TWI335254B - - Google Patents

Description

1335254 • · IX. Description of the invention: _ [Technical field of the invention] The present invention relates to a flat panel display such as a liquid crystal display (LCD) or a plasma display panel (PDP). In the process, after the two substrates are aligned (adjusted) with respect to the ΧΥΘ direction, the substrates are overlapped and fixed, and then the gap between the two substrates is pressed to a predetermined distance by the air pressure difference between the inside and the outside of the upper and lower substrates. Substrate alignment device of the substrate machine. In particular, it relates to a substrate alignment device that can align a large substrate. Furthermore, there is a method in which two substrates which are bonded to each other in a vacuum chamber are respectively detachably held in the upper and lower holding plates and opposed to each other, and the two substrates are relatively opposed in a vacuum. Adjust the movement in the direction of the yaw to perform the substrate alignment device for the substrate alignment. [Prior Art] Conventionally, such a substrate alignment device is disposed inside a vacuum chamber of a side surface of an upper and lower substrate inlet and outlet, and is provided with an upper holding plate (upper abutment) and a lower holding plate (lower abutment), The through hole (opening portion) of the bottom end wall of the vacuum chamber allows the base of the lower holding plate to pass through, whereby the holding plate can be supported by the sill table, and the sill table is driven by The support base that the motor can move in the ΧΥ direction is formed by the slewing seat and the vacuum seal, and the slewing table can be rotated by the drive motor by the drive motor. The pedestals of the lower holding plates and the through holes of the vacuum chamber are hermetically bonded by an elastic sealing member such as a bellows-like elastic body. * (Refer to Patent Document 1) 96986.doc 1335254 and 'In order to be able to move or remove the upper and lower substrates arbitrarily, a vacuum chamber inside the opening can be arbitrarily closed on the side, and an upper holding plate (upper abutment) is provided. And the lower holding plate (lower abutment), and the plurality of through holes (first opening portions) opened at the bottom of the vacuum chamber are respectively inserted into the upper shaft (the first axis), and the elasticity is in the form of a bellows The sealing member is kept in airtight engagement, and the lower holding plate is connected to the shank table (moving abutment) by the shafts, and the lower holding plate can be arbitrarily adjusted and moved in the direction of χγθ in parallel with the joint surface of the two substrates. Is supported. After the required vacuum is reached in the vacuum chamber, the upper and lower holding plates can be brought close to each other by the moving device disposed in the direction of the vacuum chamber, and then the respective axes are moved by the movement of the χγθ table. And the lower holding plate, the two substrates are oppositely aligned in the direction of χγθ, and then the vacuum chamber is reduced to atmospheric pressure, and the two substrates are further pressed by the action of atmospheric pressure between the two substrates (refer to the patent document) 2) [Patent Document 1] JP-A-2001-305563 (pages 3, 4, 3, 6, and 7) [Patent Document 2] JP-A-2002-229042 (pages 3-6, 1 to 5) [Problem to be Solved by the Invention] However, the conventional substrate alignment device mentioned herein uses a 乂¥0 table to move the two substrates in the ΧΥΘ direction to be aligned. . However, today's general squatting table is basically designed to move in units of mm or more in the direction of χθθ, such as adjusting the position of the substrate, such as a slight movement amount of less than several hundred Mrn, which does not reach the rotating body of the rotary bearing. The amount of one rotation, each time the 969S6.doc 1335254 substrate is adjusted and the movement is less than a few hundred, the sliding part consumes wear when the oil is exhausted, and the precision of the control surface is lost in a short time. Its indispensable high fluency response, so it is not practical after all, and 'the size of the substrate has become larger and larger in recent years. Even a substrate with a single side length of more than 1000 mm appears. However, even if the substrate size tends to be large, the precision required for aligning the substrate is the same as that of the small substrate, even if the length of one side is 1000 mm or more. When the substrate is aligned with respect to the substrate, the amount of movement in the direction of the ridge does not exceed several hundred μm. Therefore, the device for adjusting the movement of the large substrate having a length of 1 〇〇〇 mm or more in the ΧΥΘ direction becomes larger as the substrate size increases, and the device becomes larger, and the truck cannot be loaded in the completed state. The situation happened. Under this circumstance, if the cost of the disassembler is high, and it must be disassembled when it is shipped, the alignment accuracy must be reduced, and it takes a lot of time to complete the alignment. Some points are fatal shortcomings when selecting a device. However, due to the large structure of the above-mentioned squatting platform, the weight of the slab is also increased, and the manufacturing is too large, and the body becomes large. Moreover, in recent years, as the substrate has become larger, the entire device itself has become larger, and the problem has become increasingly serious. The above-mentioned elastic sealing member between the bottom end wall of the vacuum chamber and the elastic body such as the bellows-like elastic body interposed therebetween is installed to maintain the vacuum state of the vacuum chamber 96986*doc 1335254. In addition to the cost of maintaining the vacuum, it is also because of the increase in the degree of 'four'. If the surface of the vacuum seal is tightly connected to the moving member, the force against the load is increased and the force required to adjust the movement is required. There is a problem with many restrictions on the type of movement of the drive source for outputting large position adjustments. Furthermore, in this state, as described above, the two substrates are aligned, and when the movable member is moved in micron or submicron (submicr〇n) units, the elastic sealing member temporarily Deformed, but after the adjustment, it will return to its original state. That is to say, in the adjustment phase, even if the two substrates are correctly aligned, 'the elastic sealing member has the elastic force relationship with the shape before the deformation can be recovered', so that the alignment of the two substrates may be caused, and the alignment may not be possible. The correct alignment is done. Moreover, it is difficult to move or remove the substrate in the vacuum chamber because the whole of the vacuum chamber cannot be opened and closed. The maintenance of the vacuum chamber is more difficult in the present invention, and the invention described in the scope of claim patent i, It is a method that can accurately align the substrate to the substrate without using the pedestal table. The invention described in the second item of the scope of the application (4) is in addition to the purpose described in the first item of the patent scope, and the square of the movable upper and lower panels can be squatted by a simple structure. The plane is adjusted in the direction of the adjustment. The invention described in the third paragraph of the patent application, in addition to the object described in the first item of the patent application, is one of the movable upper and lower holding plates 96986.doc^35254, which can be constructed by a simple structure. The flat branch is smoothly adjusted in the direction of χθθ. In the invention described in the fourth item of the patent application of the patent, the vacuum penetration member is removed in addition to the object described in the first paragraph of the patent application. In the invention described in the fifth aspect of the patent application, in addition to the objects described in the first, second or third aspect of the patent application, the vacuum chamber is designed to be compact. The invention described in the sixth paragraph of the Shenyue Patent Enclosure, except for the purpose described in the Patent Model No. 2, 4, or 5, may be added without a vacuum shell structure and a U-simple structure to adjust the most between the two substrates. Suitable for the spacing of the alignment. [Means for Solving the Problem] In order to achieve the above-mentioned object #, the biggest feature of the present invention is that in order to adjust the two substrates, one of the movable holding plates in the movable chambers of the upper and lower movable chambers in the vacuum chamber is a "swinging link guide". Guide device" to support. ^Shaking the #导装置", as will be explained later, it refers to the swinging linkage device as a swing. It is essentially a circular arc motion, in one. Within the range, the secondary 疋 plane guidance (receiving axis) is achieved with an approximate practically problem-free accuracy. It has superior reaction and control performance with the guiding device 1 which has been individually rotated as the main body. This same device can be implemented by inverting the swing and standing from the bottom up. Further, in the "rocking link guide device", in addition to the above, the continuous-part portion can be elastically deformed to realize the secondary element plane guide. And the movement of the holding plate corresponds to the second element plane guiding, and it is most suitable to implement a 7L three-point displacement moving cam with 96986.doc 1335254. That is, the invention described in the ninth aspect of the invention is characterized in that the rocking link guide is mounted above or below the vacuum chamber. When disposed above the vacuum chamber, the rocking rod guiding device is suspended from the top wall of the vacuum chamber; when disposed under the vacuum chamber, the rocking rod guiding device is installed by the bottom end wall of the vacuum chamber .

More specifically, this means that one of the upper and lower holding plates is kept parallel with respect to the other of the two substrates, and the device can be supported to move in any direction in the direction of the cymbal. The wall or the bottom end wall is provided with a rocking link guiding device which is moved in the ΧΥΘ direction by the χγθ direction moving device, so that the upper and lower holding plates are opposite to each other In the direction of the ΧΥΘ 移动 移动 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明f is installed outside the vacuum chamber, and the upper and lower holding plates are supported on the branch.

When it is placed above the real crucible, 'the substantially parallel connecting rod member is raised from the top wall of the vacuum chamber to cut the holding plate; when installed under the vacuum chamber, (10) the bottom end wall of the vacuum chamber (4) is substantially parallel to the connecting rod (four) pieces To support the retaining plate. In the invention package f described in the first item of the patent application, the following configuration is added: the above-mentioned rocking link guiding device is installed from a vacuum to an internal to the outside. The end walls are vertically arranged to be large = the top end of the vacuum chamber or the bottom=minute link, and then "cannot be connected to the axis of the XYe direction (4): • the member Μ and the upper and lower holding plates to achieve the invention The goal. 96986.doc </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> Below the bottom end wall. When installed above the vacuum chamber, the upper retaining plate is suspended by a base frame located above the top wall of the vacuum chamber; when installed under the vacuum chamber, the base frame is located below the bottom wall of the vacuum chamber. A pillar is provided to support the lower retaining plate. In detail, in the invention device described in the ninth application, the following configuration is adopted: the above-mentioned rocking link guiding device includes a vacuum chamber top wall or bottom which is opposed to one another by one of the upper and lower holding plates The end walls are substantially parallel pillars that are vertically mounted to the base frame, and the pillars are configured to be movable in any direction. The invention described in claim 4 is the apparatus described in the first, second or third aspect of the patent application, and the following constitution is added: the same atmosphere as the vacuum chamber interior or the vacuum chamber interior The space is filled with * a TM to the mobile device 'to make the upper and lower holding plates - or with the shaking; the guiding device is directly connected. The application of the invention described in item 5 of the patent application is based on the application of patent I, which has been included in the first, second or third item of this article. The following structure is as follows: The outer side of the vacuum chamber is provided with a state-direction moving device [characteristics: through the rocking link guiding device, the structure of the indirect connecting rod of one of the upper and lower holding plates is referred to. And the invention contained in the fifth paragraph of the scope of the patent application, is applied for the patent: in the above-mentioned direct space indoor... In the carrier device, the following one or the inner wall surrounding the vacuum chamber or the pillar 96986.doc 1335254 is added, and a substrate spacing adjusting device is connected with the upper holding plate, whereby the upper holding plate is opposite to the upper holding plate The lower holding plate allows it to move in parallel in the z direction. [Effect of the Invention] As described in the above description, in the case of the present invention, the one of the upper and lower holding plates can be secured to the other side. In the state, the support can be freely adjusted to move in the direction of χθθ, and the support f is attached to the top end wall or the bottom end wall of the vacuum chamber from one of the upper and lower holding plates, and the rocking link guide is guided. The device # moves the device in the direction of the cymbal, and shakes in the direction of the cymbal, so that the upper and lower holding plates are adjusted in the direction of the other side, and the upper substrate and the lower substrate are moved in the yaw direction to be aligned. Therefore, it is possible to accurately align the two substrates without using the cymbal stand. The result 'Compared with the f-processing method using the ΧΥΘ heart as the ΧΥΘ direction movement' because there is no need to squat the pedestal, the device that moves in the direction of the ΧΥΘ 乃 can be J-shaped, and therefore, for the repetitive movement adjustment At the time of the operation of the base &amp;#, it is expected that the wear of the sliding portion which is generated when the oil is exhausted will not occur again, and the durability effect can be improved, and the maintenance cost can be reduced, and the maintenance is also easy. And even if the substrate size

Gradually increasing size, 1 奘 敕 敕 L L π 〃 〃 衷 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , It must be decomposed first, and the work must be re-aligned when it arrives. 969S6.doc -13- 1335254 Furthermore, with the enlargement of the substrate, the large &amp; m gentleman increases the weight of the goods relative to the vacuum chamber. Due to the improved control performance of the alignment, even if the top or bottom wall of the vacuum chamber is deformed due to the atmospheric pressure, it will not affect the accuracy of the alignment of the substrate. = Invented in the invention of claim 2, in addition to (4) the effect of the invention described in the scope of the patent, the vacuum chamber is provided with a plurality of externally facing portions, and each of the vacuum chambers is provided with a top wall or a bottom wall in a vertical direction. The substantially parallel connecting rod member and the connecting member connecting the respective distal end portions thereof are connected to the connecting member and the upper and lower holding plates by a shaft that cannot be deformed in the weir direction, and even the rocking member and the connecting rod member can be arbitrarily rocked. Moving in the direction of grasping, and because of the rigidity of the shaft itself, the distance between one of the upper and lower holding plates and the top wall and the bottom end wall of the vacuum chamber can be kept at a certain distance 'and' because they do not touch each other, so Resistance slippage occurs. . . Therefore, the one of the upper and lower holding plates can be moved, and the movement in the direction of the yaw can be adjusted on the support plane by the simple structure. As a result, there is no frictional contact with the movement of the yaw direction, and dust is not generated by the contact friction. Therefore, the alignment of the two substrates can prevent the occurrence of dust on both substrates. &amp; bad effects. In the invention of claim 3, in addition to the effects of the invention as set forth in claim 1, the rocking link guiding device is formed by one of the upper and lower holding plates and penetrates the vacuum chamber opposite thereto. The top or bottom end wall is formed by substantially parallel struts that are mounted in the vertical direction to the pedestal. By providing these pillars, it is possible to move the upper side of the holding plate of the 96986.doc 14 !335254 and the top or bottom end wall of the vacuum chamber in the direction of χγθ, completely unaffected by atmospheric pressure, and also adjusted by It does not touch when moving, so there is no sliding resistance. Therefore, with this simple configuration, it is possible to smoothly adjust the direction of the χθθ, and to support the side of the movable upper and lower holding plates in a plane. As a result, in addition to the miniaturization of the mobile energy source that can move the direction of the yaw, since there is no frictional contact portion that moves in the direction of the adjustment ,, dust generated by the contact friction does not occur, and the two substrates are aligned. At the time, it can prevent the adverse effects on the two substrates due to the occurrence of dust. In the invention of claim 4, in addition to the effects of the invention as set forth in the first item of the patent application, a χθθ direction moving device is installed in the space inside the vacuum chamber or in the same atmosphere as the inside of the vacuum chamber. And rocking the link guide. By directly interlocking the slanting direction moving device with the upper and lower sides or the rocking link guide device, the work between the substrates can be performed by internal driving. Therefore, it is no longer necessary to use a vacuum penetrating member. As a result, compared with the conventional structure in which the elastic sealing member such as the bellows-like elastic body is provided between the bottom end wall of the vacuum chamber and the driving member penetrating the same, and the vacuum state in the vacuum chamber is maintained, the elastic sealing is not required. The member is closed to penetrate the vacuum member, so that in addition to reducing the cost of vacuum isolation, and because there is no need to adjust the considerable force required for the movement, the drive type is not particularly limited. ~ and 'in order to align the two substrates' even if the movement is only adjusted in micron or submicron units, it does not adjust the shape of the 96986.doc 15 1335254 .m ^14 (four) structure to restore the deformation before deformation The problem of the substrate alignment occurs 'the correct operation can be performed correctly. In addition, as in the invention of claim 5, in addition to the invention effect provided in the patent scope range 1, 2 or 3, the device is moved in the direction of the device on the outside of the vacuum chamber, and the device is shaken. The rod guiding guide device indirectly aligns the direction moving device with the __ side of the upper and lower holding plates, and aligns the substrate by an external driving source. Therefore, the vacuum chamber can be designed to be compact and small. In the sixth item of the application (4), in addition to the effects of the invention provided in the scope of the patent application, paragraphs 2, 3, 4 or 5, in the vacuum chamber or in the inner wall or on the pillar surrounding the vacuum chamber, A substrate spacing adjusting device is provided for interlocking with the upper holding plate. The substrate spacing adjusting device can move the upper holding plate parallel to the lower holding plate in the z direction, thereby correcting the movement of the substrate with the ΧΥΘ direction. A small amount of variation from the interval between the eight. Therefore, it is not necessary to add a vacuum penetrating member, and the simple configuration can be adjusted to the optimum interval for the substrate alignment. [Embodiment] In the present invention, a substrate bonding machine having a substrate alignment device D is provided, as shown in Figs. 1 to 6, behind the upper holding plate 1 and the lower holding plate 2, and is laterally mounted substantially parallel thereto. The opposite end wall 3 and the bottom end wall 4 which can be arbitrarily moved in the Z direction are moved by the relative proximity of the top end wall 3 and the bottom end wall 4, and a pair of upper and lower holding plates 1 and 2 are formed therebetween. The vacuum chamber S can be freely divided in the up and down direction. When the degree of vacuum in the vacuum chamber S reaches a desired level, the moving device 5 of the substrate alignment device D starts to operate, and 96986.doc -16-1335254 is opposite to the substrates A and B made of two glass plates. The adjustment is moved in the direction of χγθ, and the preliminary alignment and the precision alignment operation are sequentially performed to align the two substrates A and B. More specifically, the peripheral walls 3&amp; and 4a are integrally formed or integrally formed on the outer periphery of the top end wall 3 and above the bottom end wall 4. Thereby, an upper holding plate 1 is placed above the inside of the vacuum chamber s surrounded by the top wall 3 and the surrounding wall 3a, and at the same time, the vacuum chamber S is also formed around the bottom end wall 4 and its surrounding wall. Below the inside, erect the holding plate 2. The top end wall 3 and the peripheral wall 3a and the bottom end wall 4 and the surrounding wall 4a thereof are pulled away from the z direction by the elongating operation by the lifting device 11 constituted by the jack 4, and are assembled on the upper and lower holding plates 1, 2 After the substrates a and B are rearwardly retracted by the lifting device, the top end wall 3 is moved downward to be in close contact with the annular peripheral wall "4a" to form a vacuum chamber s. Then, by using the function of the getter device 12, the air in the vacuum chamber s is extracted to reach the required degree of vacuum, and then the upper holding plate 1 and the lower holding plate 2 are opposed by the χγθ direction moving device 5. On the other side, make adjustment movements in the direction of χυθ. Further, the upper substrate Α and the holding surface which are arbitrarily detachably supported on the holding surface of the upper holding plate 1 are arbitrarily detachably supported and supported on the upper substrate B, and the initial substrate: = plate: dense alignment operation. After the bit has been re-hunted by the top of the board 1 early skill A, -. The double K-protection surface is sprayed with a nitrogen gas, and the holding surface is forcibly separated from the upper substrate A, and the annular adhesive C on the upper and lower plates 3 is instantaneously joined to seal the two sides. After that, make it. The gas device is actuated, and at the same time, the air or nitrogen gas is supplied to the true and empty chambers S by using the penetrating holes of the absorbing devices 96986.doc 1335254 lb and 2b, which will be described later, or the vacuum chamber S is utilized by either side. The air inside returns to the normal atmospheric pressure, and is uniformly pressurized by the difference in air pressure generated between the inside and the outside of the two substrates A and B. The liquid crystal is squeezed to a desired interval in a sealed state to complete the desired product. Hereinafter, various embodiments of the present invention will be described by way of the drawings. [Embodiment 1] In the first embodiment, as shown in Fig. 2 and Fig. 2, the bottom end wall 4 of the vacuum chamber 3 is fixedly mounted on the frame-like gantry 13a, and the support is fixed 'opposite, and then borrowed. The top end wall 3 is moved back and forth in the two directions by the expansion and contraction of the lifting device ( (closing operation), so that the inside of the vacuum chamber s is replaced by the cam 5a of the above-mentioned directional moving device 5 The abutting portion 2e to which the cam h is engaged is disposed in a concave shape at the bottom of the lower holding plate 2. In the sealed vacuum chamber S, the 2e of the bottom surface abutting portion of the T holding plate 2 is moved (pressed) in the horizontal direction by the movement of the cam, so that the two substrates 8 and 3 are kept in parallel. Perform preliminary alignment and precise alignment operations in sequence

The upper holding plate 1 and the lower holding plate 2 are stable flat plates having a flat plate shape such as a metal or ceramic having a high rigidity and a thickness which is not easily bent (bent). On the opposite side, each of the electrostatic absorbing panels 1 &amp; and 23 devices that can hold the two substrates eight (four) are fixed, and the absorbing device 1b and 2 absorbing the suction force in the atmosphere In addition, in order to make the handling work of the pirate (not shown) moving the substrate smoother, the plurality of mounts are repeatedly moved in the Z direction, and the lift pins l and 2 are held by the suction force. More ^6986.dot -18- χ335254 Hold the plate 1, which can be held down, and the plate 2 is positioned at a position that does not move in the direction of χγθ, which is taken as a unit 'on the separation position of the lower holding plate 2 from the bottom end wall 4 thereof. 'Install a plurality. In the embodiment of the present invention, the rocking link guiding devices 6 each include a substantially flat connecting rod member 6b which is suspended from the bottom end wall 4 of the vacuum chamber S in a vertical direction (ζ direction), and is connected to each end thereof. The connecting member 6c of the portion is connected to the lower holding plate 2 by a shaft having a strong rigidity so as not to be deformed in the direction of the weir. The link member 6b is moved in the ΧΥΘ direction by the above-described χ θ θ direction moving means 5', and the angle at which it is shaken is maintained. In the illustrated example, the shaft 6a is a hanging device that passes through the through hole 4b of the bottom end wall 4 of the lower holding plate 2 in the direction of the weir; and the link member 6b is formed by the bottom end wall 4 The lower side of the through hole 4b serves as a means for surrounding the shaft. For example, four rods can be erected, and the link members 6b are respectively divided in the axial direction thereof, and the curved portion 6 such as a ball joint is used for each other ( j is combined with 'to make it move in the direction of the 。. That is, 'the shaft 6a' composed of the shaft can be arbitrarily shaken like a swing through the link member 6b which can rock in the direction of χγθ and the member of the disk-shaped link member Further, the gap between the through hole 4b and the shaft 6a formed in the bottom end wall 4 is covered by an elastic sealing member 6e made of, for example, a bellows-like elastic body such as a bellows. Passing through the seal under the condition of moving in the direction of the yaw, or using the periphery of the oscillating connecting rod guide 6 as a wall (not shown), each of which is attached to the inside of the vacuum chamber S and the same 96986.doc 1335254 space. If you don't need to use a flexible seal Further, with respect to the above-described rocking link guide device 6, the central axis 6a may be formed to be freely rockable in the direction of χγθ, or the connecting member 6b may be formed to be rigid in the Ζ direction, as opposed to the above-described configuration. Strong and unbiased χγθ direction. As a structure that can be arbitrarily oscillated in the forward direction, a column or metal wire (four) member such as an elastic (four) or a shaft 6a or a connecting rod is used without using the f-curved portion 6a' such as a ball joint. One part or the whole of 6b is made of an elastically deformable material. 'The entire link member 6b is made of a material that is elastically deformable in a cylindrical shape, and a configuration other than that in the drawings can be arranged. And, for example, the above-mentioned shaking connection As shown in FIG. 2, the rod guiding device 6 is disposed in each of four corners of the lower holding plate 2 and the bottom end wall 4, and a total of four sets are arranged. As the size of the substrate is gradually increased, as long as the above-mentioned The arrangement of the slanting direction moving device 5 or the lift pin 2c may be set to five or more. On the other hand, the vacuum state in the vacuum chamber S is maintained while being interlocked with at least one of the upper and lower holding plates 1 and 2 The substrate spacing adjusting device 7 that moves the upper and lower holding plates 1 and 2 in parallel in the Z direction. In the illustrated example, on the lower side of the center member 6a formed by the shafts of the respective rocking link guiding devices 6, The substrate spacing adjusting device 7 that is telescopically moved in the z direction is attached to each other. The lower holding plate 2 is moved in parallel with respect to the bottom end wall 4 in the z direction by the substrate spacing adjusting device 7. Each of the substrate spacing adjusting devices 7 is It is a driving body installed in the middle position of the center member 6a, such as a linear actuator or a telescopic cylinder. Before setting the two substrates A and B, consider the thickness balance of the two substrates a, 3, etc. 96986 .doc -22- 1335254 The factor is set to keep 1, 2 in parallel by elongating each drive and body. After the preliminary alignment and precision alignment work is performed, the basin_interval changes, and the surrounding members of the rocking link guiding device 6 are moved in the direction of the state, and the lower holding plate 2 and the bottom end wall 4 are moved. The interval between them is only "the length of the shorter portion" while maintaining the set spacing of the lower holding plate 2 and its bottom end wall 4. s bad

The interval between the 13th and the 8th floor of the friend's second board is described in detail. From the vacuum chamber S, the king will draw out the upper substrate eight and the annular adhesive C liquid crystal on the lower substrate B remains completely out of contact with each other. The interval is about 1 mm~2: Before the initial alignment operation, the minimum value is about keeping the upper substrate A not rounded; ^ the contact of the sputum C is about 〇'5 mm is ideal; and the precision alignment is for &lt; The minimum value is about to keep the upper substrate A in contact with the circumferential direction of the annular adhesive, and the distance from the lower substrate B is preferably about 〜 mm to 0.2 mm. Furthermore, the operation of the substrate alignment device will be described.

- After the first vacuum chamber S reaches the required vacuum level, as shown in the figure, the lower holding plate 2 is raised by the operation of the substrate spacing adjusting device 7, and the upper and lower substrates A, B are set. The interval between the two is approximately 0.5 mm in the initial alignment operation, and is reduced to 〇^ mm~0·2 mm in the precision alignment. Two substrates in this preliminary and precision alignment stage The symbols displayed by A and B are measured by a detector (not shown) composed of a microscope and a camera, and data is output, and the plural χ θ θ direction moving device 5 is individually operated accordingly. 96986.doc -23· 1335254 Each of the ΧΥΘ direction moving devices·5, by the rotation of the aligning drive source 5b, for the X-direction cam 5a and the y-direction cam 5&amp;, the bottom plate of the lower holding plate 2 The abutting portion 2e is moved (pressed) in the ΧΥΘ direction with respect to the upper holding plate 借此, whereby the two substrates Α and Β can be sequentially aligned and precisely aligned. Eight,.. The overall XY of the substrate alignment device can be compacted and succinct, and can be finely adjusted and accurately aligned. Further, in the embodiment of the present invention, by abutting the lower holding plate 2

The 2e and the cam 5a are installed in the sealed vacuum chamber (10), and the movement of the substrate a and b in the alignment direction is performed in the vacuum chamber S, and the movement of the direction (4) is not required to penetrate the vacuum. Smoothly adjust the movements.

Further, while performing the above preliminary and precise alignment operation, if the upper left lower holding plate 2 is moved in the direction of χγθ with respect to the bottom end wall 4 thereof, the name of the surrounding member 6b of the guiding device 6 is The deformation and movement in the same direction, the core members 6&amp; have rigidity in the vertical direction, so that the weight of the plate 2 can be maintained while maintaining the separation between the lower holding plate 2 and its bottom end wall*: no contact, so Sliding resistance is not generated due to the movement adjustment of the χγθ direction. -, fruit, can provide adjustment of the direction of the squat, smooth and durable, south of the broadcast link guide 6. Further, the substrate spacing adjustment device 7 can move the lower plate 2 in parallel with respect to the bottom end wall 4 thereof, and the distance between the plate and B can be Change, each rocking rod ^ 96986.doc -24- The surrounding member 6b of the cymbal 6 is deformed and moved in the direction of the cymbal, and the vertical up and down size will be slightly shortened while the interval between the cymbal and the cymbal is slightly widened. The interval between the temple plate 2 and the bottom wall 4 thereof becomes small, but even so, the above-described change portion is corrected, and the predetermined space is maintained. The result is a simple structure that not only corrects the alignment of the board A and the cymbal, but also corrects the small error in the z direction accompanying the alignment. [Embodiment 2] In the second embodiment, as shown in Figs. 3 and 4, the abutting portion 2e' of the X-direction cam 5&amp; and the direction-direction cam 5 of the χγθ-direction moving device 5 is not engaged. The bottom surface of the lower holding plate 2 is attached to the bottom end wall by a projection, and the bottom surface abutting portion 2e of the lower holding plate 2 is driven by the χ direction cam "and the 丫 direction cam 5a" toward the χ θ θ ( The horizontal direction is adjusted and moved, whereby the two substrates Α and Β are kept in parallel, and preliminary and precise alignment operations are sequentially performed. This configuration is different from the first embodiment shown in FIGS. 1 and 2; The same as the embodiment shown in Fig. 1 and Fig. 2. In the embodiment, the bottom end wall 4 of the vacuum chamber 8 is fixedly mounted on the plate-shaped gantry 13b, and the plate-shaped gantry nb is arranged in a plurality of cylindrical frames. The bottom end wall 4 is held stationary, and the top end wall 3 is reciprocated in the Z direction (opening and closing motion) by the above-described "retracting operation of the lifting device 11 described above." Further, the abutting portion 2e is provided. _ made into a rod shape, penetrating through the through hole 4c' provided in the bottom end wall 4 to make it arbitrarily The Θ direction moves, and then protrudes from the vacuum to the outside of the S. The elastic sealing structure #2f composed of the bellows-like elastic 96986.doc -25-1335254 formed by the bellows is closely adhered to the above-mentioned rod-shaped joint. 2e, the gap between the through hole 4c, the X-direction cam &amp; and the y-direction cam mounting follower w from the respective abutting portions 2e to the χγθ direction moving device 5 can be arbitrarily moved in the X direction or the Y direction. By the elastic body 5e such as a spring, the lower holding plate 2 is pulled to the X and γ directions by the respective abutting portions 2e, and the cams 5a and the followers 5d are constantly abutted against each other. By the movement of the aligning movement source 5b of the moving device 5 in the yaw direction, the respective slewing movements are converted into reciprocating motions in the 乂 and 丫 directions by the respective cams 53. At the same time, the respective repetitive motions are transmitted to the respective slaves. In the case of 5d, the respective abutting portions 2e and the lower holding plate 2 are indirectly moved in the squat direction against the respective elastic bodies 5e. Further, the abutting portion 2ei, the 乂 direction moving device 5, the 乂 direction cam 5a And the y-direction cam &amp; The arrangement or structure of the driven member (f〇ll〇Wer) 5d and the elastic body 5e is the same as that of the embodiment shown in the figure, and is not the same as the embodiment shown in FIG. The portion 2e' is protruded from the vacuum chamber to the side of the vacuum chamber, and is placed on the inner side in engagement with the X-direction cam 5a and the Y-direction cam 5&amp; or as long as the attachment of the lift shaft 2c is not hindered, the mover 5d is not required. The abutting portion "can be directly engaged with the cam" or the like, and any other arrangement or structure can be performed as long as the respective abutting portions 2 〆 can be moved in the direction of the cam 50 χ γθ. Therefore, FIG. 3 and FIG. 4 The configuration of the display has the same effect as that of the first embodiment shown in the above drawings and FIG. And as the above-mentioned ΧΥΘ direction moving device 5 is close to the above-mentioned rocking link guiding device 6, the arrangement of the two is difficult, for example, as shown in the figure, ^96986.doc -26- 1335254 is plurally worn on the bottom end wall 4 The lateral holes 4d of the annular projections 4a are inserted into the plurality of support beams 2g protruding from the outer periphery of the lower holding plate 2 in a state of being fitted, and are not only arbitrarily supported in the z-direction or the Z-direction, but also supported. The tip end portion of the center member 6a of the rocking link guide 6 may be connected below the support beam 2f. [Embodiment 3] Embodiment 3 As shown in Figs. 5 and 6, the rocking link guiding device 6 as the supporting means of the lower holding plate 2 includes the bottom end wall of the lower holding plate 2 toward the bottom of the vacuum chamber S. 4. The pedestal 6f and/or the lower holding plate 2 are moved in the χγθ (horizontal) direction by the operation of the slanting direction moving device 5 so as to extend through the pedestal (the substantially parallel struts 6f which are vertically arranged toward the 13d). The substantially whole or a part of the pillar 6f is rocked in the direction of χγθ, and the substrate A and the substrate can be sequentially aligned and precisely aligned in a state of being kept parallel. This configuration is implemented as shown in the above figure and FIG. The example is different from the embodiment 2 shown in FIG. 3 and FIG. 4, and the other configurations are the same as those of the embodiment or the embodiment 2. In detail, the pillar 6f of the rocking link guiding device 6 is for The lower holding plate 2 is arbitrarily movable in the direction of χγθ to move the rocking member which can be arbitrarily turned in the direction of the yaw. Thereby, the lower holding plate 2 is supported by the swing in the reverse direction as described above, and can be arbitrarily rocked by the above-described ΧΥΘ direction moving device 5, This pillar 6f Shaking in the direction of the yaw and maintaining the angle of its shaking. In the illustration, the bottom end wall 4 of the vacuum chamber 3 is fixedly mounted on the plate-shaped gantry 13b, and the plate-shaped gantry 13b is supported by the plurality of cylindrical gantry The end wall 4 keeps it from moving. On the other hand, the top wall 3 is moved in the z direction (opening and closing motion) by using the above-mentioned lifting and lowering movement 969S6.doc -27-1335254. °The above-mentioned cylindrical pedestals 13 are respectively penetrated from the upper surface of the fixed base frame 13d toward the bottom end wall 4 of the vacuum chamber S, and traverse the i and lower the bottom surface of the holding plate 2, and the struts of the above-mentioned rocking link guiding device 6纡 is placed in the direction of the main water, and four or more are provided at equal intervals. Each of the pillars 6f can be divided in the axial direction of each season, and can be combined with each other by a curved portion 6d such as a spherical joint, or Change the whole or part of the elasticity

The material is made so that at least the upper portion joined to the bottom surface of the lower holding plate 2 can be shaken and deformed in the ΧΥΘ direction. Further, the upper portion of the rocking side of the stay 6f is connected to the connecting member 6g, and is integrated with each other, and the connecting member 6g is interlocked with the above-described 方向 direction moving device 5.

The upper portion of each of the pillars 6 f penetrates the bottom hole 4 of the vacuum chamber s and the through hole 4e of the plate-shaped frame Ub so as to penetrate the inside and the outside of the vacuum chamber s in an arbitrary movement state in the direction of the sill. The gap between the hole plenums can be closed by the elastic sealing member 6h' which is formed by an elastic body such as a bellows-like elastic body such as a bellows (w), which can be sealed in an airtight manner. Or, if each of the pillars 6f and the contact member 6g and the periphery of the above-described ΧΥΘ-direction moving device 5 are covered by a partition wall (not shown) so as to be in the same atmosphere as the inside of the vacuum chamber S, it is not necessary to use an elastic seal. The member 6h is sealed. In the drawing, at the upper end of the support post 6f, the shaft 6ι which is not deformed in the weir direction is connected and integrated, and is joined to the bottom surface of the lower holding plate 2 to be joined. The gap between the shaft 6i and the through hole 4e of the bottom end wall 4 is set to _96986.doc • 28·, for example, 254 elastic reaching, sealing member 6h, and at the same time, the shafts 6i are stretched and connected to each other. Member 6g. 〜 Between the link member 6g and the 乂 direction cam 5a and the directional cam 5&amp; of the ΧΥΘ direction moving device 5, the device can move the follower 5f in the X and γ directions arbitrarily, and pass through the elastic body 5g such as a spring. The contact member 6g, the shaft, and the support 6f pull the lower holding plate 2 in the X and Y directions, and hold the cam 5a and the follower 5f abutting. In other words, the link member 611, the shaft 6丨, and the support 6f' are abutting portions 2e that abut against the Χ θ direction moving device 5 and the Υ direction cam 53 and the Υ direction cam 53. Further, by the movement of the moving direction of the moving device 5 in each of the directions, the X-direction cams and the γ-direction cams 5&amp; are converted into reciprocating motions in the X and γ directions. At the same time, each reciprocating motion is transmitted to each of the followers 5fU1, and the respective elastic bodies are made to move, and by moving the link member 6g, the lower holding plate 2 is indirectly moved in the X-direction by the shaft 6i and the strut 6f. Further, the arrangement or structure of the x-direction cam 53 and the γ-direction cam 5a, the aligning movement source 5b, the follower 5f, the elastic body 5g, the support 6f, the contact member 6g, and the shaft 6i of the ΧΥΘ direction moving device 5 are In addition to the configuration in the illustrated example, for example, the upper end of the strut 纡 can be directly joined to the bottom surface of the lower retaining plate 2 by the shaft 6i, or the same as in the embodiment 1 shown in FIG. In the inside of the vacuum chamber s, the support 6f and the contact member 6g are engaged with the X-direction cam 5a and the y-direction cam 53, and the support 6 can be tilted toward the 乂¥0 direction by the χ direction cam 5a and the Υ direction cam 5a. Adjusting the movement, 96986.doc -29· 133 5254, other configurations or configurations can be performed. Therefore, the configurations shown in FIG. 5 and FIG. 6 are not only the actual red example shown in FIG. 2 and FIG. 2 or the embodiment 2 shown in FIG. 3 and FIG. Having the same effect, and connecting with the substantially parallel connecting member 吊 which is vertically suspended from the bottom surface of the lower holding plate 2 and the bottom end wall 4 of the vacuum chamber as shown in Embodiments 1 and 2, and the connection of the lower end thereof Compared with the rocking link guiding device 6 of the member 6c, the lower holding plate 2 is supported by the simple planar structure so that it can be moved in the direction of χγθ, whereby the size of the substrate becomes larger, even if When the atmospheric pressure load of the vacuum chamber S is increased, the controllability of the alignment can be improved, and the bottom end wall 4 of the vacuum chamber S is deformed due to the load of the atmospheric pressure, and the accuracy of the alignment operation is not affected. Further, in order to perform the preliminary and precise alignment work of the substrate Α and Β, at least one of the upper and lower holding plates 1 and 2 is interlocked, and the upper and lower holding plates are held while maintaining the vacuum state in the vacuum chamber s. a spacer substrate that moves parallel to the z direction The whole device 7 is disposed on the peripheral wall 3a surrounding the vacuum chamber s, the butterfly portion. In addition to the configuration of the example, the substrate spacing adjustment device 7 may be disposed on the inner side of the vacuum chamber S or on the lower side of the pillar 纡. Therefore, even if the pillars 6f are deformed and moved in the direction of the yaw, the size of the upper and lower sides is slightly shortened, the interval between the substrates A and B is slightly widened, and the distance between the lower holding plate 2 and the bottom end wall 4 is slightly changed. Small, it is also possible to correct the small error portion in the 2 direction to maintain the required interval. As a result, it is not necessary to additionally add a member that penetrates the vacuum chamber 3, and the substrate can be inserted in a simple device structure. Align with 3 and adjust to the most appropriate interval of 96986.doc 1335254. Further, in the above-mentioned embodiment, the bottom end wall 4 of the vacuum chamber 3 is placed above the 13a, 13b, 13c, 13d to be supported and fixed. On the other hand, the distal end wall 3 is opened and closed in the Z direction by the expansion and contraction operation of the lifting device 11, but the invention is not limited thereto, and the distal end wall 3 may be supported in a stationary manner, and the bottom end wall 4 may be opened and closed in the Z direction. By operating, the vacuum chamber s is divided (opened and closed) in the up and down direction. Further, the lower substrate 3 and the lower substrate 3 are not moved by the above-described ΧΥΘ direction moving device 5 by merely moving the lower holding plate 2 toward the ΧΥΘ* direction. Moving in the direction of χθθ to maintain the alignment of the substrate 丨 above the plate ,, but not limited thereto, as opposed to the former, it is also possible to adjust the moving plate to the other direction by the ΧΥΘ direction moving device 5 Moving, while the lower substrate Α is moved and cannot move in the ΧΥΘ direction, the alignment of the substrate B under the plate 2 is maintained. At this time, the rocking link guiding means of the supporting means for holding the upper plate is erected by the upper holding plate 1 toward the top end wall 3 of the vacuum chamber S. Moreover, although the display is moved by the cam of each of the forward-direction moving devices 5, the upper and lower holding plates are moved in the direction of γ θθ, but it is not limited to this and the actuator can also be used. Other driving sources are used to adjust the movement in the direction of the cymbal instead of the cam 5a. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front cross-sectional view showing a substrate aligning apparatus according to a first embodiment of the present invention and an enlarged view of a slanting direction moving device. Fig. 2 is a plan view showing a lower holding plate. 96986.doc Mountain: 254, Fig. 3 is a longitudinal sectional front view showing the substrate alignment device in the second embodiment of the present invention. Fig. 4 is a cross-sectional plan view showing a state in which the lower holding plate and the χγθ direction moving device are enlarged. Fig. 5 is a view showing the substrate alignment device in the third embodiment of the present invention. The figure shows an enlarged cross-sectional view of the portion along the direction of (6)-(6) of Fig. 5. [Main component symbol description] 1 upper holding plate 2 lower holding plate 2e, 2e', 2e&quot; abutting portion 3 top wall 3a surrounding wall 4 bottom end wall 4a surrounding wall 4b through hole 4c through hole 4d transverse hole 4e through hole 5 ΧΥΘ Directional moving device 5b Alignment moving source 5c Elastic object 5d Follower member 5 e Elastic object

96986.doc -32* 1335254 5f follower member (fllower) 5g elastic body 6 supporting device (shaking connecting rod guide 6a shaft 6b connecting member 6c connecting rod member 6e bellows-like elastic sealing member 6f strut 6g connecting member 6h bellows Elastomeric sealing member 6i Shaft 7 Spacer adjustment device 11 Lifting device 12 Suction device 13d Base frame A Substrate (upper substrate) B Substrate (lower substrate) C Ring-shaped adhesive D Substrate aligning device S Vacuum chamber

96986.doc -33 -

Claims (1)

1335254 r—--- Patent application No. 93,132,594, % of the year and month of the year) (3⁄4) is replacing the page · · Chinese patent application area replacement (99 ' 9' month) - two __ ten, the scope of application for patent: 1. A substrate alignment device in a vacuum chamber (S), wherein two substrates (A, B) bonded to each other are detachably held by upper and lower holding plates (1, 2) and In the opposite state, the two substrates (A, B) are relatively moved in the ΧΥΘ direction, and the substrate (A, B) is aligned with the alignment substrate, and the feature is as follows: 2) The support means for arbitrarily adjusting the movement in the direction of the weir in the state in which the two substrates (A, B) are kept in parallel, from one of the upper and lower holding plates (1, 2) to the vacuum chamber (S) The top end wall (3) or the bottom end wall (4) is provided with a rocking link guiding device (6), and the connecting rod is rocked in the weir direction by the ΧΥΘ direction moving device (5) (6) ), one of the upper and lower holding plates (1, 2) can be adjusted to move in the other direction. 2. The substrate alignment device according to claim 1, wherein the rocking link guiding device (6) is provided from the inside of the vacuum chamber (S) to the outside of the vacuum chamber (S), each of which is contained in a vacuum a substantially parallel link member (6b) disposed at a top end wall (3) of the chamber (S) and a bottom end wall (4), and a joint member (6c) connecting the top end portions thereof; the joint member ( 6c) Connect one of the upper and lower holding plates (1, 2) to the shaft (6a) which is not deformable in the xy0 direction. 3. The substrate alignment device according to claim 1, wherein the rocking link guiding device (6) comprises a vacuum chamber (S) extending from one of the upper and lower holding plates (1, 2) to the opposite side thereof. The top wall (3) or the bottom end wall (4) and facing the base frame (13d) are substantially parallel pillars (6f) arranged in a vertical direction; this 96986-990903.doc 1335254 ----- The struts (6f) are arbitrarily swayed in the direction of the squat. The substrate aligning device according to claim 1, wherein the vacuum chamber (s) is inside or In the space of the same atmosphere as the inside of the vacuum chamber (S), a ΧΥΘ direction moving device (5) and a rocking link guiding device (6) are provided to make the ΧΥΘ direction moving device (5) and the upper and lower holding plates (1, 2) One of the sides is directly connected to the rocking rod guiding device (6). The substrate aligning device according to claim 1, 2 or 3, wherein one of the outer sides of the above-mentioned true empty chamber (s) is installed The ΧΥΘ direction moving device (5), the χ θ θ direction moving device (5) through the rocking link guiding device (6) and the upper and lower holding plate (1) 6. A substrate alignment device according to the above item 1, 2, 3, or 4, wherein the inside of the vacuum chamber (8) or the surrounding wall surrounding the vacuum chamber (8) (3a, 乜Or the pillars (6a'6f) are provided with a spacer substrate adjustment device (7) that is interlocked with the upper holding plate (1), whereby the upper holding plate (1) is oriented relative to the lower holding plate (2) by the spacer substrate adjusting device (7) The Z direction is parallel. - 7. The substrate alignment device according to claim 5, wherein the inside of the vacuum chamber or the surrounding wall (3a'4a) or branch (6a' 6〇J surrounding the vacuum chamber (8) \, the substrate adjustment device is arranged to be spaced apart from the upper holding plate (1), thereby spacing the substrate adjusting device (7) such that the upper holding plate (1) is opposed to the lower holding plate (2) moving in parallel in the Z direction. 96986-990903.d〇i 1335254月修曰 (3⁄4正换页Page 093132594 Patent Application Replacement of Chinese Drawings (September 99) ^--, Schema: 96986-990903.doc 1335254 ------ 9 per? Yuezhi repair (3⁄4 positive replacement page 0) cm ^^ 96986-990903.doc 2- 1335254 Month R repair (3⁄4 positive replacement page a) to -Q Ο Ό CD CO CO ζ〇 C〇 &lt;〇 96986-990903.doc 1335254 Yuezhi repair (3⁄4) is replacing page 〇'N, hN'N, do hN\N, r&lt;^i two' \ \ I/-P9 ί;®csl 丨-ll®10 &lt;....... *0·— ί ps--f-ΦΊ fj Ί 96986-990903.doc 1335254 July of the Year &gt; Daily Repair (3⁄4 positive replacement page 96986-990903.doc 1335254 The shirt is retired on July 3) 96986-990903.doc