CN1303756A - 通过高能量通量激光束加热至少两个元件的方法和装置 - Google Patents

通过高能量通量激光束加热至少两个元件的方法和装置 Download PDF

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CN1303756A
CN1303756A CN00135265A CN00135265A CN1303756A CN 1303756 A CN1303756 A CN 1303756A CN 00135265 A CN00135265 A CN 00135265A CN 00135265 A CN00135265 A CN 00135265A CN 1303756 A CN1303756 A CN 1303756A
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laser beam
laser
mask
diode
workpiece
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CN1144646C (zh
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陈杰伟
C·莱斯特尔
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Leste Processing Tech AG
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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    • B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/14—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
    • B29C65/16—Laser beams
    • B29C65/1629—Laser beams characterised by the way of heating the interface
    • B29C65/1674—Laser beams characterised by the way of heating the interface making use of laser diodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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    • B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/14—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
    • B29C65/16—Laser beams
    • B29C65/1629—Laser beams characterised by the way of heating the interface
    • B29C65/1654—Laser beams characterised by the way of heating the interface scanning at least one of the parts to be joined
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
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    • B29C65/14—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
    • B29C65/16—Laser beams
    • B29C65/1696—Laser beams making use of masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/01—General aspects dealing with the joint area or with the area to be joined
    • B29C66/05—Particular design of joint configurations
    • B29C66/10—Particular design of joint configurations particular design of the joint cross-sections
    • B29C66/11—Joint cross-sections comprising a single joint-segment, i.e. one of the parts to be joined comprising a single joint-segment in the joint cross-section
    • B29C66/112—Single lapped joints
    • B29C66/1122—Single lap to lap joints, i.e. overlap joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
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    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/01—General aspects dealing with the joint area or with the area to be joined
    • B29C66/05—Particular design of joint configurations
    • B29C66/20—Particular design of joint configurations particular design of the joint lines, e.g. of the weld lines
    • B29C66/24—Particular design of joint configurations particular design of the joint lines, e.g. of the weld lines said joint lines being closed or non-straight
    • B29C66/242—Particular design of joint configurations particular design of the joint lines, e.g. of the weld lines said joint lines being closed or non-straight said joint lines being closed, i.e. forming closed contours
    • B29C66/2424—Particular design of joint configurations particular design of the joint lines, e.g. of the weld lines said joint lines being closed or non-straight said joint lines being closed, i.e. forming closed contours being a closed polygonal chain
    • B29C66/24243—Particular design of joint configurations particular design of the joint lines, e.g. of the weld lines said joint lines being closed or non-straight said joint lines being closed, i.e. forming closed contours being a closed polygonal chain forming a quadrilateral
    • B29C66/24244—Particular design of joint configurations particular design of the joint lines, e.g. of the weld lines said joint lines being closed or non-straight said joint lines being closed, i.e. forming closed contours being a closed polygonal chain forming a quadrilateral forming a rectangle
    • B29C66/24245—Particular design of joint configurations particular design of the joint lines, e.g. of the weld lines said joint lines being closed or non-straight said joint lines being closed, i.e. forming closed contours being a closed polygonal chain forming a quadrilateral forming a rectangle forming a square
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    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/01—General aspects dealing with the joint area or with the area to be joined
    • B29C66/05—Particular design of joint configurations
    • B29C66/20—Particular design of joint configurations particular design of the joint lines, e.g. of the weld lines
    • B29C66/24—Particular design of joint configurations particular design of the joint lines, e.g. of the weld lines said joint lines being closed or non-straight
    • B29C66/244—Particular design of joint configurations particular design of the joint lines, e.g. of the weld lines said joint lines being closed or non-straight said joint lines being non-straight, e.g. forming non-closed contours
    • B—PERFORMING OPERATIONS; TRANSPORTING
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    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/01—General aspects dealing with the joint area or with the area to be joined
    • B29C66/05—Particular design of joint configurations
    • B29C66/306—Applying a mark during joining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/40—General aspects of joining substantially flat articles, e.g. plates, sheets or web-like materials; Making flat seams in tubular or hollow articles; Joining single elements to substantially flat surfaces
    • B29C66/41—Joining substantially flat articles ; Making flat seams in tubular or hollow articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/80—General aspects of machine operations or constructions and parts thereof
    • B29C66/83—General aspects of machine operations or constructions and parts thereof characterised by the movement of the joining or pressing tools
    • B29C66/836—Moving relative to and tangentially to the parts to be joined, e.g. transversely to the displacement of the parts to be joined, e.g. using a X-Y table
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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    • B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/14—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
    • B29C65/16—Laser beams
    • B29C65/1629—Laser beams characterised by the way of heating the interface
    • B29C65/1635—Laser beams characterised by the way of heating the interface at least passing through one of the parts to be joined, i.e. laser transmission welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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    • B29C66/01—General aspects dealing with the joint area or with the area to be joined
    • B29C66/05—Particular design of joint configurations
    • B29C66/20—Particular design of joint configurations particular design of the joint lines, e.g. of the weld lines
    • B29C66/24—Particular design of joint configurations particular design of the joint lines, e.g. of the weld lines said joint lines being closed or non-straight
    • B29C66/242—Particular design of joint configurations particular design of the joint lines, e.g. of the weld lines said joint lines being closed or non-straight said joint lines being closed, i.e. forming closed contours
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
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    • B29C66/73—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset
    • B29C66/739—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of the parts to be joined being a thermoplastic or a thermoset
    • B29C66/7392—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of at least one of the parts being a thermoplastic
    • B29C66/73921—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of at least one of the parts being a thermoplastic characterised by the materials of both parts being thermoplastics
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    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
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    • B29K2995/0018—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds having particular optical properties, e.g. fluorescent or phosphorescent
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Abstract

一种通过激光束对各个工件加以连接或分离的方法和装置,将一个由激光束不可透过的材料制成的掩模设置在激光源和待连接的工件之间,激光束和掩模相对移动。为了在连接区域产生高能量通量,将至少两个二极管激光器的激光束集聚在一起,随后通过变焦光学装置产生不同的激光谱线长度。通过一光束分离器,与掩模表面垂直对齐的第一激光束与垂直于第一激光束的至少一个次级激光束连接,产生的激光束指向掩模。采用波长不同或者波长相同但偏振作用不同的激光束。

Description

通过高能量通量激光束加热至少两个元件的方法和装置
本发明涉及一种通过激光束对至少两个元件进行加热以便将这两个元件加以连接或分离的方法。
本发明具体涉及一种用以将由塑料或者塑料和其它材料制成的各个工件加以连接的激光连接方法，其中面朝着激光源的上部工件由一种能透过激光束的材料构成，第二个工件由能吸收激光束的材料构成，从而两个工件相邻接的接触面熔化并且在随后的冷却过程中在压力作用下相互连接在一起；在激光源和待连接的工件之间设置了一个掩模，以便将接触面的特定区域连接各工件，使所述掩模的结构大于所施加激光束的波长，将激光源朝向接触面如此设置，即：产生幕帘状的激光束，在接触面上产生一条谱线，并且激光束和掩模相对移动。本发明还涉及一种用于实施本方法的装置。
在未决的欧洲专利申请99101816.9中描述了这种方法。这种为显微结构的部件连接掩模的方法需要非常高速移动的激光束和待连接的部件。为了获得所需的熔化温度，还需要具有非常高的能量通量的激光放射线。然而，目前所能获得的半导体激光器的激光二极管系列只能达到最大60-80W的输出。仍然需要有其输出为kW范围且激光束可以通过一个合适的光学装置形成一条谱线的一组叠式二极管。有利的是，激光束垂直地指向接触面的连接区域，以便特别是在小结构的情况下获得尽可能准确的投射，并且排除任何所不需要的阴影效果。由于这种激光器设计成一组叠式二极管的形式，激光束以一定的角度击打在掩模上。由于所产生的不准确性，这个角度对于掩模连接方法而言是不可接受的。
为了将例如表面安装装置(SMD)的半导体部件安置或者从载体上去除，未决的欧洲专利申请99121031.1描述了一种通过激光束加热这种部件的方法，其中布线路径位于印刷电路板上或者其中。连接可以通过焊剂或者仅通过对待连接部件相应加热而不使用焊剂(所谓的显微连接)来实现。根据这种方法，不能透过激光束的掩模材料被设置在激光源和各部件之间，待连接的区域已经从所述掩模上被去除掉。然后，通过一个或几个激光束对所有的加热区域分别照射或同时照射。尤其是一个线形的激光束被选择成相对于各部件和载体移动。采用这种方法，与采用上述激光连接方法相比，各部件的加热通常进行得较慢，所需能量通量的提供也产生一个问题。
因此，本发明的目的是提议一种提供足够能量通量的方案，以便获得足够的热来对由相同或不同材料制成的至少两个元件进行连接或分离，这些材料包括金属、合金、塑料、陶瓷、以及有机或无机物质。具体而言，本发明的目的是在一个平面内邻接的各物体的邻接区域中提供高性能的区域连接，其中至少一个物体由塑料制成，连接区域被严格地定义。
根据本发明，这个目的由权利要求1或2的特征部分所述的方法实现。这个方法的其它有利的实施方案包含在从属权利要求中。此外，这个目的由权利要求6的特征部分所述的装置实现。这个装置的其它有利的实施方案包含在相关的从属权利要求中。
因此，为了在连接区域产生高能量通量，至少两个二极管激光器的激光束被集聚在一起，并且随后通过变焦光学装置产生不同的激光谱线长度。这包括例如一个可以在照射方向上移动的柱面透镜，以便改变距掩模的距离。激光束和各部件之间的相对移动可以借助例如一个可移动的偏向镜通过移动激光束或者在一个x-y平面上移动各部件来实现。
根据一个优选的实施方案，垂直于掩模表面的第一激光束与至少一个垂直于第一激光束的次级激光束连接，对于每个次级激光束的这种连接或者混合通过一个光束分离器来实现，所产生的激光束指向掩模。为此，采用了一个严格定义的光束分离器，它对于一种激光束是可高度透过的，而对于垂直地击打在该第一激光束上的相应的次级激光束是高度反射的。优选采用具有不同波长或相同波长但偏振作用不同的激光束。采用这种方法和相应的装置，目前可以获得200-300W的性能。
根据另一个优选的实施方案，通过一个透镜可以将几个激光束相互平行地聚焦在连接区域上。为此，各激光源相互邻近地设置(间隔约1mm)。如果聚焦线的聚焦长度足够长，这种密排设计还可能会限制角度问题。采用这种设置方式，目前可以获得200W的输出。
因此，这种方法和装置能够将塑料板、模塑部件、或箔片连接在一起或者与例如金属、合金、塑料、陶瓷、半导体材料、有机或无机物质等其它材料相连接，这种连接所需的时间周期短并且能提供高的质量；或者是通过提供足够的能量通量来代替不足量的单个激光器的输出、以及通过使其改变激光谱线的长度来实现将细微构造的工件精确地表面连接到所希望的区域，而不会对该结构造成损坏。这样，可以获得较高的灵活性。
下面将结合附图借助于实施例更加详细地描述本发明，其中：
图1是其中两个激光源彼此垂直设置的一种结构的示意图；
图2是图1所示结构的示意图，其中几个平行的激光源垂直于第一激光源设置；以及
图3是示出具有几个平行半导体激光器的激光源的另一种设计的示意图。
图1示出通过激光束2和掩模3仅在某个特定连接区域6将待焊接的塑料板4、5施以平面焊接的一种结构的例子。因此，这种结构还可以构造成将各部件(在载体上的SMD等)连接或分离。这种结构包括第一激光源1′，例如设置成一条直线的一个或几个激光器(二极管激光器)，由所述半导体激光器发射出的激光器发射光由一个准直透镜13′直接校准。将激光源1′设置成使得光束幕帘形式的激光束2垂直通过掩模3的孔9进入两个塑料板4、5之间的接触区7的连接区域6。在此之前，激光束2′通过光束分离器10，该光束分离器对于激光束2″而言是可高度透过的。从与第一激光源2′垂直的激光源1″发射出的一个相应的激光束2″也被一个准直透镜13″校准，其射向光束分离器10，在此，该激光束2″击打在对其具有高度反射性的表面11上，由此，与其它激光束2′集聚在一起形成激光束2。激光束2′的波长与激光束2″的波长不同。在另一个方案中，激光束2′、2″的波长相同，但是偏振作用不同。由于几个激光束平行于激光源1″设置以增加能量通量，所述激光束被设置成与光束分离器10′-10相结合使用，如图2所示。从而相应地施加波长或偏振作用的条件。
随后，激光束2击打在柱面透镜12上，该透镜12可以沿照射的方向移动，从而产生不同的激光谱线长度。用虚线示出激光谱线长度。
能量有效的激光谱线8照射到接触面7上。根据本方法的需要，将塑料板4构造成能传送激光射线，而塑料板5是吸收性的。激光束2相对于掩模3或塑料板4、5连续移动，从而在连接区域6中正好位于激光谱线8下方的塑料板4、5呈现一种熔融状态，并且在冷却后随后产生固化。
图3示出一个实施方案，它包括几个彼此平行设置的激光源14′-14，从而所产生的激光束2′-2彼此邻近地对齐，以避免任何可能的角度误差。激光源的间隔为约1mm，但是为了避免角度误差，激光源的数量被限制为平行光束2′-2的最大厚度、约5mm。通过会聚镜15′将平行光束2′-2″对准到接触面7上。
上述所需的相对移动可以通过移动塑料板4、5或激光束2来实现。这例如可以通过附加使用偏向镜来实现，其中该偏向镜可以移动到位于柱面透镜或会聚镜前面的光束路径中。

Claims (9)

1．一种通过激光束(2)选择性地加热至少两种材料(4,5)的方法，其中一个掩模(3)由不可透过放射线的材料制成，其设置在放射源(1)和材料(4,5)之间，区域(9)已经被从所述掩模(3)上去除，激光放射线通过所述区域(9)到达设置在掩模(3)下方的材料(4,5)的所选定的加热区域(6)，所有的加热区域(6)通过放射线被加热，从而使得材料(4,5)被连接或分离，在一个或几个激光束和材料(4,5)之间产生相对移动，其特征在于，为了产生高能量通量，来自至少两个二极管激光器(1′-1"")的激光束被集聚到一起至加热区域(6)，随后通过变焦光学装置(12)产生不同的激光谱线长度(8)。
2．一种将由塑料或者塑料和其它材料制造的各个工件(4,5)加以连接的方法，其中面朝着激光源(1)的上部工件(4)由一种可透过激光束(2)的材料构成，第二个工件(5)由能吸收激光束(2)的材料构成，从而两个工件(4,5)的相邻接的接触面(7)熔化并且在随后的冷却过程中在压力作用下相互连接在一起；在激光源(1)和待连接的工件(4,5)之间设置了一个由不可透过激光的材料制成的掩模(3)，以便在接触面(7)的特定连接区域(6)中连接各工件，所述掩模的结构(9)大于所施加激光束(2)的波长，将激光源(1)朝向接触面(7)如此设置，即：产生幕帘状的激光束，在接触面土产生一条谱线(8)，并且激光束(2)和掩模(3)相对移动，其特征在于，为了在连接区域(6)中产生高能量通量，至少两个二极管激光器(1′-1"")的激光束被集聚到一起，并且随后通过变焦光学装置(12)产生不同的激光谱线长度(8)。
3．权利要求1或2的方法，其特征在于，垂直于掩模(3)表面的第一激光束(2′)与至少一个垂直于第一激光束的次级激光束(2′-2)连接，对于每个次级激光束的这种连接或者混合通过一个光束分离器(10-10)来实现，所产生的激光束(2)指向连接区域(6)。
4．权利要求3的方法，其特征在于，采用不同波长或相同波长但不同偏振作用的激光束。
5．权利要求1或2的方法，其特征在于，通过一个透镜(15)将几个激光束(2′-2)相互平行地聚焦在连接区域(6)上。
6．一种通过激光束(2)选择性地加热至少两种材料(4,5)的装置，其中一个掩模(3)由不可透过放射线的材料制成，其设置在放射源(1)和材料(4,5)之间，区域(9)已经从所述掩模(3)上被去除，激光放射线通过所述区域(9)到达设置在掩模(3)下方的材料(4,5)的所选定的加热区域(6)，所有的加热区域(6)通过放射线被加热，从而使得材料(4,5)被连接或分离，在一个或几个激光束和材料(4,5)之间产生相对移动，其特征在于，具有至少两个二极管激光器(1′-1"")以在激光束集聚装置的接触面(7)上产生高能量通量，该激光束集聚装置将激光束集聚到一起，还具有一个相邻的变焦光学装置(12)以产生不同的激光谱线长度。
7．权利要求6的装置，其特征在于，具有第一二极管激光器(1′)，该二极管激光器产生垂直于掩模(3)表面的激光束(2′)，还具有至少另一个垂直于所述第一二极管激光器(1′)的二极管激光器(1″-1"")，该二极管激光器(1″-1"")产生垂直地击打在第一激光束上的一个激光束(2″-2"")，并且还具有一个作为激光束集聚装置的光束分离器(10-10)。
8．权利要求7的装置，其特征在于，所述二极管激光器(1′-1"")发射出具有不同波长或者相同波长但偏振作用不同的激光束。
9．权利要求6的装置，其特征在于，设置了几个相互平行的二极管激光器(14′-14)，在光束路径中设置了一个会聚透镜(5)作为激光束集聚装置且同时作为变焦光学装置，所述会聚透镜(15)将激光束(2-2″)聚焦在接触面(7)上。
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DE59905945D1 (de) 2003-07-17
JP2001260232A (ja) 2001-09-25

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