CN1304885C - 平面板用基板的粘合装置 - Google Patents

平面板用基板的粘合装置 Download PDF

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Publication number
CN1304885C
CN1304885C CNB038011646A CN03801164A CN1304885C CN 1304885 C CN1304885 C CN 1304885C CN B038011646 A CNB038011646 A CN B038011646A CN 03801164 A CN03801164 A CN 03801164A CN 1304885 C CN1304885 C CN 1304885C
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CN
China
Prior art keywords
holding plate
substrates
price fixing
movable block
make
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB038011646A
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English (en)
Chinese (zh)
Other versions
CN1568493A (zh
Inventor
关川利夫
横田明义
石坂一朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Engineering Co Ltd
Original Assignee
Shin Etsu Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Engineering Co Ltd filed Critical Shin Etsu Engineering Co Ltd
Publication of CN1568493A publication Critical patent/CN1568493A/zh
Application granted granted Critical
Publication of CN1304885C publication Critical patent/CN1304885C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/26—Sealing together parts of vessels
    • H01J9/261—Sealing together parts of vessels the vessel being for a flat panel display
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1341—Filling or closing of cells

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Liquid Crystal (AREA)
  • Theoretical Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
CNB038011646A 2002-04-24 2003-04-18 平面板用基板的粘合装置 Expired - Fee Related CN1304885C (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2002122474 2002-04-24
JP122474/2002 2002-04-24
JP2002336740 2002-11-20
JP336740/2002 2002-11-20

Publications (2)

Publication Number Publication Date
CN1568493A CN1568493A (zh) 2005-01-19
CN1304885C true CN1304885C (zh) 2007-03-14

Family

ID=29272335

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB038011646A Expired - Fee Related CN1304885C (zh) 2002-04-24 2003-04-18 平面板用基板的粘合装置

Country Status (6)

Country Link
JP (1) JP3572307B2 (ko)
KR (1) KR100666021B1 (ko)
CN (1) CN1304885C (ko)
AU (1) AU2003227422A1 (ko)
TW (1) TWI228612B (ko)
WO (1) WO2003091970A1 (ko)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3817556B2 (ja) * 2004-01-21 2006-09-06 株式会社 日立インダストリイズ 基板組立装置
KR101358952B1 (ko) * 2006-08-08 2014-02-06 엘아이지에이디피 주식회사 평판 표시패널의 합착장치
JP4821707B2 (ja) * 2007-05-29 2011-11-24 株式会社デンソー シート材貼り合わせ装置
JP4954968B2 (ja) * 2008-12-01 2012-06-20 アドヴァンスド・ディスプレイ・プロセス・エンジニアリング・コーポレーション・リミテッド 粘着チャック及びこれを有する基板合着装置
TW201352096A (zh) * 2012-06-01 2013-12-16 Subtron Technology Co Ltd 拆板總成及其操作方法
KR101408644B1 (ko) * 2013-02-25 2014-06-18 주식회사 톱텍 합착기판의 스테이지 평탄도 보정장치
JP5422767B1 (ja) * 2013-05-09 2014-02-19 信越エンジニアリング株式会社 貼り合わせ分離方法及び分離装置
CN104808370B (zh) 2015-05-22 2017-10-31 合肥京东方光电科技有限公司 一种对盒设备、对位方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01124026A (ja) * 1987-11-09 1989-05-16 Fuji Electric Co Ltd 論理演算方法
JPH08220548A (ja) * 1995-02-14 1996-08-30 Ushio Inc 液晶パネルの貼り合わせ方法および装置
JPH0996822A (ja) * 1995-09-29 1997-04-08 Toshiba Corp 基板接合装置
JP2001005405A (ja) * 1999-06-18 2001-01-12 Hitachi Techno Eng Co Ltd 基板の組立方法およびその装置
JP2001282126A (ja) * 2000-03-30 2001-10-12 Hitachi Techno Eng Co Ltd 基板組立装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08115128A (ja) * 1993-07-15 1996-05-07 Agency Of Ind Science & Technol パラレルリンク機構
JP3169484B2 (ja) * 1993-08-20 2001-05-28 新日本製鐵株式会社 パラレルリンクマニピュレータ
JPH1124026A (ja) * 1997-06-27 1999-01-29 Sintokogio Ltd ギャップ出し装置及びギャップ出し方法
JPH11274031A (ja) * 1998-03-20 1999-10-08 Canon Inc 露光装置およびデバイス製造方法ならびに位置決め装置
JP2000009867A (ja) * 1998-06-22 2000-01-14 Olympus Optical Co Ltd ステージ移動装置
JP2000162133A (ja) * 1998-09-21 2000-06-16 Olympus Optical Co Ltd 基板検査装置および該基板検査装置に用いられるパラレルリンク機構
JP3486862B2 (ja) * 1999-06-21 2004-01-13 株式会社 日立インダストリイズ 基板の組立方法とその装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01124026A (ja) * 1987-11-09 1989-05-16 Fuji Electric Co Ltd 論理演算方法
JPH08220548A (ja) * 1995-02-14 1996-08-30 Ushio Inc 液晶パネルの貼り合わせ方法および装置
JPH0996822A (ja) * 1995-09-29 1997-04-08 Toshiba Corp 基板接合装置
JP2001005405A (ja) * 1999-06-18 2001-01-12 Hitachi Techno Eng Co Ltd 基板の組立方法およびその装置
JP2001282126A (ja) * 2000-03-30 2001-10-12 Hitachi Techno Eng Co Ltd 基板組立装置

Also Published As

Publication number Publication date
JP3572307B2 (ja) 2004-09-29
KR100666021B1 (ko) 2007-01-10
KR20040096490A (ko) 2004-11-16
TWI228612B (en) 2005-03-01
CN1568493A (zh) 2005-01-19
TW200305743A (en) 2003-11-01
WO2003091970A1 (fr) 2003-11-06
AU2003227422A1 (en) 2003-11-10
JPWO2003091970A1 (ja) 2005-09-02

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Granted publication date: 20070314

Termination date: 20150418

EXPY Termination of patent right or utility model