JP4470922B2 - Board loading / unloading method and robot - Google Patents

Description

The present invention relates to a substrate bonding apparatus, and in particular, a substrate carrying method and a substrate suitable for assembling a liquid crystal display panel or the like that holds substrates facing each other in a decompression chamber, opposes each other, and bonds them with a small interval. It relates to a robot for carrying in and out.

As a conventional apparatus for manufacturing a liquid crystal display panel, there is one described in Patent Document 1. In this publication, liquid crystal is coated on one side of two glass substrates provided with transparent electrodes and thin film transistor arrays, spacers are further distributed, and the other substrate is placed on top with pins having a vertical mechanism. After aligning the substrate with the positioning pins provided in the left and right direction of the device, after stacking the substrate by evacuating the chamber, aligning the substrate again, and then bonding the substrate by returning the pressure in the chamber to the atmospheric pressure side. Like to do.

Further, in Patent Document 2, a first table for detachably fixing either one of the two substrates to the upper surface or the lower surface in a vacuum chamber having an integrated structure and the other of the two substrates to the lower surface or the upper surface are detachably fixed. A second table is provided so that an upper surface and a lower surface to which the respective substrates are fixed are opposed to each other, and one of the tables is movably coupled to the vacuum chamber via an elastic body, and the one table is A structure is disclosed that includes driving means that moves at least in the horizontal direction with respect to the vacuum chamber on the atmosphere side of the vacuum chamber partitioned by the elastic body.

Further, Patent Document 3 discloses a substrate assembling apparatus that divides a chamber into two upper and lower parts, and transports a substrate in the lower chamber and includes a liquid crystal dropping device.

JP 10-26763 A JP 2001-305563 A JP 2001-5401 A

In the above-mentioned Patent Document 1, the substrate is pressurized using only the pressure difference between the substrates and the outside of the substrate. In this case, the sealing material between the substrates must be surely filled between the upper and lower substrates. I must. For this reason, a large amount of sealing material is required, and there is a possibility of spreading to the display unit side. In addition, while holding the substrate in vacuum, the lower substrate is placed on a flat stage,
Since the upper substrate supports an appropriate portion of the peripheral edge with a pin-shaped member, in the case of a large substrate of 1 m × 1 m or more, it is difficult to accurately position both the upper and lower substrates.

Furthermore, since the upper and lower substrates are directly transferred into the vacuum chamber and the inside of the chamber is evacuated from the atmospheric pressure to the vacuum after the transfer, there is a problem that it takes time to exhaust and the productivity cannot be increased.

Further, in the configuration of Patent Document 2, when the upper and lower tables are arranged in an integrated vacuum chamber, when the substrate is damaged in the chamber, or when the table surface is contaminated with substances adhering to the substrate. There is a problem that it is difficult to clean the table inside the chamber. In addition, in order to take out the substrate after bonding, a mechanism for temporarily raising and lowering the substrate, or a mechanism for temporarily fixing the substrate to prevent displacement, and a mark recognition or illumination mechanism for positioning the substrate are integrated vacuums. Lifting mechanism, temporary fixing, recognition or positioning groove provided on the lower table, which is fixed to the chamber or the structure outside the vacuum chamber, and the vacuum chamber and the lower table move relative to each other during positioning. There was also a problem that the size of the hole was increased. When the size of the hole or groove provided in the table is increased, when the substrate is positioned and then pressed, local pressure fluctuations may occur and the adhesive may not be uniformly crushed.

Furthermore, in a conventional apparatus having a two-divided chamber, the lower table and the lower chamber are not integrated, and the space between the table and the chamber is sealed, and the lower table rotates freely with respect to the lower chamber. And so on. For this reason, the alignment of the substrate is XY
The direction of the whole chamber and the movement in the θ direction move the substrate mounting table, so that there are two seal structures between the upper and lower chambers and between the lower table and the lower chamber. There is a case.

Therefore, an object of the present invention is to provide a substrate bonding apparatus that can perform bonding with high accuracy and high speed even when the substrate is enlarged, and has high productivity.

In order to achieve the above object, according to the present invention, an upper table and a lower table are provided in a chamber so as to hold two substrates in the vertical direction facing each other with a gap therebetween. In a robot that carries a substrate in and out of a substrate assembly apparatus that bonds substrates by shrinking, the robot has two arms, and one of the two substrates is held by one of the two arms. then at the same time, holds the other substrate at the other arm to move the substrate assembly apparatus, transferring the substrate held by the one arm on said table is loaded into the chamber, and thereafter, the in one arm said holding the substrate bonding is completed in the chamber as well as out from the chamber, the substrate held by the other arm the switch Configured as pass to the lower table is loaded into the Nba.

According to the robot and the loading / unloading method for loading / unloading a substrate according to the present invention, the substrate loading / unloading time can be greatly shortened, and the substrate manufacturing throughput can be improved.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

In FIG. 1, the substrate assembling apparatus includes a lower chamber T1 portion and an upper chamber T2 portion. In the upper chamber T2, the upper table 2 is provided with support legs 3 penetrating the upper chamber T2.
A plurality of adjustment legs 4 are provided so as to be movable in the vertical direction. The support leg 3 is blocked by an O-ring 5 and the adjustment leg 4 is blocked by a welding bellows 6 so that the inside of the upper chamber T2 does not communicate with the atmosphere. The support leg 3 and the adjustment leg 4 of the upper table 2 are fixed to the pressure base plate 7.

Further, the central portion of the pressure base plate 7 is fixed to the intermediate base plate 8. The intermediate base plate 8 operates as a ball spline guide 13 by operating a drive mechanism including a drive motor 10 and a speed reducer 11 and a ball screw 12 attached to the ceiling frame 9.
It can be moved up and down using as a guide. In addition, the ceiling frame 9 is supported by a support column provided separately from the ball spline guide on the gantry 1. The other end of each adjustment leg 4, one end of which is fixed to the pressure base plate 7, is connected to a ball screw 15 driven by a drive motor 14 attached to the intermediate base plate 8. The upper table 2 can be moved up and down while maintaining the flatness by driving the vertical adjustment mechanism comprising the drive motor 14 and the ball screw 15 and applying a force to the pressure base plate 7.

FIG. 2 shows an example of a mechanism for driving the upper chamber T2. The upper chamber T2 is provided with a fastening mechanism between a lever 51 driven by a cylinder 50 and an upper table 2 composed of a T-shaped fastening member 52. The pressure base plate 7 is provided with a through hole so that the fastening member 52 can move up and down. With the pressure base plate 7 lowered, the T-shaped fastening member 52 and the pressure base plate 7
By inserting the lever 51 between the upper surface and the upper chamber T2, the upper chamber T2 can be moved upward together when the pressure base plate 7 is lifted. The upper chamber T2 is also mounted in a shape close to rigidity in the front and rear, left and right (horizontal direction) so as to be movable up and down with the ball spline guide 13 as a guide. One end of this ball spline 13 is fixed to the frame 1 of the apparatus. That is, in order to move the upper chamber T2, the upper table 2 and the upper chamber T2 can be moved up and down together by a fastening mechanism.

A door valve 16 for loading / unloading the substrate into / from the chamber is installed on the side wall of the upper chamber T2. Further, an ionizer 17 is installed at a position on the side wall of the upper chamber opposite to the door valve 16 so that ionized ultrasonic air is blown onto the surface of the substrate so that the substrate can be neutralized. Further, an ionizer 17a is also provided in the vicinity of the door valve 16 outside the chamber. With this, ionizing air can be blown with the door opened to increase the effect of removing the substrate. Although the ionizer 17 in the chamber is provided in the upper chamber T2, it is needless to say that an ion wind may be blown onto the substrate surface and the ionizer 17 may be attached to the lower chamber T1. The substrate is carried in from the door valve 16 and the bonded liquid crystal panel is carried out.

A plurality of bush-structured sub-guides 18 are provided on the outer wall of the upper surface of the upper chamber T2 so as to project a center shaft 19 into the chamber. The center shaft 19 can be adjusted in the horizontal direction of the upper table 2 by engaging with a hole provided in a protrusion provided on the outer periphery of the upper table 2.
That is, the sub guide 18 and the center shaft 19 operate as a horizontal adjustment mechanism for the upper table 2. Thus, by allowing the upper table 2 to finely adjust the position in the horizontal direction, the alignment of the substrate is facilitated and the pressure applied to the substrate can be made uniform.

The upper chamber T2 is provided with a plurality of observation windows for observing the substrate mark at the lower end of the convex window frame inside the chamber. The camera barrel 21 is inserted into the observation window frame, and the mark provided on the substrate is recognized by the camera. The camera barrel 21 is installed on a moving stage having a horizontal (X, Y direction) moving axis and a vertical (Z direction) moving axis, and the moving stage is fixed on the upper chamber T2. It is. Further, the upper table 2 is provided with a hole for recognizing a substrate mark at a position corresponding to the observation window.

In the present embodiment, the camera is arranged outside the chamber. However, by adopting a configuration in which the camera is directly attached to the upper table 2, the observation window becomes unnecessary and the airtightness in the chamber can be improved. Can be placed close to the board, improving the accuracy of mark recognition by the camera,
The alignment accuracy between the substrates can be improved.

Further, a load cell 22 is provided between the intermediate base of the support leg 3 and the ball screw in order to measure the pressure applied to the substrate. Further, when adjusting the flatness of the upper table, the load cell 23 is provided for each adjustment leg on the pressure base plate 7 in order to monitor the motor 14 driving each adjustment leg 4 so as not to be overloaded. It is provided.

A lower table 24 is fixed in the lower chamber T1. When the entire surface of the lower table 24 is bonded and fixed to the lower chamber, when the lower chamber T1 is deformed at the time of decompression, the deformation is transmitted to the lower table as it is, and the flatness may be shifted. Therefore, only the periphery of the lower table is fixed to the lower chamber so as not to be affected by the deformation of the lower chamber T1. Further, a seal ring 25 to be described later is disposed on the entire circumference of the lower chamber T1, and when the upper chamber T2 is in contact with the seal ring 25 and the door valve 16 is closed, the inside is classified and a decompression chamber is configured. It has become.

The lower chamber T1 is installed on a θ base table 28 configured to be rotated by a motor 26, a ball screw (not shown), and a rotary bearing 27. For fastening the θ base table 28 and the lower chamber T1, a box-shaped member is interposed so that a predetermined space can be secured. This space is provided to attach the UV irradiation mechanism 40, the substrate holding claw elevating mechanism 41, and the substrate lift mechanism 43 to the lower side of the lower chamber T1. The θ base table 28 is mounted on the Y table 32 via a rotary bearing 27. The Y table 32 is installed so that it can be moved by a motor 29 on a linear rail provided on the X table 33. Further, the X table 33 is provided so as to be moved by driving a motor 30 on a linear rail provided on the gantry 1 side. In this way, the lower chamber driving mechanism to which the lower table is fixed is disposed outside the lower chamber, and the substrate on the lower table can be positioned by moving the lower chamber. It is. For this reason, the airtightness in the chamber can be maintained, and the drive mechanism is externally arranged, so that the substrate is not affected by dust generated by the operation of the drive mechanism, and high-precision bonding can be performed.

In addition, when the upper chamber T2 is in contact with the seal ring 25 of the lower chamber T1 to form a decompression chamber, a plurality of upper A ball bearing 34 for the chamber and a receiving seat 35 with an adjusting mechanism are provided. The lower position of the upper chamber portion T2 is adjusted by the ball bear 34 and the receiving seat 35. In the present embodiment, the upper chamber T2 and the lower chamber T1 are coupled by the weight of the upper chamber T2. As described above, by reducing the pressure inside the upper chamber T2 alone, a force acts from the atmosphere side toward the inside of the chamber, and a sufficient pressing force acts on the upper chamber, so that a large coupling force is exerted. The chambers can be coupled with each other. Further, the ball bear 34 is provided with a minute height raising / lowering mechanism for finely moving the upper chamber T2 up and down.

Further, a plurality of ball bearings 37 for the θ base table 28 are attached to a member fixed on the apparatus base (mounting base) 1 so as to support the outer peripheral portion of the θ base table 28 so that the θ base table 28 is not deformed, and an adjustment. A receiving seat 38 with a mechanism is provided. Thus, the load from the θ base table 28 is received. In this way, the chamber ball bear 34 and the θ base table ball bear 37 are configured to receive the load around the upper and lower chambers in two stages, so that the deformation of the chamber can be suppressed.

The lower chamber T1 is provided with a plurality of transmitted illuminations 39 for performing mark recognition, and holes are formed at corresponding positions on the lower table 24. Further, a plurality of pressure / UV irradiation mechanisms 40 are provided in the lower chamber T1 in order to crush and cure the UV adhesive so that the bonded substrates are not displaced. Furthermore, when carrying in / out the substrate, the holding claw elevating mechanism 41 for preventing the substrate from bending in the width direction, the bending of the robot hand, the rotating elevating pins for preventing the substrate from bending in the front-rear direction, Substrate lift mechanisms 43 for raising and lowering the combined substrates are provided.

The lower table 24 is provided with holes so that the pressure / UV irradiation mechanism 40 can move up and down in the lower table 24. The pressurizing / UV irradiation mechanism 40 can also be used as a rotary lift pin. Further, grooves (notches) are provided on the substrate support side so that the substrate lift mechanism 43 can move up and down. When the substrate is carried in and out, the substrate lift mechanism 43 is operated so that the robot hand can be inserted into the lower surface side of the substrate. Since these holes or grooves fix the lower table 24 to the lower chamber T1, it is only necessary to provide a minimum margin.

Further, the pressurizing / UV irradiation mechanism 40, the holding claw elevating mechanism 41, and the substrate lift mechanism 42 each have a vertical movement mechanism penetrating the lower chamber T1, but the lower chamber T1 and these vertical movement mechanism sections are also provided. Is provided with an O-ring between them, thereby maintaining airtightness.

The holding mechanism of the upper substrate by the upper table 2 in the decompressed state may be either a mechanism that is electrically held by an electrostatic chuck or a mechanism that is physically held by an adhesive material. When electrically holding by the electrostatic chuck, the holding by the upper table 2 can be interrupted by cutting off the applied voltage and raising the upper table 2 after a certain static elimination time. Further, in the case of holding by an adhesive material, a plurality of pins that mechanically press the upper substrate against the lower substrate are provided, and only the upper table 2 is lifted while the pins are pressed downward. The holding of the substrate can be interrupted.

On the other hand, the holding mechanism of the lower substrate by the lower table 24 in the reduced pressure state may be either a method of electrically holding by an electrostatic chuck or a method of physically holding by an adhesive material. The combination of the suction methods of the upper table 2 and the lower table 24 is the upper table 2,
Either the lower table 24 is an electrostatic chuck, or the upper table 2 or the lower table 24 has an electrostatic chuck and the other is an adhesive material. It is preferable in that it is easy to assemble in parallel, and therefore it is possible to uniformly bond the upper and lower substrates. In addition, in this embodiment, it has comprised so that both the structure which carries out attraction | suction adsorption | suction by a negative pressure and electrostatic adsorption | suction by an electrostatic force can be combined.

The decompression in the decompression chamber is performed by connecting to a vacuum valve and a vacuum pump of a dry pump or a turbo molecular pump through an exhaust port (not shown) provided in either the upper or lower chamber. The atmospheric vent in the chamber is performed by introducing an inert gas such as nitrogen or the atmosphere through a valve provided in either the upper or lower chamber (not shown). The atmospheric vent is preferably an inert gas such as nitrogen having a low water molecule content from the viewpoint of reducing moisture adhesion to the chamber and shortening the time for decompressing the inside of the chamber.

Next, the operation of bonding the liquid crystal panel by the substrate assembling apparatus according to the present invention will be described. First, place the adhesive in a black matrix surrounding the outer periphery of the liquid crystal panel in the shape of a frame or the upper substrate coated in the vicinity of the liquid crystal so that the surface to which the adhesive is applied is turned down. Mounted on one robot arm located on the side, and on the other arm of the robot located on the upper side with the lower substrate coated with liquid crystal on the surface in a state where the liquid crystal dropping surface is on the upper side . In this way, the robot moves in front of the substrate assembling apparatus with the two substrates mounted on the upper and lower arms. In response to a command from the controller of the substrate assembly apparatus, the door valve 16 of the upper chamber T2 is opened, and the robot inserts the inverted upper substrate on the lower robot arm into the chamber.

When the upper substrate is inserted, the upper table 2 is lowered by an instruction of the control device, and the upper substrate inverted under the upper table 2 by suction suction by negative pressure is sucked and held. When the robot arm has a large deflection when the tip is extended and suction suction is difficult, the tip of the robot arm is pushed up and supported from below by using a rotary lift pin in the chamber. The lower robot arm temporarily retracts from the chamber, and after waiting for the retract, the controller of the substrate assembly apparatus performs the lower table 24.
The liquid crystal panel that has already been bonded is given a control command to the substrate lift mechanism 43 and the holding claw elevating mechanism 41 to lift the substrate upward. The robot inserts the lower robot arm again below the liquid crystal panel in the chamber, lifts the hand upward, and then retracts the liquid crystal panel from the chamber to the outside. Thereafter, the substrate lift mechanism 43 and the holding claw elevating mechanism 41 are lowered by a command from the control device.

Next, the robot inserts the lower substrate previously coated with liquid crystal on the upper robot arm into the chamber. When the lower substrate is inserted into the chamber, the holding claw elevating mechanism 41 is raised, the lower substrate is lifted and the robot arm is retracted, the lower substrate is placed on the lower table 24, and the lower substrate is negatively pressurized. Adsorbed by suction.

Next, the substrate mark position of the upper substrate is measured by moving the camera barrel 21 down the vertical movement axis CZ and using the horizontal movement axes CX, CY and the mark center position of the upper substrate and the camera barrel. It moves to a position where the centers of 21 coincide. Subsequently, the upper table 2 is lowered, and the deviation of the mark position between the upper substrate and the lower substrate is measured by the lens barrel 21 of the camera. Next, the ball bear 34 is lifted by a not-shown minute height raising / lowering mechanism, and the upper chamber T2 is lifted together with the receiving seat 35 with an adjusting mechanism provided on the upper chamber side, and the seal ring 25 and the upper chamber T2 are lifted.
Lift to a position where it touches or does not touch. Thereafter, the lower chamber portion T1 is moved horizontally in the XYθ direction by driving the θ-axis drive motor 26, the Y-axis drive motor 29, and the X-axis drive motor 30, and the alignment marks of the lower substrate and the upper substrate are coarsely aligned. Perform positioning.

After the rough positioning, the ball bear 34 is lowered. When the upper and lower tables use substrate chucking by an electrostatic chuck, a voltage is applied to the electrostatic chuck to chuck the substrate. In this state, the door valve 16 is closed and the air in the chamber is exhausted using a vacuum pump. During the exhaust, the upper table 2 is raised so that the gas between the upper and lower substrates is easily exhausted. After the inside of the chamber is in a certain decompression state, the upper table 2 is lowered again, the positional deviation between the upper and lower substrates is measured, and the lower chamber T1 is driven in the XYθ direction by driving the motor 26, motor 29, and motor 30. Are moved horizontally to finely position the alignment marks on the lower substrate and the upper substrate. Thus, the lower chamber is moved to XYθ with the upper chamber T2 engaged with the lower chamber T1.
The seal ring 25 disposed in the lower chamber T1 is devised so that the upper chamber T2 does not move when it moves slightly in the direction.

FIG. 3 shows an example of a cross-sectional shape of the seal ring 25 used in the present embodiment. In other words, the seal ring 25 used in the present embodiment is a seal ring 25 having a shape (shape (a) or (b) in FIG. 3) in which the front / rear / left / right direction has a smaller elastic force than the elastic force in the vertical direction. Used. Further, as described above, the upper chamber T2 is attached to the ball spline guide 13 so that it can move in the vertical direction but hardly moves in the front / rear / right / left direction (horizontal direction). It is possible to align the upper and lower tables without being moved by being moved by the upper chamber even if it is moved minutely. Needless to say, the shape of the seal ring is not limited to the shape shown in FIG. 3 and may be any shape as long as the above-described characteristics can be obtained.

After the fine positioning is completed, while the value of the load cell 22 is measured, the upper table 2 is further lowered to press and bond the substrates. After the applied pressure reaches a predetermined value for crushing the adhesive, the pressurization is finished, and the pressurizing / UV irradiation mechanism 40 applies the temporary adhesive UV adhesive previously applied to the temporary fixing position of the substrate. UV light is irradiated while pressing, and temporary fixing is performed so that the position of the substrate does not shift.

After the temporary fixing is completed, the pressurizing / UV irradiation mechanism 40 is raised. When the upper table 2 uses the suction in the reduced pressure state by the electrostatic chuck, the voltage is cut and the ionizer 17 is used to remove the charge. After waiting for the static elimination time, the upper table 2 is raised. In order to shorten the static elimination time, the power supply line can be grounded with a changeover switch. When the upper table 2 uses adhesive, the upper substrate is mechanically pressed against the lower substrate by a plurality of pins, and only the upper table 2 is lifted while the pins are pressed downward. The holding of the substrate is interrupted.

Thereafter, an inert gas such as nitrogen or the atmosphere is introduced into the chamber through a valve provided in the chamber and released to the atmosphere. Subsequently, the door valve 16 is opened, and the substrate is carried in and out.

When maintenance such as cleaning is performed on the inside of the chamber of the substrate assembly apparatus, the cylinder driving lever 51 attached to the upper chamber portion T2 is moved to the pressure base plate 7 and the upper chamber with the pressure base plate 7 lowered. It is inserted between the fastening members 52 attached to T2, and in this state, it is lifted in the Z-axis direction together with the upper table 2 using the drive motor 10. As described above, the upper chamber T2 and the upper table 2 are coupled by the fastening mechanism, and the upper chamber T2 can be lifted by using the driving motor 10 used to pressurize the upper table 2, so that the upper chamber T2 is lifted. This eliminates the need to provide a separate drive mechanism and simplifies the apparatus. This also allows maintenance of the upper and lower tables with the chamber opened.

As described above, in the present invention, when assembling a substrate, a series of operations are performed in a state where the upper and lower chambers are integrated. However, when a predetermined amount of substrate bonding is completed and the apparatus is maintained, the upper and lower chambers are separated. Since the structure is adopted, it is possible to reduce the time required for bonding and the time required for maintenance.

It is a figure which shows the structure of the board | substrate assembly apparatus which becomes one Embodiment of this invention. It is a figure which shows the fastening mechanism for connecting and moving an upper chamber and a pressurization base board. It is a figure which shows an example of the cross-sectional shape of the seal ring between an upper chamber and a lower chamber.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Mounting stand, 2 ... Upper table, 3 ... Support leg, 4 ... Adjustment leg, 5 ... O-ring, 6 ... Welding bellows, 7 ... Pressurization base board, 8 ... Intermediate base board, 9 ... Ceiling frame 10, 14 DESCRIPTION OF SYMBOLS ... Drive motor, 11 ... Reduction gear, 13 ... Ball spline guide, 15 ... Ball screw, 16 ... Door valve, 17 ... Ionizer, 18 ... Sub guide, 19 ... Center shaft, 21 ... Camera barrel, 22
, 23 ... Load cell, 24 ... Lower table, 25 ... Seal ring, 26, 29, 30 ... Motor, 27 ... Rotary bearing, 28 ... Base table, 32 ... Y table, 33 ... X table, 34, 37 ... Ball bear, 35, 38 ... Receiving seat with adjustment mechanism, 39 ... Transmitted illumination, 40 ... Pressurization / UV irradiation mechanism, 41 ... Holding claw elevating mechanism, 42 ... Rotating elevating pin, 43 ...
Substrate lift mechanism, T1 ... upper chamber, T2 ... lower chamber.

Claims (3)

A substrate assembling apparatus for providing an upper table and a lower table for holding two substrates in a vertical direction in a chamber so as to face each other with an interval therebetween, and to bond the substrates by moving the upper table and reducing the table interval In a substrate loading / unloading method in which a substrate is loaded / unloaded by a robot
The robot has two arms for holding a substrate,
The robot moves one of the two substrates to the substrate assembling apparatus while holding one substrate of the two arms and simultaneously holding the other substrate by the other arm. A first step;
Following the first step, a second step of the substrate on which the robot is held on the one arm is loaded into the chamber and passes on said table,
Following the second step, the robot holds the bonding the one arm is separated from the surface of the lower table the substrate completed on the lower table in the chamber, unloaded from the chamber A third step of
Following the third step, a fourth step in which the robot carries the substrate held by the other arm into the chamber and delivers it to the lower table;
The board | substrate carrying in / out method characterized by having . A substrate assembling apparatus for providing an upper table and a lower table for holding two substrates in a vertical direction in a chamber so as to face each other with an interval therebetween, and to bond the substrates by moving the upper table and reducing the table interval In the robot that carries the substrate in and out,
Has two arms,
Wherein at the same time holding the two one substrate out of the two substrates in one arm of the arms, and holds the other substrate at the other arm to move the substrate assembly apparatus, the one arm The substrate held in the chamber is loaded into the chamber and transferred to the upper table, and then the substrate having been bonded in the chamber is held on the one arm and unloaded from the chamber. The robot according to claim 1, wherein the substrate held by the other arm is carried into the chamber and transferred to the lower table . The robot according to claim 2, wherein
The one arm and the other arm are such that the one arm is located on the lower side and the other arm is located on the upper side,
When the one arm carries the substrate into the chamber, the one arm is set to a position where the upper table descends and sucks the substrate,
When the other arm carries the substrate into the chamber, the other arm is set to a position where the holding claw elevating mechanism on the lower table side is raised to lift the substrate.
A robot characterized by that.

Images