CN109854483A - Vacuum plant and its method for exhausting - Google Patents
Vacuum plant and its method for exhausting Download PDFInfo
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- CN109854483A CN109854483A CN201910131731.2A CN201910131731A CN109854483A CN 109854483 A CN109854483 A CN 109854483A CN 201910131731 A CN201910131731 A CN 201910131731A CN 109854483 A CN109854483 A CN 109854483A
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Abstract
The present invention provides a kind of vacuum plant and its method for exhausting, including work chamber, and for processing part, work chamber is connected to exhaust valve；Rough pumping, air entry are connected to work chamber；Auxiliary chamber is connected to work chamber, is connected to by first passage with second channel between auxiliary chamber and work chamber, and rough pumping is set on second channel；Molecular pump, air entry are connected to auxiliary chamber；First air valve is set on first passage；Second air valve, on the second channel between rough pumping and work chamber；Third air valve, on the second channel between rough pumping and auxiliary chamber.Vacuum plant provided by the invention, in renewal part, work chamber is not connected to mutually with auxiliary chamber; the vacuum degree of auxiliary chamber remains unchanged; molecular pump is worked under this vacuum degree, the time caused by avoiding molecular pump from shutting down wastes, and shortening vacuumizes the required time next time.
Description
Technical field
The invention belongs to vacuum processing technique fields, are to be related to a kind of vacuum plant and method for exhausting more specifically.
Background technique
Vacuum plant is chiefly used in part processing, such as copper, aluminium brazed products, to ensure part during processing,
It is not interfered by air, impurity etc., carries out the processing of part under vacuum conditions.Such as vacuum furnace, part can add in vacuum
Quenched, annealed in hot stove, is tempered, is sintered, adding magnetic etc., to meet production requirement.But vacuum holding currently on the market
It sets, the time needed for being extracted into high vacuum is longer, and during batch production, and molecular pump needs repeatedly to shut down, with
Convenient for the part processed needed for the replacement when shutting down.Molecular pump needs could start after reaching certain vacuum degree, every time more
It after changing part, needs again to vacuumize vacuum plant, vacuum degree needed for reaching molecular pump restarts vacuum pump.In this way, leading
Cause production cycle when batch production longer.
Summary of the invention
The purpose of the present invention is to provide a kind of vacuum plants, are needed repeatedly with solving molecular pump existing in the prior art
The longer technical problem of production cycle caused by start and stop.
To achieve the above object, the technical solution adopted by the present invention is that: a kind of vacuum plant is provided, comprising:
Work chamber, for processing part, the work chamber is communicated with the exhaust valve for breaking vacuum；
Rough pumping, the air entry of the rough pumping are connected to the work chamber；
Auxiliary chamber is connected to the work chamber, passes through first between the auxiliary chamber and the work chamber
Channel and second channel connection, and the air entry of the rough pumping is set on the second channel；
Molecular pump, the connection of auxiliary chamber described in the air entry of the molecular pump；
First air valve is set on the first passage, for controlling the opening and closing of the first passage；
Second air valve, on the second channel between the air entry and the work chamber of the rough pumping, for controlling
Make the access between the air entry of the rough pumping and the auxiliary chamber；
Third air valve, on the second channel between the air entry and the auxiliary chamber of the rough pumping, for controlling
Make the access between the work chamber and the air entry of the rough pumping.
Further, further include the first vacuum meter for detecting the vacuum degree of the work chamber, and for detecting
Second vacuum meter of the vacuum degree of the auxiliary chamber.
Further, the work chamber is used for heated components, and heater is equipped in the work chamber and temperature passes
Sensor.
Further, the heater is located on the periphery of the work chamber, and the periphery of the heater is equipped with protection
Cover, the shield is interior to be equipped with cooling water pipe.
Further, the work chamber has opening, and the opening is equipped with the protective door for sealing the opening,
Cooling water ring is equipped in the protective door, the vacuum plant further includes cooling-water machine, the cooling-water machine and the cooling water pipe and
The cooling water glass is connected to.
Further, first air valve is gate valve.
Further, the exhaust valve is the combination of manual exhaust valve, pneumatic exhaust valve or both.
Another object of the present invention is to provide a kind of method for exhausting, using above-mentioned vacuum plant, comprising the following steps:
S10: rough pumping, molecular pump and third air valve are opened by control system, the indoor air of compensated cavity is discharged；
S20: when the indoor vacuum degree of compensated cavity reaches default value, closing third air valve, opens the second air valve, discharge
The indoor air of working chamber；
S30: when the vacuum degree in vacuum chamber reaches the default value, closing the second air valve, open third air valve,
The first air valve is opened, while work chamber and the indoor air of compensated cavity, which is discharged, makes its vacuum degree reach work numerical value；
S40: the indoor part of processing work chamber, and after completion of processing, the first air valve and the second air valve are closed, exhaust is opened
Valve, abolishes the indoor vacuum state of working chamber, and renewal part simultaneously closes exhaust valve；
S50: step S20 to S40 is repeated.
Further, work chamber is used for heated components, is equipped with heater and temperature sensor in work chamber；
In step s 40, the indoor temperature of temperature sensor real-time detection working chamber and its testing result is fed back into control
System processed, and by the testing result and normal temperature real time contrast, when the temperature curve of testing result composition is in normal temperature song
In the error range that line allows, then heat parts finish.
Further, in step s 30, when the vacuum degree in vacuum chamber reaches default value, auxiliary chamber is detected
Whether interior vacuum degree reaches the default value:
If whether the indoor vacuum degree of compensated cavity reaches the default value, the second air valve is closed, opens third gas
Valve opens the first air valve；
If the indoor vacuum degree of compensated cavity is not up to default value, repeatedly S20.
The beneficial effect of vacuum plant and method for exhausting provided by the invention is: compared with prior art, the present invention is true
Empty device includes work chamber and auxiliary chamber, and part is placed in work chamber and is processed, and work chamber and rough pumping connect
Logical, auxiliary chamber is connected to molecular pump, is connected between auxiliary chamber and work chamber by first passage and second channel, first
The opening and closing of Air Valve Control first passage, the access between the second Air Valve Control rough pumping and auxiliary chamber, third Air Valve Control work
Make the access between chamber and auxiliary chamber；After part completion of processing, when replacing next part, the first air valve, the second gas
Valve is closed, and first passage and second channel is disconnected, work chamber is not connected to mutually with auxiliary chamber, and abolishes work by exhaust valve
Make the vacuum of chamber, the vacuum degree of auxiliary chamber remains unchanged, and molecular pump is worked under this vacuum degree, is avoided
Time caused by molecular pump is shut down wastes, moreover it is possible to make full use of the vacuum degree of auxiliary chamber, shortening vacuumizes required next time
Time.
Detailed description of the invention
It to describe the technical solutions in the embodiments of the present invention more clearly, below will be to embodiment or description of the prior art
Needed in attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description is only of the invention some
Embodiment for those of ordinary skill in the art without any creative labor, can also be according to these
Attached drawing obtains other attached drawings.
Fig. 1 is the main view of vacuum plant provided in an embodiment of the present invention；
Fig. 2 is the side view of vacuum plant provided in an embodiment of the present invention；
Fig. 3 is the work flow diagram of method for exhausting provided in an embodiment of the present invention.
Wherein, each appended drawing reference in figure:
1- work chamber；11- rough pumping；12- manual exhaust valve；The pneumatic exhaust valve of 13-；The first vacuum meter of 14-；141- high
Vacuum transducer；142- low vacuum sensor；15- temperature sensor；16- heater；17- shield；171- cooling water pipe；
18- protective door；2- auxiliary chamber；21- molecular pump；22- cold water water ring；The second vacuum meter of 23-；3- first passage；4- second is logical
Road；The first air valve of 5-；The second air valve of 6-；7- third air valve.
Specific embodiment
In order to which technical problems, technical solutions and advantages to be solved are more clearly understood, tie below
Accompanying drawings and embodiments are closed, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only
To explain the present invention, it is not intended to limit the present invention.
It should be noted that it can be directly another when element is referred to as " being fixed on " or " being set to " another element
On one element or indirectly on another element.When an element is known as " being connected to " another element, it can
To be directly to another element or be indirectly connected on another element.
It is to be appreciated that term " length ", " width ", "upper", "lower", "front", "rear", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "top", "bottom" "inner", "outside" is that orientation based on the figure or position are closed
System, is merely for convenience of description of the present invention and simplification of the description, rather than the device or element of indication or suggestion meaning must have
Specific orientation is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.
In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance
Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include one or more of the features.In the description of the present invention, the meaning of " plurality " is two or more,
Unless otherwise specifically defined.
Also referring to Fig. 1 and Fig. 2, now vacuum plant provided by the invention is illustrated.The vacuum plant, including work
Make chamber 1, auxiliary chamber 2, rough pumping 11, molecular pump 21, exhaust valve, the first air valve 5, the second air valve 6 and third air valve 7.
Part to be processed is placed in work chamber 1, when reaching certain vacuum degree in work chamber 1, part can be heated,
Magnetic etc. is added to operate.The air entry of rough pumping 11 is connected to work chamber 1, and rough pumping 11 can extract air, forms work chamber 1
Preliminary vacuum state.Exhaust valve is also connected to work chamber 1, for abolishing the vacuum state of work chamber 1, makes work chamber 1
Reach atmospheric pressure state, to replace the part in work chamber 1.Auxiliary chamber 2 and work chamber 1 by first passage 3 and
Second channel 4 is connected to, and the first air valve 5 is set on first passage 3, and the first air valve 5 can directly control the opening and closing of first passage 3.Just
The air entry for taking out pump 11 is connected to second channel 4, and the second channel 4 between the air entry of rough pumping 11 and work chamber 1 is set
There is the second air valve 6, the second air valve 6 is used to control the access between the air entry of rough pumping 11 and auxiliary chamber 2；Third air valve 7
On second channel 4 between rough pumping 11 and auxiliary chamber 2, for controlling the air entry of work chamber 1 and rough pumping 11
Between access.More specifically, the first air valve 5 and the second air valve 6 simultaneously close off, third air valve 7 open when, molecular pump 21, just
It takes out pump 11 to be connected to auxiliary chamber 2, extracts the air in auxiliary chamber 2；First air valve 5 is closed, the second air valve 6 is opened, the
When three air valves 7 are closed, the channel between auxiliary chamber 2 and work chamber 1 is all closed, and rough pumping 11, molecular pump 21 are taken out respectively
Take work chamber 1, the air in auxiliary chamber 2；It is auxiliary when first air valve 5 is opened, the second air valve 6 is closed, third air valve 7 is opened
Help chamber 2 and work chamber 1 to be connected to by first passage 3, rough pumping 11 and molecular pump 21 can extract simultaneously auxiliary chamber 2 and
The air of work chamber 1.
When processing to first part, the first air valve 5 and the second air valve 6 are simultaneously closed off, third air valve 7 is opened,
Rough pumping 11 just take out to the air in auxiliary chamber 2；When the air in auxiliary chamber 2 reaches the first vacuum degree, first
Air valve 5 is closed, the second air valve 6 is opened, third air valve 7 is closed, and rough pumping 11 just take out to work chamber 1, makes work chamber 1
Reach the first vacuum degree；Then the first air valve 5 is opened, the second air valve 6 is closed, third air valve 7 is opened, rough pumping 11 and molecule
Pump 21 can extract the air of auxiliary chamber 2 and work chamber 1 simultaneously, and work chamber 1 and auxiliary chamber 2 is made to reach second as early as possible
Vacuum degree, the second vacuum degree can satisfy the processing conditions of part.First vacuum degree can be 10-2Torr, the second vacuum degree can be
10-6torr.First part after processing is completed, closes the first air valve 5 and the second air valve 6, by auxiliary chamber 2 and work chamber 1
Isolation, and exhaust valve is opened, the vacuum state of work chamber 1 is abolished, exhaust valve is closed, work chamber 1 is opened and replaces zero
Part after closing work chamber 1, opens the second air valve 6, and rough pumping 11 is discharged the air in work chamber 1, so recycles.
Vacuum plant provided by the invention, compared with prior art, vacuum plant of the present invention include work chamber 1 and auxiliary
Chamber 2, part are placed in work chamber 1 and are processed, and work chamber 1 is connected to rough pumping 11, auxiliary chamber 2 and molecular pump
21 connections, are connected between auxiliary chamber 2 and work chamber 1 by first passage 3 and second channel 4, the first air valve 5 control first
The opening and closing in channel 3, the second air valve 6 control the access between rough pumping 11 and auxiliary chamber 2, and third air valve 7 controls work chamber 1
Access between rough pumping 11；After part completion of processing, when replacing next part, the first air valve 5, the second air valve 6 are closed
It closes, first passage 3 and second channel 4 is disconnected, work chamber 1 is not connected to mutually with auxiliary chamber 2, and abolishes work by exhaust valve
Make the vacuum of chamber 1, the vacuum degree of auxiliary chamber 2 remains unchanged, and molecular pump 21 is worked under this vacuum degree,
Time caused by avoiding molecular pump 21 from shutting down wastes, moreover it is possible to make full use of the vacuum degree of auxiliary chamber 2, shortening vacuumizes next time
The required time.
In one of the embodiments, referring to Fig. 1, second channel 4 close to 2 one end of auxiliary chamber directly with molecular pump 21
Exhaust outlet connection, auxiliary chamber 2, molecular pump 21, third air valve 7, rough pumping 11 and work chamber 1 pass sequentially through second channel
4 are sequentially communicated, and when third air valve 7 is opened, rough pumping 11 extracts the air of auxiliary chamber 2 with molecular pump 21 simultaneously.
In another embodiment, second channel 4 is directly connected to auxiliary chamber 2 close to 2 one end of auxiliary chamber, auxiliary chamber
2, third air valve 7, rough pumping 11 and work chamber 1 are sequentially communicated by second channel 4, when third air valve 7 is opened, rough pumping 11
The air of auxiliary chamber 2 can also be extracted simultaneously with molecular pump 21.
In one of the embodiments, referring to Fig. 1, vacuum plant further include detect work chamber 1 vacuum degree the
One vacuum meter 14, and the second vacuum meter 23 of the vacuum degree for detecting auxiliary chamber 2.Optionally, the first vacuum meter 14 wraps
Low vacuum sensor 142 and high vacuum sensor 141 are included, low vacuum sensor 142 can detect whether work chamber 1 reaches first
Vacuum degree, high vacuum sensor 141 can detect whether work chamber 1 reaches the second vacuum degree.Second vacuum meter 23 can be low true
Whether empty sensor, detectable auxiliary chamber 2 reach the first vacuum degree.
The second vacuum meter 23 is set in auxiliary chamber 2 in one of the embodiments,.In another embodiment, second is true
Sky meter 23 is set on second channel 4, between auxiliary chamber 2 and third air valve 7.
Optionally, which controls rough pumping 11, molecular pump 21, the first air valve by programmable controller (PLC)
5, the second air valve 6, third air valve 7, the first vacuum meter 14, second vacuum meter 23 etc..First air valve 5, the second air valve 6 and third gas
Valve 7 is chosen as solenoid valve.More specifically, when the vacuum degree that the second vacuum meter 23 detects reaches the first vacuum degree, second
The information is fed back to PLC by vacuum meter 23, and PLC controls relay, relay opens the first air valve 5, the second air valve 6 is closed,
Third air valve 7 is opened, and rough pumping 11 tentatively vacuumizes work chamber 1；When the vacuum degree that the first vacuum meter 14 detects
When reaching the first vacuum degree, which is fed back to PLC by the first vacuum meter 14, and PLC controls relay, and relay makes the first air valve
5 open, the second air valve 6 is closed, third air valve 7 is opened, and molecular pump 21 and rough pumping 11 continue to extract work chamber 1 and compensated cavity
When the vacuum degree of air in room 2, work chamber 1 and auxiliary chamber 2 reaches the second vacuum degree, the second vacuum meter 23 is by the information
PLC is fed back to, PLC controls relay, and relay controls temperature controller, power regulator etc., makes part in scheduled temperature
It is processed under curve.
Fig. 1 and Fig. 2 is please referred in one of the embodiments, and work chamber 1 is used for heated components, sets in work chamber 1
Having heaters 16 and temperature sensor 15, making the vacuum plant can be heat parts, be made by the operating temperature for being arranged different
Part completes the techniques such as annealing, tempering.Heater 16 is used for heating work chamber 1, and work chamber 1 is made to reach predetermined temperature.It can
Selection of land, heater 16 in a ring, set on the periphery of work chamber 1, enable work chamber 1 to be brought rapidly up.Heater 16 is optional
To heat fluorescent tube.Heater 16 and temperature sensor 15 are controlled by PLC, and temperature sensor 15 can be by the temperature in work chamber 1
Angle value is uploaded to PLC, and the electric current of heater 16 is calculated by temperature value by PLC, and adjusts it by electric current to adjust heating
The electric current of device 16.
Work chamber 1 is used for heated components in one of the embodiments, be equipped in work chamber 1 heater 16 and
Temperature sensor 15, heater 16 are located on the periphery of work chamber 1, and the periphery of heater 16 is equipped with shield 17, shield
Cooling water pipe 171 is equipped in 17.The effect of shield 17 is to completely cut off the outer wall of work chamber 1 and periphery, in order to avoid scald work
Make personnel, can also reduce heat and distribute.The effect of cooling water pipe 171 is the temperature of reduction work chamber 1, makes work chamber
1 temperature curve is identical as the temperature curve of parts to be processed.
In another embodiment, Fig. 1 and Fig. 2 is please referred to, work chamber 1 has opening, and opening is equipped with to be opened for sealing
The protective door 18 of mouth, protective door 18 is interior to be equipped with cooling water ring, and vacuum plant further includes cooling-water machine, cooling-water machine and cooling water pipe 171
And cooling water glass is connected to.In renewal part, openable protective door 18 picks and places part by opening.Cooling-water machine is cooling water
Pipe 171 and cooling water ring provide coolant liquid, are conveniently adjusted the temperature of work chamber 1.The side of molecular pump 21 also is provided with cooling water
Ring 22 can cool down for molecular pump 21, and provide coolant liquid by cooling-water machine.
The first air valve 5 is gate valve in one of the embodiments, it is ensured that first passage 3 has biggish cross section,
When so that the first air valve 5 being opened, the air that molecular pump 21 can rapidly in suction operation chamber 1, first passage 3 be will not influence point
The pumping velocity of son pump 21.Optionally, work chamber 1 is directly connected to by gate valve with auxiliary chamber 2, and gate valve is second
Channel 4.In another embodiment, second channel 4 is smoothly connected with work chamber 1 and auxiliary chamber 2, does not occur neck shaped i.e.
It can.
In one of the embodiments, referring to Fig. 1, exhaust valve is manual exhaust valve 12, pneumatic exhaust valve or both
Combination.
The present invention also provides a kind of method for exhausting, using the vacuum plant in any of the above-described embodiment, comprising the following steps:
S10: rough pumping 11, molecular pump 21 and third air valve 7 are opened by control system, are discharged in auxiliary chamber 2
Air；
S20: when the vacuum degree in auxiliary chamber 2 reaches default value, closing third air valve 7, open the second air valve 6,
The air in work chamber 1 is discharged；
S30: when the vacuum degree in vacuum chamber is identical as the vacuum degree in auxiliary chamber 2, the second air valve 6 is closed, is opened
Third air valve 7 is opened, opens the first air valve 5, while the air being discharged in work chamber 1 and auxiliary chamber 2 reaches its vacuum degree
Work numerical value；
S40: the part in processing work chamber 1, and after completion of processing, the first air valve 5 and the second air valve 6 are closed, is opened
Exhaust valve, abolishes the vacuum state in work chamber 1, and renewal part simultaneously closes exhaust valve；
S50: step S20 to S40 is repeated.
Wherein, control system can be PLC.Default value is the first above-mentioned vacuum degree, and work numerical value is above-mentioned second
Vacuum degree.In step slo, rough pumping 11 and molecular pump 21 tentatively vacuumize auxiliary chamber 2, reach auxiliary chamber 2
To low vacuum state；In step S20, rough pumping 11 tentatively vacuumizes work chamber 1, and work chamber 1 is made to reach low
Vacuum state；In step s 30, molecular pump 21 and rough pumping 11 take out again to work chamber 1 and auxiliary chamber 2 true simultaneously
Sky makes work chamber 1 and auxiliary chamber 2 reach high vacuum state, that is, meets the working condition of part processing.
Work chamber 1 is used for heated components in one of the embodiments, be equipped in work chamber 1 heater 16 and
Temperature sensor 15, heater 16 and temperature sensor 15 can be controlled by PLC dispatch control system, to effectively control work chamber
Temperature in 1 makes the temperature of part according to standard processing temperatures curvilinear motion.In step s 40, temperature sensor 15 is examined in real time
Its testing result is simultaneously fed back to control system by the temperature surveyed in work chamber 1, and the testing result and normal temperature is real-time
Comparison, when the temperature curve of testing result composition is in the error range that standard temperature curve allows, then heat parts finish.
In one of the embodiments, in step S30, when the vacuum degree in vacuum chamber reaches default value, detection
Whether the vacuum degree in auxiliary chamber 2 reaches the default value:
If whether the vacuum degree in auxiliary chamber 2 reaches the default value, the second air valve 6 is closed, opens third
Air valve 7 opens the first air valve 5；
If the vacuum degree in auxiliary chamber 2 is not up to default value, repeatedly S20, reaches the vacuum degree of auxiliary chamber 2
To default value.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (10)
1. vacuum plant characterized by comprising
Work chamber, for processing part, the work chamber is communicated with the exhaust valve for breaking vacuum；
Rough pumping, the air entry of the rough pumping are connected to the work chamber；
Auxiliary chamber is connected to the work chamber, passes through first passage between the auxiliary chamber and the work chamber
And second channel connection, and the air entry of the rough pumping is set on the second channel；
Molecular pump, the connection of auxiliary chamber described in the air entry of the molecular pump；
First air valve is set on the first passage, for controlling the opening and closing of the first passage；
Second air valve, on the second channel between the air entry and the work chamber of the rough pumping, for controlling
State the access between the air entry of rough pumping and the auxiliary chamber；
Third air valve, on the second channel between the air entry and the auxiliary chamber of the rough pumping, for controlling
State the access between work chamber and the air entry of the rough pumping.
2. vacuum plant as described in claim 1, which is characterized in that further include the vacuum degree for detecting the work chamber
The first vacuum meter, and the second vacuum meter of the vacuum degree for detecting the auxiliary chamber.
3. vacuum plant as described in claim 1, which is characterized in that the work chamber is used for heated components, the work
Heater and temperature sensor are equipped in chamber.
4. vacuum plant as claimed in claim 3, which is characterized in that the heater is located on the outer of the work chamber
Week, the periphery of the heater are equipped with shield, are equipped with cooling water pipe in the shield.
5. vacuum plant as claimed in claim 4, which is characterized in that the work chamber has opening, and the opening is set
There is the protective door for sealing the opening, is equipped with cooling water ring in the protective door, the vacuum plant further includes cooling-water machine,
The cooling-water machine is connected to the cooling water pipe and the cooling water glass.
6. vacuum plant as described in claim 1, which is characterized in that first air valve is gate valve.
7. vacuum plant as described in claim 1, which is characterized in that the exhaust valve is manual exhaust valve, pneumatic exhaust valve
Or both combination.
8. method for exhausting, using the described in any item vacuum plants of claim 1-7, which comprises the following steps:
S10: rough pumping, molecular pump and third air valve are opened by control system, the indoor air of compensated cavity is discharged；
S20: when the indoor vacuum degree of compensated cavity reaches default value, third air valve is closed, opens the second air valve, work is discharged
The indoor air of chamber；
S30: when the vacuum degree in vacuum chamber reaches the default value, the second air valve is closed, opens third air valve, is opened
First air valve, while work chamber and the indoor air of compensated cavity, which is discharged, makes its vacuum degree reach work numerical value；
S40: the indoor part of processing work chamber, and after completion of processing, the first air valve and the second air valve are closed, exhaust valve is opened,
The indoor vacuum state of working chamber is abolished, renewal part simultaneously closes exhaust valve；
S50: step S20 to S40 is repeated.
9. method for exhausting as claimed in claim 8, which is characterized in that work chamber is used for heated components, sets in work chamber
Having heaters and temperature sensor；
In step s 40, the indoor temperature of temperature sensor real-time detection working chamber and by its testing result feed back to control system
System, and by the testing result and normal temperature real time contrast, when the temperature curve of testing result composition is permitted in standard temperature curve
Perhaps in error range, then heat parts finish.
10. method for exhausting as claimed in claim 8, which is characterized in that in step s 30, when the vacuum degree in vacuum chamber
When reaching default value, whether the detection indoor vacuum degree of compensated cavity reaches the default value:
If whether the indoor vacuum degree of compensated cavity reaches the default value, the second air valve is closed, third air valve is opened, opens
Open the first air valve；
If the indoor vacuum degree of compensated cavity is not up to default value, repeatedly S20.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910131731.2A CN109854483B (en) | 2019-02-22 | 2019-02-22 | Vacuum device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910131731.2A CN109854483B (en) | 2019-02-22 | 2019-02-22 | Vacuum device |
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| Publication Number | Publication Date |
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| CN109854483A true CN109854483A (en) | 2019-06-07 |
| CN109854483B CN109854483B (en) | 2020-05-05 |
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| CN201910131731.2A Active CN109854483B (en) | 2019-02-22 | 2019-02-22 | Vacuum device |
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Cited By (1)
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| CN110360835A (en) * | 2019-06-18 | 2019-10-22 | 西安交通大学 | A kind of ultrahigh vacuum depassing unit and method |
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| Publication number | Publication date |
|---|---|
| CN109854483B (en) | 2020-05-05 |
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