CN1595036A - Vacuum smelting furnace - Google Patents
Vacuum smelting furnace Download PDFInfo
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- CN1595036A CN1595036A CN 200310112360 CN200310112360A CN1595036A CN 1595036 A CN1595036 A CN 1595036A CN 200310112360 CN200310112360 CN 200310112360 CN 200310112360 A CN200310112360 A CN 200310112360A CN 1595036 A CN1595036 A CN 1595036A
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- vacuum
- melting furnace
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Abstract
Disclosed is a vacuum smelting furnace, comprising smelting chamber, bush, cavity, middle vacuum gauge, low vacuum gauge, high vacuum valve, vacuum pump, low vacuum valve, protective gas source and heat electric power source, and molecular drag pump whose are inlet is connected to the high vacuum valve, the low vacuum gauge and low vacuum valve are separately connected to air exhausting mouth of the molecular drag pump, besides, dust arrester, partial pressure monitoring meter and auxiliary evaporation source with active getter material are added between of the and air extracting channel. The vacuum smelting furnace is suitable for smelting of oxidable metal material and alloy, especially for permanent magnet alloy of rubidium-iron- boron. The invention has simple structure can reduce air extracting time and save energy, increase production efficiency and production quality.
Description
[technical field]
The present invention relates to a kind of special metallurgy and material preparation, relate in particular to a kind of vacuum melting furnace.
[background technology]
The traditional vacuum smelting furnace is made up of working chamber, crucible, die cavity, middle vacuum meter, low vacuum meter, high vacuum valve, lobe pump, oil diffusion pump, forepump, low vacuum valve, protective gas source, heating power supply etc., and wherein lobe pump and oil diffusion pump are main scavenging pump.The vacuum melting furnace of this type exists complex structure, pumping efficiency is low and energy consumption is high shortcoming.
[summary of the invention]
Have complex structure, pumping efficiency is low and energy consumption is high shortcoming in order to overcome existing vacuum melting furnace, the invention provides a kind of simple in structure, reduce the time of bleeding and save the vacuum melting furnace of air exhaust energy consumption.
For realizing purpose of the present invention; the technical solution adopted in the present invention is: a kind of vacuum melting furnace is provided; it comprises working chamber, crucible, die cavity, middle vacuum meter, low vacuum meter, high vacuum valve, forepump, low vacuum valve, protective gas source and heating power supply; it is characterized in that: this vacuum melting furnace also comprises molecular drag pump; the air inlet of this molecular drag pump is connected with high vacuum valve, and this low vacuum meter is connected with the exhaust outlet of this molecular drag pump respectively with low vacuum valve.
This vacuum melting furnace also comprises the active material auxiliary evaporation source, and it is positioned at this working chamber, and it is used for capturing the foreign gas that fusion process is emitted.
This vacuum melting furnace also comprises the partial pressure monitor, and it is connected with this working chamber, and it is monitored foreign gas, and according to monitored results, controls the evaporation capacity of this activity gettering material auxiliary evaporation source, with timely capture foreign gas.
This vacuum melting furnace also comprises the deduster with the vacuum compatibility, and it is between this working chamber and high vacuum valve and low vacuum valve.
This vacuum melting furnace also comprises the dust arrester with the vacuum compatibility, and it is between the bearing and pumped gas passage of this molecular drag pump.
The invention has the beneficial effects as follows, therefore vacuum melting furnace of the present invention has simplified the structure of vacuum melting furnace owing to adopt molecular drag pump to replace lobe pump and oil diffusion pump as main scavenging pump, has bled time decreased 50%, production efficiency has improved 25%, and the total energy consumption of bleeding has reduced by 70%.
Vacuum melting furnace of the present invention is owing to be provided with active gettering material (for example: Ti, Al, Mg, Zn etc.) auxiliary evaporation source, therefore in fusion process, auxiliary evaporation source is interrupted or continuous evaporation, in time capture the foreign gas of emitting in the fusion process, thereby reduced the oxidation and the evaporating loss of melting material significantly, significantly improved the quality of melting product.
Vacuum melting furnace of the present invention is owing to be provided with the partial pressure monitor, with the content of foreign gas in real-time, the dynamic monitoring fusion process, and optimal evaporation amount that therefore can the Based Intelligent Control auxiliary evaporation source.
Therefore vacuum melting furnace of the present invention has prolonged the cleaning frequency of vavuum pump owing to add deduster between working chamber and high vacuum valve and low vacuum valve, has improved production efficiency.
Therefore vacuum melting furnace of the present invention can be intercepted dust and spread to the bearing side, thereby increase substantially the molecular drag pump bearing life owing to be provided with the dust-break device at the molecular drag pump bearing between the body passage with bleeding.
[description of drawings]
Fig. 1 is the structural representation of first embodiment of the invention vacuum melting furnace.
[specific embodiment]
See also Fig. 1, the vacuum melting furnace of first embodiment of the invention is made up of working chamber 1, crucible 2, auxiliary evaporation source 3, middle vacuum meter 4, low vacuum meter 5 and 6, high vacuum valve 7, molecular drag pump 8, forepump 9 and 10, low vacuum valve 11 and 12, protective gas source 13, heating power supply 14, partial pressure monitor 15 and die cavity 16.
Crucible 2, auxiliary evaporation source 3 and die cavity 16 are positioned at working chamber 1; middle vacuum meter 4, low vacuum meter 5, high vacuum valve 7, low vacuum valve 12, protective gas source 13, heating power supply 14 are connected with working chamber 1 respectively with partial pressure monitor 15; low vacuum valve 12 also is connected with forepump 10; the air inlet of molecular drag pump 8 is connected with high vacuum valve 7; low vacuum meter 6 is connected with the exhaust outlet of molecular drag pump 8 respectively with low vacuum valve 11, and forepump 9 is connected with low vacuum valve 11.
Vacuum melting furnace of the present invention adopts high pumping rate molecular drag pump (the described molecular drag pump of Chinese patent ZL92101300.0 and ZL87101116.6 for example, and other molecular drag pump that grows up thus, the abbreviation molecular drag pump) lobe pump+oil diffusion pump of replacement traditional vacuum smelting furnace, therefore it can simplify the structure of smelting furnace significantly, reduce and bleed the time, save air exhaust energy consumption.
The described molecular drag pump of Chinese patent ZL92101300.0, it is by driving wheel, rotating shaft and pump case are formed, has a unit of bleeding that constitutes by a groove of bleeding along the circumferential direction on the driving wheel at least, bleeding has movable sealing in the groove, movable sealing and bleeding between the groove inboard, and bleed cell wall and pump case, leave the working clearance between perhaps quiet the wheel, the both sides of movable sealing are respectively equipped with air inlet and exhaust outlet, be provided with the movable sealing exhaust outlet between the adjacent movable sealing, the plural face that drags is arranged in this groove of bleeding, the cross section of the groove of bleeding can be a rectangle, the opening of this groove of bleeding can be on the side of circumference, perhaps on cross section.
The described molecular drag pump of Chinese patent ZL87101116.6, it is made up of driving wheel, movable sealing, rotating shaft, stationary blade wheel, pump case, air inlet and exhaust outlet etc., driving wheel is fixed in the rotating shaft, stationary blade wheel and movable sealing are fixed on the pump case, have the two unit of bleeding substantially that drag face of one-level in the impeller combination that this driving wheel, stationary blade wheel constitute at least, this unit of bleeding substantially comprises: the driving wheel that two flat disks of a. constitute, have at least a dish being provided with pore in two disks, and establish movable sealing in this disk outside near rotating shaft place; B. stationary blade wheel is made up of some spiral blades and fixture, stationary blade wheel is installed in the middle of two driving wheels, space on the stationary blade wheel between the driving wheel of two adjacent blades and two sides constitutes one and has two grooves of bleeding that drag face, between driving wheel, stationary blade wheel, rotating shaft, the pump case radially with axially leave the working clearance, radial clearance double as gas passage; C. movable sealing is installed in the outside of the driving wheel that is provided with pore, between movable sealing and driving wheel and the rotating shaft at radial and axial working clearance, the radial clearance double as gas passage of leaving.
Present embodiment adopts molecular drag pump 8 to replace the lobe pump and the oil diffusion pump of traditional vacuum smelting furnace, and its fusion process is summarized as follows:
A. the melting material is put into crucible 2, close the smelting furnace fire door;
B. close high vacuum valve 7, open low vacuum valve 11, start forepump 9 and molecular drag pump 8, allow molecular drag pump 8 be ready;
C. open low vacuum valve 12 and forepump 10;
D. working chamber's 1 pressure drop to molecular drag pump 8 (be generally 100-300Pa) below the high workload pressure time, close low vacuum valve 12 and forepump 10, open high vacuum valve 7, working chamber 1 switches to molecular drag pump 8 and bleeds.When switching molecular drag pump 8, the best pressure of working chamber 1 is 100-200Pa;
E. when the pressure of working chamber 1 reaches fritting and requires (being generally 1-10Pa), carry out fritting with 14 pairs of melting materials of heating power supply, and with in the vacuum of 4 pairs of working chambers 1 of vacuum meter monitor.When vacuum is lower than the fritting requirement, suspend fritting, treat that vacuum is gone up after, continue fritting again.Because the extraction flow of molecular drag pump 8 is big,, do not need the segmentation heating so the fritting process can once be finished usually;
F. after fritting finished, working chamber 1 continued to be bled by molecular drag pump 8;
When g. working chamber 1 reaches melting pressure (being generally 1-2Pa), close high vacuum valve 7, stop molecular drag pump 8 and forepump 9, inject protective gas and (be generally 10 working chamber 1
4The Pa high-purity argon gas), carry out melting with heating power supply 14 by traditional handicraft;
H. in the fusion process, monitor in real time, and according to monitored results, the evaporation capacity of Based Intelligent Control auxiliary evaporation source 3 in time absorbs pernicious gas with 15 pairs of pernicious gases of partial pressure monitor.
The vacuum melting furnace of second embodiment of the invention and first embodiment's is similar, the difference of itself and first embodiment is to add deduster between working chamber 1 and high vacuum valve 7 and the low vacuum valve 12, deduster can adopt the deduster with any kind of vacuum compatibility, for example electrostatic precipitator, magnetic dust removal device etc.Present embodiment is applicable to the melting occasion that dust is more, to prolong the cleaning frequency of forepump 9 and 10, enhances productivity.
The vacuum melting furnace of third embodiment of the invention and first embodiment are similar, the difference of itself and first embodiment is to be provided with between the bearing of molecular drag pump 8 and the pumped gas passage dust arrester of labyrinth structure, and import a certain amount of airflow passes labyrinth structure in the bearing side, form the inverted draft opposite with the dust dispersal direction, thereby intercept dust to the diffusion of bearing side, this air-flow is finally taken away by forepump.The flow of inverted draft should be tried one's best greatly, and being no more than License Value with the exhaust outlet pressure of molecular drag pump is the limit.
Vacuum melting furnace of the present invention is specially adapted to the melting of the metal material and the alloy of easy oxidation, is particularly useful for the melting of nd-fe-b permanent magnetic alloy.
The partial pressure monitor 15 and the auxiliary evaporation source 3 of vacuum melting furnace of the present invention can also be used for other vacuum melting furnace.
Substantially the structure of bleeding of vacuum melting furnace of the present invention can also be used for vacuum sintering furnace and vacuum heat treatment furnace.
Claims (10)
1. vacuum melting furnace; it comprises working chamber, crucible, die cavity, middle vacuum meter, low vacuum meter, high vacuum valve, forepump, low vacuum valve, protective gas source and heating power supply; it is characterized in that: this vacuum melting furnace also comprises molecular drag pump; the air inlet of this molecular drag pump is connected with high vacuum valve, and this low vacuum meter is connected with the exhaust outlet of this molecular drag pump respectively with low vacuum valve.
2. vacuum melting furnace according to claim 1, it is characterized in that: this molecular drag pump is by driving wheel, movable sealing, rotating shaft and pump case are formed, has a unit of bleeding that constitutes by a groove of bleeding along the circumferential direction on the driving wheel at least, bleeding has a plurality of movable sealings in the groove, movable sealing and bleeding between the groove inboard, and bleed cell wall and pump case, leave the working clearance between perhaps quiet the wheel, the both sides of movable sealing are respectively equipped with air inlet and exhaust outlet, be provided with the movable sealing exhaust outlet between the adjacent movable sealing, the plural face that drags is arranged in this groove of bleeding, the cross section of the groove of bleeding can be a rectangle, the opening of this groove of bleeding can be on the side of circumference, perhaps on cross section.
3. vacuum melting furnace according to claim 1, it is characterized in that: this molecular drag pump is made up of driving wheel, movable sealing, rotating shaft, stationary blade wheel, pump case, air inlet and exhaust outlet etc., driving wheel is fixed in the rotating shaft, stationary blade wheel and movable sealing are fixed on the pump case, have the two unit of bleeding substantially that drag face of one-level in the impeller combination that this driving wheel, stationary blade wheel constitute at least, this unit of bleeding substantially comprises: the driving wheel that two flat disks of a. constitute, have at least a dish being provided with pore in two disks, and establish movable sealing in this disk outside near rotating shaft place; B. stationary blade wheel is made up of some spiral blades and fixture, stationary blade wheel is installed in the middle of two driving wheels, space on the stationary blade wheel between the driving wheel of two adjacent blades and two sides constitutes one and has two grooves of bleeding that drag face, between driving wheel, stationary blade wheel, rotating shaft, the pump case radially with axially leave the working clearance, radial clearance double as gas passage; C. movable sealing is installed in the outside of the driving wheel that is provided with pore, between movable sealing and driving wheel and the rotating shaft at radial and axial working clearance, the radial clearance double as gas passage of leaving.
4. according to claim 1 or 2 or 3 described vacuum melting furnaces, it is characterized in that this vacuum melting furnace also comprises auxiliary evaporation source, it is positioned at this working chamber, and it is used for capturing the foreign gas that fusion process is emitted.
5. vacuum melting furnace according to claim 4 is characterized in that this vacuum melting furnace also comprises the partial pressure monitor, and it is connected with this working chamber, it is monitored foreign gas, and, control the evaporation capacity of this auxiliary evaporation source according to monitored results, with timely capture foreign gas.
6. according to claim 1 or 2 or 3 described vacuum melting furnaces, it is characterized in that this vacuum melting furnace comprises also and the deduster of vacuum compatibility that it is between this working chamber and high vacuum valve and low vacuum valve.
7. according to claim 1 or 2 or 3 described vacuum melting furnaces, it is characterized in that this vacuum melting furnace also comprises dust arrester, it is between the bearing and pumped gas passage of this molecular drag pump.
8. vacuum melting furnace according to claim 7 is characterized in that this dust arrester is labyrinth structure.
9. vacuum melting furnace according to claim 8 is characterized in that this vacuum melting furnace also imports the inverted draft opposite with the dust dispersal direction at this dust arrester by the bearing side.
10. according to claim 1 or 2 or 3 described vacuum melting furnaces, when it is characterized in that enabling this molecular drag pump, the pressure of working chamber is 100-300Pa.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2003101123602A CN100354589C (en) | 2003-11-24 | 2003-11-24 | Vacuum smelting furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2003101123602A CN100354589C (en) | 2003-11-24 | 2003-11-24 | Vacuum smelting furnace |
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| Publication Number | Publication Date |
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| CN1595036A true CN1595036A (en) | 2005-03-16 |
| CN100354589C CN100354589C (en) | 2007-12-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2003101123602A Expired - Fee Related CN100354589C (en) | 2003-11-24 | 2003-11-24 | Vacuum smelting furnace |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102649188A (en) * | 2012-03-22 | 2012-08-29 | 金华市禾牧真空电子有限公司 | No-tail vacuum brazing furnace |
| CN104043387A (en) * | 2014-06-20 | 2014-09-17 | 阚梦诗 | Vacuum discharge reaction kettle |
| CN104174485A (en) * | 2014-06-30 | 2014-12-03 | 中磁科技股份有限公司 | Dust removal method and dust removal device of vacuum melting furnace |
| CN105546984A (en) * | 2016-02-03 | 2016-05-04 | 西南大学 | Vacuum heating device |
| CN109854483A (en) * | 2019-02-22 | 2019-06-07 | 深圳市圆梦精密技术研究院 | Vacuum plant and its method for exhausting |
| CN110629103A (en) * | 2019-10-22 | 2019-12-31 | 山东钢铁集团有限公司 | Production method and device for vacuum degassing rare earth steel |
| CN117308587A (en) * | 2023-11-23 | 2023-12-29 | 衡水超凡新能源材料有限公司 | Horizontal vacuum furnace for producing silicon monoxide |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1025574C (en) * | 1987-10-10 | 1994-08-03 | 储继国 | Runoff type molecule pump |
| JP3077285B2 (en) * | 1991-07-26 | 2000-08-14 | 大同特殊鋼株式会社 | Vacuum metal heat treatment furnace |
| CN1056914C (en) * | 1992-02-28 | 2000-09-27 | 储继国 | Combined driving molecular pump |
| JP3584492B2 (en) * | 1994-07-12 | 2004-11-04 | 富士電機システムズ株式会社 | Dezincing induced dissolution method |
| CN2299679Y (en) * | 1997-05-14 | 1998-12-09 | 孙宝玉 | Vacuum quick-hardening furnace |
| JP2001043802A (en) * | 1999-05-20 | 2001-02-16 | Matsushita Electric Ind Co Ltd | Manufacture of gas discharge panel |
| JP2002155891A (en) * | 2000-11-22 | 2002-05-31 | Seiko Instruments Inc | Vacuum pump |
| JP2003229417A (en) * | 2001-11-28 | 2003-08-15 | Tokyo Electron Ltd | Vacuum processing apparatus and method of controlling the same |
| CN1160477C (en) * | 2002-04-16 | 2004-08-04 | 北京科技大学 | Hall type ion auxiliary evaporation source |
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- 2003-11-24 CN CNB2003101123602A patent/CN100354589C/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102649188A (en) * | 2012-03-22 | 2012-08-29 | 金华市禾牧真空电子有限公司 | No-tail vacuum brazing furnace |
| CN104043387A (en) * | 2014-06-20 | 2014-09-17 | 阚梦诗 | Vacuum discharge reaction kettle |
| CN104174485A (en) * | 2014-06-30 | 2014-12-03 | 中磁科技股份有限公司 | Dust removal method and dust removal device of vacuum melting furnace |
| CN105546984A (en) * | 2016-02-03 | 2016-05-04 | 西南大学 | Vacuum heating device |
| CN109854483A (en) * | 2019-02-22 | 2019-06-07 | 深圳市圆梦精密技术研究院 | Vacuum plant and its method for exhausting |
| CN109854483B (en) * | 2019-02-22 | 2020-05-05 | 深圳市圆梦精密技术研究院 | Vacuum device |
| CN110629103A (en) * | 2019-10-22 | 2019-12-31 | 山东钢铁集团有限公司 | Production method and device for vacuum degassing rare earth steel |
| CN110629103B (en) * | 2019-10-22 | 2023-12-05 | 山东钢铁集团有限公司 | Production method of vacuum degassing rare earth steel and device used by same |
| CN117308587A (en) * | 2023-11-23 | 2023-12-29 | 衡水超凡新能源材料有限公司 | Horizontal vacuum furnace for producing silicon monoxide |
| CN117308587B (en) * | 2023-11-23 | 2024-04-26 | 衡水超凡新能源材料有限公司 | Horizontal vacuum furnace for producing silicon monoxide |
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| Publication number | Publication date |
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| CN100354589C (en) | 2007-12-12 |
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Granted publication date: 20071212 Termination date: 20131124 |