CN1298885C - Vacuum deposition equipment - Google Patents
Vacuum deposition equipment Download PDFInfo
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- CN1298885C CN1298885C CNB2003101174996A CN200310117499A CN1298885C CN 1298885 C CN1298885 C CN 1298885C CN B2003101174996 A CNB2003101174996 A CN B2003101174996A CN 200310117499 A CN200310117499 A CN 200310117499A CN 1298885 C CN1298885 C CN 1298885C
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- vacuum
- pump
- chamber
- coating film
- molecular drag
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Abstract
The present invention discloses a vacuum film-plating appliance which comprises a film-plating chamber, a fore vacuum pump, a high vacuum valve, a low vacuum valve, a high vacuum gauge, a low vacuum gauge and a film-plating film material source and also comprises a molecular drag pump. A gas inlet of the molecular drag pump is connected with the film-plating chamber, a gas discharge port of the molecular drag pump is connected with the fore pump, and a gas stream dust arrester is additionally arranged between a bearing of the molecular drag pump and a bleed-off passage. The vacuum film-plating appliance has the advantages of simple structure, short bleed-off time, low energy consumption and high production efficiency. The vacuum film-plating appliance can enhance the quality of vacuum film-plating products, and the vacuum film-plating appliance is particularly suitable for various vacuum film-plating application areas which are sensitive to oil steam pollution.
Description
[technical field]
The present invention relates to a kind of filming equipment, particularly a kind of vacuum coating film equipment.
[background technology]
The traditional vacuum filming equipment adopts forepump (roughing pump, for example oil seal type blade oil-sealed rotary pump, sliding valve vacuum pump), lobe pump (intermediate pump) and oil diffusion pump (high-vacuum pump) bleed, shortcoming such as have complex structure, energy consumption height, the time of bleeding is long, production efficiency is low, oil vapour pollutes big and the plated film quality product is low.
In year, the partial vacuum filming equipment adopts turbomolecular pump to make high-vacuum pump surplus in the of nearly ten, and the oil vapour of having eliminated basically in the high vacuum operational process pollutes.Yet the high workload pressure of turbo-molecular pump steam inlet is 1-10Pa (pascal), and therefore, the pressure of coating chamber must be extracted into below the 10Pa by forepump, and this pump just can be started working.That is to say that coating chamber must be through returning the highest 1-50Pa pressure range of oily rate in pumping process, therefore, the oil vapour of forepump will enter coating chamber in a large number, and substrate is caused severe contamination.
[summary of the invention]
The present invention is intended to address the above problem and a kind of low pollution, high efficiency vacuum coating film equipment is provided.
For achieving the above object, the invention provides a kind of vacuum coating film equipment, it comprises coating chamber, forevacuum pump, it is characterized in that: this filming equipment also comprises molecular drag pump, the inlet mouth of this molecular drag pump is through high vacuum valve or directly be connected with coating chamber, and its venting port is connected with another forevacuum pump through low vacuum valve.
This molecular drag pump is by driving wheel, dynamic seal, rotating shaft and pump case are formed, has a unit of bleeding that constitutes by a groove of bleeding along the circumferential direction on the driving wheel at least, bleeding has a plurality of dynamic seals in the groove, dynamic seal and bleeding between the groove inboard, and bleed cell wall and pump case, leave the working clearance between perhaps quiet the wheel, the both sides of dynamic seal are respectively equipped with inlet mouth and venting port, be provided with the dynamic seal venting port between the adjacent dynamic seal, the plural face that drags is arranged in this groove of bleeding, the bleed cross section of groove is a rectangle, and the opening of this groove of bleeding is on the side of circumference, perhaps on cross section.
This molecular drag pump is made up of driving wheel, dynamic seal, rotating shaft, stationary blade wheel, pump case, inlet mouth and venting port, driving wheel is fixed in the rotating shaft, stationary blade wheel and dynamic seal are fixed on the pump case, have the two unit of bleeding substantially that drag face of one-level in the impeller combination that this driving wheel, stationary blade wheel constitute at least, this unit of bleeding substantially comprises: the driving wheel that two flat disks of a. constitute, have at least a dish being provided with pore in two disks, and establish dynamic seal in this disk outside near rotating shaft place; B. stationary blade wheel is made up of some spiral blades and stationary installation, stationary blade wheel is installed in the middle of two driving wheels, space on the stationary blade wheel between the driving wheel of two adjacent blades and two sides constitutes one and has two grooves of bleeding that drag face, between driving wheel, stationary blade wheel, rotating shaft, the pump case radially with axially leave the working clearance, radius clearance double as gas passage; C. dynamic seal is installed in the outside of the driving wheel that is provided with pore, between dynamic seal and driving wheel and the rotating shaft at radial and axial working clearance, the radius clearance double as gas passage of leaving.
This vacuum coating film equipment also comprises the fly-ash separator with the vacuum compatibility, and it is between this coating chamber and molecular drag pump and forevacuum pump.
This vacuum coating film equipment also comprises dust arrester, and it is between the bearing and pumped gas passage of this molecular drag pump.
This dust arrester is labyrinth structure.
This vacuum coating film equipment also imports the inverted draft opposite with the dust dispersal direction at this dust arrester by the bearing side.
When enabling this molecular drag pump and bleeding, the pressure of coating chamber is lower than the high workload pressure of molecular drag pump, and is higher than 50Pa.
The present invention also provides a kind of vacuum coating film equipment, it comprises several placed in-line vacuum chambers, isolate mutually by segregaion valve between the described vacuum chamber, wherein first vacuum chamber is for entering the sheet chamber, last chamber is the slice chamber, and the intermediary vacuum chamber is coating chamber or passageway, forms the continuous coating production line, enter the sheet chamber and be connected with a forevacuum pump, other vacuum chamber is connected with molecular drag pump.
This vacuum coating film equipment also comprises the fly-ash separator with the vacuum compatibility, and it is between described coating chamber and molecular drag pump and forevacuum pump.
This vacuum coating film equipment also comprises dust arrester, and it is between the bearing and pumped gas passage of this molecular drag pump.
Compare with prior art, the present invention is owing to adopt a molecular drag pump as main scavenging pump, a table oil diffusion pump and a lobe pump have been replaced, therefore simplified the structure of vacuum coating film equipment, vacuum pumping speed in increasing substantially, bled time decreased 40%, and production efficiency has improved 20%, and the total energy consumption of bleeding reduces by 60%.
Therefore vacuum coating film equipment of the present invention has prolonged the cleaning interval of vacuum pump owing to add fly-ash separator between coating chamber and vacuum pump, has improved production efficiency.
Therefore vacuum coating film equipment of the present invention can be intercepted dust and spread to the bearing side, thereby increase substantially the molecular drag pump bearing life owing to be provided with inverted draft dust-break device at the bearing of molecular drag pump between the body passage with bleeding.
[description of drawings]
Fig. 1 is a first embodiment of the invention vacuum coating film equipment structural representation.
Fig. 2 is a fourth embodiment of the invention vacuum coating production line structural representation.
[embodiment]
See also Fig. 1; the vacuum coating film equipment of first embodiment of the invention is made up of coating chamber 1, high vacuum valve 2, molecular drag pump 3, low vacuum valve 4 and 5, high vacuum gauge 6, rough vacuum meter 7 and 8, discharge power supply 9, high-purity argon gas 10, shielding gas (industrial nitrogen, or dry air) 11, forevacuum pump 12 and 13, substrate 14, magnetic controlling target 15, well heater 16 and heater power source 17.
Vacuum coating film equipment of the present invention adopts the high pumping rate molecular drag pump, the for example described molecular drag pump of Chinese patent ZL92101300.0 and ZL87101116.6 and other molecular drag pump (abbreviation molecular drag pump) of growing up thus, the oil diffusion pump and the lobe pump that replace existing vacuum coating film equipment, thus its can simplify vacuum coating film equipment structure, shorten the time of bleeding, enhance productivity and save air exhaust energy consumption.
A kind of molecular drag pump that vacuum coating film equipment of the present invention uses, it is by driving wheel, rotating shaft and pump case are formed, has a unit of bleeding that constitutes by a groove of bleeding along the circumferential direction on the driving wheel at least, bleeding has dynamic seal in the groove, dynamic seal and bleeding between the groove inboard, and bleed cell wall and pump case, leave the working clearance between perhaps quiet the wheel, the both sides of dynamic seal are respectively equipped with inlet mouth and venting port, be provided with the dynamic seal venting port between the adjacent dynamic seal, the plural face that drags is arranged in this groove of bleeding, the cross section of the groove of bleeding can be a rectangle, the opening of this groove of bleeding can be on the side of circumference, perhaps on cross section.Concrete structure can be with reference to the described molecular drag pump of Chinese patent ZL92101300.0.
Vacuum coating film equipment of the present invention also can use another kind of molecular drag pump, it is made up of driving wheel, dynamic seal, rotating shaft, stationary blade wheel, pump case, inlet mouth and venting port etc., driving wheel is fixed in the rotating shaft, stationary blade wheel and dynamic seal are fixed on the pump case, have the two unit of bleeding substantially that drag face of one-level in the impeller combination that this driving wheel, stationary blade wheel constitute at least, this unit of bleeding substantially comprises: the driving wheel that two flat disks of a. constitute, have at least a dish being provided with pore in two disks, and establish dynamic seal in this disk outside near rotating shaft place; B. stationary blade wheel is made up of some spiral blades and stationary installation, stationary blade wheel is installed in the middle of two driving wheels, space on the stationary blade wheel between the driving wheel of two adjacent blades and two sides constitutes one and has two grooves of bleeding that drag face, between driving wheel, stationary blade wheel, rotating shaft, the pump case radially with axially leave the working clearance, radius clearance double as gas passage; C. dynamic seal is installed in the outside of the driving wheel that is provided with pore, between dynamic seal and driving wheel and the rotating shaft at radial and axial working clearance, the radius clearance double as gas passage of leaving.Concrete structure can be with reference to the described molecular drag pump of Chinese patent ZL87101116.6.
Present embodiment adopts molecular drag pump 3 to replace the oil diffusion pump and the lobe pump of existing vacuum coating film equipment, and its coating process is summarized as follows:
A. open coating chamber 1, substrate 14 is put into coating chamber 1;
B. close coating chamber 1 and high vacuum valve 2, open low vacuum valve 4, start forevacuum pump 12, coating chamber 1 is bled;
C. open low vacuum valve 5, start forevacuum pump 13 and molecular drag pump 3, allow molecular drag pump 3 be ready;
D. coating chamber 1 pressure drop to molecular drag pump 3 (be generally 100-300Pa) below the high workload pressure, and when being higher than 50Pa, close low vacuum valve 4 and forevacuum pump 12, open high vacuum valve 2, coating chamber 1 switches to molecular drag pump 3 and bleeds.When switching molecular drag pump 3, the best pressure of working chamber 1 is 100-200Pa;
E. the pressure of coating chamber 1 reaches the substrate degasification and requires (to be generally 10
-2Pa) time, inject high-purity argon gas 10, the degasification of discharging of 17 pairs of substrates of power turn-on 9 and heating power supply 14 and other parts.Degasification is closed discharge power supply 9, heating power supply 17 and high-purity argon gas 10 after finishing;
F. the pressure of coating chamber 1 reaches plated film and requires (to be generally 10
-3Pa) time, inject high-purity argon gas 10, the discharge power supply 9 that closes to magnetic controlling target 15 sputter of discharging, begins substrate 14 plated films;
G. after thickness reaches requirement on the substrate 14, close discharge power supply 9, high-purity argon gas 10, high vacuum valve 2, molecular drag pump 3, low vacuum valve 5 and forepump 13 successively;
H. inject shielding gas 11, open coating chamber 1, take out the substrate of finishing plated film, finish the plated film cycle.
According to above-mentioned process operations, the oil vapour of substrate and coating chamber pollutes will reduce limit significantly.The invention has the beneficial effects as follows,, replaced a table oil diffusion pump and a lobe pump, simplified the structure of vacuum coating film equipment, increased substantially pumping efficiency, and eliminated the oil vapour pollution of coating chamber owing to adopt a molecular drag pump as main scavenging pump.The present invention is used for evaporation multilayer cold light reflectance coating, has obtained the time decreased 30% of bleeding, and production efficiency improves 15%, and air exhaust energy consumption reduces by 60%, and the ratio of first-grade products is brought up to 85% marvelous results from 40%.
The vacuum coating film equipment of second embodiment of the invention and first embodiment are similar, the difference of itself and first embodiment is to add fly-ash separator between coating chamber 1 and high vacuum valve 2 and the low vacuum valve 4, it is big that this fly-ash separator conductance is wanted, and will with vacuum compatibility, for example electrostatic precipitator.Present embodiment is applicable to the vacuum plating occasion that dust is more, to prolong the cleaning interval of molecular drag pump 3, forevacuum pump 12 and 13, enhances productivity.
The vacuum coating film equipment of third embodiment of the invention and first embodiment are similar, the difference of itself and first embodiment is to be provided with the labyrinth type dust arrester between the bearing of molecular drag pump 3 and the pumped gas passage, and import a certain amount of airflow passes labyrinth type dust arrester in the bearing side, form the inverted draft opposite with the dust dispersal direction, thereby intercepting dust spreads to the bearing side, improve bearing life, this air-flow is finally taken away by forepump 5.The inverted draft flow should be tried one's best greatly, is no more than License Value with the venting port pressure of molecular drag pump 3 and exceeds.
The vacuum coating film equipment of fourth embodiment of the invention and first embodiment are similar, as shown in Figure 2, its difference is to be provided with in the present embodiment coating chamber 1 similar, mutual placed in-line vacuum chamber 1.1,1.2,1.3...... and 1.n among some and first embodiment, isolates with segregaion valve 18.1,18.2,18.3...... and 18.n-1 between these vacuum chambers.Its first vacuum chamber 1.1 is for entering the sheet chamber, and the coating chamber that advances among the sheet chamber and first embodiment is similar, and its difference is that the common plate electrode of magnetic controlling target 15 usefulness substitutes.Its last vacuum chamber 1.n is the slice chamber, does not adorn magnetic controlling target 15, well heater 16, discharge power supply 9 and heater power source 17 in the slice chamber.Its intermediary vacuum chamber 1.2,1.3 ... Deng being coating chamber or passageway, identical as vacuum chamber and the coating chamber 1 among first embodiment that coating chamber uses, vacuum chamber and the coating chamber 1 among first embodiment as the passageway are similar, and its difference is not establish magnetic controlling target 15 and discharge power supply 9.
In the present embodiment, the main scavenging pump of all vacuum chambers all adopts molecular drag pump 3 to replace the oil diffusion pump and the lobe pump (coating chamber also can adopt turbomolecular pump) of existing vacuum coating film equipment.Its coating process is summarized as follows:
A. close into film gate 19, go out film gate 20 and high vacuum valve 2, open segregaion valve 18.1-18.n-1 and low vacuum valve 4, start forepump 12, placed in-line vacuum chamber is bled;
B. open low vacuum valve 5, start forepump 13 and molecular drag pump 3, allow molecular drag pump 3 be ready;
C. the pressure drop of vacuum chamber is to below the highest inlet operating pressure of molecular drag pump 3 (being generally 100-300Pa), and when being higher than 50Pa, closes low vacuum valve 4 and forevacuum pump 12, opens high vacuum valve 2, vacuum chamber switched to molecular drag pump 3 bleed;
D. the pressure of vacuum chamber reaches degasification and requires (to be generally 10
-2Pa) time, inject high-purity argon gas 10, close discharge power supply 9 and heating power supply 17, the degasification of discharging.Degasification is closed discharge power supply 9, heating power supply 17 and high-purity argon gas 10 after finishing;
E. the pressure of vacuum chamber reaches plated film and requires (to be generally 10
-3Pa) time, close all segregaion valve 18.1-18.n-1, finish the forvacuum operation of present embodiment;
F. close the into high vacuum valve 2 of sheet chamber 1.1, inject shielding gas 11, open into film gate 19 then, first substrate 14 to be plated is sent into into sheet chamber 1.1, close into film gate 19;
G. open the into low vacuum valve 4 of sheet chamber 1.1, start its forepump 12, bleed entering sheet chamber 1.1;
H. the pressure drop of entering sheet chamber 1.1 and when being higher than 50Pa, is closed its low vacuum valve 4 and forevacuum pump 12 to the highest inlet operating pressure of molecular drag pump 3, open its high vacuum valve 2, will enter sheet chamber 1.1 and switch to its molecular drag pump 3 and bleed;
When the pressure that i. enters sheet chamber 1.1 reaches degasification and requires, inject its high-purity argon gas 10, its discharge power supply 9 that closes is to the degasification of discharging of substrate 14 and other parts.Degasification is closed its discharge power supply 9 and high-purity argon gas 10 after finishing;
When the pressure that j. enters sheet chamber 1.1 reaches plated film and requires, close its high vacuum valve 2, open segregaion valve 18.1, substrate 14 is sent into the first filming chamber 1.2, then, close segregaion valve 18.1, finish the pre-treatment before the substrate coating;
K. in the first filming chamber 1.2, substrate 14 is carried out sputter coating by the step of first embodiment;
L. after the rete on the substrate 14 reaches requirement, open segregaion valve 18.2, it is sent into second coating chamber 1.3, close segregaion valve 18.2 then, carry out second filming process;
M. when substrate 14 successively at second, third ..., in last coating chamber 1.n-1, finish corresponding filming process after, open segregaion valve 18.n-1, the substrate 14 of finishing plated film is sent into slice chamber 1.n, then, close segregaion valve 18.n-1;
N. close the high vacuum valve 2 of slice chamber 1.n, inject working gas 11, then, open out film gate 20, the substrate 14 that has plated is sent vacuum coating film equipment, close out film gate 20;
O. among the 1.n of slice chamber, open its low vacuum valve 4, open its forevacuum pump 12,1.n bleeds to the slice chamber;
P. when slice chamber 1.n pressure drop is following to the highest inlet operating pressure of molecular drag pump 3, close its low vacuum valve 4 and forevacuum pump 12, open its high vacuum valve 2, slice chamber 1.n is switched to its molecular drag pump 3 bleed;
Q. behind the completing steps j, entering the sheet chamber is repeating step g-j, begins the next batch substrate is carried out the pre-treatment of substrate coating, thereby, realize continuous coating production.
Present embodiment not only can be walked around the pressure zone of returning oily rate maximum, the oil vapour of substrate and coating chamber is polluted drop to bottom line, increases substantially the quality of plated film product, can also save the transition chamber in traditional coating film production line, improves usage ratio of equipment.
Substantially the structure of bleeding of vacuum coating film equipment of the present invention can also be used for plasma discharge devices or single crystal growing furnace or nano material preparation equipment.
Claims (11)
1. vacuum coating film equipment, it comprises coating chamber, forevacuum pump, it is characterized in that: this filming equipment also comprises molecular drag pump, and the inlet mouth of this molecular drag pump is through high vacuum valve or directly be connected with coating chamber, and its venting port is connected with another forevacuum pump through low vacuum valve.
2. vacuum coating film equipment according to claim 1, it is characterized in that: this molecular drag pump is by driving wheel, dynamic seal, rotating shaft and pump case are formed, has a unit of bleeding that constitutes by a groove of bleeding along the circumferential direction on the driving wheel at least, bleeding has a plurality of dynamic seals in the groove, dynamic seal and bleeding between the groove inboard, and bleed cell wall and pump case, leave the working clearance between perhaps quiet the wheel, the both sides of dynamic seal are respectively equipped with inlet mouth and venting port, be provided with the dynamic seal venting port between the adjacent dynamic seal, the plural face that drags is arranged in this groove of bleeding, the cross section of the groove of bleeding is a rectangle, the opening of this groove of bleeding is on the side of circumference, perhaps on cross section.
3. vacuum coating film equipment according to claim 1, it is characterized in that: this molecular drag pump is made up of driving wheel, dynamic seal, rotating shaft, stationary blade wheel, pump case, inlet mouth and venting port, driving wheel is fixed in the rotating shaft, stationary blade wheel and dynamic seal are fixed on the pump case, have the two unit of bleeding substantially that drag face of one-level in the impeller combination that this driving wheel, stationary blade wheel constitute at least, this unit of bleeding substantially comprises: the driving wheel that two flat disks of a. constitute, have at least a dish being provided with pore in two disks, and establish dynamic seal in this disk outside near rotating shaft place; B. stationary blade wheel is made up of some spiral blades and stationary installation, stationary blade wheel is installed in the middle of two driving wheels, space on the stationary blade wheel between the driving wheel of two adjacent blades and two sides constitutes one and has two grooves of bleeding that drag face, between driving wheel, stationary blade wheel, rotating shaft, the pump case radially with axially leave the working clearance, radius clearance double as gas passage; C. dynamic seal is installed in the outside of the driving wheel that is provided with pore, between dynamic seal and driving wheel and the rotating shaft at radial and axial working clearance, the radius clearance double as gas passage of leaving.
4. according to claim 1 or 2 or 3 described vacuum coating film equipments, it is characterized in that: this vacuum coating film equipment also comprises the fly-ash separator with the vacuum compatibility, and it is between this coating chamber and molecular drag pump and forevacuum pump.
5. according to claim 1 or 2 or 3 described vacuum coating film equipments, it is characterized in that: this vacuum coating film equipment also comprises dust arrester, and it is between the bearing and pumped gas passage of this molecular drag pump.
6. vacuum coating film equipment according to claim 5 is characterized in that: this dust arrester is labyrinth structure.
7. vacuum coating film equipment according to claim 6 is characterized in that: this vacuum coating film equipment also imports the inverted draft opposite with the dust dispersal direction at this dust arrester by the bearing side.
8. according to claim 1 or 2 or 3 described vacuum coating film equipments, it is characterized in that: when enabling this molecular drag pump and bleeding, the pressure of coating chamber is lower than the high workload pressure of molecular drag pump, and is higher than 50Pa.
9. vacuum coating film equipment, it comprises several placed in-line vacuum chambers, isolate mutually by segregaion valve between the described vacuum chamber, it is characterized in that: wherein first vacuum chamber is for entering the sheet chamber, last chamber is the slice chamber, and the intermediary vacuum chamber is coating chamber or passageway, forms the continuous coating production line, enter the sheet chamber and be connected with a forevacuum pump, other vacuum chamber is connected with molecular drag pump.
10. vacuum coating film equipment according to claim 9 is characterized in that: this vacuum coating film equipment also comprises the fly-ash separator with the vacuum compatibility, and it is between described coating chamber and molecular drag pump and forevacuum pump.
11. vacuum coating film equipment according to claim 9 is characterized in that: this vacuum coating film equipment also comprises dust arrester, and it is between the bearing and pumped gas passage of this molecular drag pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2003101174996A CN1298885C (en) | 2003-12-19 | 2003-12-19 | Vacuum deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2003101174996A CN1298885C (en) | 2003-12-19 | 2003-12-19 | Vacuum deposition equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1594650A CN1594650A (en) | 2005-03-16 |
| CN1298885C true CN1298885C (en) | 2007-02-07 |
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ID=34661408
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2003101174996A Expired - Fee Related CN1298885C (en) | 2003-12-19 | 2003-12-19 | Vacuum deposition equipment |
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| CN (1) | CN1298885C (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101560645B (en) * | 2009-05-08 | 2011-01-19 | 深圳大学 | Large vacuum coating equipment |
| CN101962753B (en) * | 2009-07-21 | 2013-04-24 | 鸿富锦精密工业（深圳）有限公司 | Film coating device |
| TWI426557B (en) * | 2009-08-18 | 2014-02-11 | Hon Hai Prec Ind Co Ltd | Coating device |
| CN101928923B (en) * | 2010-05-11 | 2012-06-27 | 赫得纳米科技(昆山)有限公司 | Vacuum sputtering coating equipment with vacuum pump protecting structure |
| CN102912311B (en) * | 2012-10-08 | 2015-03-18 | 上海华力微电子有限公司 | Vacuum system applied in production of metal hardmask titanium nitride process sputtering chamber |
| CN103147060B (en) * | 2013-03-29 | 2015-04-22 | 上海理工大学 | Vacuum coating system and coating method thereof |
| CN105032500B (en) * | 2015-07-28 | 2017-05-03 | 河海大学 | Pressure-infiltration coating device and method applicable to porous ceramic matrix photocatalytic filler block |
| CN112430805B (en) * | 2020-11-23 | 2022-12-30 | 中国科学院光电技术研究所 | Vacuum control system of atomic layer deposition coating machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1075779A (en) * | 1992-02-28 | 1993-09-01 | 储继国 | Combined driving molecular pump |
| JPH0633231A (en) * | 1992-07-20 | 1994-02-08 | Hitachi Sci Syst:Kk | Ion sputtering device |
| CN2399401Y (en) * | 1999-12-22 | 2000-10-04 | 中国科学院沈阳科学仪器研制中心 | Continuous film coating appts. for plane display |
| CN2422291Y (en) * | 2000-06-07 | 2001-03-07 | 中国科学院沈阳科学仪器研制中心 | Vacuum coating film device |
| CN2502048Y (en) * | 2001-09-20 | 2002-07-24 | 储琦 | Drive molecular pump |
-
2003
- 2003-12-19 CN CNB2003101174996A patent/CN1298885C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1075779A (en) * | 1992-02-28 | 1993-09-01 | 储继国 | Combined driving molecular pump |
| JPH0633231A (en) * | 1992-07-20 | 1994-02-08 | Hitachi Sci Syst:Kk | Ion sputtering device |
| CN2399401Y (en) * | 1999-12-22 | 2000-10-04 | 中国科学院沈阳科学仪器研制中心 | Continuous film coating appts. for plane display |
| CN2422291Y (en) * | 2000-06-07 | 2001-03-07 | 中国科学院沈阳科学仪器研制中心 | Vacuum coating film device |
| CN2502048Y (en) * | 2001-09-20 | 2002-07-24 | 储琦 | Drive molecular pump |
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| CN1594650A (en) | 2005-03-16 |
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Granted publication date: 20070207 Termination date: 20131219 |