CN1337014A - 优化气体透光度的化学过滤方法 - Google Patents

优化气体透光度的化学过滤方法 Download PDF

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Publication number
CN1337014A
CN1337014A CN00802807A CN00802807A CN1337014A CN 1337014 A CN1337014 A CN 1337014A CN 00802807 A CN00802807 A CN 00802807A CN 00802807 A CN00802807 A CN 00802807A CN 1337014 A CN1337014 A CN 1337014A
Authority
CN
China
Prior art keywords
medium
gas
carbon
hydrogen compound
polarize
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN00802807A
Other languages
English (en)
Chinese (zh)
Inventor
A·J·达拉斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Donaldson Co Inc
Original Assignee
Donaldson Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Donaldson Co Inc filed Critical Donaldson Co Inc
Publication of CN1337014A publication Critical patent/CN1337014A/zh
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/909—Controlled atmosphere

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Epidemiology (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Public Health (AREA)
  • Optics & Photonics (AREA)
  • Filtering Materials (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Optical Filters (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Carbon And Carbon Compounds (AREA)
CN00802807A 1999-01-15 2000-01-05 优化气体透光度的化学过滤方法 Pending CN1337014A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/231,737 US6313953B1 (en) 1999-01-15 1999-01-15 Gas chemical filtering for optimal light transmittance; and methods
US09/231,737 1999-01-15

Publications (1)

Publication Number Publication Date
CN1337014A true CN1337014A (zh) 2002-02-20

Family

ID=22870471

Family Applications (1)

Application Number Title Priority Date Filing Date
CN00802807A Pending CN1337014A (zh) 1999-01-15 2000-01-05 优化气体透光度的化学过滤方法

Country Status (9)

Country Link
US (1) US6313953B1 (enExample)
EP (1) EP1153336B1 (enExample)
JP (1) JP2002535703A (enExample)
KR (1) KR100649386B1 (enExample)
CN (1) CN1337014A (enExample)
AT (1) ATE337573T1 (enExample)
AU (1) AU2406100A (enExample)
DE (1) DE60030254T2 (enExample)
WO (1) WO2000042475A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001006548A1 (en) 1999-07-16 2001-01-25 Nikon Corporation Exposure method and system
JP2001118783A (ja) * 1999-10-21 2001-04-27 Nikon Corp 露光方法及び装置、並びにデバイス製造方法
KR100742282B1 (ko) 2006-02-06 2007-07-24 삼성전자주식회사 케미컬 필터
WO2009058598A2 (en) * 2007-11-01 2009-05-07 Shawndra Products, Incorporated Hydrogen sulfide filter
US20090230052A1 (en) * 2008-03-11 2009-09-17 Shawndra Products, Inc. Hydrogen sulfide filter

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3413059A (en) * 1964-03-23 1968-11-26 Bell Telephone Labor Inc Gas lenses for ultrahigh frequency wave energy provided by opposing flows of gases
IT1237944B (it) * 1990-01-05 1993-06-19 Getters Spa Metodo per determinare la fine della vita utile di un purificatore di gas inerte e relativa apparecchiatura
US5166530A (en) 1991-12-20 1992-11-24 General Signal Corporation Illuminator for microlithographic integrated circuit manufacture
JP2809038B2 (ja) * 1992-03-25 1998-10-08 松下電器産業株式会社 環境制御装置および環境制御方法
JP3265666B2 (ja) * 1992-07-01 2002-03-11 株式会社ニコン 露光装置
FR2696947B1 (fr) * 1992-10-20 1994-11-25 Ceramiques Tech Soc D Module de filtration, de séparation, de purification de gaz ou de liquide, ou de transformation catalytique.
JP3152779B2 (ja) * 1993-01-08 2001-04-03 株式会社東芝 レジスト処理方法及びレジスト処理装置
US5696623A (en) 1993-08-05 1997-12-09 Fujitsu Limited UV exposure with elongated service lifetime
JP3448670B2 (ja) 1993-09-02 2003-09-22 株式会社ニコン 露光装置及び素子製造方法
BE1007851A3 (nl) 1993-12-03 1995-11-07 Asml Lithography B V Belichtingseenheid met een voorziening tegen vervuiling van optische componenten en een fotolithografisch apparaat voorzien van een dergelijke belichtingseenheid.
DE69535412D1 (de) * 1994-04-08 2007-04-12 Canon Kk Verarbeitungssystem zur Herstellung von Halbleiterbauelementen
US5456740A (en) * 1994-06-22 1995-10-10 Millipore Corporation High-efficiency metal membrane getter element and process for making
JPH08306599A (ja) * 1995-04-27 1996-11-22 Nikon Corp 空気浄化装置及び露光装置
US5902551A (en) * 1995-01-13 1999-05-11 Semi-Gas Systems, Inc. Process gas docking station with point-of-use filter for receiving removable purifier cartridges
US5810031A (en) * 1996-02-21 1998-09-22 Aeroquip Corporation Ultra high purity gas distribution component with integral valved coupling and methods for its use
JP3658852B2 (ja) * 1996-04-03 2005-06-08 株式会社ニコン 露光装置
JPH09283401A (ja) * 1996-04-09 1997-10-31 Nikon Corp 露光装置
JP3633086B2 (ja) * 1996-03-28 2005-03-30 株式会社ニコン 空調装置及びそれを備えた露光装置
JPH09275054A (ja) * 1996-04-03 1997-10-21 Nikon Corp 半導体製造装置
US5853962A (en) * 1996-10-04 1998-12-29 Eco-Snow Systems, Inc. Photoresist and redeposition removal using carbon dioxide jet spray
JPH11111593A (ja) * 1997-10-01 1999-04-23 Canon Inc 環境制御装置

Also Published As

Publication number Publication date
DE60030254D1 (de) 2006-10-05
ATE337573T1 (de) 2006-09-15
US6313953B1 (en) 2001-11-06
DE60030254T2 (de) 2007-08-30
AU2406100A (en) 2000-08-01
KR20010089824A (ko) 2001-10-08
JP2002535703A (ja) 2002-10-22
EP1153336A1 (en) 2001-11-14
KR100649386B1 (ko) 2006-11-24
EP1153336B1 (en) 2006-08-23
WO2000042475A1 (en) 2000-07-20

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C06 Publication
PB01 Publication
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication