CN1721868A - 基板检查装置以及基板检查方法 - Google Patents

基板检查装置以及基板检查方法 Download PDF

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Publication number
CN1721868A
CN1721868A CNA2005100848435A CN200510084843A CN1721868A CN 1721868 A CN1721868 A CN 1721868A CN A2005100848435 A CNA2005100848435 A CN A2005100848435A CN 200510084843 A CN200510084843 A CN 200510084843A CN 1721868 A CN1721868 A CN 1721868A
Authority
CN
China
Prior art keywords
wiring
substrate
checkpoint
voltage
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2005100848435A
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English (en)
Chinese (zh)
Inventor
山本正美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIHON LEAD ELECTRIC INDUSTRY Co Ltd
Original Assignee
NIHON LEAD ELECTRIC INDUSTRY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIHON LEAD ELECTRIC INDUSTRY Co Ltd filed Critical NIHON LEAD ELECTRIC INDUSTRY Co Ltd
Publication of CN1721868A publication Critical patent/CN1721868A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/93—Detection standards; Calibrating baseline adjustment, drift correction
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
CNA2005100848435A 2004-07-16 2005-07-18 基板检查装置以及基板检查方法 Pending CN1721868A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004209583A JP2006029997A (ja) 2004-07-16 2004-07-16 基板検査装置及び基板検査方法
JP209583/04 2004-07-16

Publications (1)

Publication Number Publication Date
CN1721868A true CN1721868A (zh) 2006-01-18

Family

ID=35896538

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2005100848435A Pending CN1721868A (zh) 2004-07-16 2005-07-18 基板检查装置以及基板检查方法

Country Status (4)

Country Link
JP (1) JP2006029997A (ko)
KR (1) KR20060053842A (ko)
CN (1) CN1721868A (ko)
TW (1) TW200617413A (ko)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101644732B (zh) * 2008-08-08 2012-05-30 东京毅力科创株式会社 探测方法以及探测用程序
CN102928770A (zh) * 2012-11-15 2013-02-13 昆山迈致治具科技有限公司 Fpc测试治具
CN103097901A (zh) * 2011-09-08 2013-05-08 日本梅克特隆株式会社 导通检测装置和导通检测方法
CN104950235A (zh) * 2014-03-27 2015-09-30 东京毅力科创株式会社 基板检查装置
CN112212782A (zh) * 2019-06-25 2021-01-12 合肥欣奕华智能机器有限公司 一种玻璃基板检测方法、装置及系统
CN113030703A (zh) * 2021-03-11 2021-06-25 上海伊诺尔信息电子有限公司 一种双界面智能卡模块开短路的测试装置
CN115280118A (zh) * 2020-02-24 2022-11-01 科磊股份有限公司 仪器化衬底设备

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101542707B (zh) * 2007-04-10 2010-10-27 松下电器产业株式会社 半导体器件的检查方法与半导体器件的检查装置
KR100868748B1 (ko) * 2007-11-26 2008-11-13 주식회사 오킨스전자 회로기판 검사장치 및 그 검사 방법
CN106324481B (zh) * 2016-08-23 2018-11-27 管仙福 一种用于集成电路的定位检测装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4970461A (en) * 1989-06-26 1990-11-13 Lepage Andrew J Method and apparatus for non-contact opens/shorts testing of electrical circuits
JPH11509321A (ja) * 1996-07-11 1999-08-17 エクスサイト エレクトロ オプティカル システムズ リミテッド 非接触検査のための、レーザ誘導の金属プラズマ
JP3804046B2 (ja) * 2001-02-19 2006-08-02 日本電産リード株式会社 回路基板の検査装置および検査方法

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101644732B (zh) * 2008-08-08 2012-05-30 东京毅力科创株式会社 探测方法以及探测用程序
CN103097901A (zh) * 2011-09-08 2013-05-08 日本梅克特隆株式会社 导通检测装置和导通检测方法
CN103097901B (zh) * 2011-09-08 2015-05-20 日本梅克特隆株式会社 导通检测装置和导通检测方法
CN102928770A (zh) * 2012-11-15 2013-02-13 昆山迈致治具科技有限公司 Fpc测试治具
CN102928770B (zh) * 2012-11-15 2015-04-22 昆山迈致治具科技有限公司 Fpc测试治具
CN104950235A (zh) * 2014-03-27 2015-09-30 东京毅力科创株式会社 基板检查装置
CN112212782A (zh) * 2019-06-25 2021-01-12 合肥欣奕华智能机器有限公司 一种玻璃基板检测方法、装置及系统
CN112212782B (zh) * 2019-06-25 2023-01-17 合肥欣奕华智能机器股份有限公司 一种玻璃基板检测方法、装置及系统
CN115280118A (zh) * 2020-02-24 2022-11-01 科磊股份有限公司 仪器化衬底设备
CN113030703A (zh) * 2021-03-11 2021-06-25 上海伊诺尔信息电子有限公司 一种双界面智能卡模块开短路的测试装置

Also Published As

Publication number Publication date
TW200617413A (en) 2006-06-01
JP2006029997A (ja) 2006-02-02
KR20060053842A (ko) 2006-05-22

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C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication