CN206450966U - A kind of substrate prealignment device - Google Patents
A kind of substrate prealignment device Download PDFInfo
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- CN206450966U CN206450966U CN201720082743.7U CN201720082743U CN206450966U CN 206450966 U CN206450966 U CN 206450966U CN 201720082743 U CN201720082743 U CN 201720082743U CN 206450966 U CN206450966 U CN 206450966U
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- plate face
- groups
- substrate
- upper plate
- cylinder
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Abstract
The utility model discloses a kind of substrate prealignment device, including the upper plate face for bearing glass substrate, the upper surface in the upper plate face is fixed with least four groups positioning cylinders and at least two groups clamping cylinders, the L-shaped periphery for being uniformly distributed in the upper plate face of at least four groups positioning cylinders, at least two groups clamping cylinders are oppositely arranged with least four groups positioning cylinders respectively.The utility model faces side using two of at least four groups positioning cylinder positioning glass substrates, recycles at least two groups clamping cylinders to be clamped glass substrate, realizes the prealignment of glass substrate；The utility model is simple in construction, light, greatly reduces the difficulty of control system.
Description
Technical field
The utility model is related to board transport technical field, more particularly to a kind of substrate prealignment device.
Background technology
In current informationized society, display is just play more and more important role in the life of people.Current
Field of display, the CRT (cathode-ray tube) of existing 100 years history just by LCD (liquid crystal display) is being gradually the flat of representative
Panel display (FPD) is substituted, and the New flat panel display that the OLED (OLED) occurred recently is representative will
More preferable display picture is provided for people, and tremendous influence is produced to existing display industry general layout.OLED has because of it
There are luminous ultra-thin, active, high brightness, high-contrast, wide viewing angle, wide operating temperature range, low-power consumption, low cost, all solid state etc.
Advantage, it is considered to be the most strong competitors of LCD, and OLED making depends on photoetching process.In the preceding road of photoetching process
Stage, lithographic equipment has higher requirements to the repetition upper plate precision of glass substrate, thus glass substrate prealignment have it is very heavy
The effect wanted.
Glass substrate all can in the carrying action repeatability error of the position deviation being handed off in film magazine, and manipulator
Cause glass substrate it is first upper piece when there is error.If upper piece precision is unsatisfactory for the requirement of litho machine, it can not carry out next
The technique of step is realized.
Utility model content
The utility model provides a kind of substrate prealignment device, there is error to solve existing glass substrate handshaking
The problem of.
In order to solve the above technical problems, the utility model provides a kind of substrate prealignment device, including for bearing glass
The upper plate face of substrate, the upper surface in the upper plate face is fixed with least four groups positioning cylinders and at least two groups clamping cylinders,
The L-shaped periphery for being uniformly distributed in the upper plate face of at least four groups positioning cylinders, at least two groups clamping cylinders point
It is not oppositely arranged with least four groups positioning cylinders.
It is preferred that two groups of positioning cylinders of wherein at least position the first side of the glass substrate, in addition at least two groups positioning
Cylinder is positioned at described first at vertical second, and one group of clamping cylinder of wherein at least is located at parallel with first side
3rd side, in addition at least one set of clamping cylinder be located at described second at the parallel the 4th.
It is preferred that the fixing end of the clamping cylinder is connected with movable end by spring.
It is preferred that the fixing end of the positioning cylinder and clamping cylinder is both secured to the mounting hole on the upper plate face
It is interior.
It is preferred that the mounting hole be provided with it is multigroup, respectively correspond to various sizes of glass substrate.
It is preferred that being respectively provided with the positioning cylinder and clamping cylinder on each comfortable upper plate face of regulation
The micrometer of position.
It is preferred that the upper surface in the upper plate face is further fixed on multigroup ball, the summit of multigroup ball forms one
Individual supporting plane.
It is preferred that the substrate prealignment device also includes bottom plate face and lift cylinder, the bottom plate face is arranged at
The lower section in the upper plate face, the fixing end of the lift cylinder is fixed on the bottom plate face, and movable end passes through the upper bottom
Plate face drives the glass substrate lifting.
It is preferred that the top of the movable end of the lift cylinder is provided with some adsorbent equipments, to adsorb the glass base
Plate.
It is preferred that the adsorbent equipment is soft sucker.
Compared with prior art, the substrate prealignment device that the utility model is provided has the following advantages that：
1. it is more simple light in structure using the form of pneumatic control positioning cylinder and clamping cylinder respectively from structure
Just, control system difficulty is reduced；
2. glass substrate realizes handing-over using lift cylinder and soft sucker, handing-over precision is improved, it is safe and reliable；
3. with multigroup mounting hole fixed for cylinder, realize the handoff functionality of different size glass substrates；
4. the regulation of prealignment precision is using micrometer mechanism, easy to adjust, precision is high；
5. clamping cylinder utilizes spring clamp, it is to avoid hard contact causes damage to glass substrate, makes prealignment process more
It is safe and reliable.
Brief description of the drawings
Fig. 1 is used for the front view for illustrating the substrate prealignment device that the utility model is provided；
Fig. 2 is used for the top view for illustrating the substrate prealignment device that the utility model is provided；
Fig. 3 is used for the schematic diagram for illustrating the substrate prealignment device prealignment process that the utility model is provided.
In figure：1- positioning cylinders, 2- clamping cylinders, 3- lift cylinders, 4- balls, 5- glass substrates, 6- upper plates face, 7-
Bottom plate face, 8- springs, the mounting holes of 9- first, the mounting holes of 10- second, 11- micrometers, the soft suckers of 12-.
Embodiment
To enable above-mentioned purpose of the present utility model, feature and advantage more obvious understandable, below in conjunction with the accompanying drawings to this
The embodiment of utility model is described in detail.It should be noted that, the utility model accompanying drawing is using simplified form
And non-accurately ratio is used, only to convenient, lucidly aid illustration the utility model embodiment purpose.
The substrate prealignment device that the utility model is provided, as depicted in figs. 1 and 2, including for bearing glass substrate 5
Upper plate face 6, the upper surface in the upper plate face 6 is fixed with least four groups positioning cylinders 1 and at least two groups clamping cylinders 2, this
Embodiment is illustrated exemplified by using four groups of positioning cylinders 1 and two groups of clamping cylinders 2, and four groups of positioning cylinders 1 are L-shaped
The even periphery for being distributed in the upper plate face 6, two groups of clamping cylinders 2 are oppositely arranged with the positioning cylinder 1 respectively.This practicality is new
Type faces side using two of four groups of positioning glass substrates 5 of positioning cylinders 1, recycles two groups of clamping cylinders 2 to carry out glass substrate 5
Clamp, realize the prealignment of glass substrate 5；The utility model is simple in construction, light, greatly reduces the difficulty of control system
Degree.
It is preferred that asking emphasis to refer to Fig. 2, wherein two groups of positioning cylinders 1 position the first side of the glass substrate 5, in addition
Two groups of positioning cylinders 1 are positioned at described first at vertical second, and one of which clamping cylinder 2 is located at and first side
The 3rd parallel side, another group of clamping cylinder 2 is located at described second at the parallel the 4th.Specifically, the first side and the 3rd
Side is parallel with Y-axis, and second is parallel with X-axis while with the 4th, therefore, and two groups of positioning cylinders 1 and 1 group of clamping cylinder 2 are to glass base
Plate 5 carries out X-direction positioning and clamped；Other two groups of positioning cylinders 1 and clamping cylinder 2 carry out the locating clip of Y-direction to glass substrate 5
Tightly, so as to realize the prealignment of glass substrate 5 in the horizontal plane.
It is preferred that please continue to refer to Fig. 1 and Fig. 2, the fixing end of the clamping cylinder 2 is connected with movable end by spring 8.
In clamping process, spring 8 can play a part of the impact of absorbed glass substrate 5, it is to avoid clamping cylinder 2 and glass substrate 5 it
Between there is hard contact so that protective glass substrate 5 does not come to harm so that prealignment is safe and reliable.
It is preferred that please continue to refer to Fig. 1 and Fig. 2, the fixing end of the positioning cylinder 1 and clamping cylinder 2 is both secured to institute
State in the mounting hole on upper plate face 6, specifically, the mounting hole be provided with it is multigroup, in the present embodiment be the He of the first mounting hole 9
Second mounting hole 10, corresponds to various sizes of glass substrate 5, the corresponding positioning cylinder 1 of two groups of mounting holes and clamping cylinder 2 respectively
Position can realize that the positioning of 9.7 cun and 13 cun two kinds of glass substrates 5 is clamped, specifically, positioning cylinder 1 and clamping cylinder 2 are logical
Cross bolt to be installed in the mounting hole in upper plate face 6, the station position of the first mounting hole 9 in the outer part is applied to 13 cun of substrates, leans on
The station position of the second mounting hole 10 of inner side is applied to 9.7 cun of substrates.When the size of glass substrate 5 needs to change, first by gas
Cylinder assembly is pulled down, and then air cylinder device is arranged on to the station position of mounting hole for being applicable glass substrate 5.
It is preferred that asking emphasis to refer to is respectively provided with each leisure of regulation on Fig. 3, the positioning cylinder 1 and clamping cylinder 2
The micrometer 11 of position on the upper plate face 6.Specifically, the prealignment locating surface position coordinates of glass substrate 5 is to pass through
The upper plate position coordinates of complete machine glass substrate 5 is come what is determined, and the prealignment locating surface position coordinates for forming glass substrate 5 is by thousand
Point chi 11 adjustment positioning cylinder 1, positions of the Rz of clamping cylinder 2 to, X to, Y-direction are realized.Adjust pre- using micrometer 11
The specific method of alignment precision is as follows：Determine the Rz of positioning cylinder 1, clamping cylinder 2 to, X to, Y-direction and correct positioning first
Cylinder 1, clamping cylinder 2 Rz to, X to, the offset △ Rz of Y-direction, △ X, △ Y；Then, regulation micrometer 11 supplement positioning gas
Cylinder 1, clamping cylinder 2 Rz to offset △ Rz；Finally, regulation micrometer 11 supplement positioning cylinder 1, the X of clamping cylinder 2
To offset △ X, the △ Y of, Y-direction, being accurately positioned for positioning cylinder 1 and clamping cylinder 2 is completed.
It is preferred that asking emphasis to refer to Fig. 1, the upper surface in the upper plate face 6 is further fixed on multigroup ball 4, described multigroup
The summit of ball 4 forms a supporting plane, and the supporting plane is used for gentle support glass substrate 5, when glass substrate 5 is in positioning
The promotion of cylinder 1 and clamping cylinder 2 issues raw plan-position movement, rolling friction can be produced with ball 4, compared to whole bottom surface
The planar friction of contact, the bottom surface friction damage degree of glass substrate 5 can be greatly reduced using ball 4.
It is preferred that asking emphasis to refer to Fig. 1, the substrate prealignment device also includes bottom plate face 7 and lift cylinder 3, institute
The lower section that bottom plate face 7 is arranged at the upper plate face 6 is stated, the fixing end of the lift cylinder 3 is fixed on the bottom plate face
7, movable end drives the glass substrate 5 to lift through the upper plate face 6.The utility model realizes glass using lift cylinder 3
Handing-over of the glass substrate 5 between manipulator and prealignment device.
It is preferred that the top of the movable end of the lift cylinder 3 is provided with some adsorbent equipments, to adsorb the glass base
Plate 5, specifically, the adsorbent equipment are distributed using soft 12, the 3 groups of soft suckers 12 of soft sucker of 3 groups of materials in equilateral triangle
In the upper end of lift cylinder 3, held up with stabilization and adsorb glass substrate 5, while avoiding causing glass substrate 5 in handshaking
Damage.
In summary, the substrate prealignment device that the present invention is provided, including the upper plate face 6 for bearing glass substrate 5,
The upper surface in the upper plate face 6 is fixed with least four groups positioning cylinders 1 and at least two groups clamping cylinders 2, described at least four groups
The L-shaped periphery for being uniformly distributed in the upper plate face 6 of positioning cylinder 1, at least two groups clamping cylinders 2 respectively with it is described extremely
Few four groups of positioning cylinders 1 are oppositely arranged.The utility model is faced using two of at least four groups positioning glass substrates 5 of positioning cylinder 1
Side, recycles at least two groups clamping cylinders 2 to be clamped glass substrate 5, realizes the prealignment of glass substrate 5；This practicality
New structure is simple, light, greatly reduces the difficulty of control system.
Obviously, those skilled in the art can be new without departing from this practicality to the various changes of utility model progress and modification
The spirit and scope of type.So, if these modifications and variations of the present utility model belong to the utility model claim and its
Within the scope of equivalent technologies, then the utility model is also intended to including these changes and modification.
Claims (10)
1. a kind of substrate prealignment device, it is characterised in that including the upper plate face for bearing glass substrate, the upper plate
The upper surface in face is fixed with least four groups positioning cylinders and at least two groups clamping cylinders, and at least four groups positioning cylinders are L-shaped
Be uniformly distributed in the periphery in the upper plate face, at least two groups clamping cylinders respectively with least four groups positioning cylinder phases
To setting.
2. substrate prealignment device as claimed in claim 1, it is characterised in that two groups of positioning cylinder positioning of wherein at least are described
First side of glass substrate, in addition at least two groups positioning cylinders be positioned at described first at vertical second, wherein at least
One group of clamping cylinder is located at described first at the parallel the 3rd, and at least one set of clamping cylinder is located at and second side in addition
The 4th parallel side.
3. substrate prealignment device as claimed in claim 1, it is characterised in that the fixing end and movable end of the clamping cylinder
Connected by spring.
4. substrate prealignment device as claimed in claim 1, it is characterised in that the fixation of the positioning cylinder and clamping cylinder
End is both secured in the mounting hole on the upper plate face.
5. substrate prealignment device as claimed in claim 4, it is characterised in that the mounting hole be provided with it is multigroup, it is right respectively
Answer various sizes of glass substrate.
6. substrate prealignment device as claimed in claim 1, it is characterised in that on the positioning cylinder and clamping cylinder respectively
Provided with the micrometer for adjusting the position on each comfortable upper plate face.
7. substrate prealignment device as claimed in claim 1, it is characterised in that the upper surface in the upper plate face is further fixed on
Multigroup ball, the summit of multigroup ball forms a supporting plane.
8. substrate prealignment device as claimed in claim 1, it is characterised in that the substrate prealignment device also includes bottom
Plate face and lift cylinder, the bottom plate face are arranged at the lower section in the upper plate face, and the fixing end of the lift cylinder is fixed
In the bottom plate face, movable end drives the glass substrate lifting through the upper plate face.
9. substrate prealignment device as claimed in claim 8, it is characterised in that set at the top of the movable end of the lift cylinder
There are some adsorbent equipments, to adsorb the glass substrate.
10. substrate prealignment device as claimed in claim 9, it is characterised in that the adsorbent equipment is soft sucker.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720082743.7U CN206450966U (en) | 2017-01-20 | 2017-01-20 | A kind of substrate prealignment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720082743.7U CN206450966U (en) | 2017-01-20 | 2017-01-20 | A kind of substrate prealignment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206450966U true CN206450966U (en) | 2017-08-29 |
Family
ID=59667024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720082743.7U Active CN206450966U (en) | 2017-01-20 | 2017-01-20 | A kind of substrate prealignment device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206450966U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108181738A (en) * | 2017-12-26 | 2018-06-19 | 武汉华星光电技术有限公司 | A kind of polarized panel plastering device and the pre- alignment device of polarizer |
| CN109573607A (en) * | 2018-12-29 | 2019-04-05 | 昆山拓誉自动化科技有限公司 | Flat lamp assembly line light guide plate assembly station |
| CN112744589A (en) * | 2021-02-09 | 2021-05-04 | 苏州晶洲装备科技有限公司 | Glass substrate's loading attachment |
-
2017
- 2017-01-20 CN CN201720082743.7U patent/CN206450966U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108181738A (en) * | 2017-12-26 | 2018-06-19 | 武汉华星光电技术有限公司 | A kind of polarized panel plastering device and the pre- alignment device of polarizer |
| WO2019127637A1 (en) * | 2017-12-26 | 2019-07-04 | 武汉华星光电技术有限公司 | Polarizer attachment device and polarizer pre-alignment device |
| CN108181738B (en) * | 2017-12-26 | 2020-09-18 | 武汉华星光电技术有限公司 | Polarizing plate attaching device and polarizing plate pre-alignment device |
| CN109573607A (en) * | 2018-12-29 | 2019-04-05 | 昆山拓誉自动化科技有限公司 | Flat lamp assembly line light guide plate assembly station |
| CN112744589A (en) * | 2021-02-09 | 2021-05-04 | 苏州晶洲装备科技有限公司 | Glass substrate's loading attachment |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |