to one of the connection plate 173 and the cover 150 and the other. In addition, a driving means for converting the rotational force of the rotary motor into linear motion or a linear motor providing linear motion may be used.

The vacuum suction pipe 114 is connected to the chamber body 110 for vacuum suction from the vacuum suction unit 300, for example, it is connected to the suction port 112 formed on the bottom of the chamber body 110, and the chamber body 110 It extends downward from the bottom of

The vacuum suction unit 300 allows vacuum to be formed in the vacuum chamber 100 by suction, and various vacuum supply devices including, for example, a suction pump may be used. The vacuum suction unit 300 may be installed in the storage space opened and closed by the door 230 in the main body 200 as in this embodiment.

On the other hand, in order to control the operation of the elevating unit 160, the press unit 170, and the vacuum suction unit 300, the cooling sheet attachment device 10 of the focusing ring for semiconductor device manufacturing according to an embodiment of the present invention, An operation unit 400 for inputting a command as a signal, and a display unit 500 for displaying a vacuum pressure of the vacuum chamber 100 or other required operation state to the outside may be provided on the main body 200.

The operation of the apparatus for attaching the cooling sheet to the focusing ring for manufacturing a semiconductor device according to the present invention will be described.

First, as shown in FIG. 1, in a state where the cover 150 is opened from the chamber body 110, the cooling sheet 2 for each seat seating area 121 on the seat support ring 120; shown in FIGS. 7 and 8 ) To settle. At this time, the cooling sheet 2 has the adhesive surface facing upward. Then, by placing the focusing ring 1 on the ring jig 130, it is positioned above the cooling sheet 2 (see FIG. 7).

And, as shown in Figs. 6 and 7, in a state in which the cover 150 is positioned on the chamber body 110 by the rotation of the cover 150 by the operator, the cover 150 is removed by the lifting unit 160. The chamber body 110 is blocked by the cover 150 by descending, and then vacuum is formed in the chamber body 110 by vacuum suction by driving the vacuum suction unit 300.

When a vacuum is formed in the chamber body 110, as shown in FIG. 8, by the operation of the press unit 170, the pressure plate 172, more specifically, the buffer pad 172a of the pressure plate 172 descends. When the focusing ring 1 is pressed, the elastic member 143 of the elastic support 140 is compressed, so that the focusing ring 1 is in close contact with and attached to the cooling sheet 2.

And, when the cooling sheet 2 is attached to the focusing ring 1, the operation of the vacuum suction unit 300 is stopped, and the pressing of the focusing ring 1 by the press unit 170 is released, and the focusing ring 1 ) To return upward by the elastic force of the elastic support 140. Then, the focusing ring 1 is unloaded from the chamber body 110 by opening the cover 150. At this time, the opening of the cover 150 is to be opened from the chamber body 110 by the elevation of the cover 150 by the elevating unit 160, or instead of or in parallel, the air in the chamber body 110 By allowing the vacuum to be released by injection, the chamber body 110 may be opened.

According to the cooling sheet attaching device of the focusing ring for semiconductor device manufacturing according to the present invention, not only the cooling sheet is attached to the focusing ring at the correct position, but also the attachment of the cooling sheet is easily performed, thereby attaching the cooling sheet. In addition to minimizing the time and cost required for work, it is possible to avoid requiring operator skill.

In addition, according to the present invention, as described above, it is possible to improve the adhesion quality of the cooling sheet to the focusing ring, thereby increasing the cooling efficiency of the focusing ring, thereby contributing to an increase in the yield of semiconductor devices, and By preventing the generation of air bubbles between the cooling sheets, it is possible to minimize the occurrence of defects in the focusing ring caused by the cooling sheets.

As described above, the present invention has been described with reference to the accompanying drawings, but, of course, various modifications and variations can be made without departing from the technical spirit of the present invention. Therefore, the scope of the present invention should not be limited to the described embodiments, but should be defined by the claims and equivalents as well as the claims to be described later.

110: chamber body 111: separation zone
112: inlet 113: window
114: vacuum suction pipe 120: seat support ring
121: seat seating area 122: slit
123: fixing rod 124: suction dispersing port
130: ring jig 131: alignment protrusion
140: elastic support 141: support block
141a: receiving groove 141b: sliding coupling part
141c: upper stopper 141d: lower stopper
142: lifting shaft 142a: stopping protrusion
143: elastic member 150: cover
151: rotation shaft 152: rotation coupling member
153: sliding guide 160: elevating part
161: elevating guide 162: elevating driver
170: press unit 171: sliding shaft
172: pressure plate 172a: buffer pad
173: connection plate 174: pressure drive unit
180: close stopper 181: first vertical frame
182: horizontal frame 183: height adjustment unit
184: fixed frame 190: open stopper
191: second vertical frame 200: main body
210: caster 220: pedestal
230: door 300: vacuum suction part
400: operation unit 500: display unit

Claims (6)

A device for attaching a cooling sheet to a focusing ring for a semiconductor device manufacturing device,
main body;
A focusing ring is elastically supported and spaced apart on a cooling sheet installed in the chamber body installed in the body, a cover is provided to block the chamber body, and a vacuum suction pipe for forming a vacuum is connected inside, and the A vacuum chamber for pressing and bonding a focusing ring to the cooling sheet; And
A vacuum suction unit configured to form a vacuum by suction in the vacuum chamber;
Including,
The vacuum chamber,
A chamber body installed on the body and opened upward;
A seat support ring in which the cooling sheet is seated in the chamber body to expose an adhesive surface;
A ring jig that penetrates the seat support ring and is positioned in plural to enable elevation, and wherein the focusing ring is seated on an upper side;
An elastic support for elastically supporting the ring jig upward;
A cover for opening and closing the upper side of the chamber body by rotation;
An elevating part for elevating the cover;
A press unit installed on the cover to press the focusing ring on the ring jig downward so that the cooling sheet is attached to the bottom surface of the focusing ring by pressure and close contact; And
A vacuum suction pipe connected to the chamber body for vacuum suction from the vacuum suction unit;
Including,
The ring jig,
An apparatus for attaching a cooling sheet for a semiconductor device manufacturing focusing ring, wherein an alignment protrusion for aligning the focusing ring in a predetermined position is provided to protrude upward by being caught on the inner circumferential surface of the focusing ring. delete The method according to claim 1,
The seat support ring,
A plurality of seat seating areas in which the cooling sheet is seated are provided on the upper surface at intervals, and a plurality of slits for vertically penetrating the ring jig are formed between the seat seating areas,
The elastic support,
It is provided on the lower side of each of the ring jigs, and the receiving groove for receiving the ring jig is formed to be opened upwardly, and a sliding coupling part is formed vertically on the lower side of the receiving groove, and the upper part of the sliding coupling part and A support block each provided with an upper stopper and a lower stopper at the lower portion;
An elevating shaft provided at a lower end of the ring jig so as to be slidably coupled to the sliding coupling portion, and having a locking protrusion provided on the outside so as to be caught by the upper stopper; And
An elastic member inserted into the lifting shaft and installed between the locking protrusion and the lower stopper, and providing an elastic force upward to the lifting shaft;
Containing, a cooling sheet attaching device of the focusing ring for semiconductor device manufacturing. delete The method according to claim 1,
The cover,
It is installed to rotate by a rotation shaft from the rotation coupling member, and when the chamber body is blocked, the opening is suppressed by the vacuum formed between the chamber body,
The elevating part,
A lifting guide installed between the rotation coupling member and the main body, and guiding the rotation coupling member to rise and fall; And
An elevating drive unit installed between the rotational coupling member and the main body and configured to elevate the rotational coupling member together with the cover;
Containing, a cooling sheet attaching device of the focusing ring for semiconductor device manufacturing. The method according to claim 1,
The press part,
A sliding shaft that penetrates a plurality of the cover and is slidably installed;
A pressing plate fixed to one end of each of the sliding shafts and inserted into the chamber body when the cover blocks the chamber body;
A connection plate which is fixed to the other end of each of the sliding shafts and is positioned on the opposite side of the pressing plate with the cover therebetween; And
A pressure driving unit installed between the connection plate and the cover to move the connection plate so that the pressure plate presses or releases the focusing ring on the ring jig;
Containing, a cooling sheet attaching device of the focusing ring for semiconductor device manufacturing.

Images