CN100431807C - Manipulator and method for carrying plate therewith - Google Patents
Manipulator and method for carrying plate therewith Download PDFInfo
- Publication number
- CN100431807C CN100431807C CNB200510083960XA CN200510083960A CN100431807C CN 100431807 C CN100431807 C CN 100431807C CN B200510083960X A CNB200510083960X A CN B200510083960XA CN 200510083960 A CN200510083960 A CN 200510083960A CN 100431807 C CN100431807 C CN 100431807C
- Authority
- CN
- China
- Prior art keywords
- mechanical arm
- ing rest
- travel
- sheet material
- mentioned travel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Warehouses Or Storage Devices (AREA)
Abstract
A mechanical arm is composed of a main body and multiple movable supporting frames which are linked with said main body in movable and telescopic mode. A method for using said mechanical arm to transport plate by its supporting frames is also disclosed.
Description
Technical field
The present invention relates to a kind of mechanical arm and use the method for the carrying plate of this mechanical arm, and particularly relate to a kind of method that has the mechanical arm of telescopic movable support and use the carrying plate of this mechanical arm.
Background technology
Along with the high development of multimedia technology, the transmission of image information at present transfers Digital Transmission to by simulation mostly, and in order to cooperate modern way of life, it is frivolous that the volume of video or image device also day by day is tending towards.Traditional cathode-ray tube (Cathode Ray Tube, CRT) though display has advantages such as excellent display quality and low cost, but because the structure in its internal electron chamber, make display can't meet the demand of slimming, lightweight and low consumpting power, and the user also exist when watching radiation to hinder problems such as eye.Therefore, along with the maturation of photoelectric technology and semiconductor fabrication in recent years, (Flat Panel Display) is just flourish for flat-panel screens, LCD (LiquidCrystal Display wherein, LCD), replace traditional cathode-ray tube display more gradually and become the main flow of display product in recent years based on advantage such as its low voltage operating, radiationless line scattering, in light weight and volume be little.
LCD mainly comprises display panels (liquid crystal panel) and backlight module (back light module), wherein display panels is by colored filter (Color Filter, C/F), thin-film transistor array base-plate (thin film transistor array) and the liquid crystal layer that is arranged between this two substrates constitute, and backlight module is in order to provide this display panels required area source, so that LCD reaches the effect of demonstration.Known thin-film transistor array base-plate passes through the multiple tracks masking process on making, and a plurality of thin film transistor (TFT)s that manufacturing array is arranged on glass substrate, with active member as the driving liquid crystal layer.Wherein, glass substrate is positioned over earlier in the Storage Box before entering technology, when waiting to desire to carry out manufacturing process, by mechanical arm glass substrate is taken out from Storage Box again, and it is carried to the technology board.
Please refer to Figure 1A and 1B, it is respectively a kind of front view and vertical view of known application machine arm carrying glass substrate.Have a plurality of carriers 122 in the Storage Box 120, wherein carrier 122 is provided with glass substrate 140.During carrying, mechanical arm 100 enters in the Storage Box 120, with glass substrate 140 by taking out on the carrier 122.Yet, known this kind mechanical arm 100 is because but the area of its bearing glass substrate 140 is less, therefore when carrying, the reclinate phenomenon of glass substrate 140 outer rims as shown in FIG. takes place easily, and this phenomenon when increasing, glass substrate 140 sizes will be more obvious.Thus, the mobilizable space of mechanical arm 100 in Storage Box 120 will be compressed, make that the control of mechanical arm is comparatively difficult, and when mechanical arm 100 bearing glass substrates 140 turnover Storage Boxes 120, false touch may take place with the carrier 122 of Storage Box 120 in glass substrate 140, thereby causes glass substrate 140 to be damaged.
For avoiding the excessive problem of above-mentioned glass substrate amount of bow, known technology is to propose another kind of mechanical arm with bigger loaded area.Please refer to Fig. 2 A and 2B, it is respectively the front view and the vertical view of known another kind of application machine arm carrying glass substrate.But for increasing loaded area, body 202 both sides of mechanical arm 200 are extended with a plurality of supports 204, in order to strengthen the contact area of mechanical arm 200 and glass substrate 240, the edge of the glass substrate 240 that feasible script may bend obtains enough supportings, with the amount of bow of effective minimizing glass substrate 240.Yet, known this kind is provided with the design of support 204 in body 202 both sides of mechanical arm 200, increase crooked easily problem though can improve glass substrate 240 because of size, but also because the existence of support 204, make the overall volume of mechanical arm 200 become big, and body 202 also may be subjected to the weight influence of support 204 and produce distortion.Thus, the activity space of mechanical arm 200 in Storage Box 220 will diminish relatively, and mechanical arm 200 is in the process of carrying, and support 204 also may false touches take place with Storage Box 220 and carrier thereof 222.
In like manner, in the board of technology end, be typically provided with fulcrum post (stage lift pin), with moving up and down of supporting substrates, yet when glass substrate being moved into or shift out the technology board by mechanical arm 200 shown in Figure 2, when carrying out related process, the support 204 of mechanical arm 200 just may produce collision with fulcrum post, and causes the damage of mechanical arm 200 and fulcrum post.
In sum, known mechanical arm has usually provides the bearing area of substrate little, cause the problem of base plate deformation easily, if and increase bearing area and set up support in the mechanical arm outside, again may be because volume is excessive, and make mechanical arm and Storage Box or the interior problems such as fulcrum post generation false touch of technology board.Therefore, provide a kind of new mechanical arm to become important problem to solve foregoing problems.
Summary of the invention
Purpose of the present invention just provides a kind of mechanical arm with telescopic movable support, in order to providing sheet material bigger bearing area, and reducing the distortion of sheet material, and the stability when increasing carrying.
Another object of the present invention provides a kind of mechanical arm with telescopic movable support, with increase mechanical arm in Storage Box with the technology board in activity space, and then reduce the probability of mechanical arm and Storage Box generation false touch.
Another purpose of the present invention provides a kind of method of carrying plate, it can utilize above-mentioned mechanical arm with telescopic movable support to come carrying plate, handling when increasing carrying, and can avoid mechanical arm and Storage Box, the carrier of Storage Box or the fulcrum post generation false touch in the technology board, and then improve and make qualification rate.
Based on above-mentioned purpose, the present invention proposes a kind of mechanical arm, and it is suitable for carrying plate.This mechanical arm for example is made of body and a plurality of travel(l)ing rest, and wherein travel(l)ing rest is arranged on the body movably, and can protrude from external, with carrying sheet material.
Based on above-mentioned purpose, the present invention proposes a kind of method of carrying plate, and it is suitable for taking out sheet material by mechanical arm on carrier.Wherein, mechanical arm for example comprises body and a plurality of travel(l)ing rest, and travel(l)ing rest is arranged on the body movably.At first, the mechanically moving arm is to the sheet material below, and this moment, travel(l)ing rest was recessed in the body.Then, drive travel(l)ing rest, so that travel(l)ing rest protrudes from is external.Then, move this mechanical arm,, and sheet material is separated with carrier so that body and travel(l)ing rest carry sheet material jointly.Afterwards, the mechanically moving arm is so that mechanical arm leaves carrier together with the sheet material that it carried.
Based on above-mentioned purpose, the present invention also proposes a kind of method of carrying plate, and it is suitable for by mechanical arm the sheet material that it carried being positioned on the carrier.Wherein, mechanical arm for example comprises body and a plurality of travel(l)ing rest, and travel(l)ing rest be arranged on the body movably and protrude from external, to carry sheet material jointly with this body.At first, the mechanically moving arm is to the carrier top.Then, the mechanically moving arm, so that carrier breasting sheet material, and sheet material is separated with mechanical arm.Then, drive travel(l)ing rest, so that in the travel(l)ing rest withdrawal body.Afterwards, the mechanically moving arm is so that mechanical arm leaves carrier.
Based on above-mentioned purpose, the present invention proposes a kind of method of carrying plate in addition, and it is suitable for taking out sheet material by mechanical arm on carrier.Wherein, mechanical arm for example comprises body and a plurality of travel(l)ing rest, and travel(l)ing rest be arranged on the body movably and protrude from external, with carrying sheet material.And the lower surface of body and travel(l)ing rest also is provided with a plurality of suckers.At first, the mechanically moving arm is to the sheet material top, and wherein travel(l)ing rest is recessed in the body.Then, drive travel(l)ing rest, so that travel(l)ing rest protrudes from is external.Then, move down mechanical arm, so that sucker is adsorbed in the upper surface of sheet material, this body and above-mentioned travel(l)ing rest carry this sheet material jointly.Then, the mechanical arm that moves up separates with carrier to drive sheet material.Afterwards, the mechanically moving arm is so that mechanical arm leaves carrier together with the sheet material that it carried.
Based on above-mentioned purpose, the present invention reintroduces a kind of method of carrying plate, and it is suitable for by mechanical arm the sheet material that it carried being positioned on the carrier.Wherein, mechanical arm for example comprises body and a plurality of travel(l)ing rest, and travel(l)ing rest be arranged on the body movably and protrude from external, with carrying sheet material.And the lower surface of body and travel(l)ing rest also is provided with a plurality of suckers, in order to adsorb this sheet material, so that this body and above-mentioned travel(l)ing rest carry this sheet material jointly.At first, the mechanically moving arm sheet material adsorbed with it is to the carrier top.Then, move down mechanical arm, so that sheet material is positioned on the carrier.Then, the mechanical arm that moves up is so that mechanical arm separates with sheet material.Then, drive travel(l)ing rest, so that in the travel(l)ing rest withdrawal body.Afterwards, the mechanically moving arm is so that mechanical arm leaves carrier.
In sum, at mechanical arm of the present invention and use in the method for carrying plate of this mechanical arm, travel(l)ing rest by mechanical arm, can effectively increase the sheet material bearing area, slow down sheet deformation, and the telescopic design of travel(l)ing rest can reduce the probability of the carrier generation false touch of mechanical arm and Storage Box, Storage Box when carrying plate.In addition, also can reduce the probability of the fulcrum post generation false touch in mechanical arm and the technology board.In addition, set vacuum cup also can significantly increase the stability of sheet material on body and the travel(l)ing rest when carrying plate.
For above and other objects of the present invention, feature and advantage can be become apparent, preferred embodiment cited below particularly, and conjunction with figs. are described in detail below.
Description of drawings
Figure 1A and 1B are respectively a kind of front view and vertical view of known application machine arm carrying glass substrate.
Fig. 2 A and 2B are respectively the front view and the vertical view of another kind of known application machine arm carrying glass substrate.
Fig. 3 is the vertical view of a kind of flexible mechanical arm of the first embodiment of the present invention.
Fig. 4 A～4C is followed successively by the front view of the mechanical arm of Fig. 3 from Storage Box taking-up glass substrate.
Fig. 5 A～5C is respectively the vertical view of Fig. 4 A～4C.
Fig. 6 A～6C is followed successively by the mechanical arm that sucker and travel(l)ing rest are located at the below, and it takes out the front view of glass substrate from Storage Box.
Fig. 7 is the vertical view of a kind of mechanical arm of the second embodiment of the present invention.
The vertical view of a kind of mechanical arm of Fig. 8 third embodiment of the present invention.
Fig. 9 is the vertical view of a kind of mechanical arm of the fourth embodiment of the present invention.
Figure 10 A and 10B are respectively the vertical view and the front view of a kind of mechanical arm of the fifth embodiment of the present invention.
Figure 11 A～11C is respectively the schematic diagram of dissimilar travel(l)ing rest of the present invention.
The main element description of symbols
100,200: mechanical arm
120,220: Storage Box
122,222: carrier
140,240: glass substrate
202: body
204: support
300,400,600,700,800: mechanical arm
302,402,602,702,802: body
304,404,604,704,804: travel(l)ing rest
306,406,606,706,806: sucker
320: Storage Box
322: carrier
340: glass substrate
910a, 910b, 910c: travel(l)ing rest
912a, 912b, 912c: sucker
916b: mechanical type actuated element
916c: electromagnetic component
914a, 914b, 914c: interior pipe
The specific embodiment
Hereinafter the glass substrate with display panels is that example illustrates mechanical arm of the present invention and uses the method for work that this mechanical arm is carried, certainly, according to feature of the present invention, mechanical arm of the present invention and the method for using the carrying plate of this mechanical arm are not limited to such use.
Please refer to Fig. 3, it is the vertical view of a kind of flexible mechanical arm of the first embodiment of the present invention.Mechanical arm 300 for example comprises body 302, a plurality of travel(l)ing rest 304 and a plurality of sucker 306, wherein travel(l)ing rest 304 is slidedly arranged on the body 302, and be symmetricly set in the both sides of body 302, (be shown in Fig. 4 A～4C) to stretch out in body 302 external bearing glass substrates 340 by the mode of sliding.In addition, sucker 306 is arranged on body 302 and the travel(l)ing rest 304, (is shown in Fig. 4 A～4C), (is shown in the stability of Fig. 4 A～4C) to improve glass substrate 340 in order to absorption glass substrate 340 in the process of carrying.
Please be simultaneously with reference to Fig. 4 A～4C and Fig. 5 A～5C, wherein Fig. 4 A～4C is followed successively by the front view of the mechanical arm of the invention described above from Storage Box taking-up glass substrate, and Fig. 5 A～5C is respectively the vertical view of Fig. 4 A～4C.For example have a plurality of carriers 322 in the Storage Box 320, and for example be provided with glass substrate 340 on the carrier 322, its material for example is the base material of glass or other kind.
At first, shown in Fig. 4 A and 5A, mechanical arm 300 moves to glass substrate 340 belows, and wherein mechanical arm 300 is when mobile, and travel(l)ing rest 304 (being shown in Fig. 4 B) is recessed in the body 302 (being shown in Fig. 4 B).Thus, can effectively the take in sail chance of support 304 and Storage Box 320 and carrier 322 false touches thereof.
Then, shown in Fig. 4 B and 5B, after mechanical arm 300 arrived the location of glass substrate 340 belows, the travel(l)ing rest 304 of mechanical arm 300 stretched out in outside the body 302, wherein will be in hereinafter being illustrated about the method that drives travel(l)ing rest 304.
Then, shown in Fig. 4 C and 5C, mechanical arm 300 moves up, wherein travel(l)ing rest 304 passes carrier 322, and be bearing on glass substrate 340 belows with body 302, wherein for example can utilize the mode that vacuumizes to make the sucker 306 on body 302 and the travel(l)ing rest 304 be adsorbed in glass substrate 340 surfaces, to make progress by mechanical arm 300 drive glass substrates 340 and to separate with carrier 322.Afterwards, mechanical arm 300 just can withdraw from Storage Box 320 by the opposite direction that advances into Storage Box 320 earlier, so that glass substrate 340 is taken out in Storage Box 320.
In like manner, use the carrier that mechanical arm of the present invention also can be put back to glass substrate Storage Box, its related procedure is shown in Fig. 4 C～4A and Fig. 5 C～5A, and according to the above-mentioned steps reverse operating.
At first, shown in Fig. 4 C and 5C, the travel(l)ing rest 304 of mechanical arm 300 protrudes from outside the body 302, in order to bearing glass substrate 340, and drives carrier 322 tops that glass substrate 340 arrives Storage Box 320.
Then, shown in Fig. 4 B and 5B, mechanical arm 300 moves down, glass substrate 340 is positioned over carrier 322 tops.Wherein, after removing vacuum, the suction of the 306 pairs of glass substrates 340 of sucker on removable body 302 and the travel(l)ing rest 304, and make mechanical arm 300 can leave glass substrate 340 surfaces smoothly, and the travel(l)ing rest 304 of mechanical arm 300 can pass the carrier 322 of bearing glass substrate 340, comes the below of carrier 322.
Afterwards, shown in Fig. 4 A and 5A, travel(l)ing rest 304 is activated and inwardly shrinks in body 302, just and mechanical arm 300 can leave Storage Box 320 along the opposite direction that advances into Storage Box 320 earlier.Wherein, because travel(l)ing rest 304 (being shown in Fig. 4 B) is recessed in the body 302 (being shown in Fig. 4 B), therefore when mechanical arm 300 leaves Storage Box 320, can effectively avoid travel(l)ing rest 304 and Storage Box 320 and carrier 322 thereof that false touch takes place.
Yet except the foregoing description, the present invention also can change sucker into the below that is arranged on mechanical arm, and so that different modes of operation to be provided, its related procedure will be in hereinafter explanation.
Fig. 6 A～6C is followed successively by the mechanical arm that sucker and travel(l)ing rest are located at the below, and it takes out the front view of glass substrate from Storage Box.At first, as shown in Figure 6A, mechanically moving arm 300 is to glass substrate 340 tops, and travel(l)ing rest 304 this moment (being shown in Fig. 6 B) is recessed in the body 302 (being shown in Fig. 6 B).Then, shown in Fig. 6 B, behind mechanical arm 300 location, drive travel(l)ing rest 304, so that travel(l)ing rest 304 protrudes from outside the body 302, wherein sucker 306 is arranged at the lower surface of body 302 and support 304.Then, shown in Fig. 6 C, move down mechanical arm 300, so that sucker 306 is adsorbed in the upper surface of glass substrate 340.Then, the mechanical arm 300 that moves up separates with carrier 322 to drive glass substrate 340.Afterwards, mechanical arm 300 just can withdraw from Storage Box 320 by the opposite direction that advances into Storage Box 320 earlier, so that glass substrate 340 is taken out in Storage Box 320.
Certainly, except with glass substrate 340 from Storage Box 320 is taken out of, below of the present invention has the mechanical arm 300 of sucker 306 can also be moved into glass substrate 340 in the Storage Box 320 by the external world, its related procedure is shown in Fig. 6 C～6A.
At first, shown in Fig. 6 C, mechanically moving arm 300 glass substrate 340 adsorbed with it is to carrier 322 tops.Then, move down mechanical arm 300, so that glass substrate 340 is positioned on the carrier 322.Afterwards, shown in Fig. 6 B, remove vacuum, with absorption affinity releasing with the sucker 306 on body 302 and the travel(l)ing rest 304, and the mechanical arm 300 that moves up, so that mechanical arm 300 separates with glass substrate 340.Then, as shown in Figure 6A, drive travel(l)ing rest 304, so that in the travel(l)ing rest 304 withdrawal bodies 302.Afterwards, mechanical arm 300 just can leave Storage Box 320 along the opposite direction that advances into Storage Box 320 earlier.
From the above, mechanical arm of the present invention is provided with telescopic travel(l)ing rest, wherein during Storage Box, travel(l)ing rest is recessed in the body in turnover when mechanical arm, with the activity space of increase mechanical arm in Storage Box, and then the chance of reduction travel(l)ing rest and Storage Box generation false touch.In like manner, mechanical arm of the present invention also can be reduced in the technology board and the chance of fulcrum post generation false touch, and so therefore the working method of its relevant mechanical arm no longer repeats to give unnecessary details because of similar to the above embodiments.
What deserves to be mentioned is, mechanical arm of the present invention is not limited only to as shown in Figure 3, wherein in not breaking away from spiritual scope of the present invention, the person of ordinary skill in the field also can be according to actual process requirements, and design to the shape of travel(l)ing rest, position and with the combination of body, and sucker also optionally is arranged on body or the travel(l)ing rest, to reach optimized technological effect.Hereinafter enumerate the mechanical arm of other number of different types of the present invention.
Please refer to Fig. 7, it is the vertical view of a kind of mechanical arm of the second embodiment of the present invention.Mechanical arm 400 for example comprises body 402, a plurality of travel(l)ing rest 404 and a plurality of sucker 406 that is arranged on body 402 and the travel(l)ing rest 404, wherein travel(l)ing rest 404 is slidedly arranged on the body 402, and be alternately arranged on the both sides of body 402, to stretch out in body 402 external bearing glass substrates by the mode of sliding.In addition, sucker 406 is in order to adsorbing glass substrate in the process of carrying, and then improves the stability of glass substrate.Because travel(l)ing rest 404 is crisscross arranged on body 402, therefore can make that the collapsing length of travel(l)ing rest 404 is longer, support zone is bigger, the deflection when more helping to reduce glass substrate and being subjected to mechanical arm 400 carryings.
In addition, the travel(l)ing rest of mechanical arm of the present invention also is not limited to only past folk prescription to extension, also can extend toward two different directions simultaneously, and Fig. 8 is the vertical view of a kind of mechanical arm of the third embodiment of the present invention.Mechanical arm 600 for example comprises body 602, a plurality of travel(l)ing rest 604 and a plurality of sucker 606 that is arranged on body 602 and the travel(l)ing rest 604.Wherein, an end of travel(l)ing rest 604 is slidedly arranged on the body 602, and is symmetricly set in the both sides of body 602, and travel(l)ing rest 604 can be stretched out in outside the body 602 with bearing glass substrate 340 by the mode of sliding.It should be noted that since this mechanical arm 600 travel(l)ing rest 604 all have bigger loaded area in X-axis and Y direction, thereby can further reduce glass substrate 340 issuable reclinate phenomenon when carrying.
Outside travel(l)ing rest of the present invention is arranged on the body divided by above-mentioned sliding type, also can combine with body by pivot joint or alternate manner.
Please refer to Fig. 9, it is the schematic diagram of a kind of mechanical arm of the fourth embodiment of the present invention.Mechanical arm 700 for example comprises body 702, a plurality of travel(l)ing rest 704 and a plurality of sucker 706 that is arranged on body 702 and the travel(l)ing rest 704.Wherein, an end of travel(l)ing rest 704 is hubbed on the body 702, and travel(l)ing rest 704 can and protrude from mechanical arm 700 along the rotation of the loading end of mechanical arm 700, with the bearing glass substrate.
In addition, please refer to Figure 10 A and 10B, it is respectively the vertical view and the front view of a kind of mechanical arm of the fifth embodiment of the present invention.Mechanical arm 800 for example comprises body 802, a plurality of travel(l)ing rest 804 and a plurality of sucker 806 that is arranged on body 802 and the travel(l)ing rest 804.Travel(l)ing rest 804 is hubbed at the two sides of body 802, and travel(l)ing rest 804 can upwards turn to the loading end of mechanical arm 800 by the both sides of body 802, with the bearing glass substrate.
What deserves to be mentioned is that the travel(l)ing rest of mechanical arm of the present invention can have multiple different type of drive, Figure 11 A～11C is respectively the schematic diagram of dissimilar travel(l)ing rest of the present invention.
Shown in Figure 11 A, travel(l)ing rest 910a is the pneumatic type support, wherein by pressure-air being injected travel(l)ing rest 910a, to utilize the pressure official post travel(l)ing rest 910a inside and outside it protruding by the body (not shown).In like manner, also can bleed to travel(l)ing rest 910a, when internal pressure during less than the outside, travel(l)ing rest 910a will contract toward in.Shown in Figure 11 B, the type of drive of travel(l)ing rest 910b is that mechanical type drives, and wherein utilizes the drive of mechanical type actuated element 916b, can make travel(l)ing rest 910b flexible.Shown in Figure 11 C, travel(l)ing rest 910a also for example is the electromagnetic type support, and it is flexible wherein can to drive travel(l)ing rest 910c by electromagnetic component 916c.Wherein, above-mentioned pneumatic type support has advantage in light weight, that be easy to design, and the mechanical type support has the accurate positioning characteristic, and therefore electromagnetic type is difficult for consume then because be contactless driving.In addition, if travel(l)ing rest 910a, 910b, the last setting of 910c are with sucker 912a, 912b, 912c, pipe 914a, 914b, 914c in also can in travel(l)ing rest 910a, 910b, 910c, being provided with, also bleeding and exitting and make sucker 912a, 912b, 912c work by interior pipe 914a, 914b, 914c.
It should be noted that above-mentioned for the mechanical arm of embodiment, it is external that its travel(l)ing rest all stretches out in from the body both sides, and body be shaped as cuboid.Yet travel(l)ing rest of the present invention is not limited to stretch out from the body both sides originally external, can also stretch out from other position level of body, with the bearing glass substrate.In addition, the shape of body of the present invention also is not limited to cuboid, also can be other any suitable shape, and except the glass substrate that the foregoing description is carried, mechanical arm of the present invention also can be applicable to carry wafer or slim thing sheet materials such as (as cardboard or metallic plates etc.).
In sum, mechanical arm of the present invention has following feature and advantage at least:
1. the design of the travel(l)ing rest of body and both sides can increase the bearing area of sheet material, and then reduces sheet material and be subjected to mechanical arm issuable distortion of when carrying.
2. travel(l)ing rest has telescopic design, therefore can effectively increase mechanical arm in Storage Box and the activity space in the technology board, be convenient to controlling of mechanical arm, and make the structure of Storage Box and technology board need not be subjected to the shape limitation of mechanical arm, thereby have more elasticity in design.
3. the telescopic design of travel(l)ing rest can avoid mechanical arm when carrying plate, produces false touch improperly with carrier on the Storage Box or the fulcrum post in the technology board, therefore helps to improve the technology qualification rate.
4. on body and the travel(l)ing rest sucker is set optionally,, slows down the situation that sheet material rocks to improve the stability of sheet material when carrying.
Though the present invention discloses as above with preferred embodiment; right its is not in order to limit the present invention; any person of ordinary skill in the field; without departing from the spirit and scope of the present invention; when can doing a little change and improvement, so protection scope of the present invention is as the criterion when looking the claim person of defining.
Claims (17)
1. a mechanical arm is suitable for carrying plate, it is characterized in that this mechanical arm comprises:
Body; And
A plurality of travel(l)ing rests are arranged on this body movably, and above-mentioned travel(l)ing rest is suitable for protruding from that this is external, to carry this sheet material jointly with this body.
2. mechanical arm according to claim 1 is characterized in that above-mentioned travel(l)ing rest is arranged at the relative both sides of this body symmetrically.
3. mechanical arm according to claim 1 is characterized in that above-mentioned travel(l)ing rest is alternately arranged on the relative both sides of this body.
4. mechanical arm according to claim 1 is characterized in that also comprising a plurality of suckers, and it is arranged on this body and the above-mentioned travel(l)ing rest, in order to adsorb this sheet material.
5. mechanical arm according to claim 1 is characterized in that above-mentioned travel(l)ing rest comprises a kind of in pneumatic type support, mechanical type support and the electromagnetic type support.
6. mechanical arm according to claim 1 is characterized in that an end of above-mentioned travel(l)ing rest is hubbed on this body, and above-mentioned travel(l)ing rest is after rotation, and its other end can screw out in this external.
7. mechanical arm according to claim 1 is characterized in that above-mentioned travel(l)ing rest is slidedly arranged on this body, stretches out in slip that this is external.
8. the method for a carrying plate, be suitable on carrier, taking out sheet material by mechanical arm, it is characterized in that this mechanical arm comprises body and a plurality of travel(l)ing rest, wherein above-mentioned travel(l)ing rest is arranged on this body movably, and the method for this carrying plate comprises:
Move this mechanical arm to this sheet material below, wherein above-mentioned travel(l)ing rest is recessed in this body;
Drive above-mentioned travel(l)ing rest, this is external so that above-mentioned travel(l)ing rest protrudes from;
This mechanical arm that moves up so that this body and above-mentioned travel(l)ing rest carry this sheet material jointly, and drives this sheet material and separates with this carrier; And
Move this mechanical arm, so that this mechanical arm leaves this carrier together with this sheet material that it carried.
9. the method for carrying plate according to claim 8, it is characterized in that this mechanical arm also comprises a plurality of suckers, it is arranged on this body and the above-mentioned travel(l)ing rest, and when this body and above-mentioned this sheet material of travel(l)ing rest breasting, above-mentioned sucker is adsorbed in the surface of this sheet material.
10. the method for carrying plate according to claim 8, the type of drive that it is characterized in that above-mentioned travel(l)ing rest comprise that pneumatic type drives, mechanical type drives and a kind of in driving of electromagnetic type.
11. the method for a carrying plate, be suitable for the sheet material that it carried being positioned on the carrier by mechanical arm, it is characterized in that this mechanical arm comprises body and a plurality of travel(l)ing rest, wherein above-mentioned travel(l)ing rest is arranged on this body movably, and above-mentioned travel(l)ing rest protrudes from, and this is external, to carry this sheet material jointly with this body, the method for this carrying plate comprises:
This sheet material that mobile this mechanical arm and its is carried is to this carrier top;
Move down this mechanical arm, so that this this sheet material of carrier breasting, and this sheet material is separated with this mechanical arm;
Drive above-mentioned travel(l)ing rest, so that above-mentioned travel(l)ing rest is withdrawn in this body; And
Move this mechanical arm, so that this mechanical arm leaves this carrier.
12. the method for carrying plate according to claim 11, it is characterized in that this mechanical arm also comprises a plurality of suckers, it is arranged on this body and the above-mentioned travel(l)ing rest, and when this body and above-mentioned this sheet material of travel(l)ing rest breasting, above-mentioned sucker is adsorbed in the surface of this sheet material.
13. the method for carrying plate according to claim 11, the type of drive that it is characterized in that above-mentioned travel(l)ing rest comprise that pneumatic type drives, mechanical type drives and a kind of in driving of electromagnetic type.
14. the method for a carrying plate, be suitable on carrier, taking out sheet material by mechanical arm, it is characterized in that this mechanical arm comprises body and a plurality of travel(l)ing rest, wherein above-mentioned travel(l)ing rest is arranged on this body movably, and the lower surface of this body and above-mentioned travel(l)ing rest also is provided with a plurality of suckers, and the method for this carrying plate comprises:
Move this mechanical arm to this sheet material top, wherein above-mentioned travel(l)ing rest is recessed in this body;
Drive above-mentioned travel(l)ing rest, this is external so that above-mentioned travel(l)ing rest protrudes from;
Move down this mechanical arm, so that above-mentioned sucker is adsorbed in the upper surface of this sheet material, this body and above-mentioned travel(l)ing rest carry this sheet material jointly;
This mechanical arm that moves up separates with this carrier to drive this sheet material; And
Move this mechanical arm, so that this mechanical arm leaves this carrier together with this sheet material that it carried.
15. the method for carrying plate according to claim 14, the type of drive that it is characterized in that above-mentioned travel(l)ing rest comprise that pneumatic type drives, mechanical type drives and a kind of in driving of electromagnetic type.
16. the method for a carrying plate, be suitable for the sheet material that it carried being positioned on the carrier by mechanical arm, it is characterized in that this mechanical arm comprises body and a plurality of travel(l)ing rest, wherein above-mentioned travel(l)ing rest is arranged on this body movably, this is external and above-mentioned travel(l)ing rest protrudes from, and the lower surface of this body and above-mentioned travel(l)ing rest also is provided with a plurality of suckers, in order to adsorb this sheet material, so that this body and above-mentioned travel(l)ing rest carry this sheet material jointly, the method for this carrying plate comprises:
Move this mechanical arm this sheet material adsorbed to this carrier top with it;
Move down this mechanical arm, sheet material is positioned on this carrier;
This mechanical arm that moves up is so that this mechanical arm separates with this sheet material;
Drive above-mentioned travel(l)ing rest, so that above-mentioned travel(l)ing rest is withdrawn in this body; And
Move this mechanical arm, so that this mechanical arm leaves this carrier.
17. the method for carrying plate according to claim 16, the type of drive that it is characterized in that above-mentioned travel(l)ing rest comprise that pneumatic type drives, mechanical type drives and a kind of in driving of electromagnetic type.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200510083960XA CN100431807C (en) | 2005-07-15 | 2005-07-15 | Manipulator and method for carrying plate therewith |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200510083960XA CN100431807C (en) | 2005-07-15 | 2005-07-15 | Manipulator and method for carrying plate therewith |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1895858A CN1895858A (en) | 2007-01-17 |
| CN100431807C true CN100431807C (en) | 2008-11-12 |
Family
ID=37608573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200510083960XA Expired - Fee Related CN100431807C (en) | 2005-07-15 | 2005-07-15 | Manipulator and method for carrying plate therewith |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100431807C (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102774652A (en) * | 2012-07-31 | 2012-11-14 | 深圳市华星光电技术有限公司 | Supporting arm of LCD (liquid crystal display) panel handling device |
| CN102795502B (en) * | 2012-09-06 | 2016-01-20 | 东莞市威力固电路板设备有限公司 | Substrate conveying picks and places method |
| CN104909046A (en) * | 2015-05-08 | 2015-09-16 | 合肥鑫晟光电科技有限公司 | Substrate carrying device and system |
| CN106348016A (en) * | 2016-10-14 | 2017-01-25 | 武汉华星光电技术有限公司 | Tablet pick-and-place robot |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0033835A1 (en) * | 1980-02-11 | 1981-08-19 | International Business Machines Corporation | Sheet stack aligner |
| JP2772536B2 (en) * | 1989-03-03 | 1998-07-02 | 株式会社ブリヂストン | Loading / unloading device for sheet-like members |
| US5950495A (en) * | 1997-07-16 | 1999-09-14 | Daihen Corporation | Two-armed transfer robot |
| CN1473748A (en) * | 2002-08-05 | 2004-02-11 | 尼康株式会社 | Cross mark transport method, cross mark transport device and exposure device |
| US20050079043A1 (en) * | 2003-07-11 | 2005-04-14 | Daihen Corporation | Two-arm transfer robot |
-
2005
- 2005-07-15 CN CNB200510083960XA patent/CN100431807C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0033835A1 (en) * | 1980-02-11 | 1981-08-19 | International Business Machines Corporation | Sheet stack aligner |
| JP2772536B2 (en) * | 1989-03-03 | 1998-07-02 | 株式会社ブリヂストン | Loading / unloading device for sheet-like members |
| US5950495A (en) * | 1997-07-16 | 1999-09-14 | Daihen Corporation | Two-armed transfer robot |
| CN1473748A (en) * | 2002-08-05 | 2004-02-11 | 尼康株式会社 | Cross mark transport method, cross mark transport device and exposure device |
| US20050079043A1 (en) * | 2003-07-11 | 2005-04-14 | Daihen Corporation | Two-arm transfer robot |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1895858A (en) | 2007-01-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6774978B2 (en) | Device for cutting liquid crystal display panel and method for cutting using the same | |
| CN204641013U (en) | Polarized light sheet pasting device | |
| KR101058187B1 (en) | Cassette system for substrate storage | |
| CN102050567A (en) | Turning device for turning plate body and turning method | |
| CN100431807C (en) | Manipulator and method for carrying plate therewith | |
| CN100447644C (en) | Substrate production apparatus for producing a substrate for a display device | |
| KR100973190B1 (en) | Cassette and robot for transferring glass, and cassette system having the same | |
| CN103227125B (en) | substrate turnover device | |
| JP2003295781A (en) | Bonding apparatus and driving method | |
| JP4153582B2 (en) | Substrate holding device | |
| TW201441137A (en) | Device for peeling substrate, method for peeling substrate, and method for producing electronic device | |
| JP2007162063A (en) | Sputtering apparatus and carrier for transporting substrate | |
| US20070114111A1 (en) | Cassette and mechanical arm and process apparutus | |
| KR101530036B1 (en) | Carrier glass remover | |
| KR101576546B1 (en) | Carrier glass remover | |
| WO2012147600A1 (en) | Substrate holding device | |
| US20090156082A1 (en) | Apparatus for Transferring Substrate | |
| CN214059186U (en) | TFT substrate carrying device | |
| KR200143155Y1 (en) | Align instrument for lcd | |
| KR101003580B1 (en) | Apparatus for loading substrate | |
| KR101014749B1 (en) | Cassette System for Storing the Substrate | |
| JP4474672B2 (en) | Substrate transfer device | |
| US20210187932A1 (en) | Peeling apparatus and method of manufacturing display device using the same | |
| TWI307655B (en) | Fork and method of carrying substrate with the same | |
| US9387946B2 (en) | Panel unpacking method and panel unpacking device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20081112 Termination date: 20160715 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |