CN1743245A - 基板装载箱体 - Google Patents

基板装载箱体 Download PDF

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Publication number
CN1743245A
CN1743245A CNA2005100597808A CN200510059780A CN1743245A CN 1743245 A CN1743245 A CN 1743245A CN A2005100597808 A CNA2005100597808 A CN A2005100597808A CN 200510059780 A CN200510059780 A CN 200510059780A CN 1743245 A CN1743245 A CN 1743245A
Authority
CN
China
Prior art keywords
substrate
brace table
framework
supporting pin
lower frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2005100597808A
Other languages
English (en)
Chinese (zh)
Inventor
安根洙
郑炳基
赵在勇
洪相一
朴正勋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of CN1743245A publication Critical patent/CN1743245A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H01L21/67309—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by the substrate support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Pallets (AREA)
CNA2005100597808A 2004-08-30 2005-03-31 基板装载箱体 Pending CN1743245A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020040068430 2004-08-30
KR1020040068430A KR100575160B1 (ko) 2004-08-30 2004-08-30 기판 적재용 카세트

Publications (1)

Publication Number Publication Date
CN1743245A true CN1743245A (zh) 2006-03-08

Family

ID=36109566

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2005100597808A Pending CN1743245A (zh) 2004-08-30 2005-03-31 基板装载箱体

Country Status (3)

Country Link
JP (1) JP2006062747A (ko)
KR (1) KR100575160B1 (ko)
CN (1) CN1743245A (ko)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100388074C (zh) * 2006-06-07 2008-05-14 友达光电股份有限公司 基板装载装置
CN105353541A (zh) * 2015-10-16 2016-02-24 苏州尚牙电子有限公司 支撑杆和具备支撑杆的基板装载盒
CN105353542A (zh) * 2015-10-16 2016-02-24 苏州尚牙电子有限公司 一种支撑杆和具备支撑杆的基板装载盒
CN108120388A (zh) * 2016-11-30 2018-06-05 株式会社大福 检查装置
CN109693860A (zh) * 2017-10-23 2019-04-30 合肥欣奕华智能机器有限公司 一种基板缓存装置

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008041711A1 (fr) * 2006-10-03 2008-04-10 Asahi Glass Company, Limited Boîte de transfert d'élément d'affichage
JP5731808B2 (ja) * 2010-12-06 2015-06-10 光洋サーモシステム株式会社 ワーク積載装置
KR101045288B1 (ko) * 2010-12-24 2011-07-01 음노선 유리 적재 장치
CN103403856B (zh) * 2011-02-01 2016-04-13 泰拉半导体株式会社 基板支撑用的晶舟以及使用该晶舟的支撑单元
KR101306757B1 (ko) * 2011-05-02 2013-09-10 주식회사 테라세미콘 기판 지지용 지지 유닛 및 이를 사용한 기판 처리 장치
KR101306751B1 (ko) * 2011-04-29 2013-09-10 주식회사 테라세미콘 기판 지지용 홀더 및 이를 사용한 기판 처리 장치
KR101310096B1 (ko) * 2011-04-29 2013-09-23 참엔지니어링(주) 기판용 지지 유닛 및 이를 이용한 기판 처리 장치
TWM413959U (en) * 2011-05-20 2011-10-11 Forever Group Prec Ind Co Ltd Fast Assembling protection Holder
KR101297686B1 (ko) * 2011-10-07 2013-08-21 주식회사 테라세미콘 기판 처리 장치

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3977491B2 (ja) 1997-07-16 2007-09-19 淀川ヒューテック株式会社 基板用カセット
JP2002154648A (ja) 2000-11-15 2002-05-28 Fuji Photo Film Co Ltd 基板カセット
KR100458054B1 (ko) 2004-01-26 2004-11-20 (주)애드컴텍 기판 적재용 카세트
KR100585023B1 (ko) * 2004-03-24 2006-05-30 주식회사 에이디피엔지니어링 기판 수납 장치

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100388074C (zh) * 2006-06-07 2008-05-14 友达光电股份有限公司 基板装载装置
CN105353541A (zh) * 2015-10-16 2016-02-24 苏州尚牙电子有限公司 支撑杆和具备支撑杆的基板装载盒
CN105353542A (zh) * 2015-10-16 2016-02-24 苏州尚牙电子有限公司 一种支撑杆和具备支撑杆的基板装载盒
CN108120388A (zh) * 2016-11-30 2018-06-05 株式会社大福 检查装置
CN113758436A (zh) * 2016-11-30 2021-12-07 株式会社大福 检查装置
CN108120388B (zh) * 2016-11-30 2022-01-14 株式会社大福 检查装置
CN109693860A (zh) * 2017-10-23 2019-04-30 合肥欣奕华智能机器有限公司 一种基板缓存装置
CN109693860B (zh) * 2017-10-23 2020-12-22 合肥欣奕华智能机器有限公司 一种基板缓存装置

Also Published As

Publication number Publication date
JP2006062747A (ja) 2006-03-09
KR20060019777A (ko) 2006-03-06
KR100575160B1 (ko) 2006-04-28

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WD01 Invention patent application deemed withdrawn after publication