TWI296489B - Substrate assembly machine - Google Patents

Description

1296489 IX. Description of the Invention: [Technical Field] The present invention relates to a substrate assembly apparatus for assembling a substrate, and more particularly to a substrate assembly apparatus for assembling a substrate, wherein The distance between the upper and lower platforms of the substrate assembly equipment is adjusted by a vertical actuator and the overload of the vertical actuator is prevented.

[First cutting technology] Because of the development of information technology, the demand for display devices has also increased. In order to meet such demands, various flat display panels such as a liquid crystal display (LCD), a plasma display panel (PDP), and the like have been studied, some of which have been applied as display devices in various devices. Among these devices, LCDs have replaced cathode ray tubes (CRTs) and are most commonly used as portable display devices due to high image quality, light weight, thin thickness, and low power consumption. Furthermore, in addition to portable display devices such as monitors for laptop computers, LCDs have also been developed as monitors for televisions or computers. Therefore, although the LCD has developed various technologies for the role of a display device in the field of long-term support, and it is still a lot of efforts, It can be used to enhance the image quality as a display device. Therefore, in order to utilize lcd as a general display device in various fields, the development point of the LCD is how to maintain light weight, thin thickness, and low power consumption, and at the same time, how to implement the south image quality, such as south liberation, large area, and the like. Injected into a thin film transistor (TFT) substrate and the LCD includes

1296489 A liquid crystal material between color filters covered with a fluorescent material; a sealant connected to the periphery of the two substrates to surround the liquid crystal material; and a distance maintaining member distributed between the substrates to support the Substrate. When electric power is applied to a liquid crystal material having an unequal dielectric constant and injected between the two materials, and the intensity of the electric power is adjusted to adjust the amount of light transmitted through the material, an image is displayed. In order to manufacture an LCD device, many devices may be required, and a substrate assembly device for assembling a substrate is an important device. The conventional substrate assembly apparatus for assembling a substrate as shown in FIG. 1 includes: a lower base 10; an upper base 12, which is separated from the lower base 10 by upper and lower chambers 14 and 16, and is disposed at In the upper region of the upper base 12; and the upper and lower platforms 20 and 22 are disposed in the upper or lower regions of the upper and lower chambers 14 and 16, and are constructed to be horizontally arranged on the upper platform 20 and the lower platform 22 in the substrate S, The two bases S (the TFT array substrate and a color filter substrate) inserted into the upper and lower chambers 14 and 16 are bonded in the vertical direction. In the upper region of the upper chamber 14, an upper plate 18 is provided to open and close, and the internal components are maintained while maintaining a sealed state. In order to ensure that the substrate S is inserted into the upper and lower chambers 14 and 16 or the passages from the upper chambers 14 and 16, a lower lifter (not shown) is provided in the lower corner region of the upper chamber 14 to raise and lower. Upper chamber 14. In the lower region of the upper platform 20 and the upper region of the lower platform 22, an electrostatic chuck (ESC, not shown) is provided to generate an electrostatic force for sucking the load base S. Although not shown in the drawings, a plurality of lift pins (not shown) are provided, which are connected to the base material and the lower material 7 1296489 to pass through the vertical and the top ten. With a majority of 22 holes, primary and temporary attraction base # S. The lift pins are individually moved on a single plate on the upper and lower sides. Although the upper and lower lift pins are integrally fixed to the upper and lower sides of the plate, the drive unit (not shown) is used to raise and lower the plates. Here, there is a platform alignment program for aligning the substrate loaded on the lower stage to be accurately placed in the X and Y axis directions and in the x-axis direction, and the alignment of the substrate S is performed on one. On the alignment unit 24, the alignment unit 24 is arranged to contact three points of the adjacent side walls of the lower chamber 丨6. The aligning unit 24 directly contacts the lower chamber 1-6 between the stack and the lower chamber 丨4 and 丨6, and is fixed to the upper region of the upper base i2, and includes an eccentrically disposed cam and a transmission unit for A rotational force is applied to the cam. Wherein, there is also provided: a vertical transmission unit 34 for adjusting the distance between the two substrates S by slightly raising and lowering the upper platform 20; the support member 3 〇, from the side or four sides of the upper platform 20 Extending outwardly to drive the raising and lowering forces of the vertical transmission unit 34 to the upper platform 2〇, and the support member 3〇 is disposed in the upper chamber 14. As shown in Fig. 2, the lower chamber 16 is formed with a continuous perforation, passing through the thickness direction of the lower chamber 16, and the lower shaft support 42 is inserted into the through hole and fixed by screws so that the lower shaft support 42 The upper side is aligned with the upper side of the lower chamber 16. The vertical transmission unit 34 is fixed to the lower inner circumference of the lower shaft support 42, and the lower shaft 36 is positioned at the center of the lower shaft support 42 to contact the moving shaft of the vertical transmission unit 34. The support member 30 is extended outwardly and fixed to the outer wall of the upper flat 8 1296489 table 20 to easily support the upper platform 20. The fixing member 32 is formed with a thread to be fixed to the inner wall of the support member 30. In order to place the support member 30 on the vertical transmission unit 34, the inner side of the upper chamber 14 is formed with an outwardly facing recessed space, and the recessed space passes downward to communicate with the vertical transmission unit 34.

The upper shaft 38 is disposed to be raised and lowered while the upper shaft support 40 contacts the lower side of the support member 30, and the lower shaft 36 contacting the upper shaft 38 and the vertical transmission unit 34 are disposed on the vertical axis. Here, the transmission force of the vertical transmission unit 34 is transmitted to the support member 30 via the lower shaft 36 contacting the vertical transmission unit 34 and the upper shaft 38 contacting the lower shaft 36, respectively. The support member 30 is fixed to the outer wall of the upper stage 20 for fine movement. In the upper plate 18, an elastic member 26 is provided at each corner between the upper plate 18 and the upper platform 20 to support the platform 20 placed on the lower side. The upper end of the elastic member 26 projecting from the upper plate 18 through the upper plate 18 is fixed to the upper plate 18, so that the fixing portion 28 of the elastic member 26 is fixed to the upper plate 18 by bolts, and elastic The lower end of the member 26 is fixed to the upper platform 20 by bolts. However, since the upper platform 20 is supported by the plurality of elastic members 26 to the upper plate 1, the load of the upper platform 20 is dispersed by the elastic members 26, but the upper platform 20 is necessarily vibrated. If the elastic member 26 is removed to remove the vibration of the upper platform 20, the vertical transmission unit 34 supports the overload of the upper platform 20, so that the stress is concentrated to the fixed member 32, and the output power of the vertical transmission unit 34 must be increased. Further, since the upper shaft 38 and the lower shaft 36 are disposed between the vertical transmission unit 34 and the support member 30 to support the upper platform 9 1296489 20 ', the structure for transmitting the lifting force is complicated. Furthermore, in traditional substrate assembly equipment, because of the placement

| # I 7 ^ Port lifting and unloading of the substrate, so the structure is complicated and also increased. SUMMARY OF THE INVENTION The present invention has been directed to the above and/or other problems to provide a substrate assembly apparatus in which an upper platform is supported to prevent overload. Another purpose of the mouth and this month is to provide a substrate assembly equipment to unload! The "upper chamber and loading" unloading device is a single rise. Another purpose of the present month is to provide a substrate assembly apparatus and a loading/unloading device for fixing, wherein the upper substrate of the lower substrate inserted into the chamber is attracted and fixed by the string, so that the manufacturing cost is simplified. Reduced and easy to perform maintenance. According to the present invention, the above and other aspects can be completed by means of a mounting device for "in a vacuum chamber," and the device comprises: - a chamber, a lower chamber including an upper chamber and a light connection to an upper chamber, respectively. The upper and lower regions are respectively absorbing materials; the upper platform slab member has an end connected to the opposite side of the upper platform into the upper chamber side wall to support the upper chamber; and the lower support is configured to support the upper side wall of the chamber The lower side of the opposite side of the platform support member is inserted; the vertical transmission unit is connected to the substrate and the structure from the lower side of the invention for the purpose of the invention and the loading/high device. a substrate group substrate, the upper and lower upper and lower base sides are inserted, and are disposed on an upper side of the opposite side of the upper platform support member of the upper chamber side wall of the upper chamber side wall to move the upper platform in the vertical direction And a loading/unloading device disposed in the chamber to extract the substrate inserted from the outside and discharge the assembled substrate to the outside. Since the vertical transmission unit is disposed in the upper corner region of the upper platform, and the lower support member is disposed at the lower corner of the upper platform to distribute the load on the upper platform, the upper platform is prevented from vibrating and the vertical transmission unit prevents overload. Moreover, the structure of the substrate assembly apparatus can be simplified due to direct contact.

[Embodiment] These and/or other aspects and advantages of the present invention will be apparent from the following detailed description of the embodiments. Hereinafter, a substrate assembly apparatus according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings. <Example 1> A substrate assembly apparatus such as a conventional substrate assembly apparatus according to a preferred embodiment of the present invention as shown in Figs. 3 and 4, comprising upper and lower bases 11 2 and 11 0, upper and lower chambers 114 and 116, upper and lower platforms 120 and 122, a lifting device (not shown), an alignment device 124, a vertical transmission unit 134 and a lower support member 144, and are constructed such that they are inserted into the upper and lower chambers 1 Two substrates S (a thin film transistor (TFT) array substrate and a color filter substrate) assembled together with 1 4 and 1 16 are placed in the horizontal direction on the upper platform 120 and the lower platform 122. Here, because the upper and lower bases 112 and 110, the upper and lower chambers 114 and 11

1296489 116, the upper and lower platforms 12A and 122, and the alignment device 124 have the same structure and performance as the substrate assembly equipment, so the description is taken between the upper and lower platforms 120 and 122. The support member 130 is disposed between the upper and lower platforms 12A and 122, and is provided by the outer wall of the upper platform 12A in order to fix the support member 130 to the upper platform 120, and the member 130 is connected to the upper platform 12〇. Fixing member 132. The fixing members 1 3 2 fixed to the support member 130 are formed on the outer circumference thereof and the upper platform 120 is formed on the outer wall thereof so that the male screw can be fixed to the female thread so that the support structure is fixed to the upper platform. The outer wall of 120. In order to fix the support member 130 on the vertical transmission unit side to the recessed space having an outwardly facing recessed space and formed on its upper to upper platform 120, the support member 13 is positioned to be recessed therein. In the upper edge region of 30, the vertical transmission unit 1 3 4 as $ is disposed to contact the upper edge region, and the i 13 member passes through the predetermined position of the upper chamber 114 and is fixed to the same portion, and the portion that remains therethrough The parts are sealed. The support member 144 and the stopper M6 are inserted into the space of the vertical axis of the lower chamber, and the member 1 3 0, lv a 'the opening and closing member 1 1 4 a of the upper chamber 1 14 is solidified. Lower side. The lower support member 144 is a retractable spring and is fixed between the "opening and closing members U4a 卞 ii4a so as to be omitted from the conventional position in most positions. It is not required to be lifted and protruded outside. There is a male screw with a female screw 130 points 134 in the lower inner side and the solid chamber. Linear actuation and vertical transmission to the upper chamber over the vertical transmission support * upper chamber 114 "component 1 3 0 擒 upper platform 12 1296489 120 When the upper platform 120 is lowered, the load of the upper platform 120 can be distributed and lowered due to the operation of the vertical transmission. Meanwhile, in the upper region of the opening and closing loss in the lower support member 丨 44, it is provided as The stopper 146 of a shock absorbing body, the maximum reduction of the support member 13A fixed to the upper platform 120, increases the vibration of the upper platform 120. The stopper 146 is disposed between the support and the opening and closing member 114a, and has The height of the support member 13 〇 contacts the inner space of the upper chamber 114 when the 130 is lowered. The opening and closing member 114 & is manufactured in a plate shape and is repaired and maintained by the support member 144 and the stopper 146. And was fixed Up to the lower side of the upper chamber 1 1 4 . Here, the component representative symbol 118 is designated as the upper plate. In order to finely adjust the distance between the upper and lower platforms in the device according to the preferred embodiment of the present invention, the upper platform 12〇 In other words, for the upper platform 120, which is placed on the upper platform 12, the upper platform 120 is supported by the support member 丨4 4 at the eve of the upper flat corner area. And, the upper area of the support is the vertical transmission unit disposed outside the upper chamber 114. The lower support member 144 is aligned with the vertical axis so that the vertical transmission load is the vertical transmission unit 134 and the lower support member 144. When the upper platform 120 is vibrated, the upper platform 12 is disposed in the lower branch member 144, and the stop 146 is minimized by the unit 134 > the yak U4a to limit the degree and the minimum member 1 3 0 between the support members is removed The vibration of the unit 134 > the unit 134 > of the member 1 3 0 134 of the number of the support pedestals 120 assembled by the bolt-on substrate is 〇13 1296489 <Example 2> The base according to the preferred embodiment of the present invention Material assembly equipment and The substrate assembly equipment of the loading/unloading device is as shown in Fig. 5 and includes: upper and lower bases 212 and 210, upper and lower chambers 214 and 216, upper and lower platforms 218 and 220, and lifting devices (2 32). ) an alignment device 236 and a loading/unloading device 250.

The electrostatic chuck 228 provided on the upper side of the lower stage 220 is different from the electrostatic chuck 22 integrally formed on the upper stage 218, and has a plurality of rectangular spaces which are separated from each other in the width and length directions and have an equal area. The loading/unloading device 250 as shown in Figures 6 and 9 includes a frame 252, a guide shaft 254, an elastic member 256, a lifter 260, a string fixing unit 262, and a substrate contactor 264, and is disposed by The upper and lower chambers 214 and 216 are in the space defined by the upper and lower platforms 218 and 220. The frame 252 is guided to be raised and lowered by the guide shaft 254 inserted into the hole formed in the corner, and has a plate-shaped and perforated center member having an area smaller than the inner space formed in the lower chamber 216 and larger than the lower platform 220. . Each of the guide shafts 254 is a hollow cylinder having a diameter larger than the middle portion at both ends, and the lower end is disposed on the upper side of the upper base portion 21 and below the space between the lower chamber 216 and the lower platform 220. In the corner. The elastic member 256 is a compression spring. The upper end of the elastic member 256 is fixed to the upper end of the outer circumference of the guide shaft 254, and the lower end thereof is fixed to the upper side of the frame 252 which is aligned with the guide shaft 254. The resilient member 256 is raised along the individual guide shaft 254 and, when returned to the starting position, provides a restoring force to the frame 252. 14 1296489 ” The lifter 260 is a reel and is manufactured to be connected to a power plug. The wire is forcibly opened by V: 7 to apply electrical power to an electrical device, such as a conventional vacuum cleaner. The wire, 8 is wound around the individual lifter 260. When holding and releasing the line 25 8 , the line 2 S 丄 ' • returns to the starting position due to its own restoring force. The lifter 260 is fixed to the individual positions of the top plate of the upper chamber 2 1 4, aligned with the individual guiding axes The central axis of 254. Here, the front end of the line 258 entering and exiting the lifter 260 is fixed to the frame 252 exposed by the guide shaft 254. The length of the line 258 is reduced and increased to adjust the rise and fall. The level of the loading/unloading device 250. In other words, the release length of the line 25 8 provided at the lifter 256 can be adjusted. The entire length of the line 25 8 can be broken so that the line 258 can be released to a predetermined length. However, when the release length exceeds the predetermined length, the release of the wire 25 8 is stopped, or the release length of the wire 258 is limited by a separate stopper (not shown). The string fixing unit 262 has a block shape and is Set at block 252 Individual single straight lines to adjust the string tension as the substrate contact 264. If the individual substrate contacts 264 are in the same stretched state, the substrate s can be placed horizontally on the upper side of the wire fixing unit 262, and when the substrate When the s is placed in the inclined state, the wire fixing unit 262 can adjust the technical strength of the partial substrate contact 264 to horizontally place the inclined substrate S. The substrate contact 264 is a string or a lift pin, in this embodiment The string is used as the substrate contact 264. When the substrate contact 264 is a lift pin, the hole in which the lift pin enters is formed to pass through the lower = stage 220 in the thickness direction, and the substrate S is placed The upper substrate on the upper side of the 15 489 489 pin is raised or lowered through the hole. The ends of the substrate contact members 262, -, 64 are fixed to the individual wire fixing unit, and are coated with gold to be coated with 2 σ. In the case where the surface of the substrate contact member 246 is joined, the substrate S on which the rose is placed is prevented from being scratched. Meanwhile, when the base J is increased, τ can also provide a plurality of substrate contacts 264. Here, the height of the ^ # is the same. The maximum rise of the contact is high. The bearing of the substrate S and the substrate S are raised as shown in Fig. 8 + the upper chamber μ, and the upper side of the lower chamber 2 16 is set to a raised height reference point raised from the lower chamber 2 j 6 to the most 2 to 14 The height a is the position of the chord 264 of the loading/unloading device 250 when the upper chamber 214 is simultaneously high, and the height X is the length and height of the line 258 when the winding unit 260 is released at the maximum value. When:: when the upper chamber 214 of the lifter 232 is raised to a large value, the enemy's position/stop 214 is fixed to two degrees C, and the height c becomes the substrate 3 is carried by the summer wearing/unloading skirt 250. s position. The loading/unloading device is based on the substrate assembly apparatus according to the preferred embodiment. In other words, base...

The port P carries the robot arm (the Uf is inserted into the substrate assembly device, and when the lift pin 222 of the substrate S is lifted by the vacuum sucking, the upper base's is pushed onto the platform. 218 of the electrostatic chuck coffee, the lower substrate "Dannan degree a, 1 at this time 'the upper side of the upper chamber 214 reached the height of the sentence to change the sentence brother? When the upper Miyata to the Feng Descendants 232 rise, The upper and lower chambers 214, 216 are opened, and the line 25 8 of the lifter 260 wound in the lifter 260 of the top plate of the upper chamber 214 is released. Thereby, when the chamber 214 reaches the height b, the substrate S is The frame in which the carrying robot is inserted and the frame 2 5 2 of the loading/unloading device 250 are not raised due to the elastic force of the elastic member 256, and only the wire 2 58 is released. At the same time, the line that may be trained is completely released.

Subsequently, when the lifter 232 is driven to raise the upper chamber 214 to the height c, the line 25 8 that may be released is not released further, and the frame 252 of the loading/unloading device 250 is raised. Thereby, the string as the substrate contactor 264 fixed to the frame 252 by the string fixing unit 2 62 is raised, so that the substrate contactor 264 is raised and the base of the arm carrying the robot arm is drawn at the base of the height b. At this time, the frame 252 is raised along the guide shaft 254 and compresses the elastic member 256 disposed between the guide shaft 254 and the frame 252. When the substrate S is completely withdrawn, the arm carrying the robot arm is withdrawn and removed from the substrate assembly device, and the upper chamber 214 is lowered by the lifter 232. Due to the restoring force of the elastic member 256 disposed between the guide shaft 254 and the frame 252, the frame 252 is also lowered, and the substrate S is placed on the upper side of the lower electrostatic chuck 228, and is fixed to the frame 252. Line 258 is returned to lifter 260 and gradually wound, and upper and lower chambers 214 and 216 are sealed. Subsequently, in the substrate assembly apparatus, the upper and lower substrates S are assembled, and the assembled substrate S is taken out in the reverse order of the above procedure. Therefore, in the procedure of using the lifter 232 to raise the upper chamber 214, when the upper chamber 214 is raised to insert and withdraw the substrate S into and out of the chamber, when the upper chamber 214 is positioned higher than the upper chamber 214 At a predetermined height of the height, the loading/unloading device is arranged to be driven without a separate transmission unit, and thus a transmission unit for extracting the substrate S is not required. 17 1296489 <Example 3 >

The substrate assembly apparatus having the loading/unloading apparatus according to the preferred embodiment as shown in FIG. 10 generally includes a lower base portion 310, a base portion 312 separated from the lower base portion 310, and upper and lower chambers 314. And 316 are disposed in the upper side of the upper base 3 1 2 , and an upper cover 3 1 8 is placed on the upper side of the upper chamber 3 1 4 to seal the upper chamber 314 and the upper and lower platforms 320 and 322 are disposed in the upper and lower chambers 3 1 4 and 3 1 6 in the upper and lower regions, and are constructed to arrange the two substrates S (the thin film transistor array and the color filter substrate) to be inserted into the upper and lower chambers 3 1 4 and 3 16 Referring to the "upper and lower substrates", the upper platform 3 20 and the lower platform 322 are horizontally placed and assembled. In order to ensure the passage of the upper and lower substrates S inserted into and out of the upper and lower chambers 314 and 316, the lifter 332 for raising the upper chamber 314 passes through the lower chamber 3 16 and contacts the lower chamber 3 1 4 corner. Here, before assembling the lower substrate S, there is a platform alignment procedure for aligning the substrate S disposed on the lower stage 322 with the exact positions in the X and Y directions and the 0 axis. The alignment of the lower substrate S is performed by an alignment device (not shown) that is arranged to contact three points of the adjacent sidewalls of the lower chamber 3 16 . The upper platform 320 and the lower platform 322 are arranged opposite to the upper and lower chambers of the upper and lower chambers 3 1 4 and 3 16 of the substrate assembly apparatus, and have loading/unloading devices so that the robot arms are carried (not The upper and lower substrates S inserted into the upper and lower chambers 314 and 316 are assembled. At the same time, the lower platform 322 uses a plurality of lift pins 326 18 that are fixed to the plate.

1296489 Pull out the upper and lower substrates S. Since the lower platform 3 22 has the same structure as the conventional lower platform, its detailed description is omitted. Specifically, as shown in Figs. 11a, 11b, and 12, each of the substrate extracting devices 340 for extracting the substrate S disposed on the upper side of the upper and lower substrates S is placed on the upper cover 3 The lower side of the 18 is a space between the upper chamber 3 18 and the inner wall of the upper platform 320, and includes a movable member 342, a string tension adjuster 344, a string 346, a transmission device 348, and a wind. Box 3 50, a tube line 3 5 2, and a suction module 3 5 4 . The substrate extracting means 340 are respectively arranged in the plurality of grooves 320a, and the groove portion is recessed by the lower side by a predetermined depth. Further, the suction module 354 of the substrate extracting device 340 is raised to a predetermined height. The minimum height of the suction module 3 54 is a height, wherein the carrying robot arm enters to insert the upper substrate S, and the highest height of the suction module 345 is sucked into the upper substrate S by the suction module 354, and The lower side of the substrate S reaches the height of the underside of the electrostatic chuck 328 of the upper platform 320. The components of the substrate extracting device 340 will be described in detail below. Finally, the movable member 3 42 is formed into a plate shape, and the other portions are perforated in the thickness direction except for the edges. The string tension adjuster 344 pulls any end of the string 346 to adjust the tensile strength of the string corresponding to the size and weight of the substrate S above the lower side of the contact suction module 35. The string 3 46 requires a predetermined length and is made of a metal, a mixture of several metals, or a synthetic resin. Furthermore, the strings 346 are arranged in one column and two or three strings 346 19 per two strings.

1296489 is fixed to the lateral direction of the string tension adjuster 344. The transmission 3 4 8 series cylindrical actuator or servo motor, and its degree of rotation, is controlled by a motor controller (not shown). The transmission 3 4 8 passes through the upper side of the chamber 3 1 4 and is connected to the upper side of the upper chamber 3 14 which is fixed to the two upper or four corners of the movable member 34, such that when the transmission 348 is driven, all The movable member 342 is raised. Here, since the string stretching adjuster 344 of the substrate extracting device 340 is moved in the side where the string stretching adjuster 344 is arranged on the movable member 342, the individual strings 34 can be horizontally or arranged in an inclined state. Therefore, when the carrying robot enters the space between the string tension adjusters 3 44 or the case, the carrying robot can move in the arranged direction (see the figure). Furthermore, one of the transmissions 348 will be adjusted in height when either of the transmissions 348 or one of the transmissions 348 provided on one side is driven. Since the upper arm of the cantilever carrying the mechanical arm is lowered at the front end of the substrate S loaded on the carrying robot, the substrate S is also tilted by the amount of the upper arm of the cantilever. The substrate extracting device 3 40 is also tilted and positioned at the inclination angle of the substrate S carrying the arm of the robot arm so that the substrate S is sucked horizontally under the suction module 35 4 (see Fig. 13). The bellows 350 is disposed around the circumference of the movable shaft of the transmission device 34. 8 is exposed to the space defined by the upper cover 318 and the movable member 3 42 of the substrate assembly apparatus to protect the movable shaft of the transmission 348. The vacuum tube 3 5 2 on the inner side of the string tension adjuster 344 disposed on the string 346 communicates with an external vacuum pump (not shown), and the inside thereof is evacuated. Each of the positions of the vacuum line 3 5 2 provided with the suction module 3 5 4 is connected to the connector 3 52a by being placed on the upper side of the speed line. The suction modules 3 5 4 shown in Figs. 14a and 14b are arranged in a plurality of chords 3 4 6 ' and are in communication with the individual vacuum lines 3 5 2 in a state of their fixed positions. A suction module 3 54 is provided to draw the upper substrate S using a vacuum line 3 52 and is preferably arranged at regular intervals. At the same time, the suction module 354 is fixed to the two or three strings 3 4 6 and prevents the string 346 from vibrating when the suction module 3 54 is fixed to the single string 346. Each suction module 354 includes a fixed block 356 and a vacuum pad 360. The fixing block 3 5 6 is made of plastic or metal and is divided into an upper part and a lower part, and is fixed to the two strings 346 and contacts the strings 346. The contact surface of the fixed block 356 is formed with a semicircular groove corresponding to the diameter of the chord 346. The fixed block 356 is fixed in place on the chord 3 bucket 6. Here, there is a clamp type fixing and a bolt type fixing to fix the fixing block 356. According to the clamp type fixing 'hinge 3 5 8 is attached to both sides of the contact surface of the fixing block 3 5 6 , the fixing block 3 58 is pivoted about the hinge 3 5 8 by a predetermined angle and the back side of the contact surface Fixed for bolts. According to the bolt type fixing, the upper and lower fixing blocks 3 5 6 are fixed by bolts B. The vacuum pad 360 is positioned in a perforation formed in the lower side of the fixed block 354, and includes a conical punch formed on the underside thereof to evacuate the surface contacting the upper substrate s via the vacuum line 325. Meanwhile, when the vacuum pad 360 is seated on the fixed block 3 56, the vacuum pad 36 is extended by a predetermined height from the upper central portion of the fixed block 3 56. Vacuum pad 36〇 21 1296489: The extension is inserted into the connector 35 of the vacuum line 352. In other words, because only when the suction module 354 is separated from the connector 3 54a of the vacuum camp, the suction wedge 352 is removed, and the 3 5 4 can be repaired. The maintenance of the suction module 3 5 4 is easy. As shown in Figs. 15a and 15b, the falling member 37 of the movable member (4) moves to the chord and the mouth P, and falls. The length direction of 6 and the prevention of the string 346 ^ falling member 3 is made into a block shape, the length of the money material ▲ ί placed on the upper side of the movable 彳 342 与 with the movable 彳 ... ~ ° direction. The individual strings 346 are inserted into the fall prevention members 37, and are: lifted up to the lower side of the upper side of the guard member 370 to prevent the strings 346 from falling. In other words, since the P-side broadcast from the u-fishing Wolla member 370 can be moved to the 'simultaneous' contact with the upper end of the movable member 342, the fall-preventing member 370 moves to the square The position is lowered to prevent the chord 3 two-string 3 village from simultaneously 'when the fall prevention member 3 70 is disposed between the strings, the suction root is separated from the chord 346' to change the position of the fall prevention member 37G. ^ ^ 354 Accordingly, a program for supporting a substrate loaded on the upper and lower platforms, such as a device:nb diagram, will be used in accordance with a preferred embodiment of the present invention. The transmission 348 of the substrate extraction device 340 when the upper substrate is "skinned" in the lower edge of the upper platform 32A is placed in the rim of the upper platform 320 to be driven down to the lower end 342 of the transmission 348. When the string tension adjuster ... placed on the lower side of the movable # 342 is lowered, the vacuum pad 22 1296489 of the suction module 3 54 fixed to the majority of the string 346 is also lowered and contacts the upper surface of the substrate S, The adjuster is, for example, a plurality of chords 34 4 arranged in a pitch. The suction module 354 is used in the substrate S and the suction mold via a vacuum line 3 s ) provided at the end of the string tension adjuster 3 44 The vacuum pressure between the direct uranium and the workpiece 360 of the group 354 absorbs the substrate s. Subsequently, the suction module 3 54 disposed in the string tension adjustment number ^4 is raised while sucking the upper substrate s, 卄a sub-destruction is positioned in the recess 32 0a between the upper platform 320 and the electrostatic chuck 328. The upper side of the micro-for-profit material S contacts the lower side of the electrostatic chuck 3 2 8 , and the upper substrate s is placed The electrostatic force of the electrostatic chuck 328 is fixed. Subsequently, when the lift pin 326 provided in the lower platform 322 is lowered by the drive, and solidified When the substrate 3 is approached, the vacuum pump is driven, so that the pin 326 temporarily absorbs the lower substrate 3 and the lower arm to move outward. The lift pin: the mouth lift moves downward, and the lower substrate 8 is firmly placed on the lower platform. The electrostatic force of the M2 broken electrostatic chuck 328 is absorbed, and the substrate grouping device according to the present invention is assembled on the lower side of the upper plate, when the upper platform is ancient material 8. When the distance between the upper and lower platforms is straight, The transmission unit supports the adjustment side, the lower support member, and the upper stopper of the platform supports the upper and lower sides of the upper platform of the upper platform, and the F side, thereby preventing the vertical transmission single because a small capacity can be used - It has been planted early and simplified. The support structure has been simplified. The manufacture of the radish, warfare/unloading device and the assembled device with the substrate according to the present invention is reduced, and the substrate is fixed in the base/discharged substrate. In the material-level equipment, it is used. The position of the ring is transferred to the south to load / 乂 will be ^ / but the cutting device, the equipment is T1, the top plate lifter, lifting device. Loading / unloading Install 'to make a flat ^ more included in the upper chamber 23 1296489 drop a wire having a predetermined length in the device, the end portion of which is fixed to the frame and when the force applied thereto disappears, the wire returns to the starting position. When the upper chamber is raised to a predetermined height by the lifter, and further The rise to the wire is strained as much as possible because the loading/unloading device is raised to the substrate withdrawal position to withdraw the substrate, so that a separate transmission is not required to bring the substrate to the transfer position. The present invention has been described by way of example only, and it is to be understood by those skilled in the art The following is done to complete the material of the base material of the large-loading group. The basic set of the first set of Ming dynasty is basically based on the example of the top view of the figure. According to the face of the large section of the section 4. Put the first part of the section of the implementation of the better than the second; the first section of the face of the face of the side of the side of the 5 set of display installation, the group of materials on the base side and a set of loading 5 Unloading / / The loading of the figure is shown in the figure. The JPJ· unloading / / / / Loading and loading in the middle of the figure Figure 5 5 The first picture is Figure 6 7 No. au -T mm of the installation of the base material of the example of the implementation of the second statement, according to the figure is the cross-sectional side of the 8th state of the opening 24 1296489 Figure 9 is a side profile, showing Figure 8 A fully open state of the substrate assembly apparatus in the first embodiment; a tenth side view of a substrate assembly apparatus provided with a loading/unloading device according to a third embodiment of the present invention; the first 1 a and the 1 1 b are the first 0 side sectional view of the loading/unloading device operation;

Figure 12 is a bottom view showing the loading/unloading device of Figure 10; Figure 13 is a side view showing the substrate receiving unit of the loading/unloading device of Figure 10; 1 4 a and 1 4b is a side view showing a side view of the suction module of the substrate assembly apparatus according to the third embodiment of the present invention; and FIGS. 15a and 15b are bottom views showing the strings of the loading/unloading device provided in FIG. The anti-sagging member. [Simplified description of component symbol] 10 lower base 12 upper base 14 upper chamber 16 lower chamber 18 upper plate 20 upper platform 22 lower platform 24 alignment unit 30 support member 32 fixing member 34 vertical transmission unit 36 lower shaft 38 upper shaft 40 Shaft support 42 lower shaft support 110 lower base 112 upper base 114 upper chamber 25 116 lower chamber opening and closing member upper plate 120 upper platform lower platform 124 alignment device support member 132 fixing member vertical transmission unit 144 lower support member stop Upper part 214 lower base lower chamber 218 upper lower platform 226 upper platform electrostatic chuck 232 lifting device alignment device 250 loading/unloading device frame 254 guide shaft elastic member 258 wire lifter 262 string fixed unit base Material contactor 310 lower base upper portion 3 14 upper lower chamber 3 18 upper cover platform 322 lower platform lift pin 332 lifter extraction device 342 movable member string tension adjuster 34 6-string drive unit 350 bellows vacuum tube line 352a connector suction module 356 fixed block 26 1296489 3 60 vacuum pad 370 anti-drop member S substrate

27

Claims (1)

1296489 X. Patent Application Range: 1. A substrate assembly apparatus for assembling upper and lower substrates in a vacuum chamber, the apparatus comprising at least: a chamber including an upper chamber and a lower chamber connected to the upper chamber The upper and lower platforms are respectively disposed in the upper and lower regions of the chamber to respectively absorb the upper and lower substrates; the upper platform support members have ends, and the ends are connected to the side of the upper platform And the opposite side to support the upper chamber, wherein the upper platform support members are inserted into the side walls of the upper chamber; the lower support members are disposed in the side walls of the upper chamber to support the upper platform supports inserted into the upper chamber side walls a lower side of the opposite side of the member; a vertical drive unit coupled to the upper side of the opposite side of the upper platform support members in the side wall of the upper chamber, to move the upper platform in a vertical direction; and a loading/unloading device, It is placed in the chamber to extract the substrate inserted from the outside and discharge the assembled substrate to the outside. 2. The substrate assembly apparatus of claim 1, wherein the lower support member comprises a compression spring. 3. The substrate assembly apparatus of claim 1, further comprising a stopper disposed in the lower support member to limit the descending degree of the upper platform. 28 The substrate assembly apparatus of claim 1, wherein the vertical transmission unit comprises a linear actuator. 5. The substrate assembly apparatus of claim 1, wherein the loading/unloading device comprises: a plurality of substrate contactors disposed on the lower platform to be placed thereon to support the substrate; a plate frame disposed on a lower side of the substrate contactors and having a hole center member formed at a center of the plate frame, the plate frame having an area larger than an area of the lower platform; and a lifter disposed In each corner of the frame, to the upper chamber, and when the upper chamber is connected to the frame, there is a substrate assembly device as described in claim 5, wherein The substrate contactor comprises a string. 7. The substrate assembly apparatus of claim 6, further comprising a guide shaft vertically disposed in a corner region of the frame and being vertically erected, and being fixed to the lower platform to guide a vertical movement of the frame, It is perforated for the thread to pass through, and the frame is lowered by the outer circumference in the vertical direction. In the above, the above substrate is provided with a through-area, frame-fixed line. The above contains the lower part of the interior is raised and 29 The substrate assembly apparatus of claim 7, wherein each of the guide shafts further includes an elastic member for returning the frame to the starting position due to the elastic force. 9. The substrate assembly apparatus of claim 1, wherein the loading/unloading device comprises: a movable member formed in a rectangular shape and reciprocating in a vertical direction; a string disposed in a movable direction with a plurality of strings In the length direction, it becomes several columns; most string tension adjusters are arranged on the sides of the strings to fix the sides of the strings; the suction module is placed on the individual strings to use the vacuum pressure to absorb the base a vacuum line connected to the suction module and an external vacuum pump to supply a vacuum suction force to the suction modules; a plurality of agitating devices are coupled to the movable members to supply a transmission force to partially or All of the movable members are moved; and the bellows is disposed at a portion exposed to the outside of the transmission to maintain the vacuum state of the chamber. The substrate assembly apparatus of claim 9, wherein the suction module comprises: a fixing block disposed to contact upper and lower sides of the strings, and fixed to 30 1296489 to the strings a predetermined position and having a semicircular groove of a diameter corresponding to the diameter of the chord formed in the contact face; and a vacuum pad positioned on the underside of the fixed block to generate a vacuum pressure on the surface thereof To contact the substrate via the vacuum lines. 1 1. The substrate assembly apparatus according to claim 10, further comprising a fall prevention member disposed on a side of the movable member and moving in a length direction of the strings to prevent the strings from falling down . 31